US6430737B1
Expired / Lapsed
US
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Convergence technique for model-based optical and process correction
Assignee: Siemens Industry Software Inc
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Filing: 2000-07-10
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Granted: 2002-08-06
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Expires: 2020-07-10
Abstract
Abstract Layout correction is accomplished using a forward mapping technique. Forward mapping refers to mapping of fragments from a reticle layout to a target layout, while backward mapping refers to mapping of fragments from the target layout to the reticle layout. Forward mapping provides a technique for making an unambiguous mapping for each reticle fragment to a corresponding target layout fragment. The mapping does not necessarily provide a one-to-one correspondence between reticle fragments and target layout fragments. That is, multiple reticle layout fragments can map to a single target layout fragment. An edge placement error for the target layout fragments is used to make positioning corrections for the corresponding reticle fragment(s). Edge placement error can be determined, for example, with a simulation process that simulates a manufacturing process using the reticles.
Inventors
- 👤 Nicolas Bailey Cobb
- 👤 Emile Sahouria
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-07 09:55
CPC Classifications
G; G03; G03F; G03F1/00; G03F1/36; G03F1/68; G03F1/70; G06; G06F; G06F30/00; G06F30/30; G06F30/39; G06F30/398
Claims Analysis
Total Claims: 27
Claim 1
Independent Claim
86 words
A method comprising: analyzing a layout of an integrated device layer to identify one or more predetermined structures; modifying one or more reticle layouts corresponding to the integrated device layer in a predetermined manner for the identified predetermined structures by adding assist features to layout elements having dimensions less than or equal to a predetermined threshold and further wherein at least one of the assist features comprises a hammer head structure to one or more line ends; and performing model-based correction on the modified reticle layouts.
Claim 2
Independent Claim
86 words
A method comprising: analyzing a layout of an integrated device layer to identify one or more predetermined structures; modifying one or more reticle layouts corresponding to the integrated device layer in a predetermined manner for the identified predetermined structures by adding assist features to layout elements having dimensions less than or equal to a predetermined threshold and further wherein at least one of the assist features comprises a hammer head structure to one or more line ends; and performing model-based correction on the modified reticle layouts.
Claim 3
Dependent Claim
34 words
The method of claim 1 wherein modifying one or more reticle layouts corresponding to the integrated device layer in a predetermined manner further comprises adding a serif structure to one or more line corners.
Claim 4
Dependent Claim
103 words
The method of claim 1 wherein performing model-based correction comprises: (a) mapping one or more fragments of multiple reticle layouts to a target layout representing a desired integrated device layer; (b) comparing the target layout to a predicted layer of an integrated device to be manufactured; (c) determining an error metric for one or more fragments based, at least in part, on the comparison of the simulated layer and the target layout; and (d) modifying placement of one or more fragments of the multiple reticle layouts based, at least in part, on the error metric of the corresponding fragment of the target layer.
Claim 5
Dependent Claim
14 words
The method of claim 3 wherein the error metric comprises an edge placement error.
Claim 6
Dependent Claim
38 words
The method of claim 3 wherein each fragment of the multiple reticles is mapped to a corresponding fragment of the simulated layer and further wherein multiple reticle layout fragments can be mapped to a single simulated layer fragment.
Claim 7
Dependent Claim
21 words
The method of claim 3 wherein (b) through (d) are repeated until each error metric is less than a predetermined threshold.
Claim 8
Dependent Claim
18 words
The method of claim 3 herein the multiple reticles are to be used for phase shifting manufacturing techniques.
Claim 9
Dependent Claim
13 words
The method of claim 1 wherein the integrated device is an integrated circuit.
Claim 10
Dependent Claim
102 words
A machine-readable medium having stored thereon sequences of instructions that, when executed, cause one or more electronic systems to: analyze a layout of an integrated device layer to identify one or more predetermined structures; modify one or more reticle layouts corresponding to the integrated device layer in a predetermined manner for the identified predetermined structures by adding assist features to layout elements having dimensions less than or equal to a predetermined threshold and further wherein at least one of the assist features comprises a hammer head structure to one or more line ends; and perform model-based correction on the modified reticle layouts.
Claim 11
Dependent Claim
102 words
A machine-readable medium having stored thereon sequences of instructions that, when executed, cause one or more electronic systems to: analyze a layout of an integrated device layer to identify one or more predetermined structures; modify one or more reticle layouts corresponding to the integrated device layer in a predetermined manner for the identified predetermined structures by adding assist features to layout elements having dimensions less than or equal to a predetermined threshold and further wherein at least one of the assist features comprises a hammer head structure to one or more line ends; and perform model-based correction on the modified reticle layouts.
