Patent US6300780B1 successfully refreshed from Google Patents.
US6300780B1
Expired / Lapsed
US
⏱️ 0.0 years remaining
High density integrated circuit apparatus, test probe and methods of use thereof
Assignee: Tokyo Electron Ltd
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Filing: 1998-06-01
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Granted: 2001-10-09
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Expires: 2018-06-01
Abstract
Abstract A high density test probe for testing a high density and high performance integrated circuits in wafer form or as discrete chips. The test probe is formed from a dense array of elongated electrical conductors which are embedded in an compliant or high modulus elastomeric material. A standard packaging substrate, such as a ceramic integrated circuit chip packaging substrate is used to provide a space transformer. Wires are bonded to an array of contact pads on the surface of the space transformer. The space transfer formed from a multilayer integrated circuit chip packaging substrate. The wires are as dense as the contact location array. A mold is disposed surrounding the array of outwardly projecting wires. A liquid elastomer is disposed in the mold to fill the spaces between the wires. The elastomer is cured and the mold is removed, leaving an array of wires disposed in the elastomer and in electrical contact with the space transformer. The space transformer can have an array of pins which are on the opposite surface of the space transformer opposite to that on which the elongated conductors are bonded. The pins are inserted into a socket on a second space transformer, such as a printed circuit board to form a probe assembly. Alternatively, an interposer electrical connector can be disposed between the first and second space transformer.
Inventors
- 👤 Brian Samuel Beaman
- 👤 Keith Edward Fogel
- 👤 Paul Alfred Lauro
- 👤 Maurice Heathcote Norcott
- 👤 Da-Yuan Shih
- 👤 George Frederick Walker
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-03 18:22
CPC Classifications
G; G01; G01R; G01R1/00; G01R1/02; G01R1/06; G01R1/067; G01R1/073; G01R1/07307; G01R1/07364; G01R1/07371; G01R1/07314; G01R1/07342; G01R3/00; G01R31/00; G01R31/28; G01R31/2851; G01R31/2886; H; H10; H10W; H10W70/00; H10W70/60; H10W70/611; H10W70/62; H10W70/63; H10W70/635; H10W90/00; G01R1/06711; G01R1/06733; G01R1/0675; G01R1/07378; H10W72/00; H10W72/01; H10W72/012; H10W72/01221; H10W72/01225; H10W72/071; H10W72/0711; H10W72/07141; H10W72/072; H10W72/07251; H10W72/075; H10W72/07531; H10W72/07532; H10W72/07533; H10W72/07535; H10W72/20; H10W72/251; H10W72/50; H10W72/551; H10W72/552; H10W72/5522; H10W72/5524; H10W72/5525; H10W74/00; H10W90/701; H10W90/751; H10W90/754; Y; Y10; Y10S; Y10S29/00; Y10S29/029; Y10T; Y10T29/00; Y10T29/49; Y10T29/49002; Y10T29/49004; Y10T29/49117; Y10T29/49124; Y10T29/49126; Y10T29/49147; Y10T29/49149; Y10T29/49155; Y10T29/49158; Y10T29/49162; Y10T29/49174; Y10T29/49181; Y10T29/49185; Y10T29/49192; Y10T29/53; Y10T29/5313; Y10T29/53174
Claims Analysis
Total Claims: 27
Claim 1
Independent Claim
140 words
An electronic device probe for probing an electronic device comprising: a first space transformer having a first surface; said first surface having a first plurality of contact locations; a first plurality of elongated electrical conductors each having a protuberance at one end thereof; said protuberance of each of said plurality of elongated conductors is bonded to one of said plurality of contact locations; each of said plurality of elongated conductors extends outwardly away form said surface to form an array of elongated conductors; said array of elongated conductors being embedded in a material; said elongated conductors having exposed probe tip ends at an exposed surface of said material; and said first space transformer has a second surface with a second plurality of contact locations thereon and said second space transformer has a surface with a plurality of third contact locations.
