US6469926B1
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Magnetic element with an improved magnetoresistance ratio and fabricating method thereof
Assignee: Everspin Technologies Inc
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Filing: 2000-03-22
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Granted: 2002-10-22
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Expires: 2020-03-22
Abstract
Abstract An improved and novel magnetic element and fabrication method. The magnetic element ( 10;30 ) including a bottom pinned ferromagnetic layer ( 12;32 ) and a top pinned ferromagnetic layer ( 20;40 ) fabricated antiparallel to one another. The magnetic element ( 10;30 ) further including a bottom tunnel barrier layer ( 14;34 ), a free ferromagnetic layer ( 16;46 and 48 ) and a top tunnel barrier layer ( 18;38 ) formed between the bottom pinned ferromagnetic layer ( 12;32 ) and the top pinned ferromagnetic layer ( 20;40 ). The structure is defined as including two (2) tunnel barrier layers in which one tunnel barrier layer is normal ( 18 ) and one is reversed ( 14 ), or a structure in which the two tunnel barrier layers are of the same type ( 34; 38 ) with the structure further includes a SAF structure ( 36 ) to allow for consistently changing magnetoresistance ratios across both tunnel barriers. The magnetic element ( 10;30 ) having an improved magnetoresistance ratio and a decrease in voltage dependence.
Inventors
- 👤 Eugene Youjun Chen
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-02 06:34
CPC Classifications
G; G11; G11C; G11C11/00; G11C11/02; G11C11/14; G11C11/15; H; H01; H01F; H01F10/00; H01F10/32; H01F10/324; H01F10/3254; B; B82; B82Y; B82Y25/00; B82Y40/00; H01F10/3263; H01F41/00; H01F41/14; H01F41/30; H01F41/302; G11B; G11B5/00; G11B5/127; G11B5/33; G11B5/39; G11B5/3903; G11B5/3906; G11B5/3909
Claims Analysis
Total Claims: 22
Claim 1
Independent Claim
170 words
A magnetic element comprising: a bottom pinned ferromagnetic layer having a top surface and a bottom surface whose magnetization is fixed in a preferred direction in the presence of an applied magnetic field: a top pinned ferromagnetic layer having a top surface and a bottom surface whose magnetization is pinned in a preferred direction in the presence of an applied magnetic field, the bottom pinned ferromagnetic layer and the top pinned ferromagnetic layer fabricated antiparallel to one another; and a bottom tunnel barrier layer, a free ferromagnetic layer and a top tunnel barrier layer formed between the bottom pinned ferromagnetic layer and the top pinned ferromagnetic layer, wherein the top tunnel barrier layer is normal thereby forming a magnetic tunnel junction having a maximum resistance for anti-parallel aligned magnetic electrodes and a minimum resistance for parallel aligned magnetic electrodes and the bottom tunnel barrier layer is reverse thereby having a magnetic tunnel junction having a maximum resistance for parallel aligned magnetic electrodes and a minimum resistance for anti-parallel magnetic electrodes.
Claim 2
Dependent Claim
170 words
A magnetic element comprising: a bottom pinned ferromagnetic layer having a top surface and a bottom surface whose magnetization is fixed in a preferred direction in the presence of an applied magnetic field: a top pinned ferromagnetic layer having a top surface and a bottom surface whose magnetization is pinned in a preferred direction in the presence of an applied magnetic field, the bottom pinned ferromagnetic layer and the top pinned ferromagnetic layer fabricated antiparallel to one another; and a bottom tunnel barrier layer, a free ferromagnetic layer and a top tunnel barrier layer formed between the bottom pinned ferromagnetic layer and the top pinned ferromagnetic layer, wherein the top tunnel barrier layer is normal thereby forming a magnetic tunnel junction having a maximum resistance for anti-parallel aligned magnetic electrodes and a minimum resistance for parallel aligned magnetic electrodes and the bottom tunnel barrier layer is reverse thereby having a magnetic tunnel junction having a maximum resistance for parallel aligned magnetic electrodes and a minimum resistance for anti-parallel magnetic electrodes.
Claim 3
Dependent Claim
35 words
A magnetic element as claimed in claim 1 wherein the free ferromagnetic layers and the top pinned ferromagnetic layer and the bottom pinned ferromagnetic layer include at least one of NiFe, NiFeCo, CoFe, or Co.
