US5835227A
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US
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Method and apparatus for determining performance characteristics in lithographic tools
Assignee: Nikon Precision Inc
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Filing: 1997-03-14
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Granted: 1998-11-10
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Expires: 2017-03-14
Abstract
Abstract A method and apparatus for determining performance characteristics in lithographic tools includes projecting a predetermined image with a projection system having a known predetermined performance characteristic to obtain data indicative of the relationship between the size of the projected image and the predetermined performance characteristic. The same image is then projected in a system having an unknown value for the predetermined performance characteristic. The predetermined performance characteristic for the system under consideration is then determined based on the data obtained when the image was projected in the system having the known predetermined performance characteristic.
Inventors
- 👤 Ilya Grodnensky
- 👤 Etsuya Morita
- 👤 Kyoichi Suwa
- 👤 Shigeru Hirukawa
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-07 14:10
CPC Classifications
G; G03; G03F; G03F7/00; G03F7/70; G03F7/70058; G03F7/70216; G03F7/70241; G03F7/70483; G03F7/70591; G03F7/706
Claims Analysis
Total Claims: 59
Claim 1
Independent Claim
92 words
An apparatus for determining a partial coherence factor in a lithography system which includes a source of radiation and a projection system, the apparatus comprising: a mask having an image formed thereon; a substrate onto which the image on said mask is projected by radiation projected through said projection system; a measuring device, said measuring device measuring a size of said projected image and producing a signal indicative thereof; and a processor responsive to said signal from said measuring device for determining said partial coherence factor based on said measured image size.
Claim 2
Independent Claim
92 words
An apparatus for determining a partial coherence factor in a lithography system which includes a source of radiation and a projection system, the apparatus comprising: a mask having an image formed thereon; a substrate onto which the image on said mask is projected by radiation projected through said projection system; a measuring device, said measuring device measuring a size of said projected image and producing a signal indicative thereof; and a processor responsive to said signal from said measuring device for determining said partial coherence factor based on said measured image size.
Claim 3
Dependent Claim
45 words
An apparatus according to claim 1, wherein said processor includes a memory for storing data indicative of relationships between projected image size and partial coherence factor values, said processor comparing said signal indicative of said projected image size with said data stored in said memory.
Claim 4
Dependent Claim
16 words
An apparatus according to claim 1, wherein said measuring device comprises a laser step alignment system.
Claim 5
Dependent Claim
54 words
An apparatus according to claim 3, wherein said laser step alignment system includes a laser source for producing a laser beam, said laser step alignment system scanning said projected image with said laser beam, thereby causing light from said laser beam to be at least one of diffracted and scattered from said projected image.
Claim 6
Dependent Claim
54 words
An apparatus according to claim 4, wherein said laser step alignment system includes a detector for detecting said at least one of diffracted and scattered light, said detector producing a signal indicative of a size of said projected image in response to said detection of said at least one of diffracted and scattered light.
Claim 7
Dependent Claim
19 words
An apparatus according to claim 1, wherein said image formed on said mask includes at least one wedge-shaped mark.
Claim 8
Dependent Claim
19 words
An apparatus according to claim 6, wherein said image formed on said mask includes a plurality of wedge-shaped marks.
Claim 9
Dependent Claim
20 words
An apparatus according to claim 1, wherein said image formed on said mask includes at least one triangle shaped mark.
Claim 10
Dependent Claim
20 words
An apparatus according to claim 8, wherein said image formed on said mask includes a plurality of triangle shaped marks.
Claim 11
Dependent Claim
20 words
An apparatus according to claim 1, wherein said image formed on said mask includes at least one fluted wedge mark.
Claim 12
Dependent Claim
19 words
An apparatus according to claim 1, wherein said image formed on said mask includes at least one star-shaped mark.
Claim 13
Dependent Claim
36 words
An apparatus according to claim 2, wherein said memory comprises a machine readable media, said machine readable media storing data indicative of a plurality of relationships between image size, numerical aperture and partial coherence factor values.
Claim 14
Dependent Claim
39 words
An apparatus according to claim 6, wherein said at least one wedge-shaped mark includes a point at one end of said wedge-shaped mark, said point defining an angle α, where α is an angle approximately in a range 10°≧α≧4°.
Claim 15
Independent Claim
158 words
An apparatus for determining sigma values in an exposure field of a lithography system which includes a source of illumination, a projection optical system, a mask stage, and a substrate stage, the apparatus comprising: a mask having a predetermined image formed thereon and disposed on said mask stage; a substrate having a photosensitive layer formed thereon and disposed on said substrate stage such that illumination from said source of illumination causes said predetermined image on said mask to be projected onto said photosensitive layer through said projection optical system; a measuring tool for measuring a size of said image projected on said photosensitive layer and producing a signal indicative thereof; a memory for storing data indicative of relationships between projected image size and sigma values; and a signal processor responsive to said signal from said measuring tool for accessing said memory in accordance with said signal to obtain a corresponding sigma value based on said measured image size.
