US6284587B1
Expired / Lapsed
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Fabricating method for semiconductor device
Assignee: Lapis Semiconductor Co Ltd
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Filing: 1998-05-19
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Granted: 2001-09-04
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Expires: 2018-05-19
Abstract
Abstract In the fabrication of capacitors, a TiO 2 film is formed from a TiN film by means of heat-treatment within an atmosphere which does not contain oxygen. This serves to prevent the polysilicon which forms the bottom electrode from being oxidized during heat-treatment. Thus, once the bottom electrode has been formed on the silicon wafer, a TiN film and RuO 2 film are formed, and the silicon wafer is heat-treated in an atmosphere which does not contain oxygen. In this manner, a dielectric film that is a TiO 2 film and a top electrode that is a ruthenium film are obtained.
Inventors
- 👤 Satoshi Yamauchi
- 👤 Shinobu Takehiro
- 👤 Masaki Yoshimaru
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-09 04:42
CPC Classifications
H; H10; H10P; H10P14/00; H10P14/60; H10P14/65; H10P14/6516; H10P14/6518; H10P14/6519; H10P14/6522; H10P14/63; H10P14/6302; H10P14/6304; H10P14/6314; H10B; H10B12/00; H10B12/01; H10B12/02; H10B12/03; H10B12/033; H10B12/0335; H10D; H10D1/00; H10D1/60; H10D1/68; H10D1/692; H10D1/694; H10D1/696; H10P14/6544; H10P14/69; H10P14/692; H10P14/6938; H10P14/6939; H10P14/69392; H10P14/69393; H10P14/69394; H10P14/69395; H10P14/69398; H10W; H10W20/00; H10W20/01; H10W20/031; H10W20/064; H10W20/065
Claims Analysis
Total Claims: 31
Claim 1
Independent Claim
82 words
A fabrication method for a semiconductor device, comprising: forming a laminated structure, having at least a first film for use in forming an oxidized dielectric film and which contains an oxidizable substance for the purpose of forming an oxidized dielectric film, and having a second film for use in supplying oxygen to the first film, and supplying oxygen from the second film to the first film by virtue of heat-treatment of the laminated structure within an atmosphere which does not contain oxygen.
Claim 2
Dependent Claim
82 words
A fabrication method for a semiconductor device, comprising: forming a laminated structure, having at least a first film for use in forming an oxidized dielectric film and which contains an oxidizable substance for the purpose of forming an oxidized dielectric film, and having a second film for use in supplying oxygen to the first film, and supplying oxygen from the second film to the first film by virtue of heat-treatment of the laminated structure within an atmosphere which does not contain oxygen.
Claim 3
Dependent Claim
31 words
The fabrication method for a semiconductor device according to claim 1 , wherein said supplying oxygen comprises: forming the oxidized dielectric film by nitriding the oxidizable substance in the first film.
Claim 4
Dependent Claim
54 words
The fabrication method for a semiconductor device according to claim 1 , wherein the first film has a same composition as the oxidized dielectric film, said supplying oxygen comprising compensating an oxygen deficit in the first film by virtue of the heat-treatment of the laminated structure within the atmosphere which does not contain oxygen.
Claim 5
Dependent Claim
29 words
The fabrication method for a semiconductor device according to claim 1 , wherein the second film constitutes a part of, or all of, a top electrode of a capacitor.
Claim 6
Dependent Claim
38 words
The fabrication method for a semiconductor device according to claim 4 , wherein the top electrode is further provided with a metal film for activating the oxygen which is supplied from the second film to the first film.
Claim 7
Dependent Claim
28 words
The fabrication method for a semiconductor device according to claim 1 , wherein the second film constitutes part of, or all of, a bottom electrode of a capacitor.
Claim 8
Dependent Claim
63 words
The fabrication method for a semiconductor device according to claim 6 , wherein the bottom electrode is provided with an interlayer wiring film formed within a through hole, a barrier layer formed on the interlayer wiring film, a metal film that is compression stressed formed on the barrier layer, and the second film for use in supplying oxygen formed on the metal film.
Claim 9
Dependent Claim
77 words
The fabrication method for a semiconductor device according to claim 6 , wherein the bottom electrode is provided with an interlayer wiring film formed within a through-hole, a barrier layer formed on the interlayer wiring film, a first metal film that is compression stressed formed on the barrier layer, the second film for use in supplying oxygen formed on the first metal film, and a second metal film this is tensile stressed formed on the second film.
Claim 10
Dependent Claim
65 words
The fabrication method for a semiconductor device according to claim 1 , wherein said forming a laminated structure comprises: forming the second film which constitutes part of, or all of, a bottom electrode of a capacitor; and forming a third film for use in supplying oxygen to the first film, the third film constitutes part of, or all of, a top electrode of the capacitor.
