US6175645B1 — Optical inspection method and apparatus

Claim 1

Independent Claim 146 words

A method for inspecting an object having upper and lower faces for detecting defects existing on the object, the method comprising: a) providing first and second beams of radiation; b) directing the first beam of radiation onto the object so as to illuminate a first area of the object, and sensing a light component reflected from one face of the object; c) directing the second beam of radiation onto the object so as to illuminate a second, different area of the object, and sensing a light component transmitted through the upper and lower faces of the object; d) simultaneously acquiring first and second images of the object, wherein the first image is formed by the reflected light component and the second image is formed by the transmitted light component; and e) analyzing said first and second images so as to provide data indicative of said defects.

Claim 2

Independent Claim 146 words

A method for inspecting an object having upper and lower faces for detecting defects existing on the object, the method comprising: a) providing first and second beams of radiation; b) directing the first beam of radiation onto the object so as to illuminate a first area of the object, and sensing a light component reflected from one face of the object; c) directing the second beam of radiation onto the object so as to illuminate a second, different area of the object, and sensing a light component transmitted through the upper and lower faces of the object; d) simultaneously acquiring first and second images of the object, wherein the first image is formed by the reflected light component and the second image is formed by the transmitted light component; and e) analyzing said first and second images so as to provide data indicative of said defects.

Claim 3

Dependent Claim 29 words

The method according to claim 1 , wherein acquiring the first and second images comprises directing the reflected and transmitted light components onto first and second image sensors, respectively.

Claim 4

Dependent Claim 65 words

The method according to claim 2 , wherein the first and second beams of the radiation are directed onto the object from the opposite faces thereof, and further comprising: directing the reflected and transmitted light components via an optical system mounted in optical paths of the reflected and transmitted light components onto the first and second image sensors accommodated at one side of the object.

Claim 5

Dependent Claim 43 words

The method according to claim 1 , wherein directing the first and second beams of the radiation onto the object further comprise manipulating said first and second beams of the radiation to illuminate first and second parallel spaced-apart corresponding portions of the object.

Claim 6

Dependent Claim 25 words

The method according to claim 4 , wherein each of said first and second portions of the object are in the form of a strip.

Claim 7

Dependent Claim 80 words

The method according to claim 4 , wherein the first and second beams of the radiation are directed onto the object from the opposite faces thereof; the reflected and transmitted light components are directed onto, respectively, first and second image sensors, accommodated at one side of the object, via an optical system mounted in optical paths of the reflected and transmitted light components; and the first and second portions extend symmetrically relative to an optical axis of said optical system.

Claim 8

Dependent Claim 43 words

The method according to claim 1 , wherein the first and second beams of the radiation are directed onto the object from the opposite faces thereof; and the first and second beams of the incident radiation are formed of light having different wavelengths.

Claim 9

Dependent Claim 41 words

The method according to claim 1 , wherein the first and second beams of the radiation are directed onto the object from the opposite faces thereof; the first and second beams of the radiation are formed of light having different polarizations.

Claim 10

Dependent Claim 69 words

The method according to claim 4 , wherein the first and second images of the first and second portions are in the form of two lines, each having a width “a” and a length “b”, the width “a” being substantially smaller than the width of the respective portion, a space “d” between lines being such as to satisfy the following condition: d=n·a wherein “n” is an integer such n≧1.

Claim 11

Dependent Claim 33 words

The method according to claim 1 , wherein the step of providing the first and second beams of the radiation comprises providing first and second light sources each generating a beam of light.

Claim 12

Dependent Claim 60 words

The method according to claim 1 , wherein the step of providing the first and second beams of the radiation comprises providing a light source generating a beam of light and directing the generated beam of light towards the object via a beam splitter, which splits the generated beam of light into the first and second beams of the radiation.

Claim 13

Dependent Claim 42 words

The method according to claim 1 , further comprising the step of: supporting the object for sliding movement along two orthgonally oriented axes within an inspection plane so as to provide said first and second images of each point of the object.

Claim 14

Dependent Claim 23 words

The method according to claim 1 , wherein the analyzing of the first and second images comprises comparing the images to each other.

Claim 15

Independent Claim 159 words

An apparatus for optical inspection of an object, having upper and lower faces, so as to detect defects existing on the object, the apparatus comprising: i. an illumination system providing first and second beams of radiation simultaneously directed respectively onto a first area of the object and a second, different area of the object; ii. a sensing system mounted in the vicinity of the object and simultaneously sensing a light component of the first beam reflected from the upper face of the object and a light component of the second beam transmitted through the upper and lower faces of the object and providing output signals representative thereof; iii. a light directing system directing the reflected and transmitted light components onto the sensing system; and iv. a processor coupled to the sensing system for receiving the output signals; representative of the reflected and transmitted light components and for analyzing the signals so as to provide data indicative of said defects.