Claim 4
Dependent Claim
48 words
A magnetic element as claimed in claim 2 wherein the free ferromagnetic layer is formed as a single layer separating the bottom tunnel barrier and the top tunnel barrier layer, the free ferromagnetic layer having its magnetization free to rotate in the presence of an applied magnetic field.
Claim 5
Dependent Claim
31 words
A magnetic element as claimed in claim 3 wherein the top tunnel barrier layer is formed of AlO x and the bottom tunnel barrier layer is formed of TaO Y .
Claim 6
Dependent Claim
28 words
A magnetic element as claimed in claim 4 wherein the free ferromagnetic layer is aligned co-linearly with the bottom pinned ferromagnetic layer and the top pinned ferromagnetic layer.
Claim 7
Dependent Claim
28 words
A magnetic element as claimed in claim 4 wherein the free ferromagnetic layer is aligned perpendicularly with the bottom pinned ferromagnetic layer and the top pinned ferromagnetic layer.
Claim 8
Dependent Claim
57 words
A magnetic element as claimed in claim 2 wherein the free ferromagnetic layer is formed as a synthetic antiferromagnetic (SAF) structure formed one of separating the bottom tunnel barrier layer and the top tunnel barrier layer, adjacent a top surface of the bottom tunnel barrier layer or adjacent a bottom surface of the top tunnel barrier layer.
Claim 9
Dependent Claim
39 words
A magnetic element as claimed in claim 7 wherein the synthetic antiferromagnetic structure includes a first free ferromagnetic layer and a second free ferromagnetic layer, separated by a spacer layer including antiferromagnetic exchange coupling, thereby defining the SAF structure.
Claim 10
Dependent Claim
31 words
A magnetic element as claimed in claim 8 wherein the bottom tunnel barrier layer and the top tunnel barrier layer are formed of one of TaO y or AlO x .
Claim 11
Dependent Claim
35 words
A magnetic element as claimed in claim 9 wherein the first free ferromagnetic layer and the second free ferromagnetic layer are aligned co-linearly to the first pinned ferromagnetic layer and the second pinned ferromagnetic layer.
Claim 12
Dependent Claim
35 words
A magnetic element as claimed in claim 9 wherein the first free ferromagnetic layer and the second free ferromagnetic layer are aligned perpendicularly to tho top pinned ferromagnetic layer and the bottom pinned ferromagnetic layer.
Claim 13
Dependent Claim
182 words
A magnetic element comprising: a bottom pinned ferromagnetic layer having a top surface and a bottom surface whose magnetization is fixed in a preferred direction in the presence of an applied magnetic field; a bottom tunnel barrier layer formed on the top surface of the bottom pinned ferromagnetic layer; a free ferromagnetic layer formed on a top surface of the bottom tunnel barrier layer, the free ferromagnetic layer having a top surface and a bottom surface whose magnetization is free to rotate in the presence of an applied magnetic field; a top tunnel barrier layer formed on the top surface of the free ferromagnetic layer; and a top pinned ferromagnetic layer formed on the top surface of the top tunnel barrier layer, the top pinned ferromagnetic layer having a magnetization that is fixed in a preferred direction in the presence of an applied magnetic field, whereby the free ferromagnetic layer is aligned one of co-linearly with the bottom pinned ferromagnetic layer and the top pinned ferromagnetic layer or aligned perpendicularly with the bottom pinned ferromagnetic layer and the top pinned ferromagnetic layer.
Claim 14
Dependent Claim
182 words
A magnetic element comprising: a bottom pinned ferromagnetic layer having a top surface and a bottom surface whose magnetization is fixed in a preferred direction in the presence of an applied magnetic field; a bottom tunnel barrier layer formed on the top surface of the bottom pinned ferromagnetic layer; a free ferromagnetic layer formed on a top surface of the bottom tunnel barrier layer, the free ferromagnetic layer having a top surface and a bottom surface whose magnetization is free to rotate in the presence of an applied magnetic field; a top tunnel barrier layer formed on the top surface of the free ferromagnetic layer; and a top pinned ferromagnetic layer formed on the top surface of the top tunnel barrier layer, the top pinned ferromagnetic layer having a magnetization that is fixed in a preferred direction in the presence of an applied magnetic field, whereby the free ferromagnetic layer is aligned one of co-linearly with the bottom pinned ferromagnetic layer and the top pinned ferromagnetic layer or aligned perpendicularly with the bottom pinned ferromagnetic layer and the top pinned ferromagnetic layer.
