US6313045B1
Expired / Lapsed
US
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Nanoporous silicone resins having low dielectric constants and method for preparation
Assignee: Dow Silicones Corp
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Filing: 1999-12-13
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Granted: 2001-11-06
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Expires: 2019-12-13
Abstract
Abstract Nanoporous silicone resins and silicone resin films having low dielectric constants and a method for preparing such nanoporous silicone resins. The silicone resin comprises the reaction product of a mixture comprising(A) 15-70 mol % of a tetraalkoxysilane described by formula where each R1 is an independently selected alkyl group comprising 1 to about 6 carbon atoms,(B) 12 to 60 mol % of an organosilane described by formula where R4 is selected from the group consisting of alkyl groups comprising 1 to about 6 carbon atoms and phenyl and each X is an independently selected hydrolyzable substituent,(C) 15 to 70 mol % of an organotrialkoxysilane described by formula where R2 is a hydrocarbon group comprising about 8 to 24 carbon atoms or a substituted hydrocarbon group comprising a hydrocarbon chain having about 8 to 24 carbon atoms and each R3 is an independently selected alkyl group comprising 1 to about 6 carbon atoms; in the presence of(D) water,(E) hydrolysis catalyst, and(F) organic solvent for the reaction product.The silicone resin is cured and heated in preferably an inert atmosphere at a temperature sufficient to effect thermolysis of carbon-carbon bonds of the R2 groups thereby forming a nanoporous silicone resin.
Inventors
- 👤 Bianxiao Zhong
- 👤 Russell Keith King
- 👤 Kyuha Chung
- 👤 Shizhong Zhang
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-04 12:35
CPC Classifications
C; C08; C08G; C08G77/00; C08G77/02; C08G77/04; C08G77/12; C09; C09D; C09D183/00; C09D183/04; Y; Y10; Y10S; Y10S977/00; Y10S977/70; Y10S977/831; Y10S977/84; Y10S977/89; Y10S977/891
Claims Analysis
Total Claims: 38
Claim 1
Independent Claim
231 words
A method for making a nanoporous silicone resin coating on a substrate comprising the steps of (a) coating on to a substrate a silicone resin comprising the reaction product of a mixture comprising (A) 15-70 mol % of a tetraalkoxysilane described by formula Si(OR 1 ) 4 , where each R 1 is an independently selected alkyl group comprising 1 to about 6 carbon atoms, (B) 12 to 60 mol % of an organosilane described by formula R 4 SiX 3 , where R 4 is selected from the group consisting of alkyl groups comprising 1 to about 6 carbon atoms and phenyl and each X is an independently selected hydrolyzable group, (C) 15 to 70 mole percent of an organotrialkoxysilane described by formula R 2 Si(OR 3 ) 3 , where R 2 is a hydrocarbon group comprising about 8 to 24 carbon atoms or a substituted hydrocarbon group comprising a hydrocarbon chain having about 8 to 24 carbon atoms and each R 3 is and independently selected alkyl group comprising 1 to about 6 carbon atoms; in the presence of (D) water, (E) hydrolysis catalyst, and (F) organic solvent for the reaction product and (b) heating the coated substrate to a temperature sufficient to effect curing of the silicone resin and thermolysis of R 2 groups from silicon atoms thereby forming a nanoporous silicone resin coating on the substrate.
Claim 2
Independent Claim
231 words
A method for making a nanoporous silicone resin coating on a substrate comprising the steps of (a) coating on to a substrate a silicone resin comprising the reaction product of a mixture comprising (A) 15-70 mol % of a tetraalkoxysilane described by formula Si(OR 1 ) 4 , where each R 1 is an independently selected alkyl group comprising 1 to about 6 carbon atoms, (B) 12 to 60 mol % of an organosilane described by formula R 4 SiX 3 , where R 4 is selected from the group consisting of alkyl groups comprising 1 to about 6 carbon atoms and phenyl and each X is an independently selected hydrolyzable group, (C) 15 to 70 mole percent of an organotrialkoxysilane described by formula R 2 Si(OR 3 ) 3 , where R 2 is a hydrocarbon group comprising about 8 to 24 carbon atoms or a substituted hydrocarbon group comprising a hydrocarbon chain having about 8 to 24 carbon atoms and each R 3 is and independently selected alkyl group comprising 1 to about 6 carbon atoms; in the presence of (D) water, (E) hydrolysis catalyst, and (F) organic solvent for the reaction product and (b) heating the coated substrate to a temperature sufficient to effect curing of the silicone resin and thermolysis of R 2 groups from silicon atoms thereby forming a nanoporous silicone resin coating on the substrate.
