US6184970B1
Expired / Lapsed
US
⏱️ 0.0 years remaining
Master plate transporting system
Assignee: Nikon Corp
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Filing: 1997-10-22
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Granted: 2001-02-06
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Expires: 2017-10-22
Abstract
Abstract A master plate transporting system automatically detects the presence/absence of master plates accommodated in a container and also detects the position of each master plate in the container as well as the type of the container being used. In this arrangement, the master plate transporting system executes the automatic transporting operation without transport errors. Containers each holding one or more reticles, are positioned in a semiconductor manufacturing apparatus. A reticle detection sensor detects the presence and the position of the reticle in each container. A controller controls the transporting operation of a reticle transporting mechanism based on the detection results of the detection sensor to reliably retrieve the reticle, transport it to an exposure system, and return it to the container.
Inventors
- 👤 Kanefumi Nakahara
- 👤 Yutaka Endo
- 👤 Akio Nishikata
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-31 10:55
CPC Classifications
G; G03; G03F; G03F1/00; G03F1/66; G03F7/00; G03F7/70; G03F7/70483; G03F7/70491; G03F7/70541; G03F7/70691; G03F7/70733; G03F7/70741
Claims Analysis
Total Claims: 14
Claim 1
Independent Claim
153 words
An exposure apparatus for exposing an image pattern formed on a reticle onto an object, the exposure apparatus comprising: an exposure system located between the reticle and the object to expose the image pattern onto the object; a reticle storing system including an upper unit, a lower unit and a moving unit to store one or more reticles, said moving unit moving said one or more reticles between said upper unit and said lower unit; a reticle transporting system cooperating with the reticle storing system, the reticle transporting system transporting the reticle between the reticle storing system and the exposure system; and an edge detector disposed facing a location where an edge of the reticle should be if present, the edge detector being positioned to detect the edge of the reticle in a non-contact manner while said moving unit moves said one or more reticles between said upper unit and said lower unit.
Claim 2
Dependent Claim
153 words
An exposure apparatus for exposing an image pattern formed on a reticle onto an object, the exposure apparatus comprising: an exposure system located between the reticle and the object to expose the image pattern onto the object; a reticle storing system including an upper unit, a lower unit and a moving unit to store one or more reticles, said moving unit moving said one or more reticles between said upper unit and said lower unit; a reticle transporting system cooperating with the reticle storing system, the reticle transporting system transporting the reticle between the reticle storing system and the exposure system; and an edge detector disposed facing a location where an edge of the reticle should be if present, the edge detector being positioned to detect the edge of the reticle in a non-contact manner while said moving unit moves said one or more reticles between said upper unit and said lower unit.
Claim 3
Dependent Claim
31 words
The exposure apparatus according to claim 1 , further comprising a controller communicating with the edge detector, the controller controlling the transporting according to a detection result of the edge detector.
Claim 4
Dependent Claim
73 words
The exposure apparatus according to claim 1 , wherein the edge detector comprises: a light-emitting system that emits a light to the edge of the reticle; a light-receiving system that receives the light reflected from the edge of the reticle; and a detection unit communicating with the light-receiving system, the detection unit detecting the presence of the reticle in the reticle storing system in accordance with a signal from the light receiving system.
Claim 5
Dependent Claim
16 words
The exposure apparatus according to claim 1 , wherein the edge detector is a reflection-type sensor.
Claim 6
Dependent Claim
19 words
An object on which said image pattern has been transferred by the exposure apparatus according to claim 1 .
Claim 7
Dependent Claim
35 words
The exposure apparatus according to claim 1 , wherein said moving unit comprises a holding surface that holds said one or more reticles, and wherein said edge detector is substantially perpendicular to the holding surface.
Claim 8
Dependent Claim
18 words
The exposure apparatus according to claim 1 , wherein said upper unit is detachable from said lower unit.
Claim 9
Independent Claim
148 words
A method for making an exposure apparatus that exposes a pattern of a reticle onto an object, the method comprising: providing an exposure system that exposes the pattern onto the object; providing a reticle storing system including an upper unit, a lower unit and a moving unit to store one or more reticles, said moving unit moving said one or more reticles between said upper unit and said lower unit; providing a reticle transporting system cooperating with the reticle storing system, the reticle transporting system transporting the reticle between the reticle storing system and the exposure system; and providing an edge detector disposed facing a location where an edge of the reticle should be if present, the edge detector detecting a side surface of the reticle in a non-contact manner while said moving unit moves said one or more reticles between said upper unit and said lower unit.
Claim 10
Independent Claim
148 words
A method for making an exposure apparatus that exposes a pattern of a reticle onto an object, the method comprising: providing an exposure system that exposes the pattern onto the object; providing a reticle storing system including an upper unit, a lower unit and a moving unit to store one or more reticles, said moving unit moving said one or more reticles between said upper unit and said lower unit; providing a reticle transporting system cooperating with the reticle storing system, the reticle transporting system transporting the reticle between the reticle storing system and the exposure system; and providing an edge detector disposed facing a location where an edge of the reticle should be if present, the edge detector detecting a side surface of the reticle in a non-contact manner while said moving unit moves said one or more reticles between said upper unit and said lower unit.
Claim 11
Dependent Claim
34 words
The method according to claim 8 , further comprising providing a controller that communicates with the edge detector, the controller controlling the reticle transporting system according to a detection result of the edge detector.
Claim 12
Dependent Claim
15 words
The method according to claim 8 , wherein the edge detector is a reflection-type sensor.
Claim 13
Dependent Claim
34 words
The method according to claim 8 , wherein said moving unit comprises a holding surface that holds said one or more reticles, and wherein said edge detector is substantially perpendicular to the holding surface.
Claim 14
Dependent Claim
17 words
The method according to claim 8 , wherein said upper unit is detachable from said lower unit.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 2004-02-06 | 2004-08-07 | 2005-02-06 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2008-02-06 | 2008-08-07 | 2009-02-06 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2012-02-06 | 2012-08-07 | 2013-02-06 | $7700.00 | Window Closed / Lapsed |