US6162698A
Expired / Lapsed
US
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Method of manufacturing a capacitor in a semiconductor device
Assignee: SK Hynix Inc
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Filing: 1998-06-26
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Granted: 2000-12-19
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Expires: 2018-06-26
Abstract
Abstract This invention relates to a method of manufacturing a capacitor in a semiconductor device. When forming a capacitor, just after forming the first ferroelectric PZT layer, supply of a DC bias voltage is maintained for a few minutes under the RF plasma before a cooling process, wherein then the cooling speed is rapidly increased so that a fine structure of the first PZT layer is transformed in the second PZT layer having a grain boundary of orientation polarization in the vertical direction and the domain structure. Just after forming the first ferroelectric PZT layer, after the RF plasma supply is shut off, an annealing process is performed for 5-20 minute at its temperature and then the cooling process is performed within 30 degree Celsius per minutes so that a fine structure of the first PZT layer is transformed to the second PZT layer having a grain boundary of orientation polarization in the vertical direction. Accordingly, electric characteristic of a capacitor can improve by preventing deterioration due to the endurance limit and the aging of the ferroelectric film.
Inventors
- 👤 Yong Sik Yu
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-09 04:35
CPC Classifications
C; C23; C23C; C23C14/00; C23C14/58; C23C14/5826; C23C14/06; C23C14/08; C23C14/088; H; H10; H10D; H10D1/00; H10D1/60; H10D1/68; H10D1/682; H10P; H10P14/00; H10P14/60; H10P14/63; H10P14/6326; H10P14/6328; H10P14/6329; H10P14/6334; H10P14/65; H10P14/6516; H10P14/6529; H10P14/6532; H10P14/69; H10P14/692; H10P14/6921; H10P14/69215; H10P14/6938; H10P14/69398
Claims Analysis
Total Claims: 22
Claim 1
Independent Claim
215 words
A method of manufacturing a capacitor in a semiconductor device comprising: providing a lower substrate on which an insulation layer is formed; forming a contact hole for a wire on a selected portion of said insulation layer; forming a wiring plug by depositing a polysilicon layer within said contact hole; forming a diffusion prevention layer, which is composed of Ti/TiN layers, on an exposed portion of said wiring plug and said insulation layer; forming a lower electrode, which is composed of a Pt layer, on said diffusion prevention layer; forming a ferroelectric PZT layer on said Pt layer; after forming said ferroelectric PZT layer, transforming a fine structure of said ferroelectric PZT layer into a domain structure and structure having a grain boundary of orientation polarization in a vertical direction of said lower substrate by maintaining said ferroelectric PZT layer for a few minutes under a RF plasma generated by supply of a DC bias voltage and, after maintaining said ferroelectric PZT layer under said RF plasma, performing a cooling process; forming a silicon oxidation layer over a resulting structure; selectively etching said silicon oxidation layer to expose said ferroelectric PZT layer by means of a photo mask and dry etching method; and forming an upper electrode over an exposed portion of an entire structure.
Claim 2
Independent Claim
215 words
A method of manufacturing a capacitor in a semiconductor device comprising: providing a lower substrate on which an insulation layer is formed; forming a contact hole for a wire on a selected portion of said insulation layer; forming a wiring plug by depositing a polysilicon layer within said contact hole; forming a diffusion prevention layer, which is composed of Ti/TiN layers, on an exposed portion of said wiring plug and said insulation layer; forming a lower electrode, which is composed of a Pt layer, on said diffusion prevention layer; forming a ferroelectric PZT layer on said Pt layer; after forming said ferroelectric PZT layer, transforming a fine structure of said ferroelectric PZT layer into a domain structure and structure having a grain boundary of orientation polarization in a vertical direction of said lower substrate by maintaining said ferroelectric PZT layer for a few minutes under a RF plasma generated by supply of a DC bias voltage and, after maintaining said ferroelectric PZT layer under said RF plasma, performing a cooling process; forming a silicon oxidation layer over a resulting structure; selectively etching said silicon oxidation layer to expose said ferroelectric PZT layer by means of a photo mask and dry etching method; and forming an upper electrode over an exposed portion of an entire structure.