Claim 16
Independent Claim
158 words
An apparatus for determining sigma values in an exposure field of a lithography system which includes a source of illumination, a projection optical system, a mask stage, and a substrate stage, the apparatus comprising: a mask having a predetermined image formed thereon and disposed on said mask stage; a substrate having a photosensitive layer formed thereon and disposed on said substrate stage such that illumination from said source of illumination causes said predetermined image on said mask to be projected onto said photosensitive layer through said projection optical system; a measuring tool for measuring a size of said image projected on said photosensitive layer and producing a signal indicative thereof; a memory for storing data indicative of relationships between projected image size and sigma values; and a signal processor responsive to said signal from said measuring tool for accessing said memory in accordance with said signal to obtain a corresponding sigma value based on said measured image size.
Claim 17
Dependent Claim
19 words
An apparatus according to claim 14, wherein said image formed on said mask includes at least one wedge-shaped mark.
Claim 18
Dependent Claim
19 words
An apparatus according to claim 15, wherein said image formed on said mask includes a plurality of wedge-shaped marks.
Claim 19
Dependent Claim
20 words
An apparatus according to claim 14, wherein said image formed on said mask includes at least one triangle shaped mark.
Claim 20
Dependent Claim
20 words
An apparatus according to claim 17, wherein said image formed on said mask includes a plurality of triangle shaped marks.
Claim 21
Dependent Claim
20 words
An apparatus according to claim 14, wherein said image formed on said mask includes at least one fluted wedge mark.
Claim 22
Dependent Claim
19 words
An apparatus according to claim 14, wherein said image formed on said mask includes at least one star-shaped mark.
Claim 23
Dependent Claim
16 words
An apparatus according to claim 14, wherein said measurement tool comprises a laser step alignment system.
Claim 24
Dependent Claim
56 words
An apparatus according to claim 21, wherein said laser step alignment system includes a laser source for producing a laser beam, said substrate stage moves said substrate such that said laser beam scans said projected image, thereby causing light from said laser beam to be at least one of diffracted and scattered from said projected image.
Claim 25
Dependent Claim
54 words
An apparatus according to claim 22, wherein said laser step alignment system includes a detector for detecting said at least one of diffracted and scattered light, said detector producing a signal indicative of a size of said projected image in response to said detection of said at least one of diffracted and scattered light.
Claim 26
Dependent Claim
31 words
An apparatus according to claim 14, wherein said signal processor compares said measured image size with said data stored in said memory to determine a sigma value corresponding to said signal.
Claim 27
Dependent Claim
34 words
An apparatus according to claim 24, wherein said memory comprises a machine readable media, said machine readable media storing data indicative of a plurality of relationships between image size, numerical aperture and sigma values.
Claim 28
Dependent Claim
22 words
An apparatus according to claim 14, wherein said predetermined image is projected onto said photosensitive layer at a plurality of measurement locations.
Claim 29
Dependent Claim
68 words
An apparatus according to claim 26, wherein said measuring tool measures said projected image size at said plurality of locations and produces a plurality of measurement signals indicative of said measured images, said signal processor receiving each of said plurality of measurement signals and accessing said memory in accordance with each received measurement signal to obtain a corresponding sigma value for each of said plurality of measurement signals.
Claim 30
Independent Claim
117 words
A method for determining a partial coherence factor in a projection exposure system, said method comprising the steps of: a. illuminating an image in a first projection exposure system having a known partial coherence factor to produce a first projected image; b. measuring said first projected image to obtain data indicative of a relationship between a size of the first projected image and the known partial coherence factor; c. illuminating said image in a second projection exposure system having an unknown partial coherence factor to produce a second projected image; d. measuring said second projected image; and e. determining said unknown partial coherence factor based upon said measurement of said second projected image and said obtained data.
Claim 31
Independent Claim
117 words
A method for determining a partial coherence factor in a projection exposure system, said method comprising the steps of: a. illuminating an image in a first projection exposure system having a known partial coherence factor to produce a first projected image; b. measuring said first projected image to obtain data indicative of a relationship between a size of the first projected image and the known partial coherence factor; c. illuminating said image in a second projection exposure system having an unknown partial coherence factor to produce a second projected image; d. measuring said second projected image; and e. determining said unknown partial coherence factor based upon said measurement of said second projected image and said obtained data.
Claim 32
Dependent Claim
21 words
The method according to claim 28, wherein said projected image comprises a wedge mark including at least one tapered end point.
Claim 33
Dependent Claim
16 words
The method according to claim 29, wherein said projected image comprises a plurality of wedge marks.
Claim 34
Dependent Claim
21 words
The method according to claim 30, wherein said projected image comprises a plurality of includes at least one triangle shaped mark.
Claim 35
Dependent Claim
17 words
The method according to claim 28, wherein said projected image comprises a plurality of triangle shaped marks.
Claim 36
Dependent Claim
17 words
The method according to claim 28, wherein said projected image comprises at least one fluted wedge mark.
Claim 37
Dependent Claim
16 words
The method according to claim 28, wherein said projected image comprises at least one star-shaped mark.
Claim 38
Dependent Claim
35 words
The method according to claim 28, wherein said obtained data indicative of a relationship between a size of the first projected image and the known partial coherence factor is stored in a machine readable media.