Claim 16

Independent Claim 159 words

An apparatus for optical inspection of an object, having upper and lower faces, so as to detect defects existing on the object, the apparatus comprising: i. an illumination system providing first and second beams of radiation simultaneously directed respectively onto a first area of the object and a second, different area of the object; ii. a sensing system mounted in the vicinity of the object and simultaneously sensing a light component of the first beam reflected from the upper face of the object and a light component of the second beam transmitted through the upper and lower faces of the object and providing output signals representative thereof; iii. a light directing system directing the reflected and transmitted light components onto the sensing system; and iv. a processor coupled to the sensing system for receiving the output signals; representative of the reflected and transmitted light components and for analyzing the signals so as to provide data indicative of said defects.

Claim 17

Dependent Claim 26 words

The apparatus according to claim 14 , wherein the illumination system comprises two light sources for generating, respectively, said first and second beams of the radiation.

Claim 18

Dependent Claim 39 words

The apparatus according to claim 14 , wherein the illumination system comprises a light source for generating a beam of light and a beam splitter for splitting the generated beam into said first and second beams of the radiation.

Claim 19

Dependent Claim 33 words

The apparatus according to claim 14 , wherein the illumination system comprises a directing optics for directing the first and second beams of the radiation onto, respectively, the opposite faces of the object.

Claim 20

Dependent Claim 36 words

The apparatus according to claim 14 , wherein the illumination system comprises a directing optics for directing the first and second beams of the radiation onto, respectively, first and second parallel, spaced-apart portions of the object.

Claim 21

Dependent Claim 23 words

The apparatus according to claim 14 , wherein said first and second beams of the radiation are formed of light of different wavelengths.

Claim 22

Dependent Claim 23 words

The apparatus according to claim 14 , wherein said first and second beams of the radiation are formed of light of different polarizations.

Claim 23

Dependent Claim 26 words

The apparatus according to claim 14 , wherein the sensing system comprises first and second image sensors for detecting, respectively, the reflected and transmitted light components.

Claim 24

Dependent Claim 24 words

The apparatus according to claim 17 , wherein the light directing optics and the sensing system are accommodated at one side of the object.

Claim 25

Dependent Claim 29 words

The apparatus according to claim 14 , and also comprising a support base for supporting the object for sliding movement along two orthogonally oriented axes within an inspection plane.

Claim 26

Dependent Claim 53 words

The method according to claim 1 , wherein simultaneously acquiring first and second images of the object comprises directing the reflected light component to a first sensor located on a first side of the object and directing the transmitted light component to a second sensor located on said first side of the object.

Claim 27

Dependent Claim 39 words

The method according to claim 1 , wherein simultaneously acquiring first and second images of the object comprises directing the reflected light component to a first multi-element sensor and directing the transmitted light component to a second multi-element sensor.

Claim 28

Dependent Claim 41 words

The method according to claim 25 , wherein said first multi-element sensor is a first charge coupled device (CCD) having a plurality of pixels, and said second multi-element sensor is a second charge coupled device (CCD) having a plurality of pixels.

Claim 29

Dependent Claim 33 words

The method according to claim 25 , wherein said first multi-element sensor is a first time delay integration (TDI) sensor, and said second multi-element sensor is a second time delay integration (TDI) sensor.

Claim 30

Independent Claim 151 words

A method for inspecting an object having upper and lower faces for detecting defects existing on the object, said method comprising: a) providing first and second beams of radiation; b) directing the first beam of radiation onto the object and sensing a light component reflected from one face of the object; c) directing the second beam of radiation onto the object and sensing a light component transmitted through the upper and lower faces of the object; d) simultaneously acquiring first and second images of the object, wherein the first image is formed by directing the reflected light component to a first sensor located on a first side of the object and the second image is formed by directing the transmitted light component to a second sensor located on said first side of the object; and e) analyzing said first and second images so as to provide data indicative of said defects.

Claim 31

Independent Claim 151 words

A method for inspecting an object having upper and lower faces for detecting defects existing on the object, said method comprising: a) providing first and second beams of radiation; b) directing the first beam of radiation onto the object and sensing a light component reflected from one face of the object; c) directing the second beam of radiation onto the object and sensing a light component transmitted through the upper and lower faces of the object; d) simultaneously acquiring first and second images of the object, wherein the first image is formed by directing the reflected light component to a first sensor located on a first side of the object and the second image is formed by directing the transmitted light component to a second sensor located on said first side of the object; and e) analyzing said first and second images so as to provide data indicative of said defects.

