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US6259586B1 Expired / Lapsed US ⏱️ 0.0 years remaining

Magnetic tunnel junction sensor with AP-coupled free layer

Assignee: HGST Netherlands BV
•
Filing: 1999-09-02
•
Granted: 2001-07-10
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Expires: 2019-09-02
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Abstract

Abstract A differential magnetic tunnel junction (MTJ) sensor is provided having a first MTJ stack, a second MTJ stack and a common AP-coupled free layer. The AP-coupled free layer comprises a ferromagnetic first sense layer and a ferromagnetic second sense layer with an antiferromagnetic coupling (APC) layer disposed between the two sense layers providing strong antiferromagnetic coupling. The thickness of the first sense layer is chosen to be different (greater or smaller) than the thickness of the second sense layer so that the AP-coupled free layer has a net magnetic moment oriented parallel to the ABS and free to rotate in the presence of a signal magnetic field. Antiferromagnetic (AFM) layers in the first and second MTJ stacks are set to pin the magnetizations of pinned layers in each stack perpendicular to the ABS and in the same direction with respect to one another. Having both AFM layers set in the same direction allows both AFM layers to be formed of the same antiferromagnetic material and both AFM layers may be set in the same process step during fabrication.

Inventors

  • 👤 Hardayal (Harry) Singh Gill

Bibliographic Details

Application Number —
Jurisdiction US
Data Source google_patents
Last Synchronized 2026-11-03 02:16
CPC Classifications
B; B82; B82Y; B82Y25/00; G; G01; G01R; G01R33/00; G01R33/02; G01R33/06; G01R33/09; G01R33/093; B82Y10/00; G01R33/098; G11; G11B; G11B5/00; G11B5/127; G11B5/33; G11B5/39; G11B5/3903; G11B5/3906; G11B5/3909; G11B5/3967; G11B2005/3996

