Flip chip semiconductor device

Claim 2

A semiconductor chip assembly mounted to a substrate, the substrate having a first thermal expansion coefficient and a surface having at least one electrode thereon, the chip assembly comprising: a semiconductor chip having a second thermal expansion coefficient; at least one bond pad disposed on the active side of the chip; a monolithically-deposited base layer abutting the bond pad having a first surface adjacent the active side of the chip and a second surface adjacent the substrate; at least one solder bump disposed on the chip for coupling the chip to the substrate, the solder bump having an effective thermal expansion coefficient dependent upon the material and thickness of the base layer; metallic interconnect layer deposited on the second surface of the base layer for coupling the solder bump to the bond pad, the interconnect layer having an underside facing the active side of the chip, and the underside is substantially continuously supported by the second surface of the base layer; wherein the base layer is comprised of at least one layer of polymeric material and has a composition and thickness selected wherein, when the solder bump is coupled to the at least one electrode, the base layer will modify the effective thermal expansion coefficient of the at least one solder bump so that the difference between the effective thermal expansion coefficient and the first thermal expansion coefficient is less than the difference between the first and second thermal expansion coefficients.

Claim 3

The chip assembly according to claim 1 , in which the interconnect metallic layer is a sputterdeposited layer fabricated from one or more metals selected from the group consisting of copper, nickel and gold.

Claim 4

The chip assembly according to claim 1 , further comprising a conductive wire having a first and a second end, wherein the first end is coupled to the interconnect metallic layer and the second end is coupled to the at least one bond pad.

Claim 5

The chip assembly according to claim 1 , in which the base layer is fabricated with a polymer selected from benzocyclobutene, polyimide, and polytetrafluoroethene.

Claim 6

The chip assembly of claim 1 wherein the base layer comprises at least one layer of a photo-definable dielectric polymer having sufficient adhesive and thermal expansion coefficient properties and being sufficiently thin that the base layer will adhere to the chip and modify the effective thermal expansion coefficient to be approximately the same as the first thermal expansion coefficient.

Claim 7

A semiconductor flip chip assembly mounted to a substrate, the substrate having a first thermal expansion coefficient and a surface having at least one electrode thereon, the chip assembly comprising; a semiconductor chip having an active side and a second thermal expansion coefficient; at least one bond pad disposed on the active side of the chip; a monolithically-deposited base layer abutting the at least one bond pad, the base layer having a first surface adjacent the active side of the chip and a second surface adapted to be adjacent the substrate; a sputter-deposited metallic interconnect layer on the second surface of the base layer and the at least one bond pad, the metallic interconnect layer having an underside facing the active side of the chip, the underside being substantially continuously supported on its underside by the base layer and the at least one bond pad; and at least one solder bump disposed on the metallic interconnect layer for coupling the at least one solder bump to the at least one bond pad, the solder bump having an effective thermal expansion coefficient dependent upon the material and thickness of the base layer; wherein the base layer is comprised of at least one layer of polymeric material and has a composition and thickness selected wherein, when the solder bump is coupled to the at least one electrode, the base layer will modify the effective thermal expansion coefficient of the at least one solder bump so that the difference between the effective thermal expansion coefficient and the first thermal expansion coefficient is less than the difference between the first and second thermal expansion coefficients.

Claim 8

A semiconductor flip chip assembly mounted to a substrate, the substrate having a first thermal expansion coefficient and a surface having at least one electrode thereon, the chip assembly comprising; a semiconductor chip having an active side and a second thermal expansion coefficient; at least one bond pad disposed on the active side of the chip; a monolithically-deposited base layer abutting the at least one bond pad, the base layer having a first surface adjacent the active side of the chip and a second surface adapted to be adjacent the substrate; a sputter-deposited metallic interconnect layer on the second surface of the base layer and the at least one bond pad, the metallic interconnect layer having an underside facing the active side of the chip, the underside being substantially continuously supported on its underside by the base layer and the at least one bond pad; and at least one solder bump disposed on the metallic interconnect layer for coupling the at least one solder bump to the at least one bond pad, the solder bump having an effective thermal expansion coefficient dependent upon the material and thickness of the base layer; wherein the base layer is comprised of at least one layer of polymeric material and has a composition and thickness selected wherein, when the solder bump is coupled to the at least one electrode, the base layer will modify the effective thermal expansion coefficient of the at least one solder bump so that the difference between the effective thermal expansion coefficient and the first thermal expansion coefficient is less than the difference between the first and second thermal expansion coefficients.

Claim 9

The device of claim 6 in which the metallic interconnect layer being supported on its underside does not require an encapsulant for protection.