Claim 3
Dependent Claim
23 words
The method of claim 1, wherein said Ti/TiN layers for said diffusion prevention layer is formed with thickness of 300 through 3000 Å.
Claim 4
Dependent Claim
28 words
The method of claim 1, wherein said diffusion prevention layer is formed with Ta/TaN layer instead of said Ti/TiN and formed with thickness of 300 through 3000 Å.
Claim 5
Dependent Claim
23 words
The method of claim 1, wherein said PT layer for said lower electrode is formed with a thickness of 500 through 5000 Å.
Claim 6
Dependent Claim
47 words
The method of claim 1, wherein a ruthenium layer is formed with thickness of 100 through 1000 Å and a ruthenium dioxide layer, which is conductive oxidation material, is formed thereon with thickness of 500 through 5000 Å instead of said Pt layer for said lower layer.
Claim 7
Dependent Claim
16 words
The method of claim 5, wherein said ruthenium dioxide layer is used for said upper electrode.
Claim 8
Dependent Claim
34 words
The method of claim 1, wherein said diffusion prevention layer is formed with one of Ti/TiSiN layers and Ta/TaSiN layers instead of said Ti/TiN, and formed with a thickness of 300 through 3000 Å.
Claim 9
Dependent Claim
20 words
The method of claim 1, wherein said ferroelectric PZT layer is formed with a thickness of 100 through 1000 Å.
Claim 10
Dependent Claim
18 words
The method of claim 1, wherein said upper electrode uses a Pt layer or a ruthenium dioxide layer.
Claim 11
Independent Claim
217 words
A method of manufacturing a capacitor in a semiconductor device comprising: providing a lower substrate on which an insulation layer is formed; forming a contact hole for a wire on a selected portion of said insulation layer; forming a wiring plug by depositing a polysilicon layer within said contact hole; forming a diffusion prevention layer, which is composed of Ti/TiN layers, on an exposed portion of said wiring plug and said insulation layer; forming a lower electrode, which is composed of a Pt layer, on said diffusion prevention layer; forming a ferroelectric PZT layer on said lower layer using an RF plasma supply; after forming said ferroelectric PZT layer, transforming a fine structure of said ferroelectric PZT layer into a structure having a grain boundary of orientation polarization in horizontal direction of said lower substrate by performing an annealing process for 5-20 minutes after the RF plasma supply used in forming said ferroelectric PZT layer is shut off, and performing a cooling process at a speed of 30 degrees Celsius or less per minute; forming a silicon oxidation layer over a resulting structure; selectively etching said silicon oxidation layer to expose said ferroelectric PZT layer by means of photo mask and dry etching methods; and forming an upper electrode over an exposed portion of the entire structure.
Claim 12
Independent Claim
217 words
A method of manufacturing a capacitor in a semiconductor device comprising: providing a lower substrate on which an insulation layer is formed; forming a contact hole for a wire on a selected portion of said insulation layer; forming a wiring plug by depositing a polysilicon layer within said contact hole; forming a diffusion prevention layer, which is composed of Ti/TiN layers, on an exposed portion of said wiring plug and said insulation layer; forming a lower electrode, which is composed of a Pt layer, on said diffusion prevention layer; forming a ferroelectric PZT layer on said lower layer using an RF plasma supply; after forming said ferroelectric PZT layer, transforming a fine structure of said ferroelectric PZT layer into a structure having a grain boundary of orientation polarization in horizontal direction of said lower substrate by performing an annealing process for 5-20 minutes after the RF plasma supply used in forming said ferroelectric PZT layer is shut off, and performing a cooling process at a speed of 30 degrees Celsius or less per minute; forming a silicon oxidation layer over a resulting structure; selectively etching said silicon oxidation layer to expose said ferroelectric PZT layer by means of photo mask and dry etching methods; and forming an upper electrode over an exposed portion of the entire structure.
Claim 13
Dependent Claim
24 words
The method of claim 10, wherein said Ti/TiN layers for said diffusion prevention layer are formed with a thickness of 300 through 3000 Å.
Claim 14
Dependent Claim
30 words
The method of claim 10, wherein said diffusion prevention layer is formed with Ta/TaN layers instead of said Ti/TiN layers and formed with a thickness of 300 through 3000 Å.
