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US6519760B2
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Method and apparatus for minimizing optical proximity effects
Assignee: ASML Netherlands BV
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Filing: 2001-04-24
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Granted: 2003-02-11
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Expires: 2021-04-24
Abstract
Abstract Optical proximity effects (OPEs) are a well-known phenomenon in photolithography. OPEs result from the structural interaction between the main feature and neighboring features. It has been determined by the present inventors that such structural interactions not only affect the critical dimension of the main feature at the image plane, but also the process latitude of the main feature. Moreover, it has been determined that the variation of the critical dimension as well as the process latitude of the main feature is a direct consequence of light field interference between the main feature and the neighboring features. Depending on the phase of the field produced by the neighboring features, the main feature critical dimension and process latitude can be improved by constructive light field interference, or degraded by destructive light field interference. The phase of the field produced by the neighboring features is dependent on the pitch as well as the illumination angle. For a given illumination, the forbidden pitch region is the location where the field produced by the neighboring features interferes with the field of the main feature destructively. The present invention provides a method for determining and eliminating the forbidden pitch region for any feature size and illumination condition. Moreover, it provides a method for performing illumination design in order to suppress the forbidden pitch phenomena, and for optimal placement of scattering bar assist features.
Inventors
- 👤 Xuelong Shi
- 👤 Jang Fung Chen
- 👤 Stephen Hsu
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-08 10:46
CPC Classifications
G; G03; G03F; G03F7/00; G03F7/70; G03F7/70483; G03F7/70491; G03F7/705; H; H10; H10P; H10P76/00; G03F7/70058; G03F7/70125; G03F7/70425; G03F7/70433; G03F7/70441
Claims Analysis
Total Claims: 17
Claim 1
Independent Claim
157 words
A method of identifying an extreme interaction pitch region when designing a mask for transferring a lithographic pattern corresponding to an integrated device from said mask onto a substrate by use of a lithographic apparatus, said method comprising the steps of: (a) determining an illumination intensity for a first pitch and a first illumination angle, (b) determining an illumination intensity for said first pitch and a second illumination angle, said second illumination angle being rotationally symmetric with respect to said first illumination angle, (c) determining a total illumination intensity for said first pitch by combining the illumination intensity associated with said first illumination angle and said second illumination angle, (d) determining the log-slope of said total illumination intensity, and (e) identifying said first pitch as an extreme interaction pitch region if the value of the derivative of the log-slope of said total illumination intensity divided by the derivative of said first pitch is approximately equal to zero.
Claim 2
Independent Claim
157 words
A method of identifying an extreme interaction pitch region when designing a mask for transferring a lithographic pattern corresponding to an integrated device from said mask onto a substrate by use of a lithographic apparatus, said method comprising the steps of: (a) determining an illumination intensity for a first pitch and a first illumination angle, (b) determining an illumination intensity for said first pitch and a second illumination angle, said second illumination angle being rotationally symmetric with respect to said first illumination angle, (c) determining a total illumination intensity for said first pitch by combining the illumination intensity associated with said first illumination angle and said second illumination angle, (d) determining the log-slope of said total illumination intensity, and (e) identifying said first pitch as an extreme interaction pitch region if the value of the derivative of the log-slope of said total illumination intensity divided by the derivative of said first pitch is approximately equal to zero.
Claim 3
Dependent Claim
28 words
The method of identifying an extreme interaction pitch region according to claim 1 , further comprising the steps of: repeating steps (a)-(e) for a plurality of different pitches.
Claim 4
Dependent Claim
27 words
The method of identifying an extreme interaction pitch region according to claim 2 , wherein said extreme interaction pitch regions are substantially independent of said illumination angle.
Claim 5
Dependent Claim
32 words
The method of identifying an extreme interaction pitch region according to claim 1 , wherein said second illumination angle exhibits a 90 degree rotational symmetry with respect to said first illumination angle.
Claim 6
Dependent Claim
148 words
The method of identifying an extreme interaction pitch region according to claim 2 , further comprising the steps of: for a given extreme interaction pitch: (f) determining an illumination intensity for said given extreme interaction pitch and a first illumination angle, (g) determining an illumination intensity for said given extreme interaction pitch and a second illumination angle, said second illumination angle being rotationally symmetric with respect to said first illumination angle, (h) determining a second total illumination intensity for said given extreme interaction pitch by combining the illumination intensity associated with said first illumination angle and said second illumination angle, (i) determining the log-slope of said second total illumination intensity, (j) repeating steps (f)-(i) for a plurality of different illumination angles, and (k) identifying a given illumination angle as corresponding to an undesirable pitch region if said log-slope of said second total illumination intensity exceeds a predetermined value.
