Patent US6348693B1 successfully refreshed from Google Patents.
US6348693B1
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US
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X-ray imager and its method of fabrication
Assignee: Xerox Corp
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Filing: 1999-09-16
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Granted: 2002-02-19
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Expires: 2019-09-16
Abstract
Abstract An x-ray imager and method of fabricating an x-ray imager that provides protection to the sensor arrays and the barrier layer from the corrosive effects of the scintillating material. The x-ray imager includes a benzo-cyclo-butene layer between the barrier layer and the scintillating material. The benzo-cyclo-butene layer provides several advantages including low cost and application by spin coating or spray coating.
Inventors
- 👤 Richard L. Weisfield
- 👤 Rene Lujan
- 👤 Charles T. Malone
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-06 12:36
CPC Classifications
H; H10; H10F; H10F39/00; H10F39/10; H10F39/12; H10F39/18; H10F39/189; H10F39/1898; H10F39/80; H10F39/803
Claims Analysis
Total Claims: 18
Claim 1
Independent Claim
36 words
An x-ray imager comprising: an a-Si sensor array incorporating photodiodes; a barrier layer formed over the sensor array; a benzo-cyclo-butene layer formed over the barrier layer; and an x-ray scintillating material formed over the benzo-cyclo-butene coating.
Claim 2
Dependent Claim
36 words
An x-ray imager comprising: an a-Si sensor array incorporating photodiodes; a barrier layer formed over the sensor array; a benzo-cyclo-butene layer formed over the barrier layer; and an x-ray scintillating material formed over the benzo-cyclo-butene coating.
Claim 3
Dependent Claim
18 words
The x-ray imager of claim 1 , wherein the x-ray scintillating material comprises cesium iodide doped with thallium.
Claim 4
Dependent Claim
14 words
The x-ray imager of claim 1 , wherein the barrier layer comprises silicon oxynitride.
Claim 5
Dependent Claim
19 words
The x-ray imager of claim 1 , wherein the benzo-cyclo-butene layer is between about 1.5 to 10 microns thick.
Claim 6
Dependent Claim
17 words
The x-ray imager of claim 1 , wherein the benzo-cyclo-butene layer is between about 3-5 microns thick.
Claim 7
Independent Claim
70 words
A method for fabricating an x-ray imager having an a-Si sensor array protected from the corrosive effects of an x-ray scintillating material comprising the steps of: depositing a barrier layer over the a-Si sensor array; depositing a benzo-cyclo-butene layer over the barrier layer; curing the benzo-cyclo-butene layer in an oxygen free atmosphere; depositing an x-ray scintillating material over the benzo-cyclo-butene layer; annealing at a temperature up to about 300° C.
Claim 8
Independent Claim
70 words
A method for fabricating an x-ray imager having an a-Si sensor array protected from the corrosive effects of an x-ray scintillating material comprising the steps of: depositing a barrier layer over the a-Si sensor array; depositing a benzo-cyclo-butene layer over the barrier layer; curing the benzo-cyclo-butene layer in an oxygen free atmosphere; depositing an x-ray scintillating material over the benzo-cyclo-butene layer; annealing at a temperature up to about 300° C.
Claim 9
Dependent Claim
18 words
The method of claim 6 , wherein the benzo-cyclo-butene layer is between about 3 to 5 microns thick.
Claim 10
Dependent Claim
17 words
The method of claim 6 , wherein the step of depositing the benzo-cyclo-butene layer comprises spin coating.
Claim 11
Dependent Claim
17 words
The method of claim 6 , wherein the step of depositing the benzo-cyclo-butene layer comprises spray coating.
Claim 12
Dependent Claim
17 words
The method of claim 6 , wherein the x-ray scintillating material comprises cesium iodide doped with thallium.
Claim 13
Dependent Claim
13 words
The method of claim 6 , wherein the barrier layer comprises silicon oxynitride.
Claim 14
Dependent Claim
54 words
A sensor array with a corrosion resistant coating comprising: a plurality of a-Si photosensitive elements incorporating photodiodes; a barrier layer formed over the sensor array; a benzo-cyclo-butene layer formed over the barrier layer, wherein the benzo-cyclo-butene layer provides corrosion resistance to the sensor array and a passivation layer from a subsequently applied scintillating material.
Claim 15
Dependent Claim
54 words
A sensor array with a corrosion resistant coating comprising: a plurality of a-Si photosensitive elements incorporating photodiodes; a barrier layer formed over the sensor array; a benzo-cyclo-butene layer formed over the barrier layer, wherein the benzo-cyclo-butene layer provides corrosion resistance to the sensor array and a passivation layer from a subsequently applied scintillating material.
Claim 16
Dependent Claim
14 words
The sensor array of claim 12 , wherein the barrier layer comprises silicon oxynitride.
Claim 17
Dependent Claim
19 words
The sensor array of claim 12 , wherein the benzo-cyclo-butene layer is between about 1.5 to 10 microns thick.
Claim 18
Dependent Claim
19 words
The sensor array of claim 12 , wherein the benzo-cyclo-butene layer is between about 3 to 5 microns thick.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 2005-02-18 | 2005-08-20 | 2006-02-19 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2009-02-18 | 2009-08-20 | 2010-02-19 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2013-02-18 | 2013-08-20 | 2014-02-19 | $7700.00 | Window Closed / Lapsed |