Claim 15
Dependent Claim
34 words
A magnetic element as claimed in claim 12 wherein the free ferromagnetic layer, the top pinned ferromagnetic layer, and the bottom pinned ferromagnetic layer include at least one of NiFe, NiFeCo, CoFe, or Co.
Claim 16
Dependent Claim
31 words
A magnetic element as claimed in claim 13 wherein the top tunnel barrier layer is formed of AlO x and the bottom tunnel barrier layer is formed of TaO Y .
Claim 17
Dependent Claim
176 words
A magnetic element comprising: a bottom pinned ferromagnetic layer having a top surface and a bottom surface whose magnetization is fixed in a preferred direction in the presence of an applied magnetic field; a top pinned ferromagnetic layer having a top surface and a bottom surface whose magnetization is pinned in a preferred direction in the presence of an applied magnetic field, the bottom pinned ferromagnetic layer and the top pinned ferromagnetic layer fabricated antiparallel to one another: and a bottom tunnel barrier layer, a synthetic antiferromagnetic (SAF) structure including a free ferromagnetic layer and a top tunnel barrier layer formed between the bottom pinned ferromagnetic layer and the top pinned ferromagnetic layer, where the top tunnel barrier layer is normal thereby forming a magnetic tunnel junction having a maximum resistance for anti-parallel aligned magnetic electrodes and a minimum resistance for parallel aligned magnetic electrodes and the bottom tunnel barrier layer is reverse thereby having a magnetic tunnel junction having a maximum resistance for parallel aligned magnetic electrodes and a minimum resistance for anti-parallel magnetic electrodes.
Claim 18
Dependent Claim
176 words
A magnetic element comprising: a bottom pinned ferromagnetic layer having a top surface and a bottom surface whose magnetization is fixed in a preferred direction in the presence of an applied magnetic field; a top pinned ferromagnetic layer having a top surface and a bottom surface whose magnetization is pinned in a preferred direction in the presence of an applied magnetic field, the bottom pinned ferromagnetic layer and the top pinned ferromagnetic layer fabricated antiparallel to one another: and a bottom tunnel barrier layer, a synthetic antiferromagnetic (SAF) structure including a free ferromagnetic layer and a top tunnel barrier layer formed between the bottom pinned ferromagnetic layer and the top pinned ferromagnetic layer, where the top tunnel barrier layer is normal thereby forming a magnetic tunnel junction having a maximum resistance for anti-parallel aligned magnetic electrodes and a minimum resistance for parallel aligned magnetic electrodes and the bottom tunnel barrier layer is reverse thereby having a magnetic tunnel junction having a maximum resistance for parallel aligned magnetic electrodes and a minimum resistance for anti-parallel magnetic electrodes.
Claim 19
Dependent Claim
49 words
A magnetic element as claimed in claim 15 wherein the SAF structure is formed one of separating the bottom tunnel barrier layer and the top tunnel barrier layer, adjacent a bottom surface of the top tunnel barrier layer or adjacent a top surface of the bottom tunnel barrier layer.
Claim 20
Dependent Claim
38 words
A magnetic element as claimed in claim 16 wherein the SAF structure includes a first free ferromagnetic layer and a second free ferromagnetic layer, separated by a spacer layer including antiferromagnetic exchange coupling, thereby defining the SAF structure.
Claim 21
Dependent Claim
25 words
A magnetic element as claimed in claim 17 wherein the bottom tunnel barrier layer is formed of one of TaO y or AlO x .
Claim 22
Dependent Claim
51 words
A magnetic element as claimed in claim 18 wherein the top free ferromagnetic layer and the bottom free ferromagnetic layer are aligned one of co-linearly to the top pinned ferromagnetic layer and the bottom pinned ferromagnetic layer or perpendicularly to the top pinned ferromagnetic layer and the bottom pinned ferromagnetic layer.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 2005-10-21 | 2006-04-22 | 2006-10-22 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2009-10-21 | 2010-04-22 | 2010-10-22 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2013-10-21 | 2014-04-22 | 2014-10-22 | $7700.00 | Window Closed / Lapsed |