US6420216B1
Expired / Lapsed
US
⏱️ 0.0 years remaining
Fuse processing using dielectric planarization pillars
Assignee: Qimonda AG
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Filing: 2000-03-14
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Granted: 2002-07-16
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Expires: 2020-03-14
Abstract
Abstract An electrical fuse structure comprises a semiconductor substrate; at least one electrically insulating layer over the semiconductor substrate having a portion thereof containing electrical wiring and another, adjacent portion thereof substantially free of electrical wiring; optionally, a further electrically insulating layer over the at least one electrically insulating layer. The electrically insulating layer(s) have a depression formed over the portion substantially free of electrical wiring, with the depression having a lower surface level than an adjacent portion of the electrically insulating layer. The fuse structure also includes a fuse insulator disposed over the depression and a fuse over the fuse insulator. Preferably, the fuse insulator is disposed only in the depression to elevate the fuse to the same level as the adjacent portion of the electrically insulating layer. The fuse structure may have a single layer or comprise alternating layers having different degrees of reflectivity to a laser beam, such as alternating layers of silicon oxide and silicon nitride. The preferred fuse structure comprises an electrically and thermally resistive fuse insulator in the depression, such that the fuse insulator substantially prevents heat of an energy beam directed at the fuse from being transmitted to the semiconductor substrate. More preferably, the fuse formed has a width less that that of the fuse insulator. The fuse structure may further include additional wiring over the electrical insulating layer at the same level as the fuse.
Inventors
- 👤 Larry Clevenger
- 👤 Louis L. C. Hsu
- 👤 Chandrasekhar Narayan
- 👤 Jeremy K. Stephens
- 👤 Michael Wise
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-10 01:40
CPC Classifications
H; H10; H10D; H10D84/00; H10D84/01; H10W; H10W20/00; H10W20/40; H10W20/49; H10W20/493; H10W20/494; H10W20/01; H10W20/071; H10W20/092
Claims Analysis
Total Claims: 18
Claim 1
Independent Claim
195 words
A method of forming an electrical fuse on a semiconductor structure comprising: providing a semiconductor substrate; depositing on said semiconductor substrate at least one electrically insulating layer having a portion thereof containing electrical wiring and another, adjacent portion thereof substantially free of electrical wiring; polishing said at least one electrically insulating layer such that there is formed over the portion thereof substantially free of electrical wiring a depression having a lower surface level than the adjacent portion thereof containing electrical wiring; optionally depositing over said at least one electrically insulating layer a further electrically insulating layer and polishing said further electrically insulating layer such that there is formed therein over the portion of said at least one electrically insulating layer substantially free of electrical wiring a depression having a lower surface level than an adjacent portion of the further electrically insulating layer; depositing a fuse insulator in the depression over the portion of said at least one electrically insulating layer substantially free of electrical wiring, the fuse insulator having a surface level which is substantially the same as the adjacent surface level of the electrically insulating layer; and forming a fuse over said fuse insulator.
Claim 2
Independent Claim
195 words
A method of forming an electrical fuse on a semiconductor structure comprising: providing a semiconductor substrate; depositing on said semiconductor substrate at least one electrically insulating layer having a portion thereof containing electrical wiring and another, adjacent portion thereof substantially free of electrical wiring; polishing said at least one electrically insulating layer such that there is formed over the portion thereof substantially free of electrical wiring a depression having a lower surface level than the adjacent portion thereof containing electrical wiring; optionally depositing over said at least one electrically insulating layer a further electrically insulating layer and polishing said further electrically insulating layer such that there is formed therein over the portion of said at least one electrically insulating layer substantially free of electrical wiring a depression having a lower surface level than an adjacent portion of the further electrically insulating layer; depositing a fuse insulator in the depression over the portion of said at least one electrically insulating layer substantially free of electrical wiring, the fuse insulator having a surface level which is substantially the same as the adjacent surface level of the electrically insulating layer; and forming a fuse over said fuse insulator.
Claim 3
Dependent Claim
15 words
The method of claim 1 wherein said fuse insulator is deposited only in said depression.
Claim 4
Dependent Claim
23 words
The method of claim 1 wherein depositing the fuse insulator comprises depositing alternating layers having different degrees of reflectivity to a laser beam.