Claim 2
Dependent Claim
140 words
An electronic device probe for probing an electronic device comprising: a first space transformer having a first surface; said first surface having a first plurality of contact locations; a first plurality of elongated electrical conductors each having a protuberance at one end thereof; said protuberance of each of said plurality of elongated conductors is bonded to one of said plurality of contact locations; each of said plurality of elongated conductors extends outwardly away form said surface to form an array of elongated conductors; said array of elongated conductors being embedded in a material; said elongated conductors having exposed probe tip ends at an exposed surface of said material; and said first space transformer has a second surface with a second plurality of contact locations thereon and said second space transformer has a surface with a plurality of third contact locations.
Claim 3
Dependent Claim
33 words
An electronic device probe according to claim 1 , further including an electrical interconnections means for electrically interconnecting said second plurality of electrical contact locations to said third plurality of electrical contact locations.
Claim 4
Dependent Claim
48 words
An electronic device probe according to claim 2 , wherein said electrical interconnection means is a plurality of pins electrically connected to said second plurality of contact locations said pins are adapted for insertion into a socket which is electrically interconnected with said third plurality of contact locations.
Claim 5
Dependent Claim
90 words
An electronic device probe according to claim 2 , wherein said electrical interconnection means comprises a body of elastomeric material having a fourth side and fifth side, a plurality of elongated conductors extending from said fourth side to said fifth side, each of said elongated conductors has a first end at said fourth side and a second end at said fifth side, said first ends are in electrical contact with said third plurality of contact locations and said second ends are in contact with said second plurality of contact locations.
Claim 6
Dependent Claim
32 words
An electronic device probe according to claim 2 , further including a holding means for holding said first space transformer in a fixed spatial relationship with respect to said second space transformer.
Claim 7
Dependent Claim
54 words
An electronic device probe according to claim 5 , wherein said holding means comprises an elongated member having a first end and second, said elongated member is fixedly attached to said second space transformer at said first end, there being a gripping means at said second end for gripping onto said first space transformer.
Claim 8
Dependent Claim
29 words
An electronic device probe according to claim 5 , further including a means for disposing said probe tip ends in electrical contact with contact locations on said electronic device.
Claim 9
Dependent Claim
27 words
An electronic device probe according to claim 2 , wherein said electrical interconnection means is an interposer between said first space transformer and said second space transformer.
Claim 10
Dependent Claim
124 words
An electronic device probe for probing an electronic device comprising: a first space transformer having a first surface; said first surface having a first plurality of contact locations; a first plurality of elongated electrical conductors each having a protuberance at one end thereof; said protuberance of each of said plurality conductors is bonded to one of said plurality of control locations; each of said plurality of elongated conductors extends outwardly away form said surface to form an array of elongated conductors; said array of elongated conductors being embedded in a material; said elongated conductors having exposed probe tip ends at an exposed surface of said material; and means for disposing said probe tip ends in electrical contact with contact locations on said electronic device.
Claim 11
Dependent Claim
124 words
An electronic device probe for probing an electronic device comprising: a first space transformer having a first surface; said first surface having a first plurality of contact locations; a first plurality of elongated electrical conductors each having a protuberance at one end thereof; said protuberance of each of said plurality conductors is bonded to one of said plurality of control locations; each of said plurality of elongated conductors extends outwardly away form said surface to form an array of elongated conductors; said array of elongated conductors being embedded in a material; said elongated conductors having exposed probe tip ends at an exposed surface of said material; and means for disposing said probe tip ends in electrical contact with contact locations on said electronic device.
Claim 12
Dependent Claim
125 words
An electronic device probe for probing an electronic device comprising: a first space transformer having a first surface; said first surface having a first plurality of contact locations; a first plurality of elongated electrical conductors each having a protuberance at one end thereof; said protuberance of each of said plurality of elongated conductors is bonded to one of said plurality of contact locations; each of said plurality of elongated conductors extends outwardly away form said surface to form an array of elongated conductors; said array of elongated conductors being embedded in an elastomeric material; said elongated conductors having exposed probe tip ends at an exposed surface of said material; and said elastomeric material has a depression surrounding at least one of said probe tip ends.