Claim 11
Dependent Claim
89 words
The fabrication method for a semiconductor device according to claim 9 , wherein the bottom electrode is provided with an interlayer wiring film formed within a through hole, a barrier layer formed on the interlayer wiring film, a first metal film that is compression stressed formed on the barrier layer, and the second film formed on the first metal film, and the top electrode is provided with the third film formed on the first film, and a second metal film that is compression stressed formed on the third film.
Claim 12
Dependent Claim
35 words
The fabrication method for a semiconductor device according to claim 10 , wherein the bottom electrode is further provided with a third metal film for activating the oxygen which is supplied from the second film.
Claim 13
Dependent Claim
35 words
The fabrication method for a semiconductor device according to claim 10 , wherein the top electrode is further provided with a third metal film for activating the oxygen which is supplied from the second film.
Claim 14
Dependent Claim
34 words
The fabrication method for a semiconductor device according to claim 2 , wherein the first film is a titanium nitride film, a tantalum nitride film, a zirconium nitride film or a hafnium nitride film.
Claim 15
Dependent Claim
27 words
The fabrication method for a semiconductor device according to claim 3 , wherein the first film is a tantalum oxide film or a lead zirconate titanate film.
Claim 16
Dependent Claim
52 words
The fabrication method for a semiconductor device according to claim 3 , wherein the first film is an amorphous barium-strontium titanate film or a lead zirconate titanate film, and the oxidized dielectric film is a barium-strontium titanate film or a lead zirconate titanate film which has been crystallized during said supplying oxygen.
Claim 17
Dependent Claim
42 words
The fabrication method for a semiconductor device according to claim 1 , wherein the second film is a ruthenium oxide film, an iridium oxide film, or a film consisting of a mixture of a ruthenium oxide film and an iridium oxide film.
Claim 18
Dependent Claim
24 words
The fabrication method for a semiconductor device according to claim 5 , wherein the metal film is formed of either ruthenium, iridium or platinum.
Claim 19
Dependent Claim
27 words
The fabrication method for a semiconductor device according to claim 8 , wherein the first and second metal films are formed of either ruthenium, iridium or platinum.
Claim 20
Dependent Claim
27 words
The fabrication method for a semiconductor device according to claim 10 , wherein the first and second metal films are formed of either ruthenium, iridium or platinum.
Claim 21
Independent Claim
57 words
A method of fabricating a semiconductor device, comprising: forming a first electrode on a semiconductor substrate; forming a first film which includes an oxidizable substance, on the first electrode; forming a second film which includes oxygen, on the first film; and supplying oxygen from the second film to the first film by heating in an inert gas.
Claim 22
Independent Claim
57 words
A method of fabricating a semiconductor device, comprising: forming a first electrode on a semiconductor substrate; forming a first film which includes an oxidizable substance, on the first electrode; forming a second film which includes oxygen, on the first film; and supplying oxygen from the second film to the first film by heating in an inert gas.
Claim 23
Dependent Claim
41 words
The method of fabricating a semiconductor device according to claim 20 , further comprising forming a first metal film on the first film which activates the oxygen of the second film, the second film being formed on the first metal film.
Claim 24
Dependent Claim
75 words
The method of fabricating a semiconductor device according to claim 20 , wherein said forming a first electrode includes: forming a barrier film on the semiconductor substrate; forming a metal film on the barrier film which prevents oxidation of the barrier film; and forming a third film which includes oxygen, on the metal film, the first film being oxidized during said supplying oxygen by the oxygen included in the second film and the third film.
Claim 25
Dependent Claim
27 words
The method of fabricating a semiconductor device according to claim 22 , further comprising forming on the third film a second metal film which activates the oxygen.
Claim 26
Dependent Claim
31 words
The method of fabricating a semiconductor device according to claim 22 , further comprising forming a second metal film on the first film which activates the oxygen of the second film.
Claim 27
Independent Claim
41 words
A method of fabricating a semiconductor device, comprising; forming a laminated structure which includes a first film, and a second film comprising oxygen; and supplying the oxygen from the second film to the first film by heating within an inert gas.
Claim 28
Independent Claim
41 words
A method of fabricating a semiconductor device, comprising; forming a laminated structure which includes a first film, and a second film comprising oxygen; and supplying the oxygen from the second film to the first film by heating within an inert gas.
Claim 29
Independent Claim
56 words
A method of fabricating a semiconductor device, comprising; forming a laminate structure which includes a first film on a semiconductor substrate and a second film, the first film includes an oxidizable substructure, and the second film includes oxygen; and supplying the oxygen from the second film to the first film by heating within an inert gas.
Claim 30
Independent Claim
56 words
A method of fabricating a semiconductor device, comprising; forming a laminate structure which includes a first film on a semiconductor substrate and a second film, the first film includes an oxidizable substructure, and the second film includes oxygen; and supplying the oxygen from the second film to the first film by heating within an inert gas.
Claim 31
Dependent Claim
31 words
The method of fabricating a semiconductor device according to claim 26 , further comprising forming a first metal layer which activates the oxygen, between the first film and the second film.
References Cited (Backward Citations)
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