US6156167A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Clamshell apparatus for electrochemically treating semiconductor wafers
Assignee: Novellus Systems Inc
•
Filing: 1997-11-13
•
Granted: 2000-12-05
•
Expires: 2017-11-13
Abstract
Abstract An apparatus for electroplating a wafer surface includes a cup having a central aperture defined by an inner perimeter, a compliant seal adjacent the inner perimeter, contacts adjacent the compliant seal and a cone attached to a rotatable spindle. The compliant seal forms a seal with the perimeter region of the wafer surface preventing plating solution from contaminating the wafer edge, wafer backside and the contacts. As a further measure to prevent contamination, the region behind the compliant seal is pressurized. By rotating the wafer during electroplating, bubble entrapment on the wafer surface is prevented. Further, the contacts can be arranged into banks of contacts and the resistivity between banks can be tested to detect poor electrical connections between the contacts and the wafer surface.
Inventors
- 👤 Evan E. Patton
- 👤 Wayne Fetters
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-30 04:38
CPC Classifications
H; H10; H10P; H10P72/00; H10P72/70; H10P72/76; H10P72/7604; H10P72/7606; C; C25; C25D; C25D17/00; C25D17/001; C25D7/00; C25D7/12; C25D7/123; H10P72/7608; H10P72/7611; H10P72/7624; H10P72/7626
Claims Analysis
Total Claims: 36
Claim 1
Independent Claim
87 words
An apparatus for treating a surface of a substrate comprising: a cup having a central aperture defined by an inner perimeter; a compliant seal adjacent said inner perimeter, said compliant seal being for pressing against said substrate; a plurality of electrical contacts adjacent said compliant seal for making electrical contact with said substrate; a cone attached to a rotatable spindle, wherein said cone and said cup define a first cavity, said plurality of contacts being located in said first cavity; said first cavity containing a pressurized gas.
Claim 2
Independent Claim
87 words
An apparatus for treating a surface of a substrate comprising: a cup having a central aperture defined by an inner perimeter; a compliant seal adjacent said inner perimeter, said compliant seal being for pressing against said substrate; a plurality of electrical contacts adjacent said compliant seal for making electrical contact with said substrate; a cone attached to a rotatable spindle, wherein said cone and said cup define a first cavity, said plurality of contacts being located in said first cavity; said first cavity containing a pressurized gas.
Claim 3
Dependent Claim
19 words
The apparatus of claim 1 further comprising: bearings for supporting said spindle; and a motor for rotating said spindle.
Claim 4
Dependent Claim
29 words
The apparatus of claim 1 further comprising: one or more slip rings on said spindle; and one or more brushes for contact with corresponding ones of said slip rings.
Claim 5
Dependent Claim
14 words
The apparatus of claim 1 further comprising a rotary union mounted to said spindle.
Claim 6
Dependent Claim
16 words
The apparatus of claim 1 further comprising a rack which allows vertical movement of said apparatus.
Claim 7
Dependent Claim
37 words
The apparatus of claim 1 wherein said cone is in abutting contact with said cup, said cone and said cup defining a second cavity therebetween, said apparatus further comprising a vacuum line for evacuating said second cavity.
Claim 8
Dependent Claim
28 words
The apparatus of claim 6 further comprising a first O-ring and a second O-ring, said second cavity being further defined by said first O-ring and said second O-ring.
Claim 9
Dependent Claim
24 words
The apparatus of claim 1 wherein said compliant seal is formed of a material having a shore A hardness in the range of 60-80.
Claim 10
Dependent Claim
18 words
The apparatus of claim 8 wherein said compliant seal is formed of a material consisting of synthetic rubber.
Claim 11
Dependent Claim
20 words
The apparatus of claim 1 wherein said cone comprises a pressing surface for pressing said substrate against said compliant seal.
Claim 12
Dependent Claim
30 words
The apparatus of claim 10 further comprising a third O-ring located in a channel of said pressing surface, said third O-ring extending beyond the plane defined by said pressing surface.
Claim 13
Dependent Claim
27 words
The apparatus of claim 1 further comprising a contact strip comprising said plurality of contacts and a base section, said base section being attached to said cup.
Claim 14
Dependent Claim
41 words
The apparatus of claim 12 wherein said contact strip further comprises a tab, said apparatus further comprising a sliding contact extending from said cone aligned to make contact with said tab when said cone and said cup are in abutting contact.
Claim 15
Dependent Claim
36 words
The apparatus of claim 12 wherein said plurality of contacts are bent from said base section, said contacts having a normal resting position, said contacts exerting a spring force when displaced from said normal resting position.
Claim 16
Dependent Claim
18 words
The apparatus of claim 1 further comprising a thief electrode mounted on an outer surface of said cup.
