US6208675B1
Expired / Lapsed
US
⏱️ 0.0 years remaining
Blower assembly for a pulsed laser system incorporating ceramic bearings
Assignee: Cymer LLC
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Filing: 1998-08-27
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Granted: 2001-03-27
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Expires: 2018-08-27
Abstract
Abstract A blower assembly for circulating gases in a laser chamber. The blower assembly includes a driving assembly operatively engaged to a drive side shaft for rotating a fan assembly. A first bearing assembly supports the drive side shaft. The blower assembly may further include an idle side shaft for supporting the fan assembly and a second bearing assembly circumscribing the idle side shaft. The driving assembly includes a motor disposed over a rotor. The fan assembly includes a pair of hubs supporting a plurality of blades. The first and second bearing assemblies comprise a ceramic compound, such as silicon nitride (Si 3 N 4 ), and are lubricated with a synthetic oil, such as perfluoropolyalkylether (PFPE).
Inventors
- 👤 R. Kyle Webb
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-25 09:06
CPC Classifications
H; H01; H01S; H01S3/00; H01S3/02; H01S3/03; H01S3/036; H01S3/14; H01S3/22; H01S3/223; H01S3/225
Claims Analysis
Total Claims: 28
Claim 1
Independent Claim
170 words
A laser apparatus, comprising: a) a laser chamber having interconnected walls defining a laser cavity inside said laser chamber, said laser cavity housing gases; b) a drive side shaft supported by said laser chamber; c) a first bearing assembly circumscribing said drive side shaft and exposed to said gases within said laser cavity, said first bearing assembly comprising a ceramic compound such that said gases do not substantially react with said ceramic compound; d) a driving assembly operatively engaged to said drive side shaft for rotating said drive side shaft; and e) a fan assembly disposed in said laser cavity and engaged to said drive side shaft for circulating said gases; wherein said drive side shaft is generally defined by an integral structure having an inner disc portion, an outer disc portion extending from said inner disc portion, a rod extending from said outer disc portion, and a shoulder formed on said outer disc portion such that said first bearing assembly is supporting said rod and communicating with said shoulder.
Claim 2
Dependent Claim
170 words
A laser apparatus, comprising: a) a laser chamber having interconnected walls defining a laser cavity inside said laser chamber, said laser cavity housing gases; b) a drive side shaft supported by said laser chamber; c) a first bearing assembly circumscribing said drive side shaft and exposed to said gases within said laser cavity, said first bearing assembly comprising a ceramic compound such that said gases do not substantially react with said ceramic compound; d) a driving assembly operatively engaged to said drive side shaft for rotating said drive side shaft; and e) a fan assembly disposed in said laser cavity and engaged to said drive side shaft for circulating said gases; wherein said drive side shaft is generally defined by an integral structure having an inner disc portion, an outer disc portion extending from said inner disc portion, a rod extending from said outer disc portion, and a shoulder formed on said outer disc portion such that said first bearing assembly is supporting said rod and communicating with said shoulder.
Claim 3
Dependent Claim
104 words
The laser apparatus of claim 1 , wherein said laser chamber comprises an electrode structure disposed within said laser cavity, said electrode structure comprising an anode and a cathode separated by a distance defining an electrical discharge area; a pre-ionizer disposed within said laser cavity and positioned proximal said electrode structure; a heat exchanger disposed within said laser cavity; an insulator member disposed within said laser cavity such that said insulator member is positioned intermediate said cathode and one of said walls closest to said cathode; and at least one vane selectively positioned in said laser cavity for guiding a directional flow of gases.
Claim 4
Dependent Claim
19 words
The laser apparatus of claim 1 , wherein said ceramic compound comprises silicon nitride (Si 3 N 4 ).
Claim 5
Dependent Claim
25 words
The laser apparatus of claim 1 , additionally comprising a collar, slidably engaged to said rod for compressing said first bearing assembly against said shoulder.
Claim 6
Dependent Claim
19 words
The laser apparatus of claim 4 , additionally comprising a key engaged to said rod for supporting said collar.
Claim 7
Dependent Claim
57 words
The laser apparatus of claim 1 , additionally comprising an idle side shaft engaged to said fan assembly and a second bearing assembly circumscribing said idle side shaft and exposed to said gases within said laser cavity, said second bearing assembly comprising a ceramic compound such that said gases do not substantially react with said ceramic compound.
Claim 8
Dependent Claim
19 words
The laser apparatus of claim 6 , wherein said ceramic compound comprises silicon nitride (Si 3 N 4 ).
Claim 9
Dependent Claim
66 words
The laser apparatus of claim 6 , wherein said idle side shaft is generally defined by said integral structure having said inner disc portion, said outer disc portion extending from said inner disc portion, said rod extending from said outer disc portion, and said shoulder formed on said outer disc portion such that said second bearing assembly is supporting said rod and communicating with said shoulder.
Claim 10
Dependent Claim
43 words
The laser apparatus of claim 1 , wherein said driving assembly comprises a rotor engaged to said drive side shaft, a motor disposed over said rotor for operatively driving said rotor, and a drive pressure cup disposed between said rotor and said motor.
Claim 11
Dependent Claim
44 words
The laser apparatus of claim 1 , wherein said fan assembly comprises a first hub coupled to said drive side shaft, a second hub coupled to said idle side shaft, and a plurality of blades disposed between said first hub and said second hub.
