US6277669B1
Expired / Lapsed
US
⏱️ 0.0 years remaining
Wafer level packaging method and packages formed
Assignee: Industrial Technology Research Institute
•
Filing: 1999-09-15
•
Granted: 2001-08-21
•
Expires: 2019-09-15
Abstract
Abstract A method for fabricating a wafer level package and packages formed are disclosed. In the method, an elastomeric material layer is first deposited on top of a passivation layer by a printing, coating or laminating method to form a plurality of isolated islands. The islands may have a thickness of less than 100 μm. Metal traces for I/O redistribution are then formed to connect the isolated islands with bond pads provided on the surface of the wafer such that one bond pad is connected electrically to one isolated island. On top of the metal trace is then deposited an organic material for insulation with the metal trace on top of the isolated islands exposed. After an UBM layer is formed on top of the metal traces that are exposed on the isolated islands, solder balls of suitable size may be planted by a plating technique, a printing technique or a pick and place technique to complete the wafer level package.
Inventors
- 👤 Ling-Chen Kung
- 👤 Jyh-Rong Lin
- 👤 Kuo-Chuan Chen
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-09 18:17
CPC Classifications
H; H10; H10W; H10W72/00; H10W72/01; H10W72/012; H10W74/00; H10W74/40; H10W74/47; H10W42/00; H10W42/121; H10W72/20; H10W74/10; H10W74/131; H10W70/00; H10W70/01; H10W70/05; H10W70/60; H10W70/62; H10W70/65; H10W70/654; H10W70/656; H10W70/67; H10W70/68; H10W72/01251; H10W72/01255; H10W72/019; H10W72/0198; H10W72/251; H10W72/252; H10W72/29; H10W72/90; H10W72/921; H10W72/923; H10W72/951; H10W72/952; H10W72/981; H10W72/983
Claims Analysis
Total Claims: 24
Claim 1
Independent Claim
166 words
A method for fabricating a wafer level package comprising the steps of: providing a pre-processed wafer having at least two bond pads on top, depositing a passivation layer on top of said pre-processed wafer exposing said at least two bond pads, printing an elastomeric material layer on top of said passivation layer forming a plurality of isolated islands, forming I/O redistribution metal traces between said at least two bond pads and said plurality of isolated islands, respectively such that one of said at least two bond pads being electrically connected to one of said plurality of isolated islands, forming an organic material layer on top of said wafer exposing said metal traces formed on top of said plurality of isolated islands, forming an under-bump-metallurgy (UBM) layer on top of said exposed metal traces and said plurality of isolated islands, and planting a plurality of solder balls on top of said UBM layers such that said solder balls are stress buffered by said plurality of isolated islands.
Claim 2
Independent Claim
166 words
A method for fabricating a wafer level package comprising the steps of: providing a pre-processed wafer having at least two bond pads on top, depositing a passivation layer on top of said pre-processed wafer exposing said at least two bond pads, printing an elastomeric material layer on top of said passivation layer forming a plurality of isolated islands, forming I/O redistribution metal traces between said at least two bond pads and said plurality of isolated islands, respectively such that one of said at least two bond pads being electrically connected to one of said plurality of isolated islands, forming an organic material layer on top of said wafer exposing said metal traces formed on top of said plurality of isolated islands, forming an under-bump-metallurgy (UBM) layer on top of said exposed metal traces and said plurality of isolated islands, and planting a plurality of solder balls on top of said UBM layers such that said solder balls are stress buffered by said plurality of isolated islands.
Claim 3
Dependent Claim
27 words
A method for fabricating a wafer level package according to claim 1 further comprising the step of depositing a passivation layer of silicon oxide or silicon nitride.
Claim 4
Dependent Claim
29 words
A method for fabricating a wafer level package according to claim 1 further comprising the step of printing an elastomeric layer of a material having sufficient stress buffering characteristic.
Claim 5
Dependent Claim
35 words
A method for fabricating a wafer level package according to claim 1 further comprising the step of printing an elastomeric layer of a material having a Young's modules not higher than 10 MPa/cm 2 .
Claim 6
Dependent Claim
32 words
A method for fabricating a wafer level package according to claim 1 further comprising the step of forming said plurality of isolated islands to a thickness of not more than 100 μm.
Claim 7
Dependent Claim
33 words
A method for fabricating a wafer level package according to claim 1 further comprising the step of forming said plurality of isolated islands to a thickness of preferably not more than 50 μm.
Claim 8
Dependent Claim
57 words
A method for fabricating a wafer level package according to claim 1 further comprising the steps of: depositing a passivation layer of silicon oxide or silicon nitride on said wafer, depositing a photoresist layer on top of said passivation layer, patterning said photoresist layer, and developing said photoresist layer to expose said at least two bond pads.
