US6233719B1
Expired / Lapsed
US
⏱️ 0.0 years remaining
System and method for analyzing semiconductor production data
Assignee: KLA Corp
•
Filing: 1997-10-27
•
Granted: 2001-05-15
•
Expires: 2017-10-27
Abstract
Abstract A software system and method is disclosed for extending classification attributes in the analysis of production data. The software operates in an object-oriented Windows® environment with increased flexibility because it permits the user to add classifications by dragging and dropping with a computer mouse. Thus, the system can be changed without reprogramming the software code, and is not limited by preprogrammed classifications. The classifications are preferably cluster classifications of defects in semiconductor processing such as scratches, particles, pinholes and blowouts. When a cluster classification is executed, a production map is filtered to remove the non-defect data according to the selected classification; the defect attribute is then readily visible. The filtered production maps may also be color coded for better visibility so that a plurality of corresponding defects in the map are visible in a plurality of corresponding colors. The maps of a plurality of cluster classifications also may be placed side by side for comparison.
Inventors
- 👤 Manoj Hardikar
- 👤 Steve Zhou
- 👤 Richard Shiflett
- 👤 Ashok Kulkarni
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-09 11:28
CPC Classifications
G; G06; G06Q; G06Q10/00; G06Q10/06; G06F; G06F16/00; G06F16/90; G06F16/906; Y; Y10; Y10S; Y10S707/00; Y10S707/99931
Claims Analysis
Total Claims: 27
Claim 1
Independent Claim
156 words
A method of analyzing semiconductor production data from a production line, comprising the steps of: establishing a table namespace of old semiconductor cluster classifications having first attributes; selecting from a list box a new semiconductor cluster classification having second attributes; adding said selected new cluster classification to said table namespace; choosing said new semiconductor cluster classification from said table namespace; executing an analytical routine on said production data from said new semiconductor cluster classification with said second attributes; choosing a plurality of filters associated with said old and new semiconductor cluster classifications; applying said plurality of filters to said semiconductor production data in sequence; removing non-defect semiconductor product data from said semiconductor production data; color coding each of said semiconductor cluster classifications so that said classifications can be more easily distinguished; and if results of the executed analytical routine exceed a predetermined control level, sending a command to the production line to initiate a process change.
Claim 2
Independent Claim
156 words
A method of analyzing semiconductor production data from a production line, comprising the steps of: establishing a table namespace of old semiconductor cluster classifications having first attributes; selecting from a list box a new semiconductor cluster classification having second attributes; adding said selected new cluster classification to said table namespace; choosing said new semiconductor cluster classification from said table namespace; executing an analytical routine on said production data from said new semiconductor cluster classification with said second attributes; choosing a plurality of filters associated with said old and new semiconductor cluster classifications; applying said plurality of filters to said semiconductor production data in sequence; removing non-defect semiconductor product data from said semiconductor production data; color coding each of said semiconductor cluster classifications so that said classifications can be more easily distinguished; and if results of the executed analytical routine exceed a predetermined control level, sending a command to the production line to initiate a process change.
Claim 3
Dependent Claim
61 words
The method of claim 1 , said executing step further comprising at least one of: importing a namespace containing said second attributes for said new semiconductor cluster classification; performing a pattern recognition function for said new semiconductor cluster classification; and generating a graphical representation of said results of said analytical routine on said new semiconductor cluster classifications with said second attributes.
Claim 4
Dependent Claim
21 words
The method of claim 2 , said importing step further comprising: importing said namespace across the Internet or a local network.
Claim 5
Dependent Claim
25 words
The method of claim 1 , further comprising; displaying a plurality of graphical representations of said old and new semiconductor cluster classifications side by side.
Claim 6
Dependent Claim
24 words
The method of claim 1 , wherein: said executing of said analytical routine includes generating information about said new semiconductor cluster classifications of defects.
Claim 7
Dependent Claim
27 words
The method of claim 5 , wherein: said generating of information about said semiconductor cluster classifications of defects includes generating information about scratches, particles, pinholes and blowouts.
Claim 8
Dependent Claim
20 words
The method of claim 1 , further comprising the step of: importing said new semiconductor cluster classifications across a server.
Claim 9
Dependent Claim
20 words
The method of claim 1 , further comprising the step of: importing said new semiconductor cluster classification across the Internet.
Claim 10
Independent Claim
144 words
A system for analyzing semiconductor production data from a production line, comprising: a table namespace of old semiconductor cluster classifications having first attributes; a list box containing a plurality of new semiconductor cluster classifications having second attributes; a first analytical routine for execution on said production data from at least one of said old and new semiconductor cluster classifications with said first attributes and second attributes, respectively; and a second analytical routine for applying a plurality of filters, associated with said old and new classifications, to said semiconductor production data in sequence, removing non-defect semiconductor production data from said semiconductor production data, and color coding each of said semiconductor cluster classifications so that said classifications are more easily distinguishable, and sending a command to the production line to initiate a process change if results of the second analytical routine exceed a predetermined control level.
