US6491764B2
Expired / Lapsed
US
⏱️ 0.0 years remaining
Method and apparatus for removing a liquid from a surface of a rotating substrate
Assignee: Imec
•
Filing: 1998-09-23
•
Granted: 2002-12-10
•
Expires: 2018-09-23
Abstract
Abstract A method and an apparatus for removing a liquid, i.e a wet processing liquid, from a surface of at least one substrate is disclosed. A liquid is supplied on a surface of substrate. Simultaneously or thereafter besides the liquid also a gaseous substance can be supplied thereby creating at least locally a sharply defined liquid-vapor boundary. The gaseous substance and the liquid can be selected such that the gaseous substance is miscible with the liquid and when mixed with the liquid yields a mixture having a surface tension lower than that of the liquid. According to the invention, the substrate is subjected to a rotary movement at a speed to guide said liquid-vapor boundary over said substrate thereby removing said liquid from said substrate.
Inventors
- 👤 Paul Mertens
- 👤 Mark Meuris
- 👤 Marc Heyns
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-31 15:36
CPC Classifications
G; G03; G03F; G03F7/00; G03F7/26; G03F7/42; G03F7/422; G03F7/423; H; H10; H10P; H10P50/00; H10P50/20; H10P50/28; H10P50/286; H10P50/287; H10P50/282; H10P50/283; H10P70/00; H10P70/10; H10P70/12; H10P70/15; H10P72/00; H10P72/04; H10P72/0402; H10P72/0406; H10P72/0408; H10P72/0411; H10P72/0414; Y; Y10; Y10S; Y10S134/00; Y10S134/902
Claims Analysis
Total Claims: 54
Claim 1
Independent Claim
141 words
A method of removing a liquid from at least a portion of one surface of a substrate, the method comprising steps of: subjecting said substrate to a rotary movement; supplying a liquid to at least a part of said surface of said substrate; and supplying a gaseous substance to at least a section of said surface of said substrate, the step of supplying a gaseous substance being performed, at least a part of the time, simultaneously with the step of supplying a liquid, said gaseous substance being at least partially miscible with said liquid and when mixed with said liquid yielding a mixture having a surface tension being lower than that of said liquid, wherein the supplying of a liquid and the supplying of a gaseous substance cooperatively remove liquid from at least a portion of one surface of a substrate.
Claim 2
Independent Claim
141 words
A method of removing a liquid from at least a portion of one surface of a substrate, the method comprising steps of: subjecting said substrate to a rotary movement; supplying a liquid to at least a part of said surface of said substrate; and supplying a gaseous substance to at least a section of said surface of said substrate, the step of supplying a gaseous substance being performed, at least a part of the time, simultaneously with the step of supplying a liquid, said gaseous substance being at least partially miscible with said liquid and when mixed with said liquid yielding a mixture having a surface tension being lower than that of said liquid, wherein the supplying of a liquid and the supplying of a gaseous substance cooperatively remove liquid from at least a portion of one surface of a substrate.
Claim 3
Dependent Claim
36 words
A method as recited in claim 1 , wherein, by supplying said liquid and said gaseous substance on said part of said surface of said substrate, at least locally a sharply defined liquid-vapor boundary is created.
Claim 4
Dependent Claim
28 words
A method as recited in claim 1 , wherein said rotary movement is performed at a speed to guide said liquid-vapor boundary over said surface of said substrate.
Claim 5
Dependent Claim
27 words
A method as recited in claim 3 , wherein said rotary movement is on a single substrate applied such that said substrate rotates around its own centre.
Claim 6
Dependent Claim
22 words
A method as in claim 4 , wherein the rotation speed is in the range from 2 to 40 revolutions per second.
Claim 7
Dependent Claim
42 words
A method as recited in claim 1 , wherein said gaseous substance comprises a vaporised substance which is miscible with said liquid and when mixed with said liquid yields a mixture having a surface tension being lower than that of said liquid.