Claim 32

Dependent Claim 45 words

The method according to claim 28 , wherein directing said first and second beams comprises directing said first beam so as to illuminate a first area of the object and directing said second beam so as to illuminate a second, different area of the object.

Claim 33

Dependent Claim 39 words

The method according to claim 28 , wherein simultaneously acquiring first and second images of the object comprises directing the reflected light component to a first multi-element sensor and directing the transmitted light component to a second multi-element sensor.

Claim 34

Dependent Claim 41 words

The method according to claim 30 , wherein said first multi-element sensor is a first charge coupled device (CCD) having a plurality of pixels, and said second multi-element sensor is a second charge coupled device (CCD) having a plurality of pixels.

Claim 35

Dependent Claim 33 words

The method according to claim 30 , wherein said first multi-element sensor is a first time delay integration (TDI) sensor, and said second multi-element sensor is a second time delay integration (TDI) sensor.

Claim 36

Dependent Claim 32 words

The method according to claim 28 , wherein the first and second beams of radiation are directed onto the object from opposite faces thereof, and are formed of light having different wavelengths.

Claim 37

Dependent Claim 32 words

The method according to claim 28 , wherein the first and second beams of radiation are directed onto the object from opposite faces thereof, and are formed of light having different polarizations.

Claim 38

Independent Claim 171 words

An apparatus for optical inspection of an object, having upper and lower faces, so as to detect defects existing on the object, the apparatus comprising: i. an illumination system providing first and second beams of radiation simultaneously directed onto the object; ii. a sensing system mounted in the vicinity of the object and comprising a first sensor located on a first side of the object and a second sensor located on said first side of the object for simultaneously sensing a light component of the first beam reflected from the upper face of the object and a light component of the second. beam transmitted through the upper and lower faces of the object and providing output signals representative thereof; iii. a light directing system directing the reflected and transmitted light components; onto the sensing system; and iv. a processor coupled to the sensing system for receiving the output signals representative of the reflected and transmitted light components and for analyzing the signals so as to provide data indicative of said defects.

Claim 39

Independent Claim 171 words

An apparatus for optical inspection of an object, having upper and lower faces, so as to detect defects existing on the object, the apparatus comprising: i. an illumination system providing first and second beams of radiation simultaneously directed onto the object; ii. a sensing system mounted in the vicinity of the object and comprising a first sensor located on a first side of the object and a second sensor located on said first side of the object for simultaneously sensing a light component of the first beam reflected from the upper face of the object and a light component of the second. beam transmitted through the upper and lower faces of the object and providing output signals representative thereof; iii. a light directing system directing the reflected and transmitted light components; onto the sensing system; and iv. a processor coupled to the sensing system for receiving the output signals representative of the reflected and transmitted light components and for analyzing the signals so as to provide data indicative of said defects.

Claim 40

Dependent Claim 35 words

The apparatus according to claim 35 , wherein said illumination system provides said first and second beams of radiation respectively onto a first area of the object and a second, different area of the object.

Claim 41

Dependent Claim 20 words

The apparatus according to claim 35 , wherein each of said first and second sensors comprises a respective multi-element sensor.

Claim 42

Dependent Claim 28 words

The apparatus according to claim 35 , wherein each of said first and and second sensors comprises a respective charge coupled device (CCD) having a plurality of pixels.

Claim 43

Dependent Claim 24 words

The apparatus according to claim 35 , wherein each of said first and and second sensors comprises a respective time delay integration (TDI) sensor.

Claim 44

Dependent Claim 22 words

The apparatus according to claim 35 , wherein said first and second beams of radiation are formed of light of different wavelengths.

Claim 45

Dependent Claim 22 words

The apparatus according to claim 35 , wherein said first and second beams of radiation are formed of light of different polarizations.

Claim 46

Independent Claim 136 words

A method for inspecting an object having upper and lower faces for detecting defects existing on the object, said method comprising: a) providing first and second beams of radiation; b) directing the first beam of radiation onto the object and sensing a light component reflected from one face of the object; c) directing the second beam of radiation onto the object and sensing a light component transmitted through the upper and lower faces of the object; d) simultaneously acquiring first and second images of the object, wherein the first image is formed by directing the reflected light component to a first multi-element sensor and the second image is formed by directing the transmitted light component to a second multi-element sensor; and analyzing said first and second images so as to provide data indicative of said defects.

