Miniature combination valve and pressure transducer system

Claim 2

A transducer apparatus, comprising: a mechanical structure operable by a user, the mechanical structure comprising a valve core of a valve, the valve core comprising an elongate barrel having a through bore, a proximal end, and a distal end, and a valve cup in said barrel movable between a first, open position and a second, closed position closing said valve; and a movable actuating pin extending through said barrel between said proximal and distal ends of said barrel and being coupled to said valve cup at said distal end of said barrel, said actuating pin having a proximal end protruding from said proximal end of said barrel, said movable actuating pin of said valve movable with respect to said barrel by a user engaging the proximal end of said actuating pin to move said valve cup to said open position, said actuating pin being formed substantially entirely by a microelectromechanical structure (MEMS) having a pressure transducer and pressure-sensing electronic circuitry integrally formed together on a semiconductor substrate for measuring a pressure.

Claim 3

A transducer apparatus comprising: a mechanical structure operable by a user; and a movable member cooperatively coupled to said mechanical structure for actuating said mechanical structure, said movable member and said mechanical structure selectably movable with respect to one another by a user to actuate said mechanical structure, said movable member comprising a microelectromechanical structure (MEMS) having a pressure transducer and pressure-sensing electronic circuitry integrally formed together on a semiconductor substrate for measuring a pressure; said movable member comprising first and second semiconductor substrates, each having a fabricated side on which is formed at least a portion of said MEMS, said substrates attached to one another with said fabricated side of said one substrate facing said fabricated side of said other substrate.

Claim 4

A transducer apparatus comprising: a mechanical structure operable by a user; and a movable member cooperatively coupled to said mechanical structure for actuating said mechanical structure, said movable member and said mechanical structure selectably movable with respect to one another by a user to actuate said mechanical structure, said movable member comprising a microelectromechanical structure (MEMS) having a pressure transducer and pressure-sensing electronic circuitry integrally formed together on a semiconductor substrate for measuring a pressure; said movable member comprising first and second semiconductor substrates, each having a fabricated side on which is formed at least a portion of said MEMS, said substrates attached to one another with said fabricated side of said one substrate facing said fabricated side of said other substrate.

Claim 5

The transducer apparatus recited in claim 1 , wherein said MEMS further has formed on it a transmission circuit transmitting a signal responsive to said pressure to a remote location.

Claim 6

The transducer apparatus recited in claim 3 , wherein said transmission circuit transmits wirelessly.

Claim 7

A transducer apparatus comprising: a mechanical structure operable by a user; a movable member cooperatively coupled to said mechanical structure for actuating said mechanical structure, said movable member and said mechanical structure selectably movable with respect to one another by a user to actuate said mechanical structure, said movable member comprising a microelectromechanical structure (MEMS) having a pressure transducer and pressure-sensing electronic circuitry integrally formed together on a semiconductor substrate for measuring a pressure; said MEMS further having formed on it a wireless transmission circuit for transmitting a wireless signal responsive to said pressure to a remote location; and said transmission circuit comprising an antenna having a wavelength modulated in response to said pressure for transmitting passively.

Claim 8

A transducer apparatus comprising: a mechanical structure operable by a user; a movable member cooperatively coupled to said mechanical structure for actuating said mechanical structure, said movable member and said mechanical structure selectably movable with respect to one another by a user to actuate said mechanical structure, said movable member comprising a microelectromechanical structure (MEMS) having a pressure transducer and pressure-sensing electronic circuitry integrally formed together on a semiconductor substrate for measuring a pressure; said MEMS further having formed on it a wireless transmission circuit for transmitting a wireless signal responsive to said pressure to a remote location; and said transmission circuit comprising an antenna having a wavelength modulated in response to said pressure for transmitting passively.

Claim 9

A transducer valve, comprising: a valve core mountable in a passage between an interior and an exterior of a pressure container for sensing pressure of a fluid in said interior, the valve core being elongated and having a central longitudinal axis; and a movable member comprising an actuator pin of elongated shape having a longitudinal axis disposed generally coaxially with the longitudinal axis of said valve core to extend through said valve core, said actuator pin selectively movable by a user engaging an end of said actuator pin protruding from said valve core between a closed position in which a portion of said actuator pin is in sealing engagement with a portion of said valve core to prevent fluid flow through said passage and an open position in which said portion of said actuator pin is not in sealing engagement with said portion of said valve core to allow fluid flow through said passage, said actuator pin being formed substantially entirely by a microelectromechanical structure (MEMS) having a pressure transducer and pressure-sensing electronic circuitry integrally formed on a semiconductor substrate.