Claims Analysis

Total Claims: 49
Claim 1
Independent Claim 144 words
A magnetic tunnel junction (MTJ) sensor, comprising: a first MTJ stack, comprising: a first antiferromagnetic (AFM1) layer; a first tunnel barrier layer; and a first ferromagnetic pinned layer disposed between the AFM1 layer and the first tunnel barrier layer; a second MTJ stack, comprising: a second antiferromagnetic (AFM2) layer; a second tunnel barrier layer; and a second ferromagnetic pinned layer disposed between the AFM2 layer and the second tunnel barrier layer; and an antiparallel (AP)-coupled free layer disposed between the first tunnel barrier layer and the second tunnel barrier layer, said AP-coupled free layer comprising a ferromagnetic first sense layer adjacent to and in contact with the first tunnel barrier layer, a ferromagnetic second sense layer adjacent to and in contact with the second tunnel barrier layer and an antiparallel coupling (APC) layer disposed between the first sense layer and the second sense layer.
Claim 2
Dependent Claim 144 words
A magnetic tunnel junction (MTJ) sensor, comprising: a first MTJ stack, comprising: a first antiferromagnetic (AFM1) layer; a first tunnel barrier layer; and a first ferromagnetic pinned layer disposed between the AFM1 layer and the first tunnel barrier layer; a second MTJ stack, comprising: a second antiferromagnetic (AFM2) layer; a second tunnel barrier layer; and a second ferromagnetic pinned layer disposed between the AFM2 layer and the second tunnel barrier layer; and an antiparallel (AP)-coupled free layer disposed between the first tunnel barrier layer and the second tunnel barrier layer, said AP-coupled free layer comprising a ferromagnetic first sense layer adjacent to and in contact with the first tunnel barrier layer, a ferromagnetic second sense layer adjacent to and in contact with the second tunnel barrier layer and an antiparallel coupling (APC) layer disposed between the first sense layer and the second sense layer.
Claim 3
Dependent Claim 55 words
The MTJ sensor as recited in claim 1 wherein the first sense layer comprises: a ferromagnetic first interface layer made of cobalt formed on the first tunnel barrier layer; a ferromagnetic second interface layer made of cobalt; and a ferromagnetic layer made of Ni—Fe disposed between the first interface layer and the second interface layer.
Claim 4
Dependent Claim 20 words
The MTJ sensor as recited in claim 2 wherein the first interface layer has a thickness of about 5 Å.
Claim 5
Dependent Claim 20 words
The MTJ sensor as recited in claim 2 wherein the second interface layer has a thickness of about 5 Å.
Claim 6
Dependent Claim 24 words
The MTJ sensor as recited in claim 2 wherein said ferromagnetic layer made of Ni—Fe has a thickness in the range of 20-30 Å.
Claim 7
Dependent Claim 53 words
The MTJ sensor as recited in claim 1 wherein the second sense layer comprises: a ferromagnetic first interface layer made of cobalt formed on the APC layer; a ferromagnetic second interface layer made of cobalt; and a ferromagnetic layer made of Ni—Fe disposed between the first interface layer and the second interface layer.
Claim 8
Dependent Claim 20 words
The MTJ sensor as recited in claim 6 wherein the first interface layer has a thickness of about 5 Å.
Claim 9
Dependent Claim 20 words
The MTJ sensor as recited in claim 6 wherein the second interface layer has a thickness of about 5 Å.
Claim 10
Dependent Claim 24 words
The MTJ sensor as recited in claim 6 wherein said ferromagnetic layer made of Ni—Fe has a thickness in the range of 20-30 Å.
Claim 11
Dependent Claim 16 words
The MTJ sensor as recited in claim 1 wherein the APC layer is made of ruthenium.
Claim 12
Dependent Claim 17 words
The MTJ sensor as recited in claim 1 wherein the first sense layer is made of Ni—Fe.
Claim 13
Dependent Claim 22 words
The MTJ sensor as recited in claim 11 wherein the first sense layer has a thickness in the range of 20-40 Å.
Claim 14
Dependent Claim 17 words
The MTJ sensor as recited in claim 1 wherein the second sense layer is made of Ni—Fe.
Claim 15
Dependent Claim 22 words
The MTJ sensor as recited in claim 13 wherein the second sense layer has a thickness in the range of 20-40 Å.
Claim 16
Dependent Claim 24 words
The MTJ sensor as recited in claim 1 wherein the first and second tunnel barrier layers are made of Al 2 O 3 .
Claim 17
Dependent Claim 18 words
The MTJ sensor as recited in claim 1 wherein the AFM1 and AFM2 layers are made of Ir—Mn.
Claim 18
Dependent Claim 28 words
The MTJ sensor as recited in claim 1 wherein the AFM1 and AFM2 layers are selected from a group of materials consisting of Ir—Mn, Pt—Mn, Pt—Pd—Mn, and Ni—Mn.
Claim 19
Dependent Claim 21 words
The MTJ sensor as recited in claim 1 wherein the AFM1and AFM2 layers each have a thickness of about 60 Å.
Claim 20
Dependent Claim 21 words
The MTJ sensor as recited in claim 1 wherein the first and the second ferromagnetic pinned layers are made of Ni—Fe.
Claim 21
Dependent Claim 34 words
The MTJ sensor as recited in claim 1 wherein the first and second ferromagnetic pinned layers comprise a sublayer of NiFe and an interface layer of Co in contact with the tunnel barrier layers.
Claim 22
Dependent Claim 38 words
The MTJ sensor as recited in claim 1 wherein the magnetization direction of the first pinned layer in the first MTJ stack is parallel to the magnetization direction of the second pinned layer in the second MTJ stack.