Claim 8
Dependent Claim
31 words
A method as recited in claim 6 , wherein said vaporised substance is selected from a group consisting of isopropyl alcohol (IPA), diacetone, ethyglycol, ethyllactate and methylpyrrolidon or a mixture thereof.
Claim 9
Dependent Claim
52 words
A method as recited in claim 1 , wherein said gaseous substance comprises a mixture of a vaporised substance and a gas, said mixture being at least partially miscible with said liquid and when mixed with said liquid yielding a mixture having a surface tension being lower than that of said liquid.
Claim 10
Dependent Claim
31 words
A method as recited in claim 8 , wherein said vaporised substance is selected from a group consisting of isopropyl alcohol (IPA), diacetone, ethyglycol, ethyllactate and methylpyrrolidon or a mixture thereof.
Claim 11
Dependent Claim
41 words
A method as recited in claim 1 , wherein said gaseous substance comprises a gas which is miscible with said liquid and when mixed with said liquid yields a mixture having a surface tension being lower than that of said liquid.
Claim 12
Dependent Claim
27 words
A method as recited in claim 1 , wherein said liquid is one of a group of an etching liquid, a cleaning liquid or a rinsing liquid.
Claim 13
Dependent Claim
16 words
A method as recited in claim 1 , wherein said liquid is a dilute aqueous solution.
Claim 14
Dependent Claim
53 words
A method as recited in claim 11 , wherein said cleaning liquid comprises a mixture of NH 4 OH, H 2 O 2 and H 2 O; or comprises a mixture of HCl, H 2 O 2 and H 2 O; or comprises diluted HCl; or comprises a mixture comprising O 3 .
Claim 15
Dependent Claim
35 words
A method as recited in claim 11 , wherein said rinsing liquid comprises H 2 O; or a mixture of H 2 O and an acid, said mixture having a pH between 2 and 6.
Claim 16
Dependent Claim
19 words
A method as recited in claim 1 , wherein said liquid and said gaseous substance are supplied substantially simultaneously.
Claim 17
Independent Claim
167 words
A method of removing a liquid from at least a portion of a first side and at least a portion of a second side of a substrate, the method comprising the steps of: subjecting said substrate to a rotary movement; supplying a liquid to at least a part of said first side and at least a part of said second side of said substrate; and supplying a gaseous substance to at least a section of said first side and said second side of said substrate, the step of supplying a gaseous substance being performed, at least a part of the time, simultaneously with the step of supplying a liquid, said gaseous substance being at least partially miscible with said liquid and when mixed with said liquid yielding a mixture having a surface tension being lower than that of said liquid, wherein the supplying of a liquid and the supplying of a gaseous substance cooperatively remove liquid from at least a portion of one surface of a substrate.
Claim 18
Independent Claim
167 words
A method of removing a liquid from at least a portion of a first side and at least a portion of a second side of a substrate, the method comprising the steps of: subjecting said substrate to a rotary movement; supplying a liquid to at least a part of said first side and at least a part of said second side of said substrate; and supplying a gaseous substance to at least a section of said first side and said second side of said substrate, the step of supplying a gaseous substance being performed, at least a part of the time, simultaneously with the step of supplying a liquid, said gaseous substance being at least partially miscible with said liquid and when mixed with said liquid yielding a mixture having a surface tension being lower than that of said liquid, wherein the supplying of a liquid and the supplying of a gaseous substance cooperatively remove liquid from at least a portion of one surface of a substrate.
Claim 19
Dependent Claim
25 words
A method as recited in claim 16 , wherein said first side is the topside and said second side is the bottomside of said substrate.
Claim 20
Dependent Claim
21 words
A method as recited in claim 1 , wherein the supplying of the gaseous substance is performed while supplying the liquid.
Claim 21
Dependent Claim
21 words
A method as recited in claim 16 , wherein the supplying of the gaseous substance is performed while supplying the liquid.