Claim 11
Independent Claim
144 words
A system for analyzing semiconductor production data from a production line, comprising: a table namespace of old semiconductor cluster classifications having first attributes; a list box containing a plurality of new semiconductor cluster classifications having second attributes; a first analytical routine for execution on said production data from at least one of said old and new semiconductor cluster classifications with said first attributes and second attributes, respectively; and a second analytical routine for applying a plurality of filters, associated with said old and new classifications, to said semiconductor production data in sequence, removing non-defect semiconductor production data from said semiconductor production data, and color coding each of said semiconductor cluster classifications so that said classifications are more easily distinguishable, and sending a command to the production line to initiate a process change if results of the second analytical routine exceed a predetermined control level.
Claim 12
Dependent Claim
58 words
The system of claim 9 , said analytical routine further comprises at least one of: an importation of a namespace having said second attributes for said new semiconductor cluster classification; a pattern recognition function for said new semiconductor cluster classification; and a graphical representation of results of said analytical routine on said old and new semiconductor cluster classifications.
Claim 13
Dependent Claim
18 words
The system of claim 10 , wherein: said namespace is imported over the Internet or a local network.
Claim 14
Dependent Claim
31 words
The system of claim 9 , wherein: said analytical routine is one of a number, mean, or standard deviation of defects over a particular lot identification, layer number or time period.
Claim 15
Dependent Claim
25 words
The system of claim 9 , further comprising: a plurality of graphical representations of said old and new semiconductor cluster classifications displayed side by side.
Claim 16
Dependent Claim
18 words
The system of claim 9 , wherein: said analytical routine generates information about semiconductor cluster classifications of defects.
Claim 17
Dependent Claim
19 words
The system of claim 14 , wherein: said semiconductor cluster classifications of defects include scratches, particles, pinholes and blowouts.
Claim 18
Independent Claim
162 words
A system for analyzing semiconductor production data from a production line, comprising: table namespace means for storing and displaying old semiconductor cluster classifications having first attributes; list box means for storing and displaying a plurality of new semiconductor cluster classifications having second attributes; first analytical routine means for execution on said semiconductor production data from at least one of said old and new semiconductor cluster classifications with said first attributes and second attributes respectively; second analytical routine means for applying a plurality of filters, associated with at least one of said old and new semiconductor cluster classifications, to said semiconductor production data in sequence; means for removing non-defect semiconductor production data from said semiconductor production data; means for color coding each of said semiconductor cluster classifications so that said classifications can be more easily distinguished; and means for sending a command to the production line to initiate a process change if results of the second analytical routine exceed a predetermined control level.
Claim 19
Independent Claim
162 words
A system for analyzing semiconductor production data from a production line, comprising: table namespace means for storing and displaying old semiconductor cluster classifications having first attributes; list box means for storing and displaying a plurality of new semiconductor cluster classifications having second attributes; first analytical routine means for execution on said semiconductor production data from at least one of said old and new semiconductor cluster classifications with said first attributes and second attributes respectively; second analytical routine means for applying a plurality of filters, associated with at least one of said old and new semiconductor cluster classifications, to said semiconductor production data in sequence; means for removing non-defect semiconductor production data from said semiconductor production data; means for color coding each of said semiconductor cluster classifications so that said classifications can be more easily distinguished; and means for sending a command to the production line to initiate a process change if results of the second analytical routine exceed a predetermined control level.
Claim 20
Dependent Claim
59 words
The system of claim 16 , said analytical routine further comprises at least one of: means for importing a namespace having said second attributes for said new semiconductor cluster classification; means for performing pattern recognition for said new semiconductor cluster classification; and means for graphically representing results of said analytical routine on said old and new semiconductor cluster classifications.
Claim 21
Dependent Claim
19 words
The system of claim 17 , wherein: means for importing said namespace over the Internet or a local network.
Claim 22
Dependent Claim
32 words
The system of claim 16 , wherein: said analytical routine means executes an operation of number, mean, or standard deviation of defects over a particular lot identification, layer number or time period.
Claim 23
Dependent Claim
24 words
The system of claim 16 , further comprising: means for displaying side by side a plurality of said old and new semiconductor cluster classifications.
Claim 24
Dependent Claim
19 words
The system of claim 16 , wherein: said analytical routine means generates information about semiconductor cluster classifications of defects.
Claim 25
Dependent Claim
19 words
The system of claim 20 , wherein: said semiconductor cluster classifications of defects include scratches, particles, pinholes and blowouts.
Claim 26
Dependent Claim
19 words
The system of claim 16 , further comprising: means for importing said new semiconductor cluster classification across a server.
Claim 27
Dependent Claim
19 words
The system of claim 16 , further comprising: means for importing said new semiconductor cluster classification across the Internet.
References Cited (Backward Citations)
US5047918A
Cited
US5481741A
Cited
US5065347A
Cited
US5479614A
Cited
US5201047A
Cited
US5226118A
Cited
US5381470A
Cited
US5634133A
Cited
US5483468A
Cited
US5519865A
Cited
US5675752A
Cited
US5649169A
Cited
US5761064A
Cited
US5802523A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 2004-05-14 | 2004-11-13 | 2005-05-15 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2008-05-14 | 2008-11-13 | 2009-05-15 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2012-05-14 | 2012-11-13 | 2013-05-15 | $7700.00 | Window Closed / Lapsed |