Claim 23
Dependent Claim 210 words
A magnetic tunnel junction (MTJ) sensor, comprising: a first MTJ stack, comprising: a first antiferromagnetic (AFM1) layer; a first tunnel barrier layer; and a first ferromagnetic pinned layer disposed between the AFM1 layer and the first tunnel barrier layer; a second MTJ stack, comprising: a second antiferromagnetic (AFM2) layer; a second tunnel barrier layer; and a second ferromagnetic pinned layer disposed between the AFM2 layer and the second tunnel barrier layer; and an antiparallel (AP)-coupled free layer disposed between the first tunnel barrier layer and the second tunnel barrier layer, said AP-coupled free layer comprising a ferromagnetic first sense layer adjacent to and in contact with the first tunnel barrier layer, a ferromagnetic second sense layer adjacent to and in contact with the second tunnel barrier layer, and an antiparallel coupling (APC) layer disposed between the first sense layer and the second sense layer; and said AP-coupled free layer having a back edge electrically connected to a common electrode in a back region of the MTJ sensor; a first shield in contact with said first MTJ stack for providing a first sense current to said first MTJ stack; and a second shield in contact with said second MTJ stack for providing a second sense current to said second MTJ stack.
Claim 24
Dependent Claim 210 words
A magnetic tunnel junction (MTJ) sensor, comprising: a first MTJ stack, comprising: a first antiferromagnetic (AFM1) layer; a first tunnel barrier layer; and a first ferromagnetic pinned layer disposed between the AFM1 layer and the first tunnel barrier layer; a second MTJ stack, comprising: a second antiferromagnetic (AFM2) layer; a second tunnel barrier layer; and a second ferromagnetic pinned layer disposed between the AFM2 layer and the second tunnel barrier layer; and an antiparallel (AP)-coupled free layer disposed between the first tunnel barrier layer and the second tunnel barrier layer, said AP-coupled free layer comprising a ferromagnetic first sense layer adjacent to and in contact with the first tunnel barrier layer, a ferromagnetic second sense layer adjacent to and in contact with the second tunnel barrier layer, and an antiparallel coupling (APC) layer disposed between the first sense layer and the second sense layer; and said AP-coupled free layer having a back edge electrically connected to a common electrode in a back region of the MTJ sensor; a first shield in contact with said first MTJ stack for providing a first sense current to said first MTJ stack; and a second shield in contact with said second MTJ stack for providing a second sense current to said second MTJ stack.
Claim 25
Dependent Claim 16 words
The MTJ sensor as recited in claim 22 wherein the common electrode is made of gold.
Claim 26
Dependent Claim 38 words
The MTJ sensor as recited in claim 22 wherein the magnetization direction of the first pinned layer in the first MTJ stack is parallel to the magnetization direction of the second pinned layer in the second MTJ stack.
Claim 27
Dependent Claim 301 words
A magnetic read/write head, comprising: a write head including: at least one coil layer and an insulation stack, the coil layer being embedded in the insulation stack; first and second pole piece layers connected at a back gap and having pole tips with edges forming a portion of an air bearing surface (ABS); the insulation stack being sandwiched between the first and second pole piece layers; and a write gap layer sandwiched between the pole tips of the first and second pole piece layers and forming a portion of the ABS; a read head including: a magnetic tunnel junction (MTJ) sensor, first and second shield layers and a common electrode, the MTJ sensor being sandwiched between the first and second shield layers; the MTJ sensor including: a first MTJ stack, comprising: a first antiferromagnetic (AFM1) layer; a first tunnel barrier layer; and a first ferromagnetic pinned layer disposed between the AFM1 layer and the first tunnel barrier layer; a second MTJ stack, comprising: a second antiferromagnetic (AFM2) layer; a second tunnel barrier layer; and a second ferromagnetic pinned layer disposed between the AFM2 layer and the second tunnel barrier layer; and an antiparallel-coupled (AP) free layer disposed between the first tunnel barrier layer and the second tunnel barrier layer, said AP-coupled free layer comprising a ferromagnetic first sense layer adjacent to and in contact with the first tunnel barrier layer, a ferromagnetic second sense layer adjacent to and in contact with the second tunnel barrier layer, and an antiparallel coupling (APC) layer disposed between the first sense layer and the second sense layer; and a back edge of said AP-coupled free layer connected to the common electrode; and an insulation layer disposed between the second shield layer of the read head and the first pole piece layer of the write head.
Claim 28
Dependent Claim 301 words
