US6046539A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Use of sacrificial masking layer and backside exposure in forming openings that typically receive light-emissive material
Assignee: Canon Inc
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Filing: 1997-04-29
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Granted: 2000-04-04
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Expires: 2017-04-29
Abstract
Abstract Openings are created in a structure by a process in which a plate is furnished with a sacrificial patterned masking layer divided into multiple laterally separated mask portions. A primary layer of actinic material is provided over the masking layer and in space between the mask portions. Material of the primary layer not shadowed by a mask formed with the mask portions is backside exposed to actinic radiation. Material of the primary layer not exposed to the radiation is removed. Segments of the masking layer not covered by exposed material of the primary layer are then removed. Consequently, openings extend through the primary layer where the segments of the masking layer have been removed. The process is typically employed in forming an optical device such as a flat-panel cathode-ray tube display in which the openings in the primary layer receive light-emissive material.
Inventors
- 👤 Duane A. Haven
- 👤 Arthur J. Learn
- 👤 John D. Porter
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-26 14:10
CPC Classifications
H; H01; H01J; H01J29/00; H01J29/02; H01J29/10; H01J29/08; H01J29/085; H01J31/00; H01J31/08; H01J31/10; H01J31/12; H01J31/123; H01J31/125; H01J31/127
Claims Analysis
Total Claims: 37
Claim 1
Independent Claim
135 words
A method comprising the steps of: forming a patterned masking layer over a first surface of a plate having a second surface opposite the first surface such that the masking layer is patterned into multiple laterally separated mask portions; providing a primary layer of actinic material over the masking layer and in space between the mask portions; backside exposing material of the primary layer not shadowed by a mask comprising the mask portions to backside actinic radiation that passes through the plate traveling from its second surface to its first surface; removing material of the primary layer not exposed to the radiation; and removing segments of the masking layer not covered by exposed material of the primary layer, whereby openings extend through the primary layer where the segments of the masking layer have been removed.
Claim 2
Independent Claim
135 words
A method comprising the steps of: forming a patterned masking layer over a first surface of a plate having a second surface opposite the first surface such that the masking layer is patterned into multiple laterally separated mask portions; providing a primary layer of actinic material over the masking layer and in space between the mask portions; backside exposing material of the primary layer not shadowed by a mask comprising the mask portions to backside actinic radiation that passes through the plate traveling from its second surface to its first surface; removing material of the primary layer not exposed to the radiation; and removing segments of the masking layer not covered by exposed material of the primary layer, whereby openings extend through the primary layer where the segments of the masking layer have been removed.
Claim 3
Dependent Claim
23 words
A method as in claim 1 wherein material of the primary layer exposed to the backside radiation changes chemical structure by undergoing polymerization.
Claim 4
Dependent Claim
20 words
A method as in claim 1 wherein the removed segments of the masking layer largely consist of the mask portions.
Claim 5
Dependent Claim
18 words
A method as in claim 1 further including the step of blackening exposed material of the primary layer.
Claim 6
Dependent Claim
21 words
A method as in claim 4 further including the step of introducing light-emissive material into the openings in the primary layer.
Claim 7
Dependent Claim
67 words
A method as in claim 1 wherein the backside radiation penetrates the primary layer to a specified exposure depth, as measured from the plate's first surface, largely wherever the primary layer is not shadowed by the mask such that material of the primary layer further away from the plate's first surface then the exposure depth of the backside radiation is largely not exposed to the backside radiation.
Claim 8
Dependent Claim
37 words
A method as in claim 6 wherein the primary layer material removing step includes removing material of the primary layer at a greater distance from the plate's first surface than the exposure depth of the backside radiation.
Claim 9
Dependent Claim
30 words
A method as in claim 7 wherein, prior to the backside exposing step, the primary layer is of a minimum thickness greater than the exposure depth of the backside radiation.
Claim 10
Dependent Claim
25 words
A method as in claim 1 wherein the backside radiation substantially fully penetrates the primary layer largely wherever it is not shadowed by the mask.
Claim 11
Dependent Claim
35 words
A method as in claim 1 wherein exposed material of the primary layer comprises multiple trapezoidally profiled strips, each having a width profile roughly shaped like an upright trapezoid relative to the plate's first surface.
Claim 12
Dependent Claim
18 words
A method as in claim 1 further including the step of blackening exposed material of the primary layer.
Claim 13
Dependent Claim
40 words
A method as in claim 11 wherein subsequent to the blackening step, exposed material of the primary layer comprises multiple trapezoidally profiled strips, each having a width profile roughly shaped like an upright trapezoid relative to the plate's first surface.
Claim 14
Dependent Claim
48 words
A method as in claim 1 wherein exposed material of the primary layer comprises: laterally separated first strips extending laterally generally in a first direction; and laterally separated second strips extending laterally generally in a second direction different from the first direction and largely intersecting the first strips.
