Patent US6253605B1 successfully refreshed from Google Patents.
US6253605B1
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Semiconductive flow proportioner
Assignee: Fraunhofer-Gesellschaft zur Förderung der Angewandten Forschung eV
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Filing: 1998-04-22
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Granted: 2001-07-03
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Expires: 2018-04-22
Abstract
Abstract A proportioning element ( 10 ) for proportioning a fluid flow from an input side to an output side of the proportioning element ( 10 ) comprises a membrane ( 12 ) provided with at least one opening ( 16 ) acting as a flow resistor for a medium to be proportioned. The membrane ( 12 ) has additionally integrated therein a pressure sensor ( 14 ) used for detecting a pressure difference between the input side and the output side of the proportioning element ( 10 ). The proportioning element is implemented as a semiconductor chip, the membrane ( 12 ) being a semiconductor membrane and areas of the semiconductor chip which are exposed to the medium to be proportioned being provided with a passivation layer.
Inventors
- 👤 Martin Richter
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-02 01:48
CPC Classifications
G; G01; G01F; G01F13/00; G01F1/00; G01F1/05; G01F1/34; G01F1/36; G01F1/363; G01F1/38; G01F1/383; G05; G05D; G05D7/00; G05D7/06; G05D7/0617; G05D7/0629; G05D7/0676
Claims Analysis
Total Claims: 11
Claim 1
Independent Claim
133 words
A proportioning element ( 10 ) for proportioning a fluid flow (φ) from an input side to an output side of said proportioning element ( 10 ), comprising the following features: a membrane ( 12 ) provided with at least one opening ( 16 ) acting as a flow resistor for a medium to be proportioned; and a pressure sensor ( 14 ) integrated in the membrane ( 12 ) and used for detecting a pressure difference between the input side and the output side of the proportioning element ( 10 ), wherein the proportioning element is implemented as a semiconductor chip, the membrane ( 12 ) being a semiconductor membrane, and wherein areas of the semiconductor chip which are exposed to the medium to be proportioned are provided with a passivation layer.
Claim 2
Dependent Claim
133 words
A proportioning element ( 10 ) for proportioning a fluid flow (φ) from an input side to an output side of said proportioning element ( 10 ), comprising the following features: a membrane ( 12 ) provided with at least one opening ( 16 ) acting as a flow resistor for a medium to be proportioned; and a pressure sensor ( 14 ) integrated in the membrane ( 12 ) and used for detecting a pressure difference between the input side and the output side of the proportioning element ( 10 ), wherein the proportioning element is implemented as a semiconductor chip, the membrane ( 12 ) being a semiconductor membrane, and wherein areas of the semiconductor chip which are exposed to the medium to be proportioned are provided with a passivation layer.
Claim 3
Dependent Claim
30 words
A proportioning element according to claim 1 , wherein conductor paths on the front of the membrane, when seen in the direction of flow, are provided with a passivation layer.
Claim 4
Dependent Claim
26 words
A proportioning element according to claim 1 or 2 , which additionally comprises a temperature sensor for detecting the temperature of the medium to be proportioned.
Claim 5
Dependent Claim
31 words
A proportioning element according to one of the claims 1 to 3 , wherein the pressure sensor ( 14 ) is defined by piezoresistive resistors arranged on or in the membrane.
Claim 6
Dependent Claim
18 words
A proportioning element according to claim 3 , wherein the temperature sensor is integrated on the semiconductor chip.
Claim 7
Dependent Claim
35 words
A proportioner including a proportioning element ( 10 ) according to one of the claims 1 to 5 , comprising a pressure transducer for input-side application of a pressure to the medium to be proportioned.
Claim 8
Dependent Claim
55 words
A proportioner according to claim 6 , wherein said pressure transducer is a controllable pressure transducer, said proportioner including additionally a control device for controlling the controllable pressure transducer in dependence upon the pressure difference detected by means of the pressure sensor ( 14 ) and/or the temperature detected by means of the temperature sensor.
Claim 9
Dependent Claim
53 words
A proportioner according to claim 6 or 7 , comprising in addition an alarm signalling device for outputting an alarm if flow passages arranged before and/or after the membrane have a leak or are clogged or if the at least one opening ( 16 ) of the membrane ( 12 ) is clogged.
Claim 10
Dependent Claim
32 words
A proportioner according to one of the claims 6 to 8 , wherein the proportioning element ( 10 ) is arranged in the proportioner close to a proportioning outlet of said proportioner.
Claim 11
Dependent Claim
75 words
A proportioner according to one of the claims 6 to 9 , wherein two proportioning elements ( 10 ) according to one of the claims 1 to 6 are arranged in succession so as to permit, on the basis of the pressure drop across the membranes ( 12 ) of the two proportioning elements ( 10 ), the detection of clogging or blocking of the respective flow resistor provided in said membranes ( 12 ).
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 2004-07-02 | 2005-01-01 | 2005-07-03 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2008-07-02 | 2009-01-01 | 2009-07-03 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2012-07-02 | 2013-01-01 | 2013-07-03 | $7700.00 | Window Closed / Lapsed |