Claim 47

Independent Claim 136 words

A method for inspecting an object having upper and lower faces for detecting defects existing on the object, said method comprising: a) providing first and second beams of radiation; b) directing the first beam of radiation onto the object and sensing a light component reflected from one face of the object; c) directing the second beam of radiation onto the object and sensing a light component transmitted through the upper and lower faces of the object; d) simultaneously acquiring first and second images of the object, wherein the first image is formed by directing the reflected light component to a first multi-element sensor and the second image is formed by directing the transmitted light component to a second multi-element sensor; and analyzing said first and second images so as to provide data indicative of said defects.

Claim 48

Dependent Claim 55 words

The method according to claim 42 , wherein simultaneously acquiring first and second images of the object comprises directing the reflected light component to said first multi-element sensor located on a first side of the object and directing the transmitted light component to said second multi-element sensor located on said first side of the object.

Claim 49

Dependent Claim 45 words

The method according to claim 42 , wherein directing said first and second beams comprises directing said first beam so as to illuminate a first area of the object and directing said second beam so as to illuminate a second, different area of the object.

Claim 50

Dependent Claim 43 words

The method according to claim 42 , wherein simultaneously acquiring first and second images of the object comprises directing the reflected light component to a first charge coupled device (CCD) and directing the transmitted light component to a second charge coupled device (CCD).

Claim 51

Dependent Claim 45 words

The method according to claim 42 , wherein simultaneously acquiring first and second images of the object comprises directing the reflected light component to a first time delay integration (TDI) sensor and directing the transmitted light component to a second time delay integration (TDI) sensor.

Claim 52

Dependent Claim 27 words

The method according to claim 42 , wherein providing first and second beams of radiation comprises providing first and second beams formed of light of different wavelengths.

Claim 53

Dependent Claim 27 words

The method according to claim 42 , wherein providing first and second beams of radiation comprises providing first and second beams formed of light of different polarizations.

Claim 54

Independent Claim 164 words

An apparatus for optical inspection of an object, having upper and lower faces, so as to detect defects existing on the object, the apparatus comprising: i. an illumination system providing first and second beams of radiation simultaneously directed onto the object; ii. a sensing system mounted in the vicinity of the object and comprising first and second sensors each comprising a respective multi-element sensor, said first and second sensors respectively and simultaneously sensing a light component of the first beam reflected from the upper face of the object and a light component of the second beam transmitted through the upper and lower faces of the object and providing output signals representative thereof; iii. a light directing system directing the reflected and transmitted light components onto the sensing system; and iv. a processor coupled to the sensing system for receiving the output signals representative of the reflected and transmitted light components and for analyzing the signals so as to provide data indicative of said defects.

Claim 55

Independent Claim 164 words

An apparatus for optical inspection of an object, having upper and lower faces, so as to detect defects existing on the object, the apparatus comprising: i. an illumination system providing first and second beams of radiation simultaneously directed onto the object; ii. a sensing system mounted in the vicinity of the object and comprising first and second sensors each comprising a respective multi-element sensor, said first and second sensors respectively and simultaneously sensing a light component of the first beam reflected from the upper face of the object and a light component of the second beam transmitted through the upper and lower faces of the object and providing output signals representative thereof; iii. a light directing system directing the reflected and transmitted light components onto the sensing system; and iv. a processor coupled to the sensing system for receiving the output signals representative of the reflected and transmitted light components and for analyzing the signals so as to provide data indicative of said defects.

Claim 56

Dependent Claim 35 words

The apparatus according to claim 49 , wherein said illumination system provides. said first and second beams of radiation respectively onto a first area of the object and a second, different area of the object.

Claim 57

Dependent Claim 22 words

The apparatus according to claim 49 , wherein said first and second sensors are located on the same side of the object.

Claim 58

Dependent Claim 19 words

The apparatus according to claim 49 , wherein said first and second sensors comprise respective charge coupled devices (CCD).

Claim 59

Dependent Claim 20 words

The apparatus according to claim 49 , wherein said first and second sensors comprise respective time delay integration (TDI) sensors.

Claim 60

Dependent Claim 21 words

The apparatus according to claim 49 , wherein said illumination system provides first and second beams of radiation of different wavelengths.

Claim 61

Dependent Claim 21 words

The apparatus according to claim 49 , wherein said illumination system provides first and second beams of radiation of different polarizations.

Annuity Stage	Window Opens	Payment Deadline	Surcharge Period Until	Estimated Fee	Status
3.5 Years (Year 4)	2004-01-16	2004-07-17	2005-01-16	$2000.00	Window Closed / Lapsed
7.5 Years (Year 8)	2008-01-16	2008-07-17	2009-01-16	$3760.00	Window Closed / Lapsed
11.5 Years (Year 12)	2012-01-16	2012-07-17	2013-01-16	$7700.00	Window Closed / Lapsed

Optical inspection method and apparatus

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