US5761064A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Defect management system for productivity and yield improvement
Assignee: Advanced Micro Devices Inc
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Filing: 1995-10-06
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Granted: 1998-06-02
•
Expires: 2015-10-06
Abstract
Abstract An automated wafer defect management system in which wafer defect data are collected from wafer inspection instruments, converted into a standard data format and made available through a central database system to workstations for review, analysis, and evaluation.
Inventors
- 👤 Tho Le La
- 👤 Ying Shiau
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-31 14:09
CPC Classifications
H; H10; H10P; H10P74/00; H10P74/23; G; G01; G01R; G01R31/00; G01R31/28; G01R31/317; G01R31/3181; G01R31/319
Claims Analysis
Total Claims: 43
Claim 1
Independent Claim
159 words
An automated wafer defect data management system, comprising: multiple wafer inspection instruments; multiple wafer analysis tools; means for collecting wafer defect data from multiple defects on wafers from each of said multiple wafer inspection instruments and said multiple wafer analysis tools; conversion means associated with each of the multiple wafer inspection instruments and each of the multiple wafer analysis tools for converting the collected wafer defect data from each of said multiple wafer inspection instruments and said multiple wafer analysis tools from an instrument and tool specific format to a standard format; a central database system with means for storing converted wafer defect data wherein the stored converted wafer defect data is retrievable based on selected criteria; at least one user interface workstation wherein user selected converted wafer defect data can be analyzed in real time; and means for transferring user selected converted wafer defect data from the central database system to the at least one user interface workstation.
Claim 2
Dependent Claim
159 words
An automated wafer defect data management system, comprising: multiple wafer inspection instruments; multiple wafer analysis tools; means for collecting wafer defect data from multiple defects on wafers from each of said multiple wafer inspection instruments and said multiple wafer analysis tools; conversion means associated with each of the multiple wafer inspection instruments and each of the multiple wafer analysis tools for converting the collected wafer defect data from each of said multiple wafer inspection instruments and said multiple wafer analysis tools from an instrument and tool specific format to a standard format; a central database system with means for storing converted wafer defect data wherein the stored converted wafer defect data is retrievable based on selected criteria; at least one user interface workstation wherein user selected converted wafer defect data can be analyzed in real time; and means for transferring user selected converted wafer defect data from the central database system to the at least one user interface workstation.
Claim 3
Dependent Claim
69 words
The system as in claim 1, wherein said central database system comprises: a server; a relational database installed on said server for organizing said converted wafer defect data in tables wherein aid converted wafer defect data is tagged according to preselected criteria; and wherein said means for storing converted wafer defect data comprises a memory associated with said server to store said converted wafer defect data and said tables.
Claim 4
Dependent Claim
35 words
The system as in claim 2, wherein said at least one interface workstation includes: means for creating statistical and graphical representations from said user selected converted wafer defect data; and means for displaying said representations.
Claim 5
Dependent Claim
60 words
The system as in claim 3, further comprising: at least one data analysis station; means for transferring user selected converted wafer defect data to said at least one data analysis station; means for analyzing said converted wafer defect data at said at least one data analysis station; and means for transferring analyzed wafer defect data to said central database system.
Claim 6
Dependent Claim
31 words
The system as in claim 4, further comprising means for converting user selected converted wafer defect data to an instrument specific format required by said at least one data analysis station.
Claim 7
Dependent Claim
25 words
The system as in claim 5, further comprising: means for transferring user selected analyzed wafer defect data to said at least one user interface workstation.
Claim 8
Dependent Claim
19 words
The system as in claim 6, wherein said workstation includes said means for creating said statistical and graphical representations.
Claim 9
Dependent Claim
23 words
The system as in claim 7, wherein said means for creating said statistical and graphical representations is independent of said central database system.
Claim 10
Dependent Claim
58 words
The system as in claim 8, wherein said means for creating said statistical and graphical representations includes a point-and-click graphical interface system allowing said user selected analyzed data to be selectively displayed in at least one format selected from the group consisting of a trend chart, an image, a wafer map, a tool comparison, or a Pareto chart.
Claim 11
Dependent Claim
24 words
The system as in claim 9, wherein said preselected criteria includes process technology, layer, lot, wafer, device, process equipment identification, and scan tool identification.
