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US6319381B1 Expired / Lapsed US ⏱️ 0.0 years remaining

Methods of forming a face plate assembly of a color display

Assignee: Micron Technology Inc
•
Filing: 1998-06-11
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Granted: 2001-11-20
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Expires: 2018-06-11
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Abstract

Abstract Methods of forming face plate assemblies are described. In one implementation, a substrate is patterned with photoresist and a first phosphor-comprising material is formed over first surface areas of the substrate. The photoresist is stripped leaving some of the first phosphor-comprising material over substrate areas other than the first areas. Photoresist is again formed over the substrate and processed to expose second substrate areas which are different from the first substrate areas. In a preferred aspect, processing the photoresist comprises using a heated aqueous developing solution comprising an acid, e.g. lactic acid, effective to dislodge and remove first phosphor-comprising material from beneath the developed photoresist. A second phosphor-comprising material is formed over the substrate and the exposed second areas, with trace deposits being left over other substrate areas. The photoresist is subsequently stripped leaving some of the second phosphor-comprising material over substrate areas other than the first and second areas. Photoresist is again formed over the substrate and processed to expose third substrate areas which are different from the first and second areas. In a preferred aspect, processing the photoresist comprises using a heated aqueous developing solution comprising an acid, e.g. lactic acid, effective to dislodge and remove first and second phosphor-comprising material from beneath the removed photoresist. A third phosphor-comprising material is formed over the substrate and the exposed third areas.

Inventors

  • 👤 Jefferson O. Nemelka

Bibliographic Details

Application Number —
Jurisdiction US
Data Source google_patents
Last Synchronized 2026-10-26 08:20
CPC Classifications
C; C23; C23C; C23C26/00

Claims Analysis

Total Claims: 8
Claim 1
Independent Claim 127 words
A method of forming a face plate assembly of a color display comprising: electrophoretically depositing a first phosphor-comprising material on first portions of a surface of a face plate, at least some of said first phosphor-comprising material forming on second portions of said surface; forming photoresist over the first phosphor-comprising material received on the first and second portions of said surface; light processing the photoresist on the first and second portions differently; after said light processing, stripping photoresist from over the second portions of the face plate surface with a stripping solution effective to also remove first phosphor-comprising material from the substrate beneath said stripped photoresist during said stripping; and after the stripping, electrophoretically depositing a second phosphor comprising material on the second portions of said surface.
Claim 2
Independent Claim 127 words
A method of forming a face plate assembly of a color display comprising: electrophoretically depositing a first phosphor-comprising material on first portions of a surface of a face plate, at least some of said first phosphor-comprising material forming on second portions of said surface; forming photoresist over the first phosphor-comprising material received on the first and second portions of said surface; light processing the photoresist on the first and second portions differently; after said light processing, stripping photoresist from over the second portions of the face plate surface with a stripping solution effective to also remove first phosphor-comprising material from the substrate beneath said stripped photoresist during said stripping; and after the stripping, electrophoretically depositing a second phosphor comprising material on the second portions of said surface.
Claim 3
Dependent Claim 18 words
The method of claim 1 , wherein said stripping solution comprises an aqueous solution comprising an organic acid.
Claim 4
Dependent Claim 13 words
The method of claim 2 , wherein said organic acid comprises lactic acid.
Claim 5
Dependent Claim 13 words
The method of claim 2 , wherein said organic acid comprises acetic acid.
Claim 6
Dependent Claim 25 words
The method of claim 2 , wherein said aqueous solution has a concentration of said organic acid of less than about ten percent by volume.
Claim 7
Dependent Claim 25 words
The method of claim 2 , wherein said aqueous solution has a concentration of said organic acid of less than about one percent by volume.
Claim 8
Dependent Claim 132 words
The method of claim 2 , further comprising: after electrophoretically depositing said second phosphor-comprising material, removing photoresist from over at least some of said first portion, at least some of said second phosphor-comprising material forming on some of said first portion, and forming photoresist at least over said first and second phosphor-comprising materials on said first portion of said surface; second light processing said photoresist on said first portion differently; after said second light processing, second stripping said photoresist from over and outwardly exposing some of said first portion of said surface with a stripping solution effective to also remove first and second phosphor-comprising materials from the substrate beneath said stripped photoresist during said second stripping; and after said second stripping, electrophoretically depositing a third phosphor-comprising material on said exposed first portion.

References Cited (Backward Citations)

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USPTO Annuity & Maintenance Windows

Annuity Stage Window Opens Payment Deadline Surcharge Period Until Estimated Fee Status
3.5 Years (Year 4) 2004-11-19 2005-05-21 2005-11-20 $2000.00 Window Closed / Lapsed
7.5 Years (Year 8) 2008-11-19 2009-05-21 2009-11-20 $3760.00 Window Closed / Lapsed
11.5 Years (Year 12) 2012-11-19 2013-05-21 2013-11-20 $7700.00 Window Closed / Lapsed

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