US6370307B1
Expired / Lapsed
US
⏱️ 0.0 years remaining
Optical device formed on a substrate with thermal isolation regions formed therein
Assignee: Avago Technologies International Sales Pte Ltd
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Filing: 1999-07-15
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Granted: 2002-04-09
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Expires: 2019-07-15
Abstract
Abstract An optical device that is a waveguide with a heating element thereon that is formed on a silicon substrate is disclosed. The waveguide is formed on a region of porous silicon formed in the silicon substrate. The porous silicon region provides greater resistance to the flow of heat than the silicon substrate on which the device is formed. Optionally, the porous silicon region also provides greater resistance to the flow of heat than the waveguide.
Inventors
- 👤 Allan James Bruce
- 👤 Alexei Glebov
- 👤 Joseph Shmulovich
- 👤 Ya-Hong Xie
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-25 21:14
CPC Classifications
G; G02; G02F; G02F1/00; G02F1/01; G02F1/011; G02B; G02B6/00; G02B6/10; G02B6/12; G02B2006/12035; G02B2006/12061; G02B2006/12166; G02B2006/12176; G02F1/0113; G02F1/0147; G02F2202/00; G02F2202/10; G02F2202/103
Claims Analysis
Total Claims: 8
Claim 1
Independent Claim
50 words
An optical device comprising: a region of porous silicon in a supporting silicon substrate; a waveguide formed on the region of porous silicon, the waveguide comprising a core, a cladding, and a heater formed on the cladding wherein the waveguide is formed substantially entirely on the region of porous silicon.
Claim 2
Dependent Claim
50 words
An optical device comprising: a region of porous silicon in a supporting silicon substrate; a waveguide formed on the region of porous silicon, the waveguide comprising a core, a cladding, and a heater formed on the cladding wherein the waveguide is formed substantially entirely on the region of porous silicon.
Claim 3
Dependent Claim
25 words
The optical device of claim 1 wherein the porous silicon region has a thermal resistivity that is greater than the thermal resistivity of the waveguide.
Claim 4
Dependent Claim
27 words
The optical device of claim 1 wherein the porous silicon region has a porosity that is greater than about fifty percent but less than about ninety-five percent.
Claim 5
Dependent Claim
27 words
The optical device of claim 1 wherein the porous silicon region has a porosity that is greater than about fifty percent but less than about ninety percent.
Claim 6
Dependent Claim
30 words
The optical device of claim 1 wherein the device is selected from the group consisting of wavelength add-drop (WAD) devices, dynamic wavelength equalizers, Mach-Zehnder interferometers, tunable filters, and Y-branch switches.
Claim 7
Dependent Claim
25 words
The optical device of claim 1 wherein the porous silicon region has a thermal resistivity that is less than the thermal resistivity of the waveguide.
Claim 8
Dependent Claim
11 words
The optical device of claim 6 wherein the waveguide is plastic.
References Cited (Backward Citations)
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Cited
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 2005-04-08 | 2005-10-08 | 2006-04-09 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2009-04-08 | 2009-10-08 | 2010-04-09 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2013-04-08 | 2013-10-08 | 2014-04-09 | $7700.00 | Window Closed / Lapsed |