Claim 12
Dependent Claim
23 words
The system as in claim 10, wherein said data analysis station includes means for defect classification, image capture, surface/cross-section analysis, and spectral analysis.
Claim 13
Dependent Claim
15 words
The system as in claim 11, further comprising means for accessing an electrical test database.
Claim 14
Dependent Claim
19 words
The system as in claim 12, further comprising means for accessing an in-line process monitor and equipment monitor database.
Claim 15
Dependent Claim
35 words
The system as in claim 13, wherein said central database system further comprises means for correlating said user selected analyzed data with said electrical test data and said in-line process monitor and equipment monitor data.
Claim 16
Dependent Claim
18 words
The system as in claim 14, further comprising means for providing password security access by type of user.
Claim 17
Dependent Claim
15 words
The system as in claim 15, further comprising means for an automatic backup data integrity.
Claim 18
Dependent Claim
15 words
The system as in claim 16, wherein said means for transferring comprises a computer network.
Claim 19
Dependent Claim
158 words
An automated wafer defect data management system, comprising: multiple wafer inspection instruments; multiple wafer analysis tools; a central database system; a network for transferring wafer defect data from multiple defects on wafers generated at each of the multiple wafer inspection instruments and each of the multiple wafer analysis tools to the central database system; a converter associated with each of the multiple wafer inspection instruments and each of the multiple wafer analysis tools to convert the wafer defect data generated at each of the multiple wafer inspection instruments and each of the multiple wafer analysis tools from an instrument and tool specific format to a standard format; a memory associated with the central database system to store the converted wafer defect data wherein the stored converted wafer defect data is retrievable via the network based on selected criteria; and at least one user interface workstation wherein user selected converted wafer defect data can be analyzed in real time.
Claim 20
Dependent Claim
158 words
An automated wafer defect data management system, comprising: multiple wafer inspection instruments; multiple wafer analysis tools; a central database system; a network for transferring wafer defect data from multiple defects on wafers generated at each of the multiple wafer inspection instruments and each of the multiple wafer analysis tools to the central database system; a converter associated with each of the multiple wafer inspection instruments and each of the multiple wafer analysis tools to convert the wafer defect data generated at each of the multiple wafer inspection instruments and each of the multiple wafer analysis tools from an instrument and tool specific format to a standard format; a memory associated with the central database system to store the converted wafer defect data wherein the stored converted wafer defect data is retrievable via the network based on selected criteria; and at least one user interface workstation wherein user selected converted wafer defect data can be analyzed in real time.
Claim 21
Dependent Claim
43 words
The system as in claim 18, wherein said central database system includes: a server; and a relational database installed on said server for organizing said converted wafer defect data in tables wherein said converted wafer defect data is tagged according to preselected criteria.
Claim 22
Dependent Claim
44 words
The system as in claim 19, wherein said at least one user interface workstation creates statistical and graphical representations from said user selected converted wafer defect data and wherein said at least one user interface workstation further includes a display to display said representations.
Claim 23
Dependent Claim
52 words
The system as in claim 20, further comprising at least one data analysis station wherein said converted wafer defect data is analyzed and wherein said user selected converted wafer defect data is transferred to and from said at least one data analysis station and to said central database system by said network.
Claim 24
Dependent Claim
34 words
The system as in claim 21, further comprising at least one converter to convert user selected converted wafer defect data to an instrument specific format required by said at least one data analysis station.
Claim 25
Dependent Claim
25 words
The system as in claim 22, wherein said analyzed wafer defect data is transferred to said at least one user interface workstation by said network.
Claim 26
Dependent Claim
53 words
The system as in claim 23, wherein said user interface workstation includes a point-and-click graphical interface to allow said user selected analyzed data to be selectively displayed in at least one format selected from the group consisting of a trend chart, an image, a wafer map, a tool comparison, or a Pareto chart.
Claim 27
Dependent Claim
24 words
The system as in claim 24, wherein said preselected criteria includes process technology, layer, lot, wafer, device, process equipment identification, and scan tool identification.
