US6172349B1 — Autofocusing apparatus and method for high resolu…

Claim 1

Independent Claim 101 words

A method for automatically focusing a high resolution microscope, comprising the steps of: during setup designating areas within each field of view where a measurement will be taken; for each area of interest translating the microscope along its optical axis while measuring the image intensities at discrete subareas within the area of interest; evaluating the intensities; selecting those image intensities having the greatest signal-to-noise ratio and occurring at a common point along the optical axis and identifying the corresponding subareas; and during subsequent inspections of the area of interest, using only light reflected from the identified subareas to focus the microscope.

Claim 2

Independent Claim 101 words

A method for automatically focusing a high resolution microscope, comprising the steps of: during setup designating areas within each field of view where a measurement will be taken; for each area of interest translating the microscope along its optical axis while measuring the image intensities at discrete subareas within the area of interest; evaluating the intensities; selecting those image intensities having the greatest signal-to-noise ratio and occurring at a common point along the optical axis and identifying the corresponding subareas; and during subsequent inspections of the area of interest, using only light reflected from the identified subareas to focus the microscope.

Claim 3

Independent Claim 101 words

An apparatus for automatically focusing a high resolution microscope, comprising: means for translating the microscope along its optical axis; optical means for inspecting a multiplicity of subareas of an area of interest and for developing corresponding output signals indicative of the measured image intensities; means for evaluating said output signals and for identifying those signals having the greatest signal-to-noise ratio and occurring at a common point along the optical axis; and means for storing the identified signals so that during subsequent inspections of the area of interest only light reflected from the identified subareas will be used to focus the microscope.

Claim 4

Independent Claim 101 words

An apparatus for automatically focusing a high resolution microscope, comprising: means for translating the microscope along its optical axis; optical means for inspecting a multiplicity of subareas of an area of interest and for developing corresponding output signals indicative of the measured image intensities; means for evaluating said output signals and for identifying those signals having the greatest signal-to-noise ratio and occurring at a common point along the optical axis; and means for storing the identified signals so that during subsequent inspections of the area of interest only light reflected from the identified subareas will be used to focus the microscope.

Claim 5

Independent Claim 176 words

A method for automatically focusing a high resolution microscope relative to the surface of a specimen and having first means for inspecting characteristics of an object and having second means for performing an autofocus function, at least portions of said first and second means sharing a common optical axis, comprising the steps of: during setup designating areas of interest within each field of view of said first means where a measurement is to be taken; for each said area of interest, translating the microscope along said common optical axis while measuring, via said second means, the image intensities of discrete subareas within the area of interest; evaluating the image intensities corresponding to each said subarea; selecting those subareas having image intensities with the greatest signal-to-noise ratios occurring at common points along said common optical axis and identifying the corresponding subareas; and during subsequent inspections of the areas of interest using said first means, using said second means to detect only light reflected from the selected subareas corresponding to each said common point to focus the microscope.

Claim 6

Independent Claim 176 words

A method for automatically focusing a high resolution microscope relative to the surface of a specimen and having first means for inspecting characteristics of an object and having second means for performing an autofocus function, at least portions of said first and second means sharing a common optical axis, comprising the steps of: during setup designating areas of interest within each field of view of said first means where a measurement is to be taken; for each said area of interest, translating the microscope along said common optical axis while measuring, via said second means, the image intensities of discrete subareas within the area of interest; evaluating the image intensities corresponding to each said subarea; selecting those subareas having image intensities with the greatest signal-to-noise ratios occurring at common points along said common optical axis and identifying the corresponding subareas; and during subsequent inspections of the areas of interest using said first means, using said second means to detect only light reflected from the selected subareas corresponding to each said common point to focus the microscope.

Claim 7

Dependent Claim 34 words

A method as recited in claim 3 wherein said first means includes a first optical system and a video camera, said video camera being used to inspect light from each said area of interest.

Claim 8

Dependent Claim 44 words

A method as recited in claim 4 wherein said second means includes a second optical system and detector means including an array of light-responsive diodes, each said diode being used to detect the image intensity of a discrete subarea within said area of interest.