A magnetic read/write head, comprising: a write head including: at least one coil layer and an insulation stack, the coil layer being embedded in the insulation stack; first and second pole piece layers connected at a back gap and having pole tips with edges forming a portion of an air bearing surface (ABS); the insulation stack being sandwiched between the first and second pole piece layers; and a write gap layer sandwiched between the pole tips of the first and second pole piece layers and forming a portion of the ABS; a read head including: a magnetic tunnel junction (MTJ) sensor, first and second shield layers and a common electrode, the MTJ sensor being sandwiched between the first and second shield layers; the MTJ sensor including: a first MTJ stack, comprising: a first antiferromagnetic (AFM1) layer; a first tunnel barrier layer; and a first ferromagnetic pinned layer disposed between the AFM1 layer and the first tunnel barrier layer; a second MTJ stack, comprising: a second antiferromagnetic (AFM2) layer; a second tunnel barrier layer; and a second ferromagnetic pinned layer disposed between the AFM2 layer and the second tunnel barrier layer; and an antiparallel-coupled (AP) free layer disposed between the first tunnel barrier layer and the second tunnel barrier layer, said AP-coupled free layer comprising a ferromagnetic first sense layer adjacent to and in contact with the first tunnel barrier layer, a ferromagnetic second sense layer adjacent to and in contact with the second tunnel barrier layer, and an antiparallel coupling (APC) layer disposed between the first sense layer and the second sense layer; and a back edge of said AP-coupled free layer connected to the common electrode; and an insulation layer disposed between the second shield layer of the read head and the first pole piece layer of the write head.
Claim 29
Dependent Claim 56 words
The magnetic read/write head as recited in claim 25 wherein the first sense layer comprises: a ferromagnetic first interface layer made of cobalt formed on the first tunnel barrier layer; a ferromagnetic second interface layer made of cobalt; and a ferromagnetic layer made of Ni—Fe disposed between the first interface layer and the second interface layer.
Claim 30
Dependent Claim 21 words
The magnetic read/write head as recited in claim 26 wherein the first interface layer has a thickness of about 5 Å.
Claim 31
Dependent Claim 21 words
The magnetic read/write head as recited in claim 26 wherein the second interface layer has a thickness of about 5 Å.
Claim 32
Dependent Claim 25 words
The magnetic read/write head as recited in claim 26 wherein said ferromagnetic layer made of Ni—Fe has a thickness in the range of 20-30 Å.
Claim 33
Dependent Claim 54 words
The magnetic read/write head as recited in claim 25 wherein the second sense layer comprises: a ferromagnetic first interface layer made of cobalt formed on the APC layer; a ferromagnetic second interface layer made of cobalt; and a ferromagnetic layer made of Ni—Fe disposed between the first interface layer and the second interface layer.
Claim 34
Dependent Claim 21 words
The magnetic read/write head as recited in claim 30 wherein the first interface layer has a thickness of about 5 Å.
Claim 35
Dependent Claim 21 words
The magnetic read/write head as recited in claim 30 wherein the second interface layer has a thickness of about 5 Å.
Claim 36
Dependent Claim 25 words
The magnetic read/write head as recited in claim 30 wherein said ferromagnetic layer made of Ni—Fe has a thickness in the range of 20-30 Å.
Claim 37
Dependent Claim 17 words
The magnetic read/write head as recited in claim 25 wherein the APC layer is made of ruthenium.
Claim 38
Dependent Claim 18 words
The magnetic read/write head as recited in claim 25 wherein the first sense layer is made of Ni—Fe.
Claim 39
Dependent Claim 23 words
The magnetic read/write head as recited in claim 35 wherein the first sense layer has a thickness in the range of 20-40 Å.
Claim 40
Dependent Claim 18 words
The magnetic read/write head as recited in claim 25 wherein the second sense layer is made of Ni—Fe.
Claim 41
Dependent Claim 23 words
The magnetic read/write head as recited in claim 37 wherein the second sense layer has a thickness in the range of 20-40 Å.
Claim 42
Dependent Claim 25 words
The magnetic read/write head as recited in claim 25 wherein the first and second tunnel barrier layers are made of Al 2 O 3 .
Claim 43
Dependent Claim 19 words
The magnetic read/write head as recited in claim 25 wherein the AFM1 and AFM2 layers are made of Ir—Mn.
Claim 44
Dependent Claim 29 words
The magnetic read/write head as recited in claim 25 wherein the AFM1 and AFM2 layers are selected from a group of materials consisting of Ir—Mn, Pt—Mn, Pt—Pd—Mn and Ni—Mn.
Claim 45
Dependent Claim 23 words
The magnetic read/write head as recited in claim 25 wherein the AFM1 and AFM2 layers each have a thickness of about 60 Å.
Claim 46
Dependent Claim 22 words
The magnetic read/write head as recited in claim 25 wherein the first and the second ferromagnetic pinned layers are made of Ni—Fe.
Claim 47
Dependent Claim 35 words
The magnetic read/write head as recited in claim 25 wherein the first and second ferromagnetic pinned layers comprise a sublayer of Ni—Fe and an interface layer of Co in contact with the tunnel barrier layers.
Claim 48
Dependent Claim 430 words
