Trimmable singleband and tunable multiband integrated oscillator using micro-electromechanical system (MEMS) technology

Claim 2

A trimmable singleband oscillator, comprising: an amplifier, and an integrated tunable LC network connected to said amplifier to provide positive feedback so that the amplifier outputs a local oscillator signal at a resonant frequency, said tunable LC network comprising: an array of inductor elements, an array of capacitor elements, at least one of said arrays having a plurality of elements, and a micro-electromechanical (MEM) switching network that selectively interconnects said plurality of elements to trim the frequency of said oscillator signal, said switching network comprising a plurality of MEM switches that are arranged to operate in response to an actuation signal, said LC network arranged to include a plurality of inductor-MEM switch pairs that comprise: a first layer on a common substrate that comprises a bottom electrode for said MEM switch, at least one gapped signal line, and a center tap for said inductor element that is connected to one end of the gapped signal line, a second layer above said first layer which comprises a contact electrode for said MEM switch and the coils for said inductor element, a third layer above said second layer which comprises a cantilever arm for said MEM switch, and a fourth layer above said third layer which comprises a top electrode for said MEM switch, said cantilever arm flexing downward in response to an actuation voltage applied across the top and bottom electrodes causing the contact electrode to bridge the gapped signal line and connect the coils for said inductor element into the LC network.

Claim 3

The trimmable singleband oscillator of claim 1 , wherein the coils for said inductor elements are elevated above said common substrate.

Claim 4

A trimmable singleband oscillator, comprising: an amplifier, and an integrated tunable LC network connected to said amplifier to provide positive feedback so that the amplifier outputs a local oscillator signal at a resonant frequency, said tunable LC network comprising: an array of inductor elements, an array of capacitor elements, at least one of said arrays having a plurality of elements, and a micro-electromechanical (MEM) switching network that selectively interconnects said plurality of elements to trim the frequency of said oscillator signal, said switching network comprising a plurality of MEM switches that are arranged to operate in response to an actuation signal, said LC network arranged to include a plurality of MEM switch-capacitor pairs that comprise: a bottom electrode and a gapped signal line formed on a common substrate; a suspended arm formed of insulating material affixed to said substrate and suspended above said bottom electrode and said gapped signal line; a contact electrode formed on the underside of said suspended arm positioned facing said gapped signal line; a top electrode formed atop said suspended arm that is electrostatically attractable toward said bottom electrode upon selective application of a voltage to said top electrode; a pair of capacitor anchor structures formed on said substrate, one said capacitor anchor structure being electrically connected to the gapped signal line; and a pair of capacitor electrodes that are connected to the respective capacitor anchor structures to form a signal capacitor, said electrostatic attraction of said top electrode toward said bottom electrode causing said electrical contact on said suspended arm to bridge said gapped signal line thereby connecting said signal capacitor in said LC network.

Claim 5

A trimmable singleband oscillator, comprising: an amplifier, and an integrated tunable LC network connected to said amplifier to provide positive feedback so that the amplifier outputs a local oscillator signal at a resonant frequency, said tunable LC network comprising: an array of inductor elements, an array of capacitor elements, at least one of said arrays having a plurality of elements, and a micro-electromechanical (MEM) switching network that selectively interconnects said plurality of elements to trim the frequency of said oscillator signal, said switching network comprising a plurality of MEM switches that are arranged to operate in response to an actuation signal, said LC network arranged to include a plurality of MEM switch-capacitor pairs that comprise: a bottom electrode and a gapped signal line formed on a common substrate; a suspended arm formed of insulating material affixed to said substrate and suspended above said bottom electrode and said gapped signal line; a contact electrode formed on the underside of said suspended arm positioned facing said gapped signal line; a top electrode formed atop said suspended arm that is electrostatically attractable toward said bottom electrode upon selective application of a voltage to said top electrode; a pair of capacitor anchor structures formed on said substrate, one said capacitor anchor structure being electrically connected to the gapped signal line; and a pair of capacitor electrodes that are connected to the respective capacitor anchor structures to form a signal capacitor, said electrostatic attraction of said top electrode toward said bottom electrode causing said electrical contact on said suspended arm to bridge said gapped signal line thereby connecting said signal capacitor in said LC network.

Claim 6

The trimmable singleband oscillator of claim 3 , wherein said pair of capacitor electrodes is suspended above said substrate so that the parasitic capacitance between said signal capacitor and said substrate is low.

Claim 7

The trimmable singleband oscillator of claim 3 , wherein said top electrode is formed with a grid of holes that extend through said suspended arm.