Claim 3
Dependent Claim
22 words
A method according to claim 1 , where the mixture comprises about 25 mol % to 50 mol % of the tetraalkoxysilane.
Claim 4
Dependent Claim
14 words
A method according to claim 1 , were the tetraalkoxysilane is tetramethoxysilane or tetraethoxysilane.
Claim 5
Dependent Claim
22 words
A method according to claim 1 , where the mixture comprises about 30 mol % to 50 mol % of the organosilane.
Claim 6
Dependent Claim
20 words
A method according to claim 1 , where X is an alkoxy group comprising 1 to about 6 carbon atoms.
Claim 7
Dependent Claim
21 words
A method according to claim 1 , where R4 is selected from the group consisting of methyl, ethyl, propyl, and phenyl.
Claim 8
Dependent Claim
22 words
A method according to claim 1 , where the mixture comprises about 15 mol % to 40 mol % of the organotrialkoxysilane.
Claim 9
Dependent Claim
22 words
A method according to claim 1 , where R 2 is a linear alkyl group comprising about 8 to 24 carbon atoms.
Claim 10
Dependent Claim
22 words
A method according to claim 1 , where R 2 is a linear alkyl group comprising about 16 to 20 carbon atoms.
Claim 11
Dependent Claim
21 words
A method according to claim 1 , where the organotrialkoxysilane is selected from the group consisting of octyltriethoxysilane, octadecyltrimethoxysilane, and hexadecyltrimethoxysilane.
Claim 12
Dependent Claim
51 words
A method according to claim 1 , where the reaction product comprising the silicone resin in an organic solvent is heated in the presence of an optional condensation catalyst at a temperature sufficient to effect condensation of the silicone resin to a weight average molecular weight of about 100,000 to 400,000.
Claim 13
Dependent Claim
51 words
A method according to claim 1 , where the reaction product comprising the silicone resin in an organic solvent is heated in the presence of an optional condensation catalyst at a temperature sufficient to effect condensation of the silicone resin to a weight average molecular weight of about 150,000 to 250,000.
Claim 14
Dependent Claim
25 words
A method according to claim 1 , where the nanoporous silicone resin coating has an average pore size less than about 20 nm in diameter.
Claim 15
Dependent Claim
64 words
A method according to claim 1 , where the heating of step (b) is conducted as a two-step process with the coated substrate being heated in a first step at a temperature within a range of from about 20° C. to 350° C. and heated in a second step at a temperature within a range of greater than 350° C. to about 600° C.
Claim 16
Dependent Claim
26 words
A substrate having a nanoporous silicone resin coating with an average pore diameter less than about 20 nm prepared by the method of claim 1 .
Claim 17
Dependent Claim
33 words
A substrate having a nanoporous silicone resin coating with an average pore diameter less than about 20 nm prepared by the method of claim 1 , where the substrate is an electronic component.
Claim 18
Independent Claim
216 words
A method for making a nanoporous silicone resin comprising the steps of (I) forming a reaction product by reacting a reaction mixture comprising (A) 15-70 mol % of a tetraalkoxysilane described by formula Si(OR 1 ) 4 , where each R 1 is an independently selected alkyl group comprising 1 to about 6 carbon atoms, (B) 12 to 60 mol % of an organosilane described by formula R 4 SiX 3 , where R 4 is selected from the group consisting of alkyl groups comprising 1 to about 6 carbon atoms and phenyl and each X is an independently selected hydrolyzable group, (C) 15 to 70 mole percent of an organotrialkoxysilane described by formula R 2 Si(OR 3 ) 3 , where R 2 is a hydrocarbon group comprising about 8 to 24 carbon atoms or a substituted hydrocarbon group comprising a hydrocarbon chain having about 8 to 24 carbon atoms and each R 3 is and independently selected alkyl group comprising 1 to about 6 carbon atoms; in the presence of (D) water, (E) hydrolysis catalyst, and (F) organic solvent for the reaction product and (II) heating the reaction product at a temperature sufficient to effect cure of the reaction product and thermolysis of R 2 groups thereby effecting formation of a nanoporous silicone resin.
