Claims Analysis
Total Claims: 15
Claim 1
Independent Claim
253 words
A process for producing broadband antireflective coatings comprising: a. preparing a plurality of solutions of an alkoxide precursor material by reacting an alkoxide or alkoxide mixture with water with or without a catalyst at conditions adapted to produce a series of solutions containing particles of a different size in each solution so that the series of solutions has one solution of a smallest size and one or more solutions each having increasing sizes, wherein the alkoxide is represented by the general formula M(OR) x where M is a metal atom, R is an alkyl group, having from one to five carbon atoms, and x is the valency of the metal atom, and whereby the plurality of solutions are aged or have increased solution pH so as to obtain solutions having different particle size ranges and the alkoxide or alkoxide mixture is selected from the group consisting of the alkoxides of silicon, aluminum, titanium, tantalum, niobium, or zirconium; b. providing a substrate and depositing and drying one or more layers of a first coating over the substrate from the solution having the smallest particle size; c. depositing and drying one or more additional coatings each having one or more layers over the coating obtained in step B. from solutions having increasing particle sizes; and d. thermally treating the plurality of deposited coatings from the above steps to obtain a consolidated antireflective coating with a porous structure, wherein the thermal treatment is below the temperature at which the porous structure of the coating will collapse.
Claim 2
Dependent Claim
253 words
A process for producing broadband antireflective coatings comprising: a. preparing a plurality of solutions of an alkoxide precursor material by reacting an alkoxide or alkoxide mixture with water with or without a catalyst at conditions adapted to produce a series of solutions containing particles of a different size in each solution so that the series of solutions has one solution of a smallest size and one or more solutions each having increasing sizes, wherein the alkoxide is represented by the general formula M(OR) x where M is a metal atom, R is an alkyl group, having from one to five carbon atoms, and x is the valency of the metal atom, and whereby the plurality of solutions are aged or have increased solution pH so as to obtain solutions having different particle size ranges and the alkoxide or alkoxide mixture is selected from the group consisting of the alkoxides of silicon, aluminum, titanium, tantalum, niobium, or zirconium; b. providing a substrate and depositing and drying one or more layers of a first coating over the substrate from the solution having the smallest particle size; c. depositing and drying one or more additional coatings each having one or more layers over the coating obtained in step B. from solutions having increasing particle sizes; and d. thermally treating the plurality of deposited coatings from the above steps to obtain a consolidated antireflective coating with a porous structure, wherein the thermal treatment is below the temperature at which the porous structure of the coating will collapse.
Claim 3
Dependent Claim
28 words
The process of claim 1 whereby the plurality of solutions in step a. are prepared sequentially and aged so as to obtain solutions having different particle size ranges.
Claim 4
Dependent Claim
28 words
The process of claim 1 whereby the plurality of solutions in step a. are prepared by use of catalysts adapted to obtain solutions having different particle size ranges.
Claim 5
Dependent Claim
23 words
The process of claim 1 whereby the step of thermally treating the deposited coating further comprises treating at a temperature below 900° C.
Claim 6
Dependent Claim
32 words
The process of claim 1 whereby a dopant alkoxide is added to step a. that is selected form the group consisting of the alkoxides of boron, phosphorous, germanium and a mixture thereof.
Claim 7
Dependent Claim
247 words
A process for producing a broadband antireflective coating comprising: a. preparing a plurality of coating solutions by the steps of mixing; 1. an alkoxide represented by the general formula M(OR) x where M is a metal atom selected form the group consisting of silicon, aluminum, titanium, tantalum, niobium, zirconium and a mixture thereof, where R is an alkyl group having from one to five carbon atoms and x is the valency of the metal atom; 2. water, H 2 O; 3. an organic solvent selected form the group consisting of alcohols; R 1 -OH, and ketones ##STR3## or mixtures thereof, where R 1 is an alkyl group having from one to five carbon atoms and R 2 and R 3 are alkyl groups having from one to two carbon atoms, whereby the plurality of solutions in step a. are aged or have increased solution pH so as to obtain solutions having different particle size ranges; b. providing a substitute adapted for coating by the prepared solutions; c. depositing and drying one or more layers of the solution having the smallest particle size onto the substrate to form a gel coating; d. depositing and drying one or more gel coatings each having one or more layers over the gel coating of step c.; and e. thermally treating the deposited coatings to obtain a consolidated antireflective coating with a porous structure, wherein the thermal treatment is below the temperature at which the porous structure of the coating will collapse.
Claim 8
Dependent Claim
247 words
A process for producing a broadband antireflective coating comprising: a. preparing a plurality of coating solutions by the steps of mixing; 1. an alkoxide represented by the general formula M(OR) x where M is a metal atom selected form the group consisting of silicon, aluminum, titanium, tantalum, niobium, zirconium and a mixture thereof, where R is an alkyl group having from one to five carbon atoms and x is the valency of the metal atom; 2. water, H 2 O; 3. an organic solvent selected form the group consisting of alcohols; R 1 -OH, and ketones ##STR3## or mixtures thereof, where R 1 is an alkyl group having from one to five carbon atoms and R 2 and R 3 are alkyl groups having from one to two carbon atoms, whereby the plurality of solutions in step a. are aged or have increased solution pH so as to obtain solutions having different particle size ranges; b. providing a substitute adapted for coating by the prepared solutions; c. depositing and drying one or more layers of the solution having the smallest particle size onto the substrate to form a gel coating; d. depositing and drying one or more gel coatings each having one or more layers over the gel coating of step c.; and e. thermally treating the deposited coatings to obtain a consolidated antireflective coating with a porous structure, wherein the thermal treatment is below the temperature at which the porous structure of the coating will collapse.
Claim 9
Dependent Claim
28 words
The process of claim 6 whereby the plurality of solutions in step a. are prepared sequentially and aged so as to obtain solutions having different particle size ranges.
Claim 10
Dependent Claim
28 words
The process of claim 6 whereby the plurality of solutions in step a. are prepared by use of catalysts adapted to obtain solutions having different particle size ranges.
Claim 11
Dependent Claim
23 words
The process of claim 6 whereby the step of thermally treating the deposited coating further comprises treating at a temperature below 900° C.
Claim 12
Dependent Claim
65 words
The process of claim 6 whereby a dopant alkoxide having the general formula Md(OR) x where M d is a dopant atom selected from the group consisting of boron, phosphorous, germanium, and a mixture thereof, wherein R is an alkyl group having from one to five carbon atoms and x is the valency of the dopant atom, is mixed with the alkoxide of step a.1.
Claim 13
Dependent Claim
13 words
The method of claim 3 or 8 whereby an acid catalyst is used.
Claim 14
Dependent Claim
13 words
The method of claim 3 or 8 whereby a basic catalyst is used.
Claim 15
Dependent Claim
25 words
The method of claim 3 or 8 whereby an acid catalyst is used in one set of solutions and a basic catalyst in another set.