Claim 8

A trimmable singleband oscillator, comprising: an amplifier, and an integrated tunable resonant network connected to said amplifier to provide positive feedback so that the amplifier outputs a local oscillator signal at a resonant frequency, said resonant network comprising: an inductor, a trimmable MEM capacitor connected in parallel with said inductor to trim the frequency of said local oscillator signal, said MEM capacitor having a signal capacitor that is adjusted to trim the resonant frequency and an actuator that engages said signal capacitor once trimmed to fix said resonant frequency, said inductor and said MEM capacitor being integrated on a common substrate, said MEM capacitor comprising: a flexure structure that is anchored to and suspended above said substrate so that it flexes along a direction of motion; a pair of opposing plates that form said signal capacitor, at least one of said plates being connected to said flexure structure so that it can move in response to a control voltage to set the capacitance of said signal capacitor; and a plurality of teeth that are coupled to and move with said moving plate, said actuator responding to a switch voltage to disengage a stopper from said teeth and allow said control voltage to trim the signal capacitor's capacitance and then reengage said stopper in said teeth such that the movable plate is fixed.

Claim 9

A trimmable singleband oscillator, comprising: an amplifier, and an integrated tunable resonant network connected to said amplifier to provide positive feedback so that the amplifier outputs a local oscillator signal at a resonant frequency, said resonant network comprising: an inductor, a trimmable MEM capacitor connected in parallel with said inductor to trim the frequency of said local oscillator signal, said MEM capacitor having a signal capacitor that is adjusted to trim the resonant frequency and an actuator that engages said signal capacitor once trimmed to fix said resonant frequency, said inductor and said MEM capacitor being integrated on a common substrate, said MEM capacitor comprising: a flexure structure that is anchored to and suspended above said substrate so that it flexes along a direction of motion; a pair of opposing plates that form said signal capacitor, at least one of said plates being connected to said flexure structure so that it can move in response to a control voltage to set the capacitance of said signal capacitor; and a plurality of teeth that are coupled to and move with said moving plate, said actuator responding to a switch voltage to disengage a stopper from said teeth and allow said control voltage to trim the signal capacitor's capacitance and then reengage said stopper in said teeth such that the movable plate is fixed.

Claim 10

The trimmable singleband oscillator of claim 6 , wherein said actuator comprises a tunable capacitor in which the stopper is attached to a moveable plate that is suspended from a flexure mechanism so that it opposes a fixed plate, said switch voltage creating an electrostatic force between the plates that causes the moveable plate to move against the electrostatic force to engage and disengage the stopper.

Claim 11

A trimmable singleband oscillator, comprising: an amplifier, and an integrated tunable resonant network connected to said amplifier to provide positive feedback so that the amplifier outputs a local oscillator signal at a resonant frequency, said resonant network comprising: an inductor, a trimmable MEM capacitor connected in parallel with said inductor to trim the frequency of said local oscillator signal, said MEM capacitor having a signal capacitor that is adjusted to trim the resonant frequency and an actuator that engages said signal capacitor once trimmed to fix said resonant frequency, said inductor and said MEM capacitor being integrated on a common substrate, said signal capacitor comprising: a master capacitor on said substrate, said master capacitor having a pair of opposing plates, at least one of said plates being suspended so that it is movable in response to an electrostatic force produced by a control voltage applied across said master capacitor; a slave capacitor on said substrate that responds to a signal voltage, said slave capacitor having a pair of opposing plates, at least one of said plates being suspended so that it is movable; and a mechanical coupler suspended above said substrate that slaves the motion of said slave capacitor's movable plate to the motion of said master capacitor's movable plate to trim the capacitance of said slave capacitor while electrically isolating the slave capacitor from the master capacitor.

Claim 12

A trimmable singleband oscillator, comprising: an amplifier, and an integrated tunable resonant network connected to said amplifier to provide positive feedback so that the amplifier outputs a local oscillator signal at a resonant frequency, said resonant network comprising: an inductor, a trimmable MEM capacitor connected in parallel with said inductor to trim the frequency of said local oscillator signal, said MEM capacitor having a signal capacitor that is adjusted to trim the resonant frequency and an actuator that engages said signal capacitor once trimmed to fix said resonant frequency, said inductor and said MEM capacitor being integrated on a common substrate, said signal capacitor comprising: a master capacitor on said substrate, said master capacitor having a pair of opposing plates, at least one of said plates being suspended so that it is movable in response to an electrostatic force produced by a control voltage applied across said master capacitor; a slave capacitor on said substrate that responds to a signal voltage, said slave capacitor having a pair of opposing plates, at least one of said plates being suspended so that it is movable; and a mechanical coupler suspended above said substrate that slaves the motion of said slave capacitor's movable plate to the motion of said master capacitor's movable plate to trim the capacitance of said slave capacitor while electrically isolating the slave capacitor from the master capacitor.