Claim 9
Dependent Claim
35 words
A method for fabricating a wafer level package according to claim 1 further comprising the step of printing said elastomeric material layer by a stencil printing, a screen printing, a coating or a laminating technique.
Claim 10
Dependent Claim
27 words
A method for fabricating a wafer level package according to claim 1 further comprising the step of forming said I/O redistribution metal traces by a sputtering technique.
Claim 11
Dependent Claim
27 words
A method for fabricating a wafer level package according to claim 1 further comprising the step of forming said I/O redistribution metal traces by an electroplating technique.
Claim 12
Dependent Claim
31 words
A method for fabricating a wafer level package according to claim 1 further comprising the step of forming said I/O redistribution metal traces in Al, Cu, Al alloys or Cu alloys.
Claim 13
Dependent Claim
71 words
A method for fabricating a wafer level package according to claim 1 further comprising the steps of: depositing a metal layer of Al, Cu, Al alloys or Cu alloys, depositing a photoresist layer on top of said metal layer, patterning said photoresist layer for said I/O redistribution metal traces, and etching said I/O redistribution metal traces and electrically connecting said at least two bond pads with said plurality of isolated islands.
Claim 14
Dependent Claim
45 words
A method for fabricating a wafer level package according to claim 1 , wherein said organic material layer is formed of a photosensitive material such that the layer can be patterned to expose the metal traces formed on top of said plurality of isolated islands.
Claim 15
Dependent Claim
35 words
A method for fabricating a wafer level package according to claim 1 further comprising the step of forming said UBM layer by a method selected from the group consisting of electroless plating, electroplating and sputtering.
Claim 16
Dependent Claim
51 words
A method for fabricating a wafer level package according to claim 1 further comprising the steps of: forming said UBM layer on top of said wafer, forming a photoresist layer on said UBM layer, and patterning said photoresist layer such that said UBM layer only covers said plurality of isolated islands.
Claim 17
Dependent Claim
38 words
A method for fabricating a wafer level package according to claim 1 further comprising the step of planting said plurality of solder balls by a technique selected from the group consisting of plating, printing and pick and place.
Claim 18
Dependent Claim
135 words
A wafer level package comprising: a pre-processed wafer having at least two bond pads on top, a passivation layer on top of said wafer exposing said at least two bond pads, a plurality of isolated islands formed of an elastomeric material on top of said passivation layer, at least two I/O redistribution metal traces each electrically connecting one of said at least two bond pads to one of said plurality of isolated islands, an organic material layer covers and electrically insulates said wafer except metal traces on top of said plurality of isolated islands, an UBM layer on top of said metal traces on said plurality of isolated islands, and a plurality of solder balls each on top of one of said plurality of isolated islands with said metal traces and said UBM layer thereinbetween.
Claim 19
Dependent Claim
135 words
A wafer level package comprising: a pre-processed wafer having at least two bond pads on top, a passivation layer on top of said wafer exposing said at least two bond pads, a plurality of isolated islands formed of an elastomeric material on top of said passivation layer, at least two I/O redistribution metal traces each electrically connecting one of said at least two bond pads to one of said plurality of isolated islands, an organic material layer covers and electrically insulates said wafer except metal traces on top of said plurality of isolated islands, an UBM layer on top of said metal traces on said plurality of isolated islands, and a plurality of solder balls each on top of one of said plurality of isolated islands with said metal traces and said UBM layer thereinbetween.
Claim 20
Dependent Claim
21 words
A wafer level package according to claim 17 , wherein said passivation layer is formed of silicon oxide or silicon nitride.
Claim 21
Dependent Claim
33 words
A wafer level package according to claim 17 , wherein said plurality of isolated islands is formed of an elastomeric material having a Young's modules of not higher than 10 MPa/cm 2 .
Claim 22
Dependent Claim
26 words
A wafer level package according to claim 17 , wherein said plurality of isolated islands is formed to a thickness of not more than 50 μm.
Claim 23
Dependent Claim
25 words
A wafer level package according to claim 17 , wherein said I/O redistribution metal traces are formed of Al, Cu, Al alloys or Cu alloys.
Claim 24
Dependent Claim
28 words
A wafer level package according to claim 17 , wherein said organic material layer is formed of a photosensitive material for patterning and forming in a photolithographic process.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 2004-08-20 | 2005-02-19 | 2005-08-21 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2008-08-20 | 2009-02-19 | 2009-08-21 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2012-08-20 | 2013-02-19 | 2013-08-21 | $7700.00 | Window Closed / Lapsed |