Claim 22
Dependent Claim
31 words
A method as recited in claim 1 , wherein said step of supplying a liquid to at least a part of said surface of said substrate includes supplying the liquid continuously.
Claim 23
Dependent Claim
31 words
A method as recited in claim 16 , wherein said step of supplying a liquid to at least a part of said surface of said substrate includes supplying the liquid continuously.
Claim 24
Dependent Claim
33 words
A method as recited in claim 1 , wherein the simultaneous supplying of a liquid and a gaseous substance cooperatively remove liquid from at least a portion of one surface of a substrate.
Claim 25
Dependent Claim
33 words
A method as recited in claim 16 , wherein the simultaneous supplying of a liquid and a gaseous substance cooperatively remove liquid from at least a portion of one surface of a substrate.
Claim 26
Dependent Claim
16 words
A method as recited in claim 1 , wherein said gaseous substance comprises an organic solvent.
Claim 27
Dependent Claim
16 words
A method as recited in claim 16 , wherein said gaseous substance comprises an organic solvent.
Claim 28
Dependent Claim
43 words
A method as recited in claim 1 , wherein said substrate has a center of rotary movement, and wherein, when beginning the simultaneous supplying of the liquid and the gaseous substance, the gaseous substance is supplied closer to the center than the liquid.
Claim 29
Dependent Claim
18 words
A method as recited in claim 26 , wherein the gaseous substance is supplied adjacent to the liquid.
Claim 30
Dependent Claim
37 words
A method as recited in claim 26 , wherein said substrate has an outer edge, and wherein said gaseous substance and liquid are supplied to the substrate in a direction to said outer edge of the substrate.
Claim 31
Dependent Claim
23 words
A method as recited in claim 28 , wherein said gaseous substance and liquid are supplied from said center to said outer boundary.
Claim 32
Dependent Claim
43 words
A method as recited in claim 1 , wherein said liquid and said gaseous substance are supplied from a first area of the substrate to a second area, and wherein said gaseous substance is supplied closer to said first area than said liquid.
Claim 33
Dependent Claim
28 words
A method as recited in claim 30 , wherein said substrate has a center of rotary movement, and wherein said first area is said center of rotary movement.
Claim 34
Dependent Claim
24 words
A method as recited in claim 31 , wherein said substrate has an outer edge, and wherein said second area is said outer edge.
Claim 35
Dependent Claim
43 words
A method as recited in claim 16 , wherein said substrate has a center of rotary movement, and wherein, when beginning the simultaneous supplying of the liquid and the gaseous substance, the gaseous substance is supplied closer to the center than the liquid.
Claim 36
Dependent Claim
18 words
A method as recited in claim 33 , wherein the gaseous substance is supplied adjacent to the liquid.
Claim 37
Dependent Claim
37 words
A method as recited in claim 33 , wherein said substrate has an outer edge, and wherein said gaseous substance and liquid are supplied to the substrate in a direction to said outer edge of the substrate.
Claim 38
Dependent Claim
23 words
A method as recited in claim 35 , wherein said gaseous substance and liquid are supplied from said center to said outer boundary.
Claim 39
Dependent Claim
43 words
A method as recited in claim 16 , wherein said liquid and said gaseous substance are supplied from a first area of the substrate to a second area, and wherein said gaseous substance is supplied closer to said first area than said liquid.
Claim 40
Dependent Claim
28 words
A method as recited in claim 37 , wherein said substrate has a center of rotary movement, and wherein said first area is said center of rotary movement.
Claim 41
Dependent Claim
24 words
A method as recited in claim 38 , wherein said substrate has an outer edge, and wherein said second area is said outer edge.
