US6223591B1
Expired / Lapsed
US
⏱️ 0.0 years remaining
Probe needle arrangement and movement method for use in an atomic force microscope
Assignee: Nikon Corp
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Filing: 1998-11-27
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Granted: 2001-05-01
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Expires: 2018-11-27
Abstract
Abstract A probe microscope including a probe needle arrangement having a probe needle part, and a detection part connected to, and formed along the same axis as, the probe needle part; a displacement detector that detects changes in a condition of the probe needle part; and a movement device that drives the probe needle arrangement relative to a sample surface to be measured.
Inventors
- 👤 Katsushi Nakano
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-09 01:18
CPC Classifications
G; G01; G01Q; G01Q60/00; G01Q60/24; G01Q60/38; B; B82; B82Y; B82Y35/00; G01Q20/00; G01Q20/02; Y; Y10; Y10S; Y10S977/00; Y10S977/84; Y10S977/849; Y10S977/85; Y10S977/851
Claims Analysis
Total Claims: 21
Claim 1
Independent Claim
67 words
A method for detecting an interaction force between a probe needle arrangement and a sample surface, the method comprising the steps of: generating a torsional resonant vibration centered on an axis within the probe needle arrangement, the axis passing along the length of the probe needle arrangement and being substantially perpendicular to the sample surface; and detecting the interactive force from changes in the torsional resonant vibration.
Claim 2
Independent Claim
67 words
A method for detecting an interaction force between a probe needle arrangement and a sample surface, the method comprising the steps of: generating a torsional resonant vibration centered on an axis within the probe needle arrangement, the axis passing along the length of the probe needle arrangement and being substantially perpendicular to the sample surface; and detecting the interactive force from changes in the torsional resonant vibration.
Claim 3
Dependent Claim
26 words
The method as claimed in claim 1 , wherein the generating step generates the torsional resonant vibration by a mechanical excitation of the probe needle arrangement.
Claim 4
Dependent Claim
21 words
The method as claimed in claim 1 , wherein the generating step generates the torsional resonant vibration using an electromagnetic force.
Claim 5
Dependent Claim
26 words
The method as claimed in claim 1 , wherein the detecting step detects the interactive force from changes in the amplitude of the torsional resonant vibration.
Claim 6
Dependent Claim
27 words
The method as claimed in claim 1 , wherein the detecting step detects the interactive force from changes in the resonant frequency of the torsional resonant vibration.
Claim 7
Dependent Claim
15 words
The method as claimed in claim 1 , wherein the detecting step involves optical detection.
Claim 8
Dependent Claim
15 words
The method as claimed in claim 1 , wherein the detecting step involves electromagnetic detection.
Claim 9
Dependent Claim
98 words
A probe needle arrangement movement method in a probe microscope, the method comprising the steps of: exciting a torsional resonant vibration in the probe needle arrangement; moving the probe needle arrangement relative to a sample; detecting changes in an interaction force between the probe needle arrangement and the sample by detecting changes in the torsional resonant vibration; and determining a further direction of movement of the probe needle arrangement in relation to a current placement of the probe needle arrangement and an amount of change in the interactive force when a change in the interactive force is detected.
Claim 10
Dependent Claim
98 words
A probe needle arrangement movement method in a probe microscope, the method comprising the steps of: exciting a torsional resonant vibration in the probe needle arrangement; moving the probe needle arrangement relative to a sample; detecting changes in an interaction force between the probe needle arrangement and the sample by detecting changes in the torsional resonant vibration; and determining a further direction of movement of the probe needle arrangement in relation to a current placement of the probe needle arrangement and an amount of change in the interactive force when a change in the interactive force is detected.
Claim 11
Dependent Claim
26 words
The method as claimed in claim 8 , wherein the exciting step excites the torsional resonant vibration by a mechanical excitation of the probe needle arrangement.
Claim 12
Dependent Claim
21 words
The method as claimed in claim 8 , wherein the exciting step excites the torsional resonant vibration using an electromagnetic force.
Claim 13
Dependent Claim
31 words
The method as claimed in claim 8 , wherein the detecting step detects the changes in the interactive force by detecting changes in the vibrational amplitude of the torsional resonant vibration.