Claim 19
Independent Claim
216 words
A method for making a nanoporous silicone resin comprising the steps of (I) forming a reaction product by reacting a reaction mixture comprising (A) 15-70 mol % of a tetraalkoxysilane described by formula Si(OR 1 ) 4 , where each R 1 is an independently selected alkyl group comprising 1 to about 6 carbon atoms, (B) 12 to 60 mol % of an organosilane described by formula R 4 SiX 3 , where R 4 is selected from the group consisting of alkyl groups comprising 1 to about 6 carbon atoms and phenyl and each X is an independently selected hydrolyzable group, (C) 15 to 70 mole percent of an organotrialkoxysilane described by formula R 2 Si(OR 3 ) 3 , where R 2 is a hydrocarbon group comprising about 8 to 24 carbon atoms or a substituted hydrocarbon group comprising a hydrocarbon chain having about 8 to 24 carbon atoms and each R 3 is and independently selected alkyl group comprising 1 to about 6 carbon atoms; in the presence of (D) water, (E) hydrolysis catalyst, and (F) organic solvent for the reaction product and (II) heating the reaction product at a temperature sufficient to effect cure of the reaction product and thermolysis of R 2 groups thereby effecting formation of a nanoporous silicone resin.
Claim 20
Dependent Claim
22 words
A method according to claim 17 , where the mixture comprises about 25 mol % to 50 mol % of the tetraalkoxysilane.
Claim 21
Dependent Claim
14 words
A method according to claim 17 , were the tetraalkoxysilane is tetramethoxysilane or tetraethoxysilane.
Claim 22
Dependent Claim
22 words
A method according to claim 17 , where the mixture comprises about 15 mol % to 40 mol % of the organosilane.
Claim 23
Dependent Claim
20 words
A method according to claim 17 , where X is an alkoxy group comprising 1 to about 6 carbon atoms.
Claim 24
Dependent Claim
22 words
A method according to claim 17 , where R 4 is selected from the group consisting of methyl, ethyl, propyl, and phenyl.
Claim 25
Dependent Claim
22 words
A method according to claim 17 , where the mixture comprises about 15 mol % to 40 mol % of the organotrialkoxysilane.
Claim 26
Dependent Claim
22 words
A method according to claim 17 , where R 2 is a linear alkyl group comprising about 8 to 24 carbon atoms.
Claim 27
Dependent Claim
22 words
A method according to claim 17 , where R 2 is a linear alkyl group comprising about 16 to 20 carbon atoms.
Claim 28
Dependent Claim
21 words
A method according to claim 17 , where the organotrialkoxysilane is selected from the group consisting of octyltriethoxysilane, octadecyltrimethoxysilane, and hexadecyltrimethoxysilane.
Claim 29
Dependent Claim
51 words
A method according to claim 17 , where the reaction product comprising the silicone resin in an organic solvent is heated in the presence of an optional condensation catalyst at a temperature sufficient to effect condensation of the silicone resin to a weight average molecular weight of about 100,000 to 400,000.
Claim 30
Dependent Claim
51 words
A method according to claim 17 , where the reaction product comprising the silicone resin in an organic solvent is heated in the presence of an optional condensation catalyst at a temperature sufficient to effect condensation of the silicone resin to a weight average molecular weight of about 150,000 to 250,000.
Claim 31
Dependent Claim
24 words
A method according to claim 1 , where the nanoporous silicone resin has an average pore diameter less than about 20 nm in diameter.
Claim 32
Dependent Claim
12 words
A nanoporous silicone resin prepared by the method of claim 1 .
Claim 33
Dependent Claim
19 words
A nanoporous silicone resin prepared by the method of claim 1 having a dielectric constant less than about 2.
Claim 34
Dependent Claim
22 words
A nanoporous silicone resin prepared by the method of claim 1 , where the coated substrate is heated in an inert atmosphere.
Claim 35
Dependent Claim
30 words
A nanoporous silicone resin prepared by the method of claim 14 , where the heating in the first step and in the second step are conducted in an inert atmosphere.
Claim 36
Dependent Claim
12 words
A nanoporous silicone resin prepared by the method of claim 17 .
Claim 37
Dependent Claim
24 words
A method according to claim 17 , where the nanoporous silicone resin has an average pore diameter less than about 20 nm in diameter.
Claim 38
Dependent Claim
23 words
A method according to claim 17 , where in step (II) the heating of the reaction product is conducted in an inert atmosphere.
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