Claim 13
Dependent Claim
125 words
An electronic device probe for probing an electronic device comprising: a first space transformer having a first surface; said first surface having a first plurality of contact locations; a first plurality of elongated electrical conductors each having a protuberance at one end thereof; said protuberance of each of said plurality of elongated conductors is bonded to one of said plurality of contact locations; each of said plurality of elongated conductors extends outwardly away form said surface to form an array of elongated conductors; said array of elongated conductors being embedded in an elastomeric material; said elongated conductors having exposed probe tip ends at an exposed surface of said material; and said elastomeric material has a depression surrounding at least one of said probe tip ends.
Claim 14
Dependent Claim
121 words
An electronic device probe for probing an electronic device comprising: a first space transformer having a first surface; said fist surface having a first plurality of contact locations; a first plurality of elongated electrical conductors each having a protuberance at one end thereof; said protuberance of each of said plurality of elongated conductors is bonded one of said plurality of contact locations; each of said plurality of elongated conductors extends outwardly away form said surface to form an array of elongated conductors; said array of elongated conductors being embedded in electronic material; said elongated conductors having exposed probe tip ends at an exposed surface of said material; and said probe tip ends extend beyond said exposed surface of said elastomeric material.
Claim 15
Dependent Claim
121 words
An electronic device probe for probing an electronic device comprising: a first space transformer having a first surface; said fist surface having a first plurality of contact locations; a first plurality of elongated electrical conductors each having a protuberance at one end thereof; said protuberance of each of said plurality of elongated conductors is bonded one of said plurality of contact locations; each of said plurality of elongated conductors extends outwardly away form said surface to form an array of elongated conductors; said array of elongated conductors being embedded in electronic material; said elongated conductors having exposed probe tip ends at an exposed surface of said material; and said probe tip ends extend beyond said exposed surface of said elastomeric material.
Claim 16
Dependent Claim
119 words
An electronic device probe for probing an electronic device comprising: a first space transformer having a first surface; said first surface having a first plurality of contact locations; a first plurality of elongated electrical conductors each having a protuberance at one end thereof; said protuberance of each of said plurality of elongated conductors is bonded to one of said plurality of contact locations; each of said plurality of elongated conductors extends outwardly away form said surface to form an array of elongated conductors; said array of elongated conductors being embedded in an material; said elongated conductors having exposed probe tip ends at an exposed surface of said material; and said probe is part of an electronic device test tool.
Claim 17
Dependent Claim
119 words
An electronic device probe for probing an electronic device comprising: a first space transformer having a first surface; said first surface having a first plurality of contact locations; a first plurality of elongated electrical conductors each having a protuberance at one end thereof; said protuberance of each of said plurality of elongated conductors is bonded to one of said plurality of contact locations; each of said plurality of elongated conductors extends outwardly away form said surface to form an array of elongated conductors; said array of elongated conductors being embedded in an material; said elongated conductors having exposed probe tip ends at an exposed surface of said material; and said probe is part of an electronic device test tool.
Claim 18
Dependent Claim
132 words
An electronic device probe for probing an electronic device comprising: a first space transformer having a first surface; said first surface having a first plurality of contact locations; a first plurality of elongated electrical conductors each having a protuberance at one end thereof; said protuberance of each of said plurality of elongated conductors is bonded to one of said plurality of contact locations; each of said plurality of elongated conductors extends outwardly away from said surface to form an array of elongated conductors; said array of elongated conductors being embedded in a material; said elongated conductors having exposed probe tip ends at an exposed surface of said material; and said electronic device is selected from the group consisting of a semiconductor chip and a semiconductor chip packaging substrate and a semiconductor wafer.
