Apparatus for machining, recording, and reproducing, using scanning probe microscope

Claim 2

In combination with a machining apparatus, a scanning probe microscope comprising: a probe having a probe tip extending in a Z direction; a vibration device having a piezoelectric vibrating body and an AC voltage generator for vibrating the probe tip relative to a surface of a sample; a vibration detecting device having a quartz oscillator and a current/voltage amplifier circuit for detecting vibration of the probe tip; a resilient body for biasing the probe into pressure contact with the quartz oscillator; a coarse displacement device for effecting coarse displacement of the probe in the Z direction to bring the probe tip close to the surface of the sample; a sample-to-probe distance control device having a fine displacement element and a servo circuit for effecting fine displacement of the probe tip in the Z direction; a two-dimensional scanning device having a fine displacement element and a scanning circuit for scanning the probe in X and Y directions to generate a measurement signal; and a data processing device for converting the measurement signal into a three-dimensional image.

Claim 3

A machining apparatus as set forth in claim 1; wherein the probe comprises an STM (scanning tunneling microscope) tip.

Claim 4

A machining apparatus as set forth in claim 1; wherein the probe comprises an AFM (atomic force microscope) cantilever.

Claim 5

A machining apparatus as set forth in claim 3; wherein the cantilever comprises a cantilever of a magnetic force microscope and is composed of a magnetic substance.

Claim 6

A machining apparatus as set forth in claim 3; wherein the cantilever comprises a conductive cantilever; and further comprising means for applying an electric potential to the sample surface.

Claim 7

A machining apparatus as set forth in claim 1; further comprising means for holding the sample in a vacuum.

Claim 8

A machining apparatus as set forth in claim 1; further comprising means for holding the sample in an inert gas or reactive gas.

Claim 9

A machining apparatus as set forth in claim 1; further comprising a sample stage for moving a measurement position on the sample surface.

Claim 10

A machining apparatus as set forth in claim 1; further comprising means for illuminating the surface of the sample with light.

Claim 11

A machining apparatus as set forth in claim 9; further comprising means for collecting and detecting light transmitted through the sample or light reflected off the surface of the sample.

Claim 12

A machining apparatus as set forth in claim 10; further comprising means for periodically modulating the light illuminated on the surface of the sample, and lock-in detecting means for measuring the light detected by the means for collecting and detecting light.

Claim 13

In combination with a recording-and-reproducing apparatus, a scanning probe microscope comprising: a probe having a probe tip extending in a Z direction; a vibration device having a piezoelectric vibrating body and an AC voltage generator for vibrating the probe tip relative to a surface of a sample; a vibration detecting device having a quartz oscillator and a current/voltage amplifier circuit for detecting vibration of the probe tip; a resilient body for biasing the probe into pressure contact with the quartz oscillator; a coarse displacement device for effecting coarse displacement of the probe in the Z direction to bring the probe tip close to the surface of the sample; a sample-to-probe distance control device having a fine displacement element and a servo circuit for effecting fine displacement of the probe tip in the Z direction; a two-dimensional scanning device having a fine displacement element and a scanning circuit for scanning the probe in X and Y directions to generate a measurement signal; and a data processing device for converting the measurement signal into a three-dimensional image.

Claim 14

In combination with a recording-and-reproducing apparatus, a scanning probe microscope comprising: a probe having a probe tip extending in a Z direction; a vibration device having a piezoelectric vibrating body and an AC voltage generator for vibrating the probe tip relative to a surface of a sample; a vibration detecting device having a quartz oscillator and a current/voltage amplifier circuit for detecting vibration of the probe tip; a resilient body for biasing the probe into pressure contact with the quartz oscillator; a coarse displacement device for effecting coarse displacement of the probe in the Z direction to bring the probe tip close to the surface of the sample; a sample-to-probe distance control device having a fine displacement element and a servo circuit for effecting fine displacement of the probe tip in the Z direction; a two-dimensional scanning device having a fine displacement element and a scanning circuit for scanning the probe in X and Y directions to generate a measurement signal; and a data processing device for converting the measurement signal into a three-dimensional image.

Claim 15

A recording-and-reproducing apparatus as set forth in claim 12; wherein the probe comprises an STM (scanning tunneling microscope) tip.

