Abstract A method of preparing a narrow photoresist line by first forming a resist pattern on a substrate, wherein a resist line is designed to have a width “w” in excess of a desired width “w 1 ” The resist is then subjected to ionic bombardment with ionized particles in a direction normal to the planar surface of a resistant substrate. The ionic bombardment causes formation of a hardened “chemically less reactive” skin on the exposed top surface of the photoresist. The resist is then subjected to an isotropic etch procedure. Due to the hardened top surface of the narrow pattern, the side wall erode at a faster rate than the top, causing a narrowing of the line width, while retaining a more substantial photoresist thickness than would occur if the top surface would not be hardened in advance of the etch procedure.
A method of reducing the width of a photo resist line comprising the steps of: (a) hardening a top surface of said line by bombarding the top surface with ions, and said line having a height, and a width defined by a distance between first and second sidewalls; and (b) etching said line with an isotropic etching procedure to reduce said width of said line.
Claim 2
Independent Claim
65 words
A method of reducing the width of a photo resist line comprising the steps of: (a) hardening a top surface of said line by bombarding the top surface with ions, and said line having a height, and a width defined by a distance between first and second sidewalls; and (b) etching said line with an isotropic etching procedure to reduce said width of said line.
Claim 3
Dependent Claim
22 words
A method as recited in claim 1 wherein said ions are a selected species that will not chemically react with said photoresist.
Claim 4
Dependent Claim
22 words
A method as recited in claim 1 wherein said ions are created from gases selected from the group consisting of inert gases.
Claim 5
Dependent Claim
24 words
A method as recited in claim 3 wherein said ions are created from gases selected from the group consisting of noble gases and nitrogen.
Claim 6
Dependent Claim
23 words
A method as recited in claim 4 wherein said ions are created from gases selected from the group consisting of argon and nitrogen.
Claim 7
Dependent Claim
21 words
A method as recited in claim 1 wherein said ions have an energy in the range of 20 to 100 kev.
Claim 8
Dependent Claim
17 words
A method as recited in claim 6 wherein said ions have an energy less than 40 kev.
Claim 9
Dependent Claim
29 words
A method as recited in claim 1 wherein said ions are applied having a dose in the range of 10 15 to 10 16 ions per cm 2 .