Claim 19
Dependent Claim
132 words
An electronic device probe for probing an electronic device comprising: a first space transformer having a first surface; said first surface having a first plurality of contact locations; a first plurality of elongated electrical conductors each having a protuberance at one end thereof; said protuberance of each of said plurality of elongated conductors is bonded to one of said plurality of contact locations; each of said plurality of elongated conductors extends outwardly away from said surface to form an array of elongated conductors; said array of elongated conductors being embedded in a material; said elongated conductors having exposed probe tip ends at an exposed surface of said material; and said electronic device is selected from the group consisting of a semiconductor chip and a semiconductor chip packaging substrate and a semiconductor wafer.
Claim 20
Dependent Claim
132 words
An electronic device probe for probing an electronic device comprising: a first space transformer having a first surface; said first surface having a first plurality of contact locations; a first plurality of elongated electrical conductors each having a protuberance at one end thereof; said protuberance of each of said plurality of elongated conductors is bonded to one of said plurality of contact locations; each of said plurality of elongated conductors extends outwardly away form said surface to form an array of elongated conductors; said array of elongated conductors being embedded in a material; said elongated conductors having exposed probe tip ends at an exposed surface of said material; and said protuberance is selected from the group consisting of a wire bond ball bond, a solder bump bond and a laser weld bond.
Claim 21
Dependent Claim
132 words
An electronic device probe for probing an electronic device comprising: a first space transformer having a first surface; said first surface having a first plurality of contact locations; a first plurality of elongated electrical conductors each having a protuberance at one end thereof; said protuberance of each of said plurality of elongated conductors is bonded to one of said plurality of contact locations; each of said plurality of elongated conductors extends outwardly away form said surface to form an array of elongated conductors; said array of elongated conductors being embedded in a material; said elongated conductors having exposed probe tip ends at an exposed surface of said material; and said protuberance is selected from the group consisting of a wire bond ball bond, a solder bump bond and a laser weld bond.
Claim 22
Dependent Claim
228 words
An electronic device probe for probing an electronic device comprising: a first space transformer having a surface; said surface having a first plurality of contact locations; a plurality of elongated electrical conductors each having a protuberance at one end thereof; said each of said protuberance of each of said plurality of elongated conductors is bonded to one of said plurality of contact locations; each of said plurality of elongated conductors extends outwardly away from said surface to form an array of elongated conductors ending in probe up ends; said array of elongated conductors being embedded in an elastomeric material; said elongated conductors being embedded in an elastomeric material; a second space transformer in electrical connection with said first space transformer; said first space transformer has a second surface with a second plurality of contact locations thereon and said second space transformer has a surface with a plurality of third contact thereon; an electrical interconnection means for electrically interconnecting said second plurality of electrical contact locations to said third plurality of electrical contact locations; a holding means for holding said first space transformer in a fixed spatial relationship with respect to said second space transformer; a means for disposing said probe tip ends in electrical contact with contact location on said electronic device; and said elastomeric material has a depression surrounding at least one of said probe tip ends.
Claim 23
Dependent Claim
228 words
An electronic device probe for probing an electronic device comprising: a first space transformer having a surface; said surface having a first plurality of contact locations; a plurality of elongated electrical conductors each having a protuberance at one end thereof; said each of said protuberance of each of said plurality of elongated conductors is bonded to one of said plurality of contact locations; each of said plurality of elongated conductors extends outwardly away from said surface to form an array of elongated conductors ending in probe up ends; said array of elongated conductors being embedded in an elastomeric material; said elongated conductors being embedded in an elastomeric material; a second space transformer in electrical connection with said first space transformer; said first space transformer has a second surface with a second plurality of contact locations thereon and said second space transformer has a surface with a plurality of third contact thereon; an electrical interconnection means for electrically interconnecting said second plurality of electrical contact locations to said third plurality of electrical contact locations; a holding means for holding said first space transformer in a fixed spatial relationship with respect to said second space transformer; a means for disposing said probe tip ends in electrical contact with contact location on said electronic device; and said elastomeric material has a depression surrounding at least one of said probe tip ends.