Claim 9

Dependent Claim 50 words

A method as recited in claim 5 wherein said array of light-responsive diodes is formed by a plurality of square-shaped diodes, each corresponding to one of said subareas and having a light-sensitive face and a separate electrical output producing a current proportional to the light impinging on its light-sensitive face.

Claim 10

Dependent Claim 22 words

A method as recited in claim 3 wherein said areas of interest are inspected during periods of less than approximately 0.01 second.

Claim 11

Dependent Claim 25 words

A method as recited in claim 7 wherein a shutter is used in said first optical system to determine the duration of each inspection period.

Claim 12

Dependent Claim 21 words

A method as recited in claim 7 wherein a flash lamp is used to determine the duration of each inspection period.

Claim 13

Independent Claim 165 words

An apparatus for automatically focusing a high resolution microscope relative to the surface of a specimen, said microscope including first means for inspecting characteristics of an object, and second means for performing an autofocus function, at least portions of said first and second means sharing a common optical axis, comprising: means for translating at least a portion of the microscope along said common optical axis; and wherein said second means includes optical means for inspecting and measuring the image intensity at various points along said common axis a plurality of subareas of an area of interest and for developing corresponding output signals indicative of the respective measured image intensities, means for evaluating said output signals and for identifying those output signals developed at each said point along said common axis having the greatest signal-to-noise ratios, and means for storing the identified signals so that, during subsequent inspections of the area of interest, only light from the identified subareas will be used to focus the microscope.

Claim 14

Independent Claim 165 words

An apparatus for automatically focusing a high resolution microscope relative to the surface of a specimen, said microscope including first means for inspecting characteristics of an object, and second means for performing an autofocus function, at least portions of said first and second means sharing a common optical axis, comprising: means for translating at least a portion of the microscope along said common optical axis; and wherein said second means includes optical means for inspecting and measuring the image intensity at various points along said common axis a plurality of subareas of an area of interest and for developing corresponding output signals indicative of the respective measured image intensities, means for evaluating said output signals and for identifying those output signals developed at each said point along said common axis having the greatest signal-to-noise ratios, and means for storing the identified signals so that, during subsequent inspections of the area of interest, only light from the identified subareas will be used to focus the microscope.

Claim 15

Dependent Claim 30 words

An apparatus as recited in claim 10 wherein said first means includes a first optical system having a first video camera for inspecting light from each said area of interest.

Claim 16

Dependent Claim 25 words

An apparatus as recited in claim 11 wherein said second means includes a second optical system having detector means including an array of light-responsive diodes.

Claim 17

Dependent Claim 52 words

An apparatus as recited in claim 12 wherein said array of light-responsive diodes is formed by a plurality of square-shaped diode devices, each corresponding to one of said subareas and having a light-sensitive face and a separate electrical output for producing a current proportional to the light impinging on its light-sensitive face.

Claim 18

Dependent Claim 53 words

An apparatus as recited in claim 13 wherein said first means further includes a second video camera having a predetermined focus offset relative to the focus of said first video camera along said common optical axis, said first and second video cameras being operative to simultaneously inspect different surface elevations of said specimen.

Claim 19

Dependent Claim 43 words

An apparatus as recited in claim 10 wherein said microscope is a coherence microscope and wherein the translated portion thereof includes a light source and a means for generating an interfering beam of light for interfering with the light collected from said sample.

Claim 20

Dependent Claim 43 words

An apparatus as recited in claim 10 wherein said means for translating is comprised of a motor and lead screw assembly for making macro-movements of said portion of said microscope, and a piezo-electric flexure for making micro-movements of said portion of said microscope.

Claim 21

Independent Claim 26 words

An apparatus as recited in any of claims 10 through 16 wherein said areas of interest are inspected during periods of less than approximately 0.01 second.

Claim 22

Dependent Claim 20 words

An apparatus as recited in claim 14 wherein a shutter is used to determine the duration of each inspection period.

