US6448568B1
Expired / Lapsed
US
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Electron beam column using high numerical aperture photocathode source illumination
Assignee: Applied Materials Inc
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Filing: 1999-07-30
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Granted: 2002-09-10
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Expires: 2019-07-30
Abstract
Abstract A lithography apparatus including both a laser beam source and an electron beam column, where the electron beam column has a support(in one embodiment a window in the column housing) having an index of refraction n. The support, having a photocathode source material disposed on its remote surface, is located in some embodiments such that the internal angle of the incident laser beam is theta with respect to a line perpendicular to the remote surface. The numerical aperture of the substrate(equal to nsin theta) is greater than one in one embodiment, resulting in a high resolution spot size diameter incident on the photocathode source material at the remote surface. Incident energy from the laser beam thereby emits a corresponding high resolution electron beam from the photocathode source material. Electromagnetic lens components are disposed downstream in the electron beam column to demagnify the electron beam. This apparatus allows the continuously decreasing minimum feature dimension sizes for semiconductor electron beam lithography.
Inventors
- 👤 Paul C. Allen
- 👤 Xiaolan Chen
- 👤 Douglas E. Holmgren
- 👤 Samuel C. Howells
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-31 10:52
CPC Classifications
G; G03; G03F; G03F7/00; G03F7/70; G03F7/70375; G03F7/70216; G03F7/70325; B; B82; B82Y; B82Y10/00; G03F7/20; G03F7/2022; G03F7/2051; G03F7/2059; G03F7/70358; G03F7/708; G03F7/70808; H; H01; H01J; H01J37/00; H01J37/02; H01J37/04; H01J37/06; H01J37/073; H01J2237/00; H01J2237/30; H01J2237/317; H01J2237/3175
Claims Analysis
Total Claims: 23
Claim 1
Independent Claim
110 words
An apparatus comprising: a source of a laser beam; and an electron beam column comprising: a photocathode support of a material transmissive to the laser beam; and a photocathode source material disposed on a remote surface of the support, wherein the photocathode source material and the support are located with respect to the source of the laser beam so that the laser beam radiates through the support at an angle with respect to a line perpendicular to a plane defined by the remote surface, thereby emitting an electron beam; wherein said photocathode support maintains said photocathode source material in close proximity to an objective lens for focusing said laser beam.
Claim 2
Independent Claim
110 words
An apparatus comprising: a source of a laser beam; and an electron beam column comprising: a photocathode support of a material transmissive to the laser beam; and a photocathode source material disposed on a remote surface of the support, wherein the photocathode source material and the support are located with respect to the source of the laser beam so that the laser beam radiates through the support at an angle with respect to a line perpendicular to a plane defined by the remote surface, thereby emitting an electron beam; wherein said photocathode support maintains said photocathode source material in close proximity to an objective lens for focusing said laser beam.
Claim 3
Dependent Claim
25 words
The apparatus of claim 1 , further comprising: an electron lens component located with respect to the photocathode source material to demagnify the electron beam.
Claim 4
Dependent Claim
15 words
The apparatus of claim 1 , wherein the laser beam is a stationary laser beam.
Claim 5
Dependent Claim
16 words
The apparatus of claim 3 further comprising an optical element located to scan the laser beam.
Claim 6
Dependent Claim
35 words
The apparatus of claim 1 , further comprising: an immersion lens located on an optical path between the source of the laser beam and the support, thereby to direct the laser beam to the support.
Claim 7
Dependent Claim
18 words
The apparatus of claim 5 , further comprising; a fluid disposed between the immersion lens and the support.
Claim 8
Dependent Claim
29 words
The apparatus of claim 5 , wherein the immersion lens is of a material chosen from the group consisting of fused silica, calcium fluoride, sapphire, diamond and optical glass.
Claim 9
Dependent Claim
28 words
The apparatus of claim 1 , wherein the support is of a material chosen from the group consisting of fused silica, calcium fluoride, sapphire, diamond and optical glass.
Claim 10
Dependent Claim
99 words
The apparatus of claim 1 , wherein: the source of the laser beam outputs a plurality of scanned laser beams; the material of the support is transmissive to the plurality of scanned laser beams; the photocathode source material and the support are located so that the plurality of scanned laser beams radiates through the support at the angle with respect to the line perpendicular to the plane defined by the remote surface; and the plurality of scanned laser beams is incident on the photocathode source material at the remote surface, thereby emitting a corresponding plurality of scanned electron beams.
Claim 11
Dependent Claim
21 words
The apparatus of claim 1 , wherein the support is a window disposed in a housing of the electron beam column.
Claim 12
Dependent Claim
38 words
The apparatus of claim 1 , further comprising: a window disposed in a housing of the electron beam column, the window being optically transmissive of the laser beam; and wherein the support is spaced apart from the window.
Claim 13
Dependent Claim
27 words
The apparatus of claim 1 , wherein an index of refraction of the support is n, the angle is θ, and nsin θ is greater than one.