Claim 17
Dependent Claim
25 words
The apparatus of claim 1 further comprising at least one alignment pin, said cup and said cone each having at least one corresponding alignment hole.
Claim 18
Dependent Claim
32 words
The apparatus of claim 1 wherein said plurality of contacts are grouped into at least two banks of contacts, each of said banks being electrically isolated for the other of said banks.
Claim 19
Dependent Claim
15 words
The apparatus of claim 1 further comprising snubbers for centering said substrate in said cup.
Claim 20
Dependent Claim
32 words
The apparatus of claim 1 wherein said cup is attached to said spindle, said apparatus further comprising a shaft extending into said spindle, said cone capable of vertical movement along said shaft.
Claim 21
Dependent Claim
18 words
The apparatus of claim 19 further comprising an air actuated cylinder which moves said cone along said shaft.
Claim 22
Dependent Claim
31 words
The apparatus of claim 19 further comprising at least one lead extending from said spindle to said cup, said at least one lead being electrically connected to said plurality of contacts.
Claim 23
Dependent Claim
15 words
The apparatus of claim 19 further comprising at least one poppet valve on said cone.
Claim 24
Dependent Claim
13 words
The apparatus of claim 1 wherein said cup comprises an electrically insulating material.
Claim 25
Dependent Claim
18 words
The apparatus of claim 1 wherein said cup comprises an electrically conductive material having an electrically insulating coating.
Claim 26
Dependent Claim
44 words
The apparatus of claim 1, wherein each of said plurality of contacts is torsionally bent so that an apex of a tip of each contact projects upward and a base of said tip points downward relative to a plane defined by said inner perimeter.
Claim 27
Dependent Claim
20 words
The apparatus of claim 1 further comprising a compressed gas line for supplying said pressurized gas to said first cavity.
Claim 28
Dependent Claim
13 words
The apparatus of claim 1 further comprising a bath containing an electroplating solution.
Claim 29
Dependent Claim
12 words
The apparatus of claim 27 wherein said electroplating solution comprises metal ions.
Claim 30
Dependent Claim
12 words
The apparatus of claim 28 wherein said electroplating solution comprises copper ions.
Claim 31
Dependent Claim
14 words
The apparatus of claim 27 further comprising an anode immersed in said electroplating solution.
Claim 32
Dependent Claim
20 words
The apparatus of claim 30 further comprising a power supply for biasing said anode positive and said electrical contacts negative.
Claim 33
Dependent Claim
27 words
The apparatus of claim 31 comprising a conductive path between said power supply and said electrical contacts, said conductive path comprising a slip ring and a brush.
Claim 34
Dependent Claim
35 words
The apparatus of claim 31 comprising a substrate to be electroplated, said compliant seal being in contact with a perimeter region of said substrate, said substrate being urged by said compliant seal against said cone.
Claim 35
Dependent Claim
27 words
The apparatus of claim 33 wherein contact between said compliant seal and said perimeter region of said substrate prevents said electroplating solution from entering said first cavity.
Claim 36
Dependent Claim
12 words
The apparatus of claim 33 wherein said substrate comprises a semiconductor wafer.
References Cited (Backward Citations)
US3962047A
Cited
US4137867A
Cited
US4170959A
Cited
US4246088A
Cited
US4280882A
Cited
US4259166A
Cited
US4339319A
Cited
US4304641A
Cited
US4341613A
Cited
US4339297A
Cited
US4597836A
Cited
US4469566A
Cited
US4466864A
Cited
US4565607A
Cited
US4534832A
Cited
US4696729A
Cited
US4906346A
Cited
US4861452A
Cited
US4931149A
Cited
US5024746A
Cited
US4828654A
Cited
US4879007A
Cited
US4879007B1
Cited
US5377708A
Cited
US5000827A
Cited
US5222310A
Cited
US5135636A
Cited
US5078852A
Cited
US5096550A
Cited
US5372699A
Cited
US5437777A
Cited
US5429733A
Cited
US5227041A
Cited
US5443707A
Cited
US5498325A
Cited
US5441629A
Cited
US5332487A
Cited
US5421987A
Cited
US5462649A
Cited
US5447615A
Cited
US5391285A
Cited
US5405518A
Cited
US5804052A
Cited
US5472592A
Cited
US5750014A
Cited
US5725745A
Cited
US5522975A
Cited
US5670034A
Cited
US5855850A
Cited
US5597460A
Cited
US5744019A
Cited
US5776327A
Cited
US5788829A
Cited
US5843296A
Cited
US6004828A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 2003-12-05 | 2004-06-05 | 2004-12-05 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2007-12-05 | 2008-06-05 | 2008-12-05 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2011-12-05 | 2012-06-05 | 2012-12-05 | $7700.00 | Window Closed / Lapsed |