Claim 42
Independent Claim
159 words
A method of removing a liquid from at least a portion of one surface of a substrate, the method comprising steps of: subjecting said substrate to a rotary movement; supplying a liquid from a first part of said substrate to a second part of said substrate; and supplying a gaseous substance from said first part of said substrate to said second part of said substrate, the step of supplying a gaseous substance being performed, at least a part of the time, simultaneously with the step of supplying a liquid, said gaseous substance being at least partially miscible with said liquid and when mixed with said liquid yielding a mixture having a surface tension being lower than that of said liquid, wherein the simultaneous supplying of a liquid and a gaseous substance remove liquid from at least a portion of one surface of a substrate, and wherein said gaseous substance is supplied closer to said first part than the liquid.
Claim 43
Independent Claim
159 words
A method of removing a liquid from at least a portion of one surface of a substrate, the method comprising steps of: subjecting said substrate to a rotary movement; supplying a liquid from a first part of said substrate to a second part of said substrate; and supplying a gaseous substance from said first part of said substrate to said second part of said substrate, the step of supplying a gaseous substance being performed, at least a part of the time, simultaneously with the step of supplying a liquid, said gaseous substance being at least partially miscible with said liquid and when mixed with said liquid yielding a mixture having a surface tension being lower than that of said liquid, wherein the simultaneous supplying of a liquid and a gaseous substance remove liquid from at least a portion of one surface of a substrate, and wherein said gaseous substance is supplied closer to said first part than the liquid.
Claim 44
Dependent Claim
28 words
A method as recited in claim 40 , wherein said substrate has a center of rotary movement, and wherein said first part is said center of rotary movement.
Claim 45
Dependent Claim
24 words
A method as recited in claim 41 , wherein said substrate has an outer edge, and wherein said second part is said outer edge.
Claim 46
Dependent Claim
18 words
A method as recited in claim 42 , wherein the gaseous substance is supplied adjacent to the liquid.
Claim 47
Dependent Claim
52 words
A method as recited in claim 1 , wherein the gaseous substance is directed to the section of the surface of the substrate; wherein the liquid is directed to the part of the substrate; and wherein the section of the substrate and the part of the substrate are adjacent to each other.
Claim 48
Dependent Claim
39 words
A method as recited in claim 1 , wherein the supplying a liquid comprises supplying the liquid using at least one nozzle; and wherein the supplying a gaseous substance comprises supplying the gaseous substance using at least one nozzle.
Claim 49
Dependent Claim
56 words
A method as recited in claim 45 , further comprising the step of moving the substrate and nozzles of the liquid supply and gaseous substance supply linearly relative to one another, the step of moving being performed, at least a portion of the time, simultaneously with the step of subjecting said substrate to a rotary movement.
Claim 50
Dependent Claim
41 words
A method as recited in claim 46 , wherein the nozzles move toward an outer edge of the substrate in a direction; and wherein the nozzle of the liquid supply is angled in the direction of the movement of the nozzles.
Claim 51
Dependent Claim
52 words
A method as recited in claim 16 , wherein the gaseous substance is directed to the section of the surface of the substrate; wherein the liquid is directed to the part of the substrate; and wherein the section of the substrate and the part of the substrate are adjacent to each other.
Claim 52
Dependent Claim
39 words
A method as recited in claim 16 , wherein the supplying a liquid comprises supplying the liquid using at least one nozzle; and wherein the supplying a gaseous substance comprises supplying the gaseous substance using at least one nozzle.
Claim 53
Dependent Claim
56 words
A method as recited in claim 49 , further comprising the step of moving the substrate and nozzles of the liquid supply and gaseous substance supply linearly relative to one another, the step of moving being performed, at least a portion of the time, simultaneously with the step of subjecting said substrate to a rotary movement.
Claim 54
Dependent Claim
41 words
A method as recited in claim 50 , wherein the nozzles move toward an outer edge of the substrate in a direction; and wherein the nozzle of the liquid supply is angled in the direction of the movement of the nozzles.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 2005-12-09 | 2006-06-10 | 2006-12-10 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2009-12-09 | 2010-06-10 | 2010-12-10 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2013-12-09 | 2014-06-10 | 2014-12-10 | $7700.00 | Window Closed / Lapsed |