Claim 14
Dependent Claim
31 words
The method as claimed in claim 8 , wherein the detecting step detects the changes in the interactive force by detecting changes in the resonant frequency of the torsional resonant vibration.
Claim 15
Independent Claim
149 words
A method of imaging the surface profile of a sample using a probe needle arrangement of a probe microscope, the method comprising the steps of: generating a torsional resonant vibration in the probe needle arrangement; moving the probe needle arrangement towards the sample; detecting changes in an interaction force between the probe needle arrangement and the sample by detecting changes in the torsional resonant vibration; determining a further direction of movement of the probe needle arrangement in relation to a current placement of the probe needle arrangement and an amount of change of the current interaction force each time a change in the interaction force is detected; storing data corresponding to each of the new directions of movement determinations in a memory unit; and imaging the surface profile of the sample from the data corresponding to each of the further directions of movement determinations stored in the memory unit.
Claim 16
Independent Claim
149 words
A method of imaging the surface profile of a sample using a probe needle arrangement of a probe microscope, the method comprising the steps of: generating a torsional resonant vibration in the probe needle arrangement; moving the probe needle arrangement towards the sample; detecting changes in an interaction force between the probe needle arrangement and the sample by detecting changes in the torsional resonant vibration; determining a further direction of movement of the probe needle arrangement in relation to a current placement of the probe needle arrangement and an amount of change of the current interaction force each time a change in the interaction force is detected; storing data corresponding to each of the new directions of movement determinations in a memory unit; and imaging the surface profile of the sample from the data corresponding to each of the further directions of movement determinations stored in the memory unit.
Claim 17
Independent Claim
120 words
A method of imaging a surface profile of a sample using a probe of a probe microscope, the method comprising the steps of: moving the probe towards the sample; detecting changes in an interaction force between the probe and the sample; determining a new direction of movement of the probe in relation to a current placement of the probe and an amount of change of the interaction force each time a change in the interaction force is detected; storing data corresponding to each of the new directions of movement determinations in a memory unit; and imaging the surface profile of the sample from the data corresponding to each of the further directions of movement determinations stored in the memory unit.
Claim 18
Independent Claim
120 words
A method of imaging a surface profile of a sample using a probe of a probe microscope, the method comprising the steps of: moving the probe towards the sample; detecting changes in an interaction force between the probe and the sample; determining a new direction of movement of the probe in relation to a current placement of the probe and an amount of change of the interaction force each time a change in the interaction force is detected; storing data corresponding to each of the new directions of movement determinations in a memory unit; and imaging the surface profile of the sample from the data corresponding to each of the further directions of movement determinations stored in the memory unit.
Claim 19
Dependent Claim
136 words
A probe microscope having a probe for imaging a surface profile of a sample, comprising: a movement device for driving the probe relative to a sample surface to be measured; a displacement detector for detecting changes in an interaction force between the probe and the sample; a determining section for determining a new direction of movement of the probe in relation to a current placement of the probe and an amount of change of the interaction force each time a change in the interaction force is detected; a memory for storing data corresponding to each of the new direction of movement determinations in a memory unit; and an imaging section for imaging the surface profile of the sample from the data corresponding to each of the new direction of movement determinations stored in the memory unit.
Claim 20
Dependent Claim
136 words
A probe microscope having a probe for imaging a surface profile of a sample, comprising: a movement device for driving the probe relative to a sample surface to be measured; a displacement detector for detecting changes in an interaction force between the probe and the sample; a determining section for determining a new direction of movement of the probe in relation to a current placement of the probe and an amount of change of the interaction force each time a change in the interaction force is detected; a memory for storing data corresponding to each of the new direction of movement determinations in a memory unit; and an imaging section for imaging the surface profile of the sample from the data corresponding to each of the new direction of movement determinations stored in the memory unit.
Claim 21
Dependent Claim
15 words
The probe microscope of claim 15 , wherein the probe is a pointed non-contact probe.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 2004-04-30 | 2004-10-30 | 2005-05-01 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2008-04-30 | 2008-10-30 | 2009-05-01 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2012-04-30 | 2012-10-30 | 2013-05-01 | $7700.00 | Window Closed / Lapsed |