Claim 10

A transducer valve, comprising: a valve core mountable in a passage between an interior and an exterior of a pressure container for sensing pressure of a fluid in said interior, the valve core being elongated and having a central longitudinal axis; and a movable member comprising an actuator pin of elongated shape having a longitudinal axis disposed generally coaxially with the longitudinal axis of said valve core to extend through said valve core, said actuator pin selectively movable by a user engaging an end of said actuator pin protruding from said valve core between a closed position in which a portion of said actuator pin is in sealing engagement with a portion of said valve core to prevent fluid flow through said passage and an open position in which said portion of said actuator pin is not in sealing engagement with said portion of said valve core to allow fluid flow through said passage, said actuator pin being formed substantially entirely by a microelectromechanical structure (MEMS) having a pressure transducer and pressure-sensing electronic circuitry integrally formed on a semiconductor substrate.

Claim 11

A transducer valve, comprising: a body mountable in a passage between an interior and an exterior of a pressure container for sensing pressure of a fluid in said interior; a movable member at least partially within said body, said movable member selectively movable by a user between a closed position in which a portion of said actuator pin is in sealing engagement with a portion of said body to prevent fluid flow through said passage and an open position in which said portion of said actuator pin is not in sealing engagement with said portion of said body to allow fluid flow through said passage, said movable member comprising a microelectromechanical structure (MEMS) having a pressure transducer and pressure-sensing electronic circuitry integrally formed on a semiconductor substrate; and said movable member comprising first and second semiconductor substrates, each having a fabricated side on which is formed at least a portion of said MEMS, said substrates attached to one another with said fabricated side of said one substrate facing said fabricated side of said other substrate.

Claim 12

A transducer valve, comprising: a body mountable in a passage between an interior and an exterior of a pressure container for sensing pressure of a fluid in said interior; a movable member at least partially within said body, said movable member selectively movable by a user between a closed position in which a portion of said actuator pin is in sealing engagement with a portion of said body to prevent fluid flow through said passage and an open position in which said portion of said actuator pin is not in sealing engagement with said portion of said body to allow fluid flow through said passage, said movable member comprising a microelectromechanical structure (MEMS) having a pressure transducer and pressure-sensing electronic circuitry integrally formed on a semiconductor substrate; and said movable member comprising first and second semiconductor substrates, each having a fabricated side on which is formed at least a portion of said MEMS, said substrates attached to one another with said fabricated side of said one substrate facing said fabricated side of said other substrate.

Claim 13

The transducer apparatus recited in claim 6 , wherein said MEMS further has formed on it a transmission circuit transmitting a signal responsive to said pressure to a remote location.

Claim 14

A transducer valve, comprising: a body mountable in a passage between an interior and an exterior of a pressure container for sensing pressure of a fluid in said interior; a movable member at least partially within said body, said movable member selectively movable by a user between a closed position in which a portion of said actuator pin is in sealing engagement with a portion of said body to prevent fluid flow through said passage and an open position in which said portion of said actuator pin is not in sealing engagement with said portion of said body to allow fluid flow through said passage, said movable member comprising a microelectromechanical structure (MEMS) having a pressure transducer and pressure-sensing electronic circuitry integrally formed on a semiconductor substrate; and said MEMS further having formed on it a transmission circuit transmitting a signal responsive to said pressure to a remote location; said transmission circuit transmitting wirelessly.

Claim 15

A transducer valve, comprising: a body mountable in a passage between an interior and an exterior of a pressure container for sensing pressure of a fluid in said interior; a movable member at least partially within said body, said movable member selectively movable by a user between a closed position in which a portion of said actuator pin is in sealing engagement with a portion of said body to prevent fluid flow through said passage and an open position in which said portion of said actuator pin is not in sealing engagement with said portion of said body to allow fluid flow through said passage, said movable member comprising a microelectromechanical structure (MEMS) having a pressure transducer and pressure-sensing electronic circuitry integrally formed on a semiconductor substrate; and said MEMS further having formed on it a transmission circuit transmitting a signal responsive to said pressure to a remote location; said transmission circuit transmitting wirelessly.

Claim 16

The transducer apparatus recited in claim 9 , wherein said transmission circuit comprises an antenna having a wavelength modulated in response to said pressure for transmitting passively.