Claim 15
Dependent Claim
20 words
A method as in claim 1 wherein exposed material of the primary layer contains features for receiving and constraining spacers.
Claim 16
Dependent Claim
46 words
A method as in claim 1 further including, before the primary-layer providing step, the step of furnishing a patterned auxiliary layer over the plate's first surface such that the auxiliary layer is patterned into multiple laterally separated auxiliary portions, the mask further including the auxiliary portions.
Claim 17
Dependent Claim
16 words
A method as in claim 15 wherein the primary layer is thicker than the auxiliary layer.
Claim 18
Dependent Claim
20 words
A method as in claim 16 wherein exposed material of the primary layer contains features for receiving and constraining spacers.
Claim 19
Dependent Claim
37 words
A method as in claim 16 wherein exposed material of the primary layer comprises strips, each divided into multiple segments, for receiving and constraining spacer walls, each strip extending longitudinally at an angle to each spacer wall.
Claim 20
Dependent Claim
17 words
A method as in claim 18 wherein the strips extend longitudinally approximately perpendicular to the spacer walls.
Claim 21
Dependent Claim
51 words
A method as in claim 15 wherein: the auxiliary portions comprise laterally separated first strips extending laterally in a first direction; and exposed material of the primary layer comprises laterally separated second strips extending laterally generally in a second direction different from the first direction and largely intersecting the first strips.
Claim 22
Dependent Claim
22 words
A method as in claim 20 wherein the second strips extend further away from the plate's first surface than the first strips.
Claim 23
Dependent Claim
25 words
A method as in claim 21 wherein each second strip comprises a plurality of strip segments laterally separated by open regions overlying the first strips.
Claim 24
Dependent Claim
25 words
A method as in claim 22 further including the step of inserting a spacer wall into the open regions overlying one of the first strips.
Claim 25
Dependent Claim
31 words
A method as in claim 21 wherein the auxiliary-layer furnishing step entails providing slots in the first strips along their longitudinal sides such that the second strips extend into the slots.
Claim 26
Dependent Claim
25 words
A method as in claim 24 wherein each second strip comprises a plurality of strip segments laterally separated by open regions overlying the first strips.
Claim 27
Dependent Claim
25 words
A method as in claim 25 further including the step of inserting a spacer wall into the open regions overlying one of the first strips.
Claim 28
Dependent Claim
97 words
A method as in claim 15 wherein: the auxiliary portions comprise laterally separated first strips extending laterally generally in a first direction and spaced apart from the mask portions; and exposed material of the primary layer comprises pairs of laterally separated bars extending laterally generally in the first direction, the bars extending further away from the plate's first surface than the first strips, each of the pairs of bars having longitudinal sides that largely meet opposite longitudinal sides of a different one of the first strips so as to form a channel between that pair of bars.
Claim 29
Dependent Claim
40 words
A method as in claim 27 wherein the exposed material of the primary layer further includes laterally separated second strips extending laterally generally in a second direction different from the first direction and largely intersecting the bars outside the channels.
Claim 30
Dependent Claim
20 words
A method as in claim 27 further including the step of inserting a spacer wall into one of the channels.
Claim 31
Dependent Claim
18 words
A method as in claim 15 wherein the auxiliary-layer furnishing step is performed before the masking-layer forming step.
Claim 32
Dependent Claim
15 words
A method as in claim 30 wherein the masking layer partially overlies the auxiliary layer.
Claim 33
Dependent Claim
18 words
A method as in claim 15 wherein the auxiliary-layer furnishing step is performed after the masking-layer forming step.
Claim 34
Dependent Claim
15 words
A method as in claim 32 wherein the auxiliary layer partially overlies the masking layer.
Claim 35
Dependent Claim
82 words
A method as in claim 15 wherein the auxiliary-layer furnishing step comprises: providing an original auxiliary layer of actinic material over the plate's first surface; frontside selectively exposing the original auxiliary layer to frontside actinic radiation traveling generally in a direction from the first surface of the plate to its second surface; and removing material of the original auxiliary layer not exposed to the frontside radiation such that the patterned auxiliary layer largely consists of exposed material of the original auxiliary layer.
Claim 36
Dependent Claim
19 words
A method as in claim 34 further including the step of blackening exposed material of the original auxiliary layer.
Claim 37
Dependent Claim
68 words
A method as in claim 1 further including the step of backside exposing the primary layer through a further mask situated over the plate's second surface to further backside actinic radiation that passes through the plate traveling from its second surface to its first surface such that, subsequent to the second exposing step, material of the primary layer is exposed to different depths from the plate's first surface.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 2003-04-04 | 2003-10-04 | 2004-04-04 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2007-04-04 | 2007-10-04 | 2008-04-04 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2011-04-04 | 2011-10-04 | 2012-04-04 | $7700.00 | Window Closed / Lapsed |