Claim 7
Independent Claim
281 words
A method of identifying undesirable pitches between features when designing an integrated device to be formed on a substrate by use of a lithographic apparatus, said method comprising the steps of: (a) determining an illumination intensity for a first pitch and a first illumination angle, (b) determining an illumination intensity for said first pitch and a second illumination angle, said second illumination angle being rotationally symmetric with respect to said first illumination angle, (c) determining a total illumination intensity for said first pitch by combining the illumination intensity associated with said first illumination angle and said second illumination angle, (d) determining the log-slope of said total illumination intensity, (e) identifying said first pitch as an extreme interaction pitch if the value of the derivative of the log-slope of said total illumination intensity divided by the derivative of said first pitch is approximately equal to zero, and (f) repeating steps (a)-(e) for a plurality of different pitches; wherein for each extreme interaction pitch identified in steps (a)-(f): (g) an illumination intensity is determined for said given extreme interaction pitch and said first illumination angle, (h) an illumination intensity is determined for said given extreme interaction pitch and said second illumination angle, (i) a second total illumination intensity is determined for said given extreme interaction pitch by combining the illumination intensity associated with said first illumination angle and said second illumination angle, (j) the log-slope of said second total illumination intensity is determined, (k) steps (g)-(j) are repeated for a plurality of different illumination angles, and (l) a given illumination angle is identified as corresponding to an undesirable pitch region if said log-slope of said second total illumination intensity exceeds a predetermined value.
Claim 8
Independent Claim
281 words
A method of identifying undesirable pitches between features when designing an integrated device to be formed on a substrate by use of a lithographic apparatus, said method comprising the steps of: (a) determining an illumination intensity for a first pitch and a first illumination angle, (b) determining an illumination intensity for said first pitch and a second illumination angle, said second illumination angle being rotationally symmetric with respect to said first illumination angle, (c) determining a total illumination intensity for said first pitch by combining the illumination intensity associated with said first illumination angle and said second illumination angle, (d) determining the log-slope of said total illumination intensity, (e) identifying said first pitch as an extreme interaction pitch if the value of the derivative of the log-slope of said total illumination intensity divided by the derivative of said first pitch is approximately equal to zero, and (f) repeating steps (a)-(e) for a plurality of different pitches; wherein for each extreme interaction pitch identified in steps (a)-(f): (g) an illumination intensity is determined for said given extreme interaction pitch and said first illumination angle, (h) an illumination intensity is determined for said given extreme interaction pitch and said second illumination angle, (i) a second total illumination intensity is determined for said given extreme interaction pitch by combining the illumination intensity associated with said first illumination angle and said second illumination angle, (j) the log-slope of said second total illumination intensity is determined, (k) steps (g)-(j) are repeated for a plurality of different illumination angles, and (l) a given illumination angle is identified as corresponding to an undesirable pitch region if said log-slope of said second total illumination intensity exceeds a predetermined value.
Claim 9
Dependent Claim
29 words
The method of identifying undesirable pitches between features according to claim 6 , wherein said second illumination angle exhibits a 90 degree rotational symmetry with said first illumination angle.
Claim 10
Independent Claim
85 words
A method of identifying undesirable pitches between features when designing an integrated device to be formed on a substrate by use of a lithographic apparatus, said method comprising the steps of: (a) identifying extreme interaction pitch regions by determining illumination intensity levels for a given illumination angle over a range of pitches; and (b) identifying said undesirable pitches for each extreme interaction pitch region identified in step (a) by determining illumination intensities for a given extreme interaction pitch region over a range of illumination angles.
Claim 11
Independent Claim
85 words
A method of identifying undesirable pitches between features when designing an integrated device to be formed on a substrate by use of a lithographic apparatus, said method comprising the steps of: (a) identifying extreme interaction pitch regions by determining illumination intensity levels for a given illumination angle over a range of pitches; and (b) identifying said undesirable pitches for each extreme interaction pitch region identified in step (a) by determining illumination intensities for a given extreme interaction pitch region over a range of illumination angles.
Claim 12
Dependent Claim
33 words
The method of identifying undesirable pitches between features according to claim 8 , wherein said extreme interaction pitch regions define regions which exhibit either substantial constructive optical interference or substantial destructive optical interference.
Claim 13
Dependent Claim
25 words
The method of identifying undesirable pitches between features according to claim 8 , wherein said undesirable pitches have corresponding illumination intensities exceeding a predetermined value.
Claim 14
Independent Claim
92 words
A method of identifying undesirable pitches between a feature and an optical proximity correction element when designing an integrated device to be formed on a substrate by use of a lithographic apparatus, said method comprising the steps of: (a) identifying extreme interaction pitch regions by determining illumination intensity levels for a given illumination angle over a range of pitches; and (b) identifying said undesirable pitches for each extreme interaction pitch region identified in step (a) by determining illumination intensities for a given extreme interaction pitch region over a range of illumination angles.
Claim 15
Independent Claim
92 words
A method of identifying undesirable pitches between a feature and an optical proximity correction element when designing an integrated device to be formed on a substrate by use of a lithographic apparatus, said method comprising the steps of: (a) identifying extreme interaction pitch regions by determining illumination intensity levels for a given illumination angle over a range of pitches; and (b) identifying said undesirable pitches for each extreme interaction pitch region identified in step (a) by determining illumination intensities for a given extreme interaction pitch region over a range of illumination angles.
Claim 16
Dependent Claim
33 words
The method of identifying undesirable pitches between features according to claim 11 , wherein said extreme interaction pitch regions define regions which exhibit either substantial constructive optical interference or substantial destructive optical interference.
Claim 17
Dependent Claim
25 words
The method of identifying undesirable pitches between features according to claim 10 , wherein said undesirable pitches have corresponding illumination intensities exceeding a predetermined value.
References Cited (Backward Citations)
US6094305A
Cited
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