Claim 17

The transducer apparatus recited in claim 6 , wherein said valve is a tire inflation valve, and said user moving said MEMS axially between said open and closed positions opens and closes said tire inflation valve.

Claim 18

The transducer apparatus recited in claim 11 , wherein said valve core has a proximal end and a distal end and includes a barrel, a cup, and a spring, said barrel has a proximal end and a distal end, and said MEMS extends through said barrel between said proximal and distal ends of said barrel and has a distal end connected to said cup at said distal end of said barrel and has a proximal end protruding from said proximal end of said barrel, and said spring biases said cup into sealing engagement with said distal end of said barrel.

Claim 19

The transducer apparatus recited in claim 12 , wherein: said MEMS further has formed on it a transmission circuit wirelessly transmitting a signal responsive to said pressure to a remote location; and said valve core includes an antenna electronically coupled to said distal end of said MEMS and extending from said distal end of said valve core.

Claim 20

A transducer apparatus, comprising: a structure having a curved wall with an aperture between opposing sides of said wall; and a microelectromechanical structure (MEMS) having a pressure transducer and pressure-sensing electronic circuitry integrally formed on a semiconductor substrate, said MEMS mounted to said structure and extending at least part way through said aperture at an oblique angle with respect a line parallel to a portion of said wall, said MEMS measuring pressure on one side of said wall with respect to pressure on an opposite side of said wall.

Claim 21

A transducer apparatus, comprising: a structure having a curved wall with an aperture between opposing sides of said wall; and a microelectromechanical structure (MEMS) having a pressure transducer and pressure-sensing electronic circuitry integrally formed on a semiconductor substrate, said MEMS mounted to said structure and extending at least part way through said aperture at an oblique angle with respect a line parallel to a portion of said wall, said MEMS measuring pressure on one side of said wall with respect to pressure on an opposite side of said wall.

Claim 22

The transducer apparatus recited in claim 14 , wherein said structure is a valve core of a vehicle tire inflation valve, said MEMS has an elongated shape and is disposed through an aperture in a generally tubular barrel portion of said valve core.

Claim 23

The transducer apparatus recited in claim 14 , wherein said MEMS further has formed on it a transmission circuit transmitting a signal responsive to said pressure to a remote location.

Claim 24

The transducer apparatus recited in claim 16 , wherein said transmission circuit transmits wirelessly.

Claim 25

The transducer apparatus recited in claim 17 , wherein said transmission circuit comprises an antenna having a wavelength modulated in response to said pressure for transmitting passively.

Claim 26

A transducer apparatus, comprising: a mechanical structure operable by a user; and a movable member cooperatively coupled to said mechanical structure for actuating said mechanical structure, said movable member and said mechanical structure selectably movable with respect to one another by a user engaging said movable member to actuate said mechanical structure, said movable member being formed substantially entirely by a microelectromechanical structure (MEMS) having a pressure transducer and pressure-sensing electronic circuitry integrally formed together on a semiconductor substrate for measuring a pressure.

Claim 27

A transducer apparatus, comprising: a mechanical structure operable by a user; and a movable member cooperatively coupled to said mechanical structure for actuating said mechanical structure, said movable member and said mechanical structure selectably movable with respect to one another by a user engaging said movable member to actuate said mechanical structure, said movable member being formed substantially entirely by a microelectromechanical structure (MEMS) having a pressure transducer and pressure-sensing electronic circuitry integrally formed together on a semiconductor substrate for measuring a pressure.

Claim 28

A transducer apparatus, comprising: a mechanical structure operable by a user; and a movable member cooperatively coupled to said mechanical structure for actuating said mechanical structure, said movable member and said mechanical structure selectably movable with respect to one another by a user to actuate said mechanical structure, said movable member transferring an actuating force between said member and said structure when operated by a user, said movable member being formed substantially entirely by a micromechanical structure (MEMS) having a transducer and transducer electronic circuitry integrally formed together on a semiconductor substrate.

Claim 29

A transducer apparatus, comprising: a mechanical structure operable by a user; and a movable member cooperatively coupled to said mechanical structure for actuating said mechanical structure, said movable member and said mechanical structure selectably movable with respect to one another by a user to actuate said mechanical structure, said movable member transferring an actuating force between said member and said structure when operated by a user, said movable member being formed substantially entirely by a micromechanical structure (MEMS) having a transducer and transducer electronic circuitry integrally formed together on a semiconductor substrate.

Claim 30

The transducer apparatus of claim 21 , wherein; said transducer comprises a pressure transducer.