US6238734B1
Expired / Lapsed
US
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Liquid precursor mixtures for deposition of multicomponent metal containing materials
Assignee: Versum Materials US LLC
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Filing: 1999-07-08
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Granted: 2001-05-29
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Expires: 2019-07-08
Abstract
Abstract The present invention is a composition for deposition of a mixed metal or metal compound layer, comprising a solventless mixture of at least two metal-ligand complex precursors, wherein the mixture is liquid at ambient conditions and the ligands are the same and are selected from the group consisting of alkyls, alkoxides, halides, hydrides, amides, imides, azides cyclopentadienyls, carbonyls, and their fluorine, oxygen and nitrogen substituted analogs. The present invention is also a process for deposition of a multiple metal or metal compound layer on a substrate of an electronic material, comprising: a) providing a solventless mixture of two or more metal-ligand complex precursors which constitute a liquid at ambient conditions, wherein the ligands are the same and are selected from the group consisting of alkyls, alkoxides, halides, hydrides, amides, imides, azides, nitrates, cyclopentadienyls, carbonyls, and their fluorine, oxygen and nitrogen substituted analogs; b) delivering the solventless mixture by direct liquid injection to a flash vaporization zone to vaporize the solventless mixture; c) contacting the substrate under deposition conditions with a resulting vapor of the solventless mixture, and c) depositing a multiple metal or metal compound layer on the substrate from the solventless mixture.
Inventors
- 👤 Yoshihide Senzaki
- 👤 David Allen Roberts
- 👤 John Anthony Thomas Norman
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-09 01:33
CPC Classifications
C; C23; C23C; C23C16/00; C23C18/00; C23C18/02; C23C18/12; C23C18/1204; C23C18/1208; C23C18/1216; C23C16/22; C23C16/30; C23C16/34; C23C16/40; C23C16/401; C23C16/405; C23C18/1225; C23C18/125; C23C18/1254; C23C18/1258; H; H10; H10P; H10P14/00; H10P14/20; H10P14/26; H10P14/265; H10P14/34; H10P14/3402; H10P14/3434
Claims Analysis
Total Claims: 15
Claim 1
Independent Claim
152 words
A process for deposition of an oxygen-containing multiple metal compound layer on a substrate of an electronic material, comprising: a) providing a solventless mixture of two or more metal-ligand complex precursors which constitute a liquid at ambient conditions, wherein said ligands of said two or more metal-ligand complex precursors are the same and are selected from the group consisting of alkyls, alkoxides, halides, hydrides, amides, imides, azides, nitrates, cyclopentadienyls, carbonyls, and their fluorine, oxygen or nitrogen substituted analogs; b) delivering said solventless mixture to a deposition zone where said substrate is located; c) contacting said substrate under deposition conditions with said solventless mixture and a source of oxygen, where said contacting said substrate under deposition conditions is selected from the group consisting of chemical vapor deposition, spray pyrolysis, sol-gel processing, spin coating, and atomic layer epitaxy, and d) depositing an oxygen-containing multiple metal compound layer on said substrate from said solventless mixture.
Claim 2
Dependent Claim
152 words
A process for deposition of an oxygen-containing multiple metal compound layer on a substrate of an electronic material, comprising: a) providing a solventless mixture of two or more metal-ligand complex precursors which constitute a liquid at ambient conditions, wherein said ligands of said two or more metal-ligand complex precursors are the same and are selected from the group consisting of alkyls, alkoxides, halides, hydrides, amides, imides, azides, nitrates, cyclopentadienyls, carbonyls, and their fluorine, oxygen or nitrogen substituted analogs; b) delivering said solventless mixture to a deposition zone where said substrate is located; c) contacting said substrate under deposition conditions with said solventless mixture and a source of oxygen, where said contacting said substrate under deposition conditions is selected from the group consisting of chemical vapor deposition, spray pyrolysis, sol-gel processing, spin coating, and atomic layer epitaxy, and d) depositing an oxygen-containing multiple metal compound layer on said substrate from said solventless mixture.
Claim 3
Dependent Claim
35 words
The process of claim 1 wherein said source of oxygen is selected from the group consisting of 95+% by volume oxygen, ozone, nitrous oxide, nitric oxide, nitrogen dioxide, water, hydrogen peroxide, air and mixtures thereof.
Claim 4
Dependent Claim
31 words
The process of claim 1 wherein said oxygen-containing multiple metal compound layer is selected from the group consisting of mixed metal oxides, mixed metal oxycarbonitrides, mixed metal oxycarbides, and mixtures thereof.
Claim 5
Dependent Claim
133 words
A process for deposition of an oxygen-containing multiple metal compound layer on a substrate of an electronic material, comprising: a) providing a solventless mixture of two or more metal-ligand complex precursors which constitute a liquid at ambient conditions, wherein said ligands of said two or more metal-ligand complex precursors are the same and are selected from the group consisting of alkyls, alkoxides, halides, hydrides, amides, imides, azides, nitrates, cyclopentadienyls, carbonyls, and their fluorine, oxygen or nitrogen substituted analogs; b) delivering said solventless mixture by direct liquid injection to a flash vaporization zone to vaporize said solventless mixture; c) contacting said substrate under deposition conditions with a resulting vapor of said solventless mixture and a source of oxygen, and d) depositing an oxygen-containing multiple metal compound layer on said substrate from said solventless mixture.