Claim 12
Dependent Claim
61 words
The machine-readable medium of claim 9 wherein the sequences of instructions that cause the one or more electronic systems to modify one or more reticle layouts corresponding to the integrated device layer in a predetermined manner comprises sequences of instructions that, when executed, cause the one or more electronic systems to add a serif structure to one or more line corners.
Claim 13
Dependent Claim
131 words
The machine-readable medium of claim 9 wherein the sequences of instructions that cause the one or more electronic devices to perform model-based correction comprises sequences of instructions that, when executed, cause the one or more electronic systems to: (a) map one or more fragments of multiple reticle layouts to a target layout representing a desired integrated device layer; (b) compare the target layout to a predicted layer of an integrated device to be manufactured; (c) determine an error metric for one or more fragments based, at least in part, on the comparison of the simulated layer and the target layout; and (d) modify placement of one or more fragments of the multiple reticle layouts based, at least in part, on the error metric of the corresponding fragment of the target layer.
Claim 14
Dependent Claim
15 words
The machine-readable medium of claim 11 wherein the error metric comprises an edge placement error.
Claim 15
Dependent Claim
39 words
The machine-readable medium of claim 11 wherein each fragment of the multiple reticles is mapped to a corresponding fragment of the simulated layer and further wherein multiple reticle layout fragments can be mapped to a single simulated layer fragment.
Claim 16
Dependent Claim
23 words
The machine-readable medium of claim 11 wherein (b) through (d) are repeated until each edge placement error is less than a predetermined threshold.
Claim 17
Dependent Claim
19 words
The machine-readable medium of claim 11 wherein the multiple reticles are to be used for phase shifting manufacturing techniques.
Claim 18
Dependent Claim
14 words
The machine-readable medium of claim 11 wherein the integrated device is an integrated circuit.
Claim 19
Dependent Claim
114 words
A computer data signal embodied in a data communications medium shared among a plurality of network devices comprising sequences of instructions that, when executed, cause one or more electronic systems to: analyze a layout of an integrated device layer to identify one or more predetermined structures; modify one or more reticle layouts corresponding to the integrated device layer in a predetermined manner for the identified predetermined structures by adding assist features to layout elements having dimensions less than or equal to a predetermined threshold and further wherein at least one of the assist features comprises a hammer head structure to one or more line ends; and perform model-based correction on the modified reticle layouts.
Claim 20
Dependent Claim
114 words
A computer data signal embodied in a data communications medium shared among a plurality of network devices comprising sequences of instructions that, when executed, cause one or more electronic systems to: analyze a layout of an integrated device layer to identify one or more predetermined structures; modify one or more reticle layouts corresponding to the integrated device layer in a predetermined manner for the identified predetermined structures by adding assist features to layout elements having dimensions less than or equal to a predetermined threshold and further wherein at least one of the assist features comprises a hammer head structure to one or more line ends; and perform model-based correction on the modified reticle layouts.
Claim 21
Dependent Claim
62 words
The computer data signal of claim 17 wherein the sequences of instructions that cause the one or more electronic systems to modify one or more reticle layouts corresponding to the integrated device layer in a predetermined manner comprises sequences of instructions that, when executed, cause the one or more electronic systems to add a serif structure to one or more line corners.
Claim 22
Dependent Claim
132 words
The computer data signal of claim 17 wherein the sequences of instructions that cause the one or more electronic devices to perform model-based correction comprises sequences of instructions that, when executed, cause the one or more electronic systems to: (a) map one or more fragments of multiple reticle layouts to a target layout representing a desired integrated device layer; (b) compare the target layout to a predicted layer of an integrated device to be manufactured; (c) determine an error metric for one or more fragments based, at least in part, on the comparison of the simulated layer and the target layout; and (d) modify placement of one or more fragments of the multiple reticle layouts based, at least in part, on the error metric of the corresponding fragment of the target layer.
Claim 23
Dependent Claim
16 words
The computer data signal of claim 19 wherein the error metric comprises an edge placement error.
Claim 24
Dependent Claim
40 words
The computer data signal of claim 19 wherein each fragment of the multiple reticles is mapped to a corresponding fragment of the simulated layer and further wherein multiple reticle layout fragments can be mapped to a single simulated layer fragment.
Claim 25
Dependent Claim
24 words
The computer data signal of claim 19 wherein (b) through (d) are repeated until each edge placement error is less than a predetermined threshold.
Claim 26
Dependent Claim
20 words
The computer data signal of claim 19 wherein the multiple reticles are to be used for phase shifting manufacturing techniques.
Claim 27
Dependent Claim
15 words
The computer data signal of claim 19 wherein the integrated device is an integrated circuit.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 2005-08-05 | 2006-02-04 | 2006-08-06 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2009-08-05 | 2010-02-04 | 2010-08-06 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2013-08-05 | 2014-02-04 | 2014-08-06 | $7700.00 | Window Closed / Lapsed |