Claim 14
Independent Claim
143 words
An apparatus comprising: a source of a laser beam; and an electron beam column comprising: a photocathode support of a material transmissive to the laser beam; and a photocathode source material disposed on a remote surface of the support, wherein the photocathode source material and the support are located with respect to the source of the laser beam so that the laser beam radiates through the support at an angle with respect to a line perpendicular to a plane defined by the remote surface, thereby emitting an electron beam; wherein the support is of a uniaxially birefringent crystalline material, having a c-axis about which it is rotationally symmetric, and wherein the c-axis extends in a plane parallel to that defined by a principal surface of the photocathode source material, and a polarization direction of the laser beam is at 90° to the c-axis.
Claim 15
Independent Claim
143 words
An apparatus comprising: a source of a laser beam; and an electron beam column comprising: a photocathode support of a material transmissive to the laser beam; and a photocathode source material disposed on a remote surface of the support, wherein the photocathode source material and the support are located with respect to the source of the laser beam so that the laser beam radiates through the support at an angle with respect to a line perpendicular to a plane defined by the remote surface, thereby emitting an electron beam; wherein the support is of a uniaxially birefringent crystalline material, having a c-axis about which it is rotationally symmetric, and wherein the c-axis extends in a plane parallel to that defined by a principal surface of the photocathode source material, and a polarization direction of the laser beam is at 90° to the c-axis.
Claim 16
Dependent Claim
12 words
The apparatus of claim 13 , wherein the support material is sapphire.
Claim 17
Independent Claim
100 words
A method comprising: directing a laser beam onto a surface of a support in an electron beam column such that an axis of the laser beam is at an angle with respect to a line perpendicular to a plane defined by an opposing surface of the support; and directing the laser beam onto a photosensitive material located at the opposing surface of the support, whereby an electron beam is emitted from the photosensitive material in response to the incident laser beam; wherein said support maintains said photocathode source in close proximity to an objective lens for focusing said laser beam.
Claim 18
Independent Claim
100 words
A method comprising: directing a laser beam onto a surface of a support in an electron beam column such that an axis of the laser beam is at an angle with respect to a line perpendicular to a plane defined by an opposing surface of the support; and directing the laser beam onto a photosensitive material located at the opposing surface of the support, whereby an electron beam is emitted from the photosensitive material in response to the incident laser beam; wherein said support maintains said photocathode source in close proximity to an objective lens for focusing said laser beam.
Claim 19
Dependent Claim
23 words
The method of claim 15 , wherein the directing the laser beam onto the support comprises directing a plurality of scanned laser beams.
Claim 20
Independent Claim
141 words
A method comprising: directing a laser beam onto a surface of a support in an electron beam column such that an axis of the laser beam is at an angle with respect to a line perpendicular to a plane defined by an opposing surface of the support; and directing the laser beam onto a photosensitive material located at the opposing surface of the support, whereby an electron beam is emitted from the photosensitive material in response to the incident laser beam; wherein the support is of a uniaxially birefringent crystalline material, having a c-axis about it is rotationally symmetric, and wherein the c-axis extends in a plane parallel to that defined by a principal surface of the photocathode source material, and further comprising the act of arranging the laser beam so that its polarization direction is at 90° to the c-axis.
Claim 21
Independent Claim
141 words
A method comprising: directing a laser beam onto a surface of a support in an electron beam column such that an axis of the laser beam is at an angle with respect to a line perpendicular to a plane defined by an opposing surface of the support; and directing the laser beam onto a photosensitive material located at the opposing surface of the support, whereby an electron beam is emitted from the photosensitive material in response to the incident laser beam; wherein the support is of a uniaxially birefringent crystalline material, having a c-axis about it is rotationally symmetric, and wherein the c-axis extends in a plane parallel to that defined by a principal surface of the photocathode source material, and further comprising the act of arranging the laser beam so that its polarization direction is at 90° to the c-axis.
Claim 22
Independent Claim
98 words
A method of operating a photocathode, comprising: directing an incident laser beam onto a support on which a photocathode material lies, wherein the support is an axially birefringent crystalline material having a c-axis about which it is rotationally symmetric; orienting the support so that its c-axis extends in a plane parallel to that defined by a principal surface of the photocathode material; and orienting the incident laser beam so that its polarization direction is at 90° to the c-axis; wherein said support maintains said photocathode source in close proximity to an objective lens for focusing said laser beam.
Claim 23
Independent Claim
98 words
A method of operating a photocathode, comprising: directing an incident laser beam onto a support on which a photocathode material lies, wherein the support is an axially birefringent crystalline material having a c-axis about which it is rotationally symmetric; orienting the support so that its c-axis extends in a plane parallel to that defined by a principal surface of the photocathode material; and orienting the incident laser beam so that its polarization direction is at 90° to the c-axis; wherein said support maintains said photocathode source in close proximity to an objective lens for focusing said laser beam.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 2005-09-09 | 2006-03-11 | 2006-09-10 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2009-09-09 | 2010-03-11 | 2010-09-10 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2013-09-09 | 2014-03-11 | 2014-09-10 | $7700.00 | Window Closed / Lapsed |