Claim 16

A recording-and-reproducing apparatus as set forth in claim 12; wherein the probe comprises an AFM (atomic force microscope) cantilever.

Claim 17

A recording-and-reproducing apparatus as set forth in claim 14; wherein the cantilever comprises a cantilever of a magnetic force microscope and is composed of a magnetic substance.

Claim 18

A recording-and-reproducing apparatus as set forth in claim 14; wherein the cantilever comprises a conductive cantilever and further comprising means for applying an electric potential to the sample surface.

Claim 19

A recording-and-reproducing apparatus as set forth in claim 12; further comprising means for holding the sample in a vacuum.

Claim 20

A recording-and-reproducing apparatus as set forth in claim 12; further comprising means for holding the sample in an inert gas or reactive gas.

Claim 21

A recording-and-reproducing apparatus as set forth in claim 12; further comprising a sample stage for moving a measurement position on the sample surface.

Claim 22

A recording-and-reproducing apparatus as set forth in claim 12; further comprising means for illuminating the surface of the sample with light.

Claim 23

A recording-and-reproducing apparatus as set forth in claim 20; further comprising means for collecting and detecting light transmitted through the sample or light reflected off the surface of the sample.

Claim 24

A recording-and-reproducing apparatus as set forth in claim 21; further comprising means for periodically modulating the light illuminated on the surface of the sample, and lock-in detecting means for measuring the light detected by the means for collecting and detecting light.

Claim 25

In combination with a machining apparatus, a scanning probe microscope comprising: a probe extending in a Z direction; vibrating means for vibrating the probe relative to a surface of a sample; vibration detecting means for detecting the probe vibration; biasing means for biasing the probe into pressure contact with the vibration detecting means; means for effecting coarse displacement of the probe in the Z direction; means for effecting fine displacement of the probe in the Z direction; means for scanning the probe in X and Y directions relative to the surface of the sample and generating a measurement signal; and processing means for processing the measurement signal into a three-dimensional image.

Claim 26

In combination with a machining apparatus, a scanning probe microscope comprising: a probe extending in a Z direction; vibrating means for vibrating the probe relative to a surface of a sample; vibration detecting means for detecting the probe vibration; biasing means for biasing the probe into pressure contact with the vibration detecting means; means for effecting coarse displacement of the probe in the Z direction; means for effecting fine displacement of the probe in the Z direction; means for scanning the probe in X and Y directions relative to the surface of the sample and generating a measurement signal; and processing means for processing the measurement signal into a three-dimensional image.

Claim 27

A scanning probe microscope according to claim 23; wherein the vibration detecting means comprises a quartz oscillator; and wherein the probe is integrally connected to the quartz oscillator by the pressure applied to the probe by the biasing means.

Claim 28

A scanning probe microscope according to claim 24; wherein the biasing means comprises a leaf spring.

Claim 29

A scanning probe microscope according to claim 23; wherein the vibrating means comprises a piezoelectric vibrating body and an AC voltage generator.

Claim 30

In combination with a recording-and-reproducing apparatus, a scanning probe microscope comprising: a probe extending in a Z direction; a piezoelectric vibrating body for vibrating the probe relative to a surface of a sample; a vibration detecting device having a quartz oscillator for detecting the probe vibration; a biasing member for biasing the probe into pressure contact with the quartz oscillator of the vibration detecting device to integrally connect the probe to the quartz oscillator; a coarse displacement device for effecting coarse displacement of the probe in the Z direction; a fine displacement device for effecting fine displacement of the probe in the Z direction; and a scanning device for scanning the probe in X and Y directions relative to the surface of the sample.

Claim 31

In combination with a recording-and-reproducing apparatus, a scanning probe microscope comprising: a probe extending in a Z direction; a piezoelectric vibrating body for vibrating the probe relative to a surface of a sample; a vibration detecting device having a quartz oscillator for detecting the probe vibration; a biasing member for biasing the probe into pressure contact with the quartz oscillator of the vibration detecting device to integrally connect the probe to the quartz oscillator; a coarse displacement device for effecting coarse displacement of the probe in the Z direction; a fine displacement device for effecting fine displacement of the probe in the Z direction; and a scanning device for scanning the probe in X and Y directions relative to the surface of the sample.

Claim 32

A scanning probe microscope according to claim 27; wherein the biasing member comprises a leaf spring.