US6312565B1
Expired / Lapsed
US
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Thin film deposition of mixed metal oxides
Assignee: Nokia of America Corp
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Filing: 2000-03-23
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Granted: 2001-11-06
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Expires: 2020-03-23
Abstract
Abstract Tantalum and niobium aluminate mixed metal oxides may be made by a process comprising mixing a first metal compound selected from the group consisting of aluminum alkoxide, aluminum beta-diketonate, aluminum alkoxide beta-diketonate, and mixtures thereof with a second metal compound selected from the group consisting of niobium alkoxide, niobium beta-diketonate, niobium alkoxide beta-diketonate, tantalum alkoxide, tantalum beta-diketonate, tantalum alkoxide beta-diketonate, and mixtures thereof to provide a precursor and then hydrolyzing the mixture. The resulting mixed metal oxide may be used in a variety of components of integrated circuits.
Inventors
- 👤 Sudhanshu Misra
- 👤 Pradip Kumar Roy
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-09 03:07
CPC Classifications
C; C01; C01G; C01G33/00; C01G35/00; C01P; C01P2004/00; C01P2004/80; C01P2004/82
Claims Analysis
Total Claims: 15
Claim 1
Independent Claim
62 words
A process for making a mixed metal oxide, comprising combining equimolar aluminum isopropoxide and niobium isopropoxide V acetyacetonate in benzene at 80° C. and exposing to UV for 8 hours to provide a precursor; hydrolyzing the precursor with a mixture of 50 wt. % acetone, 20 wt. % dimethylformamide, 20 wt. % isopropanol and 10 wt. % water; and removing volatile components.
Claim 2
Dependent Claim
62 words
A process for making a mixed metal oxide, comprising combining equimolar aluminum isopropoxide and niobium isopropoxide V acetyacetonate in benzene at 80° C. and exposing to UV for 8 hours to provide a precursor; hydrolyzing the precursor with a mixture of 50 wt. % acetone, 20 wt. % dimethylformamide, 20 wt. % isopropanol and 10 wt. % water; and removing volatile components.
Claim 3
Dependent Claim
80 words
A process for making a mixed metal oxide, comprising: combining a first metal compound selected from the group consisting of aluminum alkoxide, aluminum beta-diketonate, aluminum alkoxide beta-diketonate, and mixtures thereof with a second metal compound selected from the group consisting of niobium alkoxide, niobium beta-diketonate, niobium alkoxide beta-diketonate, tantalum alkoxide, tantalum beta-diketonate, tantalum alkoxide beta-diketonate, and mixtures thereof to provide a precursor; hydrolyzing the precursor with a mixture comprising water, acetone, isopropyl alcohol and dimethyl formamide; and removing volatile components.
Claim 4
Dependent Claim
80 words
A process for making a mixed metal oxide, comprising: combining a first metal compound selected from the group consisting of aluminum alkoxide, aluminum beta-diketonate, aluminum alkoxide beta-diketonate, and mixtures thereof with a second metal compound selected from the group consisting of niobium alkoxide, niobium beta-diketonate, niobium alkoxide beta-diketonate, tantalum alkoxide, tantalum beta-diketonate, tantalum alkoxide beta-diketonate, and mixtures thereof to provide a precursor; hydrolyzing the precursor with a mixture comprising water, acetone, isopropyl alcohol and dimethyl formamide; and removing volatile components.
Claim 5
Dependent Claim
13 words
The process of claim 2 , wherein the mixed metal oxide is porous.
Claim 6
Dependent Claim
16 words
The process of claim 2 , further comprising the step of densifying the mixed metal oxide.
Claim 7
Dependent Claim
51 words
The process of claim 2 , wherein the first metal compound is selected from the group consisting of aluminum n-butoxide, aluminum s-butoxide, aluminum s-butoxide bis(ethylacetoacetate), aluminum t-butoxide, aluminum di-s-butoxide ethylacetoacetate, aluminum diisopropoxide ethylacetoacetate, aluminum ethoxide, aluminum ethoxyethoxyethoxide, aluminum hexafluoropentanedionate, aluminum isopropoxide, aluminum 9-octadecenylacetoacetate diisopropoxide, aluminum 2,4-pentanedionate, aluminum 2,2,6,6-tetramethyl-3,5-heptanedionate, and mixtures thereof.
Claim 8
Dependent Claim
61 words
The process of claim 2 , wherein the second metal compound is selected from the group consisting of niobium V n-butoxide, niobium V ethoxide, niobium V methoxide, niobium V tetraethoxide pentanedionate, niobium V isopropoxide acetylacetonate, niobium V trifluoroethoxide, tantalum V n-butoxide, tantalum V ethoxide, tantalum V methoxide, tantalum V tetraethoxide pentanedionate, tantalum V isopropoxide acetylacetonate, tantalum V trifluoroethoxide, and mixtures thereof.
Claim 9
Dependent Claim
19 words
The process of claim 2 , wherein the first and second metal compounds are combined in a hydrophobic solvent.
Claim 10
Dependent Claim
17 words
The process of claim 2 , wherein the first and second metal compounds are combined in benzene.
Claim 11
Dependent Claim
21 words
The process of claim 2 , wherein the first and second metal compounds are combined in the presence of UV light.
Claim 12
Dependent Claim
18 words
The process of claim 2 , wherein the first and second metal compounds are combined at 80° C.
Claim 13
Dependent Claim
28 words
The process of claim 2 , wherein the precursor is hydrolyzed by a mixture of water and at least one solvent that dissolves both water and hydrophobic solvents.
Claim 14
Dependent Claim
35 words
The process of claim 2 , wherein the precursor is hydrolyzed by a mixture of water and at least one solvent that dissolves both water and hydrophobic solvents selected from alcohols, ketones and aprotic solvents.
Claim 15
Dependent Claim
32 words
The process of claim 2 , wherein the precursor is hydrolyzed with a mixture of 50 wt. % acetone, 20 wt. % dimethylformamide, 20 wt. % isopropanol and 10 wt. % water.
References Cited (Backward Citations)
US4830879A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 2004-11-05 | 2005-05-07 | 2005-11-06 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2008-11-05 | 2009-05-07 | 2009-11-06 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2012-11-05 | 2013-05-07 | 2013-11-06 | $7700.00 | Window Closed / Lapsed |