Claim 28
Dependent Claim
21 words
The system as in claim 25, wherein said data analysis station performs defect classification, image capture, surface/cross-section analysis, and spectral analysis.
Claim 29
Dependent Claim
16 words
The system as in claim 26, further comprising a system to access an electrical test database.
Claim 30
Dependent Claim
20 words
The system as in claim 27, further comprising a system to access an in-line process monitor and equipment monitor database.
Claim 31
Dependent Claim
31 words
The system as in claim 28, wherein said central database system correlates said user selected analyzed data with said electrical test data and said in-line process monitor and equipment monitor data.
Claim 32
Dependent Claim
18 words
The system as in claim 29, comprising a system to provide password security access by type of user.
Claim 33
Dependent Claim
18 words
The system as in claim 30, further comprising a system to perform an automatic backup of said data.
Claim 34
Independent Claim
140 words
A method of automating wafer defect data management, the method comprising: collecting wafer defect data from multiple defects on wafers from multiple wafer inspection instruments; collecting wafer defect data from multiple defects on wafers from multiple analysis tools; transferring the collected wafer defect data from the multiple wafer inspection instruments and the multiple wafer analysis tools to a central database system via a network; converting the collected wafer defect data from the multiple wafer inspection instruments and the multiple wafer analysis tools from an instrument and tool specific format to a standard format; storing the converted collected wafer defect data in a memory associated with the central database system wherein the converted collected wafer defect data is retrievable based on selected criteria; and analyzing selected converted collected wafer defect data in real time at at least one user interface workstation.
Claim 35
Independent Claim
140 words
A method of automating wafer defect data management, the method comprising: collecting wafer defect data from multiple defects on wafers from multiple wafer inspection instruments; collecting wafer defect data from multiple defects on wafers from multiple analysis tools; transferring the collected wafer defect data from the multiple wafer inspection instruments and the multiple wafer analysis tools to a central database system via a network; converting the collected wafer defect data from the multiple wafer inspection instruments and the multiple wafer analysis tools from an instrument and tool specific format to a standard format; storing the converted collected wafer defect data in a memory associated with the central database system wherein the converted collected wafer defect data is retrievable based on selected criteria; and analyzing selected converted collected wafer defect data in real time at at least one user interface workstation.
Claim 36
Dependent Claim
57 words
The method of claim 32, further comprising the step of organizing said converted wafer defect data in tables in a relational database installed on a server in said central database system wherein said converted wafer defect data is tagged according to preselected criteria comprising process technology, layer, lot, wafer, device process equipment identification, and scan tool identification.
Claim 37
Dependent Claim
32 words
The method of claim 33, further comprising the steps of: creating statistical and graphical representations from said user selected converted wafer defect data; and displaying said representations at said user interface workstation.
Claim 38
Dependent Claim
51 words
The method of claim 34, further comprising the steps of: transferring said selected converted wafer defect data to a data analysis station; analyzing said selected converted wafer defect data at the data analysis station; and transferring said analyzed selected converted wafer defect data to said central database system by said network.
Claim 39
Dependent Claim
57 words
The method of claim 35, further comprising the steps of: transferring said analyzed selected converted wafer defect data to said user interface workstation by said network; and displaying said user selected analyzed data in a format selected from the group consisting of a trend chart, an image, a wafer map, a tool comparison, or a Pareto chart.
Claim 40
Dependent Claim
20 words
The method of claim 36, further comprising the step of performing defect classification, image capture, surface/cross-section analysis, and spectral analysis.
Claim 41
Dependent Claim
47 words
The method of claim 37, further comprising the steps of: accessing an electrical test data base; accessing an in-line process monitor and equipment monitor database; and correlating information from said electrical test data base and information from said equipment monitor database with said user selected analyzed data.
Claim 42
Dependent Claim
13 words
The method of claim 38, further comprising the step of providing password security.
Claim 43
Dependent Claim
22 words
The method of claim 39, further comprising the step of performing an automated backup of said memory in said central database system.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 2001-06-01 | 2001-12-01 | 2002-06-02 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2005-06-01 | 2005-12-01 | 2006-06-02 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2009-06-01 | 2009-12-01 | 2010-06-02 | $7700.00 | Window Closed / Lapsed |