Claim 39
Dependent Claim
31 words
The method according to claim 35, wherein said determining step includes the step of comparing said measurement of said second projected image with said data stored in said machine readable media.
Claim 40
Independent Claim
119 words
A method for determining a predetermined performance characteristic in an exposure field of a projection exposure system including an illumination source, projection optics and a substrate stage, said method comprising the steps of: a. illuminating an image formed on a mask with illumination from said illumination source, said illuminated image being projected by said projection optics onto a substrate disposed on said substrate stage in the exposure field of said projection exposure system; b. measuring a size of said image projected onto said wafer; c. comparing said measurement of said projected image with data indicative of previously determined relationships between projected image size and said predetermined performance characteristic; and d. determining said predetermined performance characteristic based upon said comparison.
Claim 41
Independent Claim
119 words
A method for determining a predetermined performance characteristic in an exposure field of a projection exposure system including an illumination source, projection optics and a substrate stage, said method comprising the steps of: a. illuminating an image formed on a mask with illumination from said illumination source, said illuminated image being projected by said projection optics onto a substrate disposed on said substrate stage in the exposure field of said projection exposure system; b. measuring a size of said image projected onto said wafer; c. comparing said measurement of said projected image with data indicative of previously determined relationships between projected image size and said predetermined performance characteristic; and d. determining said predetermined performance characteristic based upon said comparison.
Claim 42
Dependent Claim
43 words
A method according to claim 37, wherein said mask has a plurality of images formed thereon, said illuminating step including the step of illuminating said plurality of images to produce a plurality of projected images at a plurality of locations on said substrate.
Claim 43
Dependent Claim
71 words
A method according to claim 38, wherein said measuring step includes the step of measuring said plurality of projected images at said plurality of locations on said substrate, each measurement of said plurality of images being compared with said data indicative of previously determined relationships between projected image size and said predetermined performance characteristic to determine a value for said predetermined performance characteristic at each location of said plurality of images.
Claim 44
Dependent Claim
18 words
A method according to claim 39, wherein said plurality of projected images include a plurality of wedge-shaped marks.
Claim 45
Dependent Claim
19 words
A method according to claim 39, wherein said plurality of projected images include at least one triangle shaped mark.
Claim 46
Dependent Claim
19 words
A method according to claim 39, wherein said plurality of projected images include at least one fluted wedge mark.
Claim 47
Dependent Claim
18 words
A method according to claim 39, wherein said plurality of projected images include at least one star-shaped mark.
Claim 48
Dependent Claim
24 words
A method according to claim 37, wherein said step of measuring includes a step of performing said measurement with a laser step alignment system.
Claim 49
Dependent Claim
31 words
A method according to claim 38, wherein said data indicative of previously determined relationships between projected image size and values for said predetermined performance characteristic is stored in machine readable media.
Claim 50
Dependent Claim
43 words
A method according to claim 45, wherein said laser step alignment system produces measurement data indicative of said size of said projected image, said comparing step including the step of comparing said measurement data with said data stored in said machine readable media.
Claim 51
Dependent Claim
16 words
A method according to claim 37, wherein said predetermined performance characteristic comprises a partial coherence factor.
Claim 52
Independent Claim
71 words
A method for determining a partial coherence factor in a lithography system which includes a source of radiation, a projection system, a mask and a substrate, the method comprising: projecting an image formed on said mask onto said substrate using radiation projected through said projection system; measuring a size of said projected image and producing a signal indicative thereof; and determining said partial coherence factor based on said measured image size.
Claim 53
Independent Claim
71 words
A method for determining a partial coherence factor in a lithography system which includes a source of radiation, a projection system, a mask and a substrate, the method comprising: projecting an image formed on said mask onto said substrate using radiation projected through said projection system; measuring a size of said projected image and producing a signal indicative thereof; and determining said partial coherence factor based on said measured image size.
Claim 54
Dependent Claim
46 words
The method according to claim 48, wherein said determining step further includes the step of comparing said measured image size with data stored in a machine readable media indicative of relationships between projected image size and partial coherence factor values to determine said partial coherence factor.
Claim 55
Dependent Claim
21 words
The method according to claim 48, wherein said measuring step includes measuring said projected image with a laser step alignment system.
Claim 56
Dependent Claim
23 words
The method according to claim 48, wherein the step of projecting an image includes projecting an image of at least one wedge-shaped mark.
Claim 57
Dependent Claim
26 words
The method according to claim 51, wherein the step of projecting an image includes the step of projecting an image of a plurality of wedge-shaped marks.
Claim 58
Dependent Claim
27 words
The method according to claim 48, wherein the step of projecting an image includes the step of projecting an image of at least one triangle shaped mark.
Claim 59
Dependent Claim
27 words
The method according to claim 53, wherein the step of projecting an image includes the step of projecting an image of a plurality of triangle shaped marks.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 2001-11-09 | 2002-05-11 | 2002-11-10 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2005-11-09 | 2006-05-11 | 2006-11-10 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2009-11-09 | 2010-05-11 | 2010-11-10 | $7700.00 | Window Closed / Lapsed |