Claim 15
Dependent Claim
23 words
The method of claim 10, wherein said Pt layer for said lower electrode is formed with a thickness of 500 through 5000 Å.
Claim 16
Dependent Claim
48 words
The method of claim 10, wherein a ruthenium layer is formed with thickness of 100 through 1000 Å and a ruthenium dioxide layer, which is a conductive oxidation material, is formed thereon with thickness of 500 through 5000 Å instead of said Pt layer for said lower layer.
Claim 17
Dependent Claim
16 words
The method of claim 14, wherein said ruthenium dioxide layer is used for said upper electrode.
Claim 18
Dependent Claim
34 words
The method of claim 10, wherein said diffusion prevention layer is formed with one of Ti/TiSiN layers and Ta/TaSiN layers instead of said Ti/TiN and formed with a thickness of 300 through 3000 Å.
Claim 19
Dependent Claim
20 words
The method of claim 10, wherein said ferroelectric PZT layer is formed with a thickness of 100 through 1000 Å.
Claim 20
Dependent Claim
18 words
The method of claim 1, wherein said upper electrode uses a Pt layer or a ruthenium dioxide layer.
Claim 21
Independent Claim
283 words
A method of manufacturing a capacitor in a semiconductor device comprising: providing a lower substrate on which an insulation layer is formed; forming a contact hole for a wire on a selected portion of said insulation layer; depositing a polysilicon layer with a thickness of 50 to 3000 Å by means of chemical vapor deposition; blank etching the polysilicon layer so that the polysilicon layer remains only within the contact hole; forming a diffusion prevention layer, which includes a Ti layer with a thickness of 100 to 1000 Å and a TiN layer with a thickness of 200 to 2000 Å, on an exposed portion of said insulation layer; depositing a Pt layer having a thickness of 1000 to 5000 Å over the diffusion prevention layer to form a lower electrode; forming a ferroelectric PZT layer on said Pt layer, said ferroelectric PZT layer being deposited with a thickness of 500 to 2000 Å by an RF sputtering method at a temperature of 300 to 700 degrees Celsius; after forming said ferroelectric PZT layer, maintaining supply of DC bias voltage for a few minutes under the RF plasma to transform a fine structure of said ferroelectric PZT layer into a domain structure and structure having a grain boundary of orientation polarization in a vertical direction of said lower substrate; performing a cooling process; forming a silicon oxidation layer over a resulting structure; selectively etching said silicon oxidation layer to expose an upper surface of said ferroelectric PZT layer by means of a photo mask and dry etching method; and forming a platinum layer with a thickness of 500 to 2000 Å over exposed portions of the resulting structure to form an upper electrode.
Claim 22
Independent Claim
283 words
A method of manufacturing a capacitor in a semiconductor device comprising: providing a lower substrate on which an insulation layer is formed; forming a contact hole for a wire on a selected portion of said insulation layer; depositing a polysilicon layer with a thickness of 50 to 3000 Å by means of chemical vapor deposition; blank etching the polysilicon layer so that the polysilicon layer remains only within the contact hole; forming a diffusion prevention layer, which includes a Ti layer with a thickness of 100 to 1000 Å and a TiN layer with a thickness of 200 to 2000 Å, on an exposed portion of said insulation layer; depositing a Pt layer having a thickness of 1000 to 5000 Å over the diffusion prevention layer to form a lower electrode; forming a ferroelectric PZT layer on said Pt layer, said ferroelectric PZT layer being deposited with a thickness of 500 to 2000 Å by an RF sputtering method at a temperature of 300 to 700 degrees Celsius; after forming said ferroelectric PZT layer, maintaining supply of DC bias voltage for a few minutes under the RF plasma to transform a fine structure of said ferroelectric PZT layer into a domain structure and structure having a grain boundary of orientation polarization in a vertical direction of said lower substrate; performing a cooling process; forming a silicon oxidation layer over a resulting structure; selectively etching said silicon oxidation layer to expose an upper surface of said ferroelectric PZT layer by means of a photo mask and dry etching method; and forming a platinum layer with a thickness of 500 to 2000 Å over exposed portions of the resulting structure to form an upper electrode.
References Cited (Backward Citations)
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