Claim 6
Dependent Claim
133 words
A process for deposition of an oxygen-containing multiple metal compound layer on a substrate of an electronic material, comprising: a) providing a solventless mixture of two or more metal-ligand complex precursors which constitute a liquid at ambient conditions, wherein said ligands of said two or more metal-ligand complex precursors are the same and are selected from the group consisting of alkyls, alkoxides, halides, hydrides, amides, imides, azides, nitrates, cyclopentadienyls, carbonyls, and their fluorine, oxygen or nitrogen substituted analogs; b) delivering said solventless mixture by direct liquid injection to a flash vaporization zone to vaporize said solventless mixture; c) contacting said substrate under deposition conditions with a resulting vapor of said solventless mixture and a source of oxygen, and d) depositing an oxygen-containing multiple metal compound layer on said substrate from said solventless mixture.
Claim 7
Dependent Claim
25 words
The process of claim 4 wherein said ambient conditions are less than or equal to 40° C. and less than or equal to 30 psig.
Claim 8
Dependent Claim
17 words
The process of claim 4 wherein said ambient conditions are 20-30° C. and 5 to 6 psig.
Claim 9
Dependent Claim
35 words
The process of claim 4 wherein said source of oxygen is selected from the group consisting of 95+% by volume oxygen, ozone, nitrous oxide, nitric oxide, nitrogen dioxide, water, hydrogen peroxide, air and mixtures thereof.
Claim 10
Dependent Claim
152 words
A process for deposition of a nitrogen-containing multiple metal compound layer on a substrate of an electronic material, comprising: a) providing a solventless mixture of two or more metal-ligand complex precursors which constitute a liquid at ambient conditions, wherein said ligands of said two or more metal-ligand complex precursors are the same and are selected from the group consisting of alkyls, alkoxides, halides, hydrides, amides, imides, azides, nitrates, cyclopentadienyls, carbonyls, and their fluorine, oxygen or nitrogen substituted analogs; b) delivering said solventless mixture to a deposition zone where said substrate is located; c) contacting said substrate under deposition conditions with said solventless mixture and a source of nitrogen, where said contacting said substrate under deposition conditions is selected from the group consisting of chemical vapor deposition, spray pyrolysis, sol-gel processing, spin coating, and atomic layer epitaxy, and d) depositing a nitrogen-containing multiple metal compound layer on said substrate from said solventless mixture.
Claim 11
Dependent Claim
152 words
A process for deposition of a nitrogen-containing multiple metal compound layer on a substrate of an electronic material, comprising: a) providing a solventless mixture of two or more metal-ligand complex precursors which constitute a liquid at ambient conditions, wherein said ligands of said two or more metal-ligand complex precursors are the same and are selected from the group consisting of alkyls, alkoxides, halides, hydrides, amides, imides, azides, nitrates, cyclopentadienyls, carbonyls, and their fluorine, oxygen or nitrogen substituted analogs; b) delivering said solventless mixture to a deposition zone where said substrate is located; c) contacting said substrate under deposition conditions with said solventless mixture and a source of nitrogen, where said contacting said substrate under deposition conditions is selected from the group consisting of chemical vapor deposition, spray pyrolysis, sol-gel processing, spin coating, and atomic layer epitaxy, and d) depositing a nitrogen-containing multiple metal compound layer on said substrate from said solventless mixture.
Claim 12
Dependent Claim
27 words
The process of claim 8 wherein said source of nitrogen is selected from the group consisting of nitrogen, ammonia, hydrazine, alkylhydrazine, hydrogen azide, alkylamine and mixtures thereof.
Claim 13
Dependent Claim
133 words
A process for deposition of a nitrogen-containing multiple metal compound layer on a substrate of an electronic material, comprising: a) providing a solventless mixture of two or more metal-ligand complex precursors which constitute a liquid at ambient conditions, wherein said ligands of said two or more metal-ligand complex precursors are the same and are selected from the group consisting of alkyls, alkoxides, halides, hydrides, amides, imides, azides, nitrates, cyclopentadienyls, carbonyls, and their fluorine, oxygen or nitrogen substituted analogs; b) delivering said solventless mixture by direct liquid injection to a flash vaporization zone to vaporize said solventless mixture; c) contacting said substrate under deposition conditions with a resulting vapor of said solventless mixture and a source of nitrogen, and d) depositing a nitrogen-containing multiple metal compound layer on said substrate from said solventless mixture.
Claim 14
Dependent Claim
133 words
A process for deposition of a nitrogen-containing multiple metal compound layer on a substrate of an electronic material, comprising: a) providing a solventless mixture of two or more metal-ligand complex precursors which constitute a liquid at ambient conditions, wherein said ligands of said two or more metal-ligand complex precursors are the same and are selected from the group consisting of alkyls, alkoxides, halides, hydrides, amides, imides, azides, nitrates, cyclopentadienyls, carbonyls, and their fluorine, oxygen or nitrogen substituted analogs; b) delivering said solventless mixture by direct liquid injection to a flash vaporization zone to vaporize said solventless mixture; c) contacting said substrate under deposition conditions with a resulting vapor of said solventless mixture and a source of nitrogen, and d) depositing a nitrogen-containing multiple metal compound layer on said substrate from said solventless mixture.
Claim 15
Dependent Claim
27 words
The process of claim 10 wherein said source of nitrogen is selected from the group consisting of nitrogen, ammonia, hydrazine, alkylhydrazine, hydrogen azide, alkylamine and mixtures thereof.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 2004-05-28 | 2004-11-27 | 2005-05-29 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2008-05-28 | 2008-11-27 | 2009-05-29 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2012-05-28 | 2012-11-27 | 2013-05-29 | $7700.00 | Window Closed / Lapsed |