Claim 13

A tunable multiband oscillator, comprising: an amplifier, and an integrated tunable LC network connected to said amplifier to provide positive feedback so that the amplifier outputs a local oscillator signal at a resonant frequency, said LC network comprising: a plurality of LC circuits that are tuned to different resonant frequencies in respective frequency bands, and a micro-electromechanical (MEM) switching network that interconnects one said LC circuits to said amplifier to set the resonant frequency of said oscillator signal, said LC circuits and said MEM switching network being integrated on a common substrate.

Claim 14

A tunable multiband oscillator, comprising: an amplifier, and an integrated tunable LC network connected to said amplifier to provide positive feedback so that the amplifier outputs a local oscillator signal at a resonant frequency, said LC network comprising: a plurality of LC circuits that are tuned to different resonant frequencies in respective frequency bands, and a micro-electromechanical (MEM) switching network that interconnects one said LC circuits to said amplifier to set the resonant frequency of said oscillator signal, said LC circuits and said MEM switching network being integrated on a common substrate.

Claim 15

The tunable multiband oscillator of claim 9 , wherein each said LC-circuit includes an inductor and a capacitor that are elevated above said common substrate to reduce parasitics.

Claim 16

The tunable multiband oscillator of claim 9 , wherein said switching network comprises a plurality of MEM switches that are arranged to operate in response to an actuation signal.

Claim 17

A tunable multiband oscillator, comprising: an amplifier, and an integrated tunable LC network connected to said amplifier to provide positive feedback so that the amplifier outputs a local oscillator signal at a resonant frequency, said resonant network comprising: a plurality of tunable LC circuits that correspond to different coarse frequency bands, a controller that finely trims said LC circuits to respective resonant frequencies in the different frequency bands, and a micro-electromechanical system (MEMS) switching network that interconnects one said LC circuits to said amplifier to set the resonant frequency of said oscillator signal, said LC circuits and said MEM switching network being integrated on a common substrate, wherein each said tunable LC circuit includes a tunable inductor which comprises: a conductive primary coil carrying an alternating primary current, a conductive drive coil carrying an alternating drive current, said drive coil in proximity to said primary coil such that said drive current induces mutual inductance components in said primary coil, and a drive circuit that sets the phase and amplitude relationships between said drive current and said primary current to establish a desired inductance for said primary coil and trim the resonant frequency.

Claim 18

A tunable multiband oscillator, comprising: an amplifier, and an integrated tunable LC network connected to said amplifier to provide positive feedback so that the amplifier outputs a local oscillator signal at a resonant frequency, said resonant network comprising: a plurality of tunable LC circuits that correspond to different coarse frequency bands, a controller that finely trims said LC circuits to respective resonant frequencies in the different frequency bands, and a micro-electromechanical system (MEMS) switching network that interconnects one said LC circuits to said amplifier to set the resonant frequency of said oscillator signal, said LC circuits and said MEM switching network being integrated on a common substrate, wherein each said tunable LC circuit includes a tunable inductor which comprises: a conductive primary coil carrying an alternating primary current, a conductive drive coil carrying an alternating drive current, said drive coil in proximity to said primary coil such that said drive current induces mutual inductance components in said primary coil, and a drive circuit that sets the phase and amplitude relationships between said drive current and said primary current to establish a desired inductance for said primary coil and trim the resonant frequency.

Claim 19

A tunable multiband oscillator, comprising: an amplifier, and an integrated tunable LC network connected to said amplifier to provide positive feedback so that the amplifier outputs a local oscillator signal at a resonant frequency, said resonant network comprising: a plurality of tunable LC circuits that correspond to different coarse frequency bands, a controller that finely trims said LC circuits to respective resonant frequencies in the different frequency bands, and a micro-electromechanical system (MEMS) switching network that interconnects one of said LC circuits to said amplifier to set the resonant frequency of said oscillator signal, said LC circuits and said MEM switching network being integrated on a common substrate, wherein each said tunable LC circuit includes a tunable MEMS capacitor that comprises: a signal capacitor that is adjusted to trim the resonant frequency and an actuator that engages said signal capacitor once trimmed to fix said resonant frequency, said signal capacitor comprising: a master capacitor on said substrate, said master capacitor having a pair of opposing plates, at least one of said plates being suspended so that it is movable in response to an electrostatic force produced by a control voltage applied across said master capacitor; a slave capacitor on said substrate that responds to a signal voltage, said slave capacitor having a pair of opposing plates, at least one of said plates being suspended so that it is movable; and a mechanical coupler suspended above said substrate that slaves the motion of said slave capacitor's movable plate to the motion of said master capacitor's movable plate to trim the capacitance of said slave capacitor while electrically isolating the slave capacitor from the master capacitor.