Claim 23

Dependent Claim 21 words

An apparatus as recited in claim 14 wherein a flash lamp is used to determine the duration of each inspection period.

Claim 24

Dependent Claim 171 words

A microscope for inspecting areas of interest on a specimen, comprising: a first optical system for inspecting an area of interest of said specimen and for generating image data that can be electronically processed and used to indicate characteristics of said specimen; a second optical system for inspecting a plurality of discrete subareas of said area of interest and for generating subarea signals corresponding to the image intensity of each said subarea, said first and second optical systems having at least portions thereof sharing a common optical axis; means for moving the portions of said first and second optical systems sharing a common axis; and computer means for processing said image data and generating an output for driving an indicator means, said computer means being operative to evaluate said subarea signals and to identify those subarea signals having the greatest signal-to-noise ratios, the identified subareas being stored for subsequent comparison to previously stored signals, with the results of the comparison indicating the degree of focus of the microscope on the specimen.

Claim 25

Dependent Claim 171 words

A microscope for inspecting areas of interest on a specimen, comprising: a first optical system for inspecting an area of interest of said specimen and for generating image data that can be electronically processed and used to indicate characteristics of said specimen; a second optical system for inspecting a plurality of discrete subareas of said area of interest and for generating subarea signals corresponding to the image intensity of each said subarea, said first and second optical systems having at least portions thereof sharing a common optical axis; means for moving the portions of said first and second optical systems sharing a common axis; and computer means for processing said image data and generating an output for driving an indicator means, said computer means being operative to evaluate said subarea signals and to identify those subarea signals having the greatest signal-to-noise ratios, the identified subareas being stored for subsequent comparison to previously stored signals, with the results of the comparison indicating the degree of focus of the microscope on the specimen.

Claim 26

Dependent Claim 30 words

A microscope as recited in claim 20 wherein the portions of said first and second optical systems sharing a common axis form the principal optical components of a Linnik microscope.

Claim 27

Dependent Claim 30 words

A microscope as recited in claim 20 wherein said first means includes a first optical system and a first video camera for inspecting light from each said area of interest.

Claim 28

Dependent Claim 25 words

A microscope as recited in claim 22 wherein said second means includes a second optical system and detector means including an array of light-responsive diodes.

Claim 29

Dependent Claim 52 words

A microscope as recited in claim 23 wherein said array of light-responsive diodes is formed by a plurality of square-shaped diode devices, each corresponding to one of said subareas and having a light-sensitive face and a separate electrical output for producing a current proportional to the light impinging on its light-sensitive face.

Claim 30

Dependent Claim 22 words

A microscope as recited in claim 20 wherein said areas of interest are inspected during periods of less than approximately 0.01 second.

Claim 31

Dependent Claim 25 words

A microscope as recited in claim 25 wherein a shutter is used in said first optical system to determine the duration of each inspection period.

Claim 32

Dependent Claim 21 words

A microscope as recited in claim 25 wherein a flash lamp is used to determine the duration of each inspection period.

Claim 33

Dependent Claim 44 words

A microscope as recited in claim 22 wherein said first means further includes a second video camera having a predetermined focus offset along said common optical axis, said first and second video cameras being operative to simultaneously inspect different surface elevations of said specimen.

Claim 34

Dependent Claim 29 words

A microscope as recited in claim 20 and further comprising stage means controlled by said computer means and operative to position said specimen relative to said common optical axis.

Claim 35

Dependent Claim 21 words

A microscope as recited in claim 29 wherein said means for moving includes a piezo-electric flexure controlled by said computer means.

Annuity Stage	Window Opens	Payment Deadline	Surcharge Period Until	Estimated Fee	Status
3.5 Years (Year 4)	2004-01-09	2004-07-10	2005-01-09	$2000.00	Window Closed / Lapsed
7.5 Years (Year 8)	2008-01-09	2008-07-10	2009-01-09	$3760.00	Window Closed / Lapsed
11.5 Years (Year 12)	2012-01-09	2012-07-10	2013-01-09	$7700.00	Window Closed / Lapsed

Autofocusing apparatus and method for high resolution microscope system

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