Claim 12
Dependent Claim
17 words
The laser apparatus of claim 1 , wherein said ceramic compound comprises zirconium oxide (ZrO 2 ).
Claim 13
Dependent Claim
130 words
A blower for circulating gases, comprising: a) a fan assembly for circulating gases; b) a drive side shaft coupled to said fan assembly for operatively driving said fan assembly; c) a first bearing assembly circumscribing said drive side shaft for supporting said drive side shaft, said first bearing assembly comprising a ceramic compound; and d) a driving assembly operatively engaged to said drive side shaft for rotating said drive side shaft; wherein said drive side shaft is generally defined by an integral structure having an inner disc portion, an outer disc portion extending from said inner disc portion, a rod extending from said outer disc portion, and a shoulder formed on said outer disc portion such that said first bearing assembly is supporting said rod and communicating with said shoulder.
Claim 14
Dependent Claim
130 words
A blower for circulating gases, comprising: a) a fan assembly for circulating gases; b) a drive side shaft coupled to said fan assembly for operatively driving said fan assembly; c) a first bearing assembly circumscribing said drive side shaft for supporting said drive side shaft, said first bearing assembly comprising a ceramic compound; and d) a driving assembly operatively engaged to said drive side shaft for rotating said drive side shaft; wherein said drive side shaft is generally defined by an integral structure having an inner disc portion, an outer disc portion extending from said inner disc portion, a rod extending from said outer disc portion, and a shoulder formed on said outer disc portion such that said first bearing assembly is supporting said rod and communicating with said shoulder.
Claim 15
Dependent Claim
18 words
The blower of claim 12 , wherein said ceramic compound comprises silicon nitride (Si 3 N 4 ).
Claim 16
Dependent Claim
35 words
The blower of claim 12 , additionally comprising an idle side shaft engaged to said fan assembly and a second bearing assembly circumscribing said idle side shaft, said second bearing assembly comprising a ceramic compound.
Claim 17
Dependent Claim
17 words
The blower of claim 14 wherein said ceramic compound comprises silicon nitride (Si 3 N 4 ).
Claim 18
Dependent Claim
15 words
The blower of claim 14 wherein said ceramic compound comprises zirconium oxide (ZrO 2 ).
Claim 19
Dependent Claim
43 words
The blower of claim 12 , wherein said fan assembly comprises a first hub coupled to said drive side shaft, a second hub coupled to said idle side shaft, and a plurality of blades disposed between said first hub and said second hub.
Claim 20
Dependent Claim
31 words
The blower of claim 12 , wherein said driving assembly comprises a rotor engaged to said drive side shaft and a motor disposed over said rotor for operatively driving said rotor.
Claim 21
Independent Claim
141 words
A method for circulating gases in a laser chamber, comprising: a) disposing a blower assembly within said laser chamber, said blower assembly comprising a drive side shaft, a fan assembly engaged to said drive side shaft for circulating gases, and a bearing assembly circumscribing said drive side shaft, wherein said bearing assembly comprises a ceramic compound and wherein said drive side shaft is generally defined by an integral structure having an inner disc portion, an outer disc portion extending from said inner disc portion, a rod extending from said outer disc portion, and a shoulder formed on said outer disc portion such that said first bearing assembly is supporting said rod and communicating with said shoulder; and b) rotating said drive shaft to operatively drive said fan assembly and to circulate gases between said fan assembly and in said laser chamber.
Claim 22
Independent Claim
141 words
A method for circulating gases in a laser chamber, comprising: a) disposing a blower assembly within said laser chamber, said blower assembly comprising a drive side shaft, a fan assembly engaged to said drive side shaft for circulating gases, and a bearing assembly circumscribing said drive side shaft, wherein said bearing assembly comprises a ceramic compound and wherein said drive side shaft is generally defined by an integral structure having an inner disc portion, an outer disc portion extending from said inner disc portion, a rod extending from said outer disc portion, and a shoulder formed on said outer disc portion such that said first bearing assembly is supporting said rod and communicating with said shoulder; and b) rotating said drive shaft to operatively drive said fan assembly and to circulate gases between said fan assembly and in said laser chamber.
Claim 23
Dependent Claim
18 words
The method of claim 19 , wherein said ceramic compound comprises silicon nitride (Si 3 N 4 ).
Claim 24
Dependent Claim
16 words
The method of claim 19 , wherein said ceramic compound comprises zirconium oxide (ZrO 2 ).
Claim 25
Dependent Claim
20 words
The method of claim 19 , additionally comprising, prior to rotating step (b), providing a lubricant to said bearing assembly.
Claim 26
Dependent Claim
23 words
The method of claim 19 , additionally comprising circulating said gases against said bearing assembly without any essential corrosion to said bearing assembly.
Claim 27
Dependent Claim
22 words
The method of claim 19 , additionally comprising circulating said gases against said bearing assembly without any essential contamination to said gases.
Claim 28
Dependent Claim
22 words
The method of claim 22 , additionally comprising circulating said gases against said bearing assembly without any essential degradation of said lubricant.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 2004-03-26 | 2004-09-25 | 2005-03-27 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2008-03-26 | 2008-09-25 | 2009-03-27 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2012-03-26 | 2012-09-25 | 2013-03-27 | $7700.00 | Window Closed / Lapsed |