Claims Analysis
Total Claims: 8
Claim 1
Independent Claim
184 words
A process for forming an LED packaging substrate, comprising the steps of: a. providing a silicon wafer substrate having opposing front and back sides; b. applying photoresist on the front side of the silicon wafer substrate; c. exposing and developing the photoresist to define predetermined areas; d. wet etching the substrate to form groove reflectors; e. applying photoresist on the back side of the silicon wafer substrate; f. exposing and developing the photoresist to define a through-hole pattern in respective aligned relationship with the groove reflectors; g. dry etching the through-hole pattern to form electrode holes through the silicon wafer substrate; h. removing the photoresist from the silicon wafer substrate; i. forming an insulation layer on the front and back sides of the substrate by oxidation or nitridation; j. applying a conductive metal layer by electroplating to the front and back sides of silicon substrate and inside electrode holes; and, k. laser treating the conductive metal layer to cut an electrode surface in the groove reflectors into positive and negative electrode contacting surfaces for respective connection with LED chips placed inside the groove reflectors.
Claim 2
Dependent Claim
184 words
A process for forming an LED packaging substrate, comprising the steps of: a. providing a silicon wafer substrate having opposing front and back sides; b. applying photoresist on the front side of the silicon wafer substrate; c. exposing and developing the photoresist to define predetermined areas; d. wet etching the substrate to form groove reflectors; e. applying photoresist on the back side of the silicon wafer substrate; f. exposing and developing the photoresist to define a through-hole pattern in respective aligned relationship with the groove reflectors; g. dry etching the through-hole pattern to form electrode holes through the silicon wafer substrate; h. removing the photoresist from the silicon wafer substrate; i. forming an insulation layer on the front and back sides of the substrate by oxidation or nitridation; j. applying a conductive metal layer by electroplating to the front and back sides of silicon substrate and inside electrode holes; and, k. laser treating the conductive metal layer to cut an electrode surface in the groove reflectors into positive and negative electrode contacting surfaces for respective connection with LED chips placed inside the groove reflectors.
Claim 3
Dependent Claim
41 words
The process for forming an LED packaging substrate of claim 1 , wherein the conductive metal plating layer provides both electrical conductance and light reflection and is made of materials selected from the group consisting of Ag, Au, Pd, and Pt.
Claim 4
Dependent Claim
34 words
The process for forming an LED packaging substrate of claim 1 , wherein the silicon wafer substrate uses (100) crystallization orientation to form the groove reflectors with declining walls by etching in step d.
Claim 5
Dependent Claim
34 words
The process for forming an LED packaging substrate of claim 1 , wherein the silicon wafer substrate uses (110) crystallization orientation to form the groove reflectors with vertical walls by etching in step d.
Claim 6
Dependent Claim
27 words
The process for forming an LED packaging substrate of claim 1 , wherein the wet etching step includes the step of using an etching solution of KOH.
Claim 7
Dependent Claim
92 words
A process for forming an LED packaging substrate of claim 1 , further comprising the steps of: placing LED chips in the groove reflectors of the silicon wafer substrate; respectively connecting positive and negative electrodes of the LED chips to the positive and negative electrode contacting surfaces of the groove reflectors of the silicon wafer substrate; covering the LED chips and completely filling the groove reflectors with an encapsulating resin; heating the silicon wafer substrate to cure the encapsulating resin; and, cutting the silicon wafer substrate to form individual SMD LED dies.
Claim 8
Dependent Claim
26 words
The process for forming an LED packaging substrate of claim 6 , wherein the encapsulating resin is a transparent and high-temperature resistant silicon rubber or epoxy.