Claim 24
Dependent Claim
229 words
An electronic device probe for probing an electronic device comprising: a first space transformer having a surface; said surface having a first plurality of contact locations; a plurality of elongated electrical conductors each having a protuberance at one end thereof; said each of said protuberance of each of said plurality of elongated conductors is bonded to one of said plurality of contact locations; each of said plurality of elongated conductors extends outwardly away from said surface to form an array of elongated conductors ending in prior tip ends; said array of elongated being embedded in an elastomeric material; said elongated conductors being embedded in an elastomeric material; a second space transformer in electrical connection with said first space transformer; said first space transformer has a second surface with a second plurality of contact locations thereon and said second space transformer has a surface with a plurality of third contact thereon; an electrical interconnection means for electrically interconnecting said second plurality of electrical contact locations to said third plurality of electrical contact locations; a holding means for holding said first space transformer in a fixed spatial relationship with respect to said second space transformer; a means for disposing said probe tip ends in electrical contact with contact location on said electronic device; and said electrical interconnection means is an interposer between said first space transformer and said second space transformer.
Claim 25
Dependent Claim
229 words
An electronic device probe for probing an electronic device comprising: a first space transformer having a surface; said surface having a first plurality of contact locations; a plurality of elongated electrical conductors each having a protuberance at one end thereof; said each of said protuberance of each of said plurality of elongated conductors is bonded to one of said plurality of contact locations; each of said plurality of elongated conductors extends outwardly away from said surface to form an array of elongated conductors ending in prior tip ends; said array of elongated being embedded in an elastomeric material; said elongated conductors being embedded in an elastomeric material; a second space transformer in electrical connection with said first space transformer; said first space transformer has a second surface with a second plurality of contact locations thereon and said second space transformer has a surface with a plurality of third contact thereon; an electrical interconnection means for electrically interconnecting said second plurality of electrical contact locations to said third plurality of electrical contact locations; a holding means for holding said first space transformer in a fixed spatial relationship with respect to said second space transformer; a means for disposing said probe tip ends in electrical contact with contact location on said electronic device; and said electrical interconnection means is an interposer between said first space transformer and said second space transformer.
Claim 26
Dependent Claim
136 words
An electronic device probe for probing an electronic device comprising: a first space transformer having a first surface; said first surface having a first plurality of contact locations; a first plurality of elongated electrical conductors each having a protuberance at one end thereof; said protuberance of said of said plurality of elongated conductors is bonded to one of said plurality of contact locations; each of said plurality of elongated conductors extends outwardly away form said surface to form an array of elongated conductors; said array of elongated conductors being embedded in a material; said elongated conductors having exposed probe tip ends at an exposed surface of said material; and said electronic device is selected from the group consisting of an integrated circuit chip, a wafer of a plurality of integrated circuit chips and a circuitized substrate.
Claim 27
Dependent Claim
136 words
An electronic device probe for probing an electronic device comprising: a first space transformer having a first surface; said first surface having a first plurality of contact locations; a first plurality of elongated electrical conductors each having a protuberance at one end thereof; said protuberance of said of said plurality of elongated conductors is bonded to one of said plurality of contact locations; each of said plurality of elongated conductors extends outwardly away form said surface to form an array of elongated conductors; said array of elongated conductors being embedded in a material; said elongated conductors having exposed probe tip ends at an exposed surface of said material; and said electronic device is selected from the group consisting of an integrated circuit chip, a wafer of a plurality of integrated circuit chips and a circuitized substrate.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 2004-10-08 | 2005-04-09 | 2005-10-09 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2008-10-08 | 2009-04-09 | 2009-10-09 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2012-10-08 | 2013-04-09 | 2013-10-09 | $7700.00 | Window Closed / Lapsed |