US6207630B1
Expired / Lapsed
US
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Processing compositions and methods of using same
Assignee: Micron Technology Inc
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Filing: 2000-01-06
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Granted: 2001-03-27
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Expires: 2020-01-06
Abstract
Abstract Compositions and methods for processing (e.g., cleaning) substrates, such as semiconductor-based substrates, as well as processing equipment, include one or more compounds of Formula (I):wherein each R1, R2, R3, and R4 is independently H or an organic group.
Inventors
- 👤 Brian A. Vaartstra
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-24 17:59
CPC Classifications
H; H10; H10P; H10P70/00; H10P70/10; H10P70/15; C; C11; C11D; C11D7/00; C11D7/22; C11D7/26; C11D7/264; C11D7/32; C11D7/3209; C11D7/3236; C11D2111/00; C11D2111/10; C11D2111/14; C11D2111/22; H10P52/00; H10P52/40; H10P52/402; H10P95/00; H10P95/06; H10P95/062
Claims Analysis
Total Claims: 23
Claim 1
Independent Claim
50 words
A processing composition for use in fabricating semiconductor-based structures, the processing composition comprising a liquid carrier and a compound of the formula: wherein each R 1 , R 2 , R 3 , and R 4 is independently H or an organic group and wherein the liquid carrier comprises water.
Claim 2
Dependent Claim
50 words
A processing composition for use in fabricating semiconductor-based structures, the processing composition comprising a liquid carrier and a compound of the formula: wherein each R 1 , R 2 , R 3 , and R 4 is independently H or an organic group and wherein the liquid carrier comprises water.
Claim 3
Dependent Claim
29 words
The composition according to claim 1 , wherein each of R 1 , R 2 , R 3 , and R 4 is independently H or a hydrocarbyl group.
Claim 4
Dependent Claim
18 words
The composition according to claim 2 , wherein the hydrocarbyl group is C 1 -C 4 hydrocarbyl group.
Claim 5
Dependent Claim
22 words
The composition according to claim 2 , wherein one or more hydrogen atoms in the hydrocarbyl group are replaced by fluorine atoms.
Claim 6
Dependent Claim
28 words
The composition according to claim 1 , wherein the compound of Formula I is present in the composition in an amount of less than about 50% by weight.
Claim 7
Dependent Claim
28 words
The composition according to claim 5 , wherein the compound of Formula I is present in the composition in an amount of less than about 10% by weight.
Claim 8
Dependent Claim
14 words
The composition according to claim 1 , wherein the composition further comprises a surfactant.
Claim 9
Dependent Claim
48 words
A processing composition for use in fabricating semiconductor-based structures, the processing composition comprising a liquid carrier and a compound of the formula: wherein each R 1 , R 2 , and R 3 is independently H or an organic group, wherein the composition further comprises an abrasive component.
Claim 10
Dependent Claim
48 words
A processing composition for use in fabricating semiconductor-based structures, the processing composition comprising a liquid carrier and a compound of the formula: wherein each R 1 , R 2 , and R 3 is independently H or an organic group, wherein the composition further comprises an abrasive component.
Claim 11
Dependent Claim
29 words
The composition according to claim 8 , wherein each of R 1 , R 2 , R 3 , and R 4 is independently H or a hydrocarbyl group.
Claim 12
Dependent Claim
28 words
The composition according to claim 9 , wherein the compound of Formula I is present in the composition in an amount of less than about 10% by weight.
Claim 13
Dependent Claim
18 words
The composition according to claim 9 , wherein the hydrocarbyl group is C 1 -C 4 hydrocarbyl group.
Claim 14
Dependent Claim
22 words
The composition according to claim 9 , wherein one or more hydrogen atoms in the hydrocarbyl group are replaced by fluorine atoms.
Claim 15
Dependent Claim
28 words
The composition according to claim 8 , wherein the compound of Formula I is present in the composition in an amount of less than about 50% by weight.
Claim 16
Dependent Claim
28 words
The composition according to claim 13 , wherein the compound of Formula I is present in the composition in an amount of less than about 10% by weight.
Claim 17
Dependent Claim
52 words
A processing composition for use in fabricating semiconductor-based structures, the processing composition comprising a liquid carrier and a compound of the formula: wherein each R 1 , R 2 , R 3 , and R 4 is independently H or an organic group and wherein the liquid carrier consists essentially of water.
Claim 18
Dependent Claim
52 words
A processing composition for use in fabricating semiconductor-based structures, the processing composition comprising a liquid carrier and a compound of the formula: wherein each R 1 , R 2 , R 3 , and R 4 is independently H or an organic group and wherein the liquid carrier consists essentially of water.
Claim 19
Dependent Claim
29 words
The composition according to claim 15 , wherein each of R 1 , R 2 , R 3 , and R 4 is independently H or a hydrocarbyl group.
Claim 20
Dependent Claim
18 words
The composition according to claim 16 , wherein the hydrocarbyl group is C 1 -C 4 hydrocarbyl group.
Claim 21
Dependent Claim
22 words
The composition according to claim 16 , wherein one or more hydrogen atoms in the hydrocarbyl group are replaced by fluorine atoms.
Claim 22
Dependent Claim
28 words
The composition according to claim 15 , wherein the compound of Formula I is present in the composition in an amount of less than about 50% by weight.
Claim 23
Dependent Claim
15 words
The composition according to claim 15 , wherein the composition further comprises an abrasive component.
References Cited (Backward Citations)
US2857331A
Cited
US3816533A
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US3833572A
Cited
US4544446A
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US4762632A
Cited
US6030491A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 2004-03-26 | 2004-09-25 | 2005-03-27 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2008-03-26 | 2008-09-25 | 2009-03-27 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2012-03-26 | 2012-09-25 | 2013-03-27 | $7700.00 | Window Closed / Lapsed |