Claim 20

A tunable multiband oscillator, comprising: an amplifier, and an integrated tunable LC network connected to said amplifier to provide positive feedback so that the amplifier outputs a local oscillator signal at a resonant frequency, said resonant network comprising: a plurality of tunable LC circuits that correspond to different coarse frequency bands, a controller that finely trims said LC circuits to respective resonant frequencies in the different frequency bands, and a micro-electromechanical system (MEMS) switching network that interconnects one of said LC circuits to said amplifier to set the resonant frequency of said oscillator signal, said LC circuits and said MEM switching network being integrated on a common substrate, wherein each said tunable LC circuit includes a tunable MEMS capacitor that comprises: a signal capacitor that is adjusted to trim the resonant frequency and an actuator that engages said signal capacitor once trimmed to fix said resonant frequency, said signal capacitor comprising: a master capacitor on said substrate, said master capacitor having a pair of opposing plates, at least one of said plates being suspended so that it is movable in response to an electrostatic force produced by a control voltage applied across said master capacitor; a slave capacitor on said substrate that responds to a signal voltage, said slave capacitor having a pair of opposing plates, at least one of said plates being suspended so that it is movable; and a mechanical coupler suspended above said substrate that slaves the motion of said slave capacitor's movable plate to the motion of said master capacitor's movable plate to trim the capacitance of said slave capacitor while electrically isolating the slave capacitor from the master capacitor.

Claim 21

A tunable multiband oscillator, comprising: an amplifier, and an integrated tunable LC network connected to said amplifier to provide positive feedback so that the amplifier outputs a local oscillator signal at a resonant frequency, said resonant network comprising: a plurality of tunable LC circuits that correspond to different coarse frequency bands, a controller that finely trims said LC circuits to respective resonant frequencies in the different frequency bands, and a micro-electromechanical system (MEMS) switching network that interconnects one said LC circuits to said amplifier to set the resonant frequency of said oscillator signal, said LC circuits and said MEM switching network being integrated on a common substrate, wherein each said tunable LC circuit includes a tunable MEMS capacitor that comprises: a master capacitor on said substrate, said master capacitor having a pair of opposing plates, at least one of said plates being suspended so that it is movable in response to an electrostatic force produced by a control voltage applied across said master capacitor; a slave capacitor on said substrate that responds to a signal voltage, said slave capacitor having a pair of opposing plates, at least one of said plates being suspended so that it is movable; and p 3 a mechanical coupler suspended above said substrate that slaves the motion of said slave capacitor's movable plate to the motion of said master capacitor's movable plate to trim the capacitance of said slave capacitor while electrically isolating the slave capacitor from the master capacitor.

Claim 22

A tunable multiband oscillator, comprising: an amplifier, and an integrated tunable LC network connected to said amplifier to provide positive feedback so that the amplifier outputs a local oscillator signal at a resonant frequency, said resonant network comprising: a plurality of tunable LC circuits that correspond to different coarse frequency bands, a controller that finely trims said LC circuits to respective resonant frequencies in the different frequency bands, and a micro-electromechanical system (MEMS) switching network that interconnects one said LC circuits to said amplifier to set the resonant frequency of said oscillator signal, said LC circuits and said MEM switching network being integrated on a common substrate, wherein each said tunable LC circuit includes a tunable MEMS capacitor that comprises: a master capacitor on said substrate, said master capacitor having a pair of opposing plates, at least one of said plates being suspended so that it is movable in response to an electrostatic force produced by a control voltage applied across said master capacitor; a slave capacitor on said substrate that responds to a signal voltage, said slave capacitor having a pair of opposing plates, at least one of said plates being suspended so that it is movable; and p 3 a mechanical coupler suspended above said substrate that slaves the motion of said slave capacitor's movable plate to the motion of said master capacitor's movable plate to trim the capacitance of said slave capacitor while electrically isolating the slave capacitor from the master capacitor.