A disk drive system comprising: a magnetic recording disk; a magnetic read/write head for magnetically recording data on the magnetic recording disk and for sensing magnetically recorded data on the magnetic recording disk, said magnetic read/write head comprising: a write head including: at least one coil layer and an insulation stack, the coil layer being embedded in the insulation stack; first and second pole piece layers connected at a back gap and having pole tips with edges forming a portion of an air bearing surface (ABS); the insulation stack being sandwiched between the first and second pole piece layers; and a write gap layer sandwiched between the pole tips of the first and second pole piece layers and forming a portion of the ABS; a read head including: a magnetic tunnel junction (MTJ) sensor, first and second shield layers and a common electrode, the MTJ sensor being sandwiched between the first and second shield layers; the MTJ sensor including: a first MTJ stack, comprising: a first antiferromagnetic (AFM1) layer; a first tunnel barrier layer; and a first ferromagnetic pinned layer disposed between the AFM1 layer and the first tunnel barrier layer; a second MTJ stack, comprising: a second antiferromagnetic (AFM2) layer; a second tunnel barrier layer; and a second ferromagnetic pinned layer disposed between the AFM2 layer and the second tunnel barrier layer; and an AP-coupled free layer disposed between the first tunnel barrier layer and the second tunnel barrier layer, said AP-coupled free layer comprising a ferromagnetic first sense layer adjacent to and in contact with the first tunnel barrier layer, a ferromagnetic second sense layer adjacent to and in contact with the second tunnel barrier layer, and an antiparallel coupling (APC) layer disposed between the first sense layer and the second sense layer; and a back edge of said AP-coupled free layer connected to the common electrode; and an insulation layer disposed between the second shield layer of the read head and the first pole piece layer of the write head; an actuator for moving said magnetic read/write head across the magnetic disk so that the read/write head may access different regions of the magnetic recording disk; and a recording channel coupled electrically to the write head for magnetically recording data on the magnetic recording disk and to the MTJ sensor of the read head for detecting changes in resistance of the MTJ sensor caused by rotation of the magnetization axis of the AP-coupled free layer relative to the fixed magnetizations of the first and second pinned layers in response to magnetic fields from the magnetically recorded data.
Claim 49
Dependent Claim 430 words
A disk drive system comprising: a magnetic recording disk; a magnetic read/write head for magnetically recording data on the magnetic recording disk and for sensing magnetically recorded data on the magnetic recording disk, said magnetic read/write head comprising: a write head including: at least one coil layer and an insulation stack, the coil layer being embedded in the insulation stack; first and second pole piece layers connected at a back gap and having pole tips with edges forming a portion of an air bearing surface (ABS); the insulation stack being sandwiched between the first and second pole piece layers; and a write gap layer sandwiched between the pole tips of the first and second pole piece layers and forming a portion of the ABS; a read head including: a magnetic tunnel junction (MTJ) sensor, first and second shield layers and a common electrode, the MTJ sensor being sandwiched between the first and second shield layers; the MTJ sensor including: a first MTJ stack, comprising: a first antiferromagnetic (AFM1) layer; a first tunnel barrier layer; and a first ferromagnetic pinned layer disposed between the AFM1 layer and the first tunnel barrier layer; a second MTJ stack, comprising: a second antiferromagnetic (AFM2) layer; a second tunnel barrier layer; and a second ferromagnetic pinned layer disposed between the AFM2 layer and the second tunnel barrier layer; and an AP-coupled free layer disposed between the first tunnel barrier layer and the second tunnel barrier layer, said AP-coupled free layer comprising a ferromagnetic first sense layer adjacent to and in contact with the first tunnel barrier layer, a ferromagnetic second sense layer adjacent to and in contact with the second tunnel barrier layer, and an antiparallel coupling (APC) layer disposed between the first sense layer and the second sense layer; and a back edge of said AP-coupled free layer connected to the common electrode; and an insulation layer disposed between the second shield layer of the read head and the first pole piece layer of the write head; an actuator for moving said magnetic read/write head across the magnetic disk so that the read/write head may access different regions of the magnetic recording disk; and a recording channel coupled electrically to the write head for magnetically recording data on the magnetic recording disk and to the MTJ sensor of the read head for detecting changes in resistance of the MTJ sensor caused by rotation of the magnetization axis of the AP-coupled free layer relative to the fixed magnetizations of the first and second pinned layers in response to magnetic fields from the magnetically recorded data.

References Cited (Backward Citations)

US5720410A Cited
US5206590A Cited
US5650958A Cited
US5966012A Cited
JPH11163436A Cited
US6114719A Cited
US6052263A Cited
US6097579A Cited

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