Claim 5
Dependent Claim
27 words
The method of claim 1 wherein the fuse insulator has a width, and wherein the fuse formed has a width less that that of the fuse insulator.
Claim 6
Dependent Claim
20 words
The method of claim 1 wherein depositing the fuse insulator comprises depositing alternating layers of silicon oxide and silicon nitride.
Claim 7
Dependent Claim
12 words
The method of claim 1 wherein the polishing comprises chemical mechanical polishing.
Claim 8
Dependent Claim
16 words
The method of claim 1 further including directing an energy beam at, and blowing, said fuse.
Claim 9
Dependent Claim
45 words
The method of claim 1 further including directing an energy beam having a width greater than said fuse at said fuse such that a portion of said energy beam blows said fuse and another portion of said energy beam is reflected by said fuse insulator.
Claim 10
Dependent Claim
17 words
The method of claim 1 comprising depositing an electrically and thermally resistive fuse insulator in said depression.
Claim 11
Dependent Claim
29 words
The method of claim 1 further including directing an energy beam at said fuse such that said fuse insulator substantially prevents heat from being transmitted to said semiconductor substrate.
Claim 12
Dependent Claim
22 words
The method of claim 1 further including depositing additional wiring over an electrical insulating layer at the same level as said fuse.
Claim 13
Independent Claim
183 words
A method of forming an electrical fuse on a semiconductor structure comprising: providing a semiconductor substrate; depositing on said semiconductor substrate a first electrically insulating layer having a portion thereof containing electrical wiring and another, adjacent portion thereof substantially free of electrical wiring; depositing over said electrically insulating layer a second electrically insulating layer; chemical mechanical polishing said second electrically insulating layer such that there is formed therein over the portion of said first electrically insulating layer substantially free of electrical wiring a depression having a lower surface level than an adjacent portion of the second electrically insulating layer over the portion of the first electrically insulating layer containing electrical wiring; depositing an electrically and thermally resistive fuse insulator in the depression of the second electrically insulating layer, the fuse insulator having a width and having a surface level which is substantially the same as the adjacent surface level of the second electrically insulating layer; forming a fuse over said fuse insulator, said fuse having a width less that of the fuse insulator; and directing a laser beam at, and blowing, said fuse.
Claim 14
Independent Claim
183 words
A method of forming an electrical fuse on a semiconductor structure comprising: providing a semiconductor substrate; depositing on said semiconductor substrate a first electrically insulating layer having a portion thereof containing electrical wiring and another, adjacent portion thereof substantially free of electrical wiring; depositing over said electrically insulating layer a second electrically insulating layer; chemical mechanical polishing said second electrically insulating layer such that there is formed therein over the portion of said first electrically insulating layer substantially free of electrical wiring a depression having a lower surface level than an adjacent portion of the second electrically insulating layer over the portion of the first electrically insulating layer containing electrical wiring; depositing an electrically and thermally resistive fuse insulator in the depression of the second electrically insulating layer, the fuse insulator having a width and having a surface level which is substantially the same as the adjacent surface level of the second electrically insulating layer; forming a fuse over said fuse insulator, said fuse having a width less that of the fuse insulator; and directing a laser beam at, and blowing, said fuse.
Claim 15
Dependent Claim
23 words
The method of claim 12 wherein depositing the fuse insulator comprises depositing alternating layers having different degrees of reflectivity to said laser beam.
Claim 16
Dependent Claim
45 words
The method of claim 12 further including directing a laser beam having a width greater than said fuse at said fuse such that a portion of said laser beam blows said fuse and another portion of said laser beam is reflected by said fuse insulator.
Claim 17
Dependent Claim
29 words
The method of claim 12 further including directing a laser beam at said fuse such that said fuse insulator substantially prevents heat from being transmitted to said semiconductor substrate.
Claim 18
Dependent Claim
28 words
The method of claim 12 further including depositing additional wiring over the adjacent surface level of said second electrical insulating layer at the same level as said fuse.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 2005-07-15 | 2006-01-14 | 2006-07-16 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2009-07-15 | 2010-01-14 | 2010-07-16 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2013-07-15 | 2014-01-14 | 2014-07-16 | $7700.00 | Window Closed / Lapsed |