US6151430A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Photonic device having an integal guide and method of manufacturing
Assignee: W.L. Gore and Associates Inc
•
Filing: 1998-07-08
•
Granted: 2000-11-21
•
Expires: 2018-07-08
Abstract
Abstract A process is provided for creating microstructure coupling guides for aligning photonic devices with optical signal carrying apparatuses. The process includes applying a photoresist to a semiconductor material, spinning the semiconductor material, baking the semiconductor material, exposing the photoresist, baking the semiconductor material a second time, and developing the resist. The process creates a microstructure that acts as an integral guide to align and maintain the relative position between an optical signal carrying apparatus and a photonic device.
Inventors
- 👤 Robert F. Traver, Jr.
- 👤 Theodore D. Lowes
- 👤 Mark N. Donhowe
- 👤 Sean P. Kilcoyne
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-27 12:05
CPC Classifications
G; G02; G02B; G02B6/00; G02B6/24; G02B6/42; G02B6/4201; G02B6/4249; G02B6/4219; G02B6/4228; G02B6/423
Claims Analysis
Total Claims: 32
Claim 1
Independent Claim
55 words
An article comprising: a photonic device having an optical signal receiving surface and an integral polymeric optical signal conveying element guide, said guide having a first end integral with said surface and a second free end extending outwardly away from said surface, said guide being configured to align and receive an optical signal conveying element.
Claim 2
Dependent Claim
55 words
An article comprising: a photonic device having an optical signal receiving surface and an integral polymeric optical signal conveying element guide, said guide having a first end integral with said surface and a second free end extending outwardly away from said surface, said guide being configured to align and receive an optical signal conveying element.
Claim 3
Dependent Claim
22 words
The article of claim 1, wherein a wall of the guide is substantially perpendicular to a substantially planar surface of the article.
Claim 4
Dependent Claim
23 words
The article according to claim 1, wherein said integral guide being configured to receive and align a plurality of optical signal conveying elements.
Claim 5
Dependent Claim
12 words
The article of claim 1, wherein the integral polymeric guide is V-shaped.
Claim 6
Dependent Claim
14 words
The article of claim 1, wherein the photonic device is a light emitting diode.
Claim 7
Dependent Claim
12 words
The article of claim 1, further including an optical signal conveying element.
Claim 8
Dependent Claim
18 words
The article of claim 6, wherein the optical signal conveying element is an optical fiber or a waveguide.
Claim 9
Dependent Claim
14 words
The article of claim 1, wherein the photonic device is a surface emitting laser.
Claim 10
Dependent Claim
12 words
The article of claim 1, wherein the photonic device is a photodetector.
Claim 11
Dependent Claim
16 words
The article of claim 1, wherein the photonic device is a vertical cavity surface emitting laser.
Claim 12
Dependent Claim
13 words
The article of claim 1, wherein the polymeric material includes an epoxidized novolak.
Claim 13
Dependent Claim
81 words
An article comprising: a photonic device having an optical signal receiving surface; and an integral polymeric optical signal conveying element guide, said guide having a first end integral with said surface and a second end extending outwardly away from said surface, said guide being configured to align and receive an optical signal conveying element and being formed by a plating material, wherein a resist is used to form openings which are filled with the plating material before the resist is removed.
Claim 14
Dependent Claim
81 words
An article comprising: a photonic device having an optical signal receiving surface; and an integral polymeric optical signal conveying element guide, said guide having a first end integral with said surface and a second end extending outwardly away from said surface, said guide being configured to align and receive an optical signal conveying element and being formed by a plating material, wherein a resist is used to form openings which are filled with the plating material before the resist is removed.
Claim 15
Dependent Claim
13 words
The article of claim 12, wherein the plating material is deposited by electroplating.
Claim 16
Dependent Claim
12 words
The article of claim 12, wherein the resist material includes epoxidized novolak.
Claim 17
Dependent Claim
53 words
An article comprising: a photonic device having an optical signal receiving surface; an optical element guide formed by a photo-definable polymer material, said guide having a first end adjacent said surface and a second end extending outwardly away from said surface, and being configured to align and receive an optical signal conveying element.
Claim 18
Dependent Claim
53 words
An article comprising: a photonic device having an optical signal receiving surface; an optical element guide formed by a photo-definable polymer material, said guide having a first end adjacent said surface and a second end extending outwardly away from said surface, and being configured to align and receive an optical signal conveying element.
Claim 19
Dependent Claim
10 words
The article of claim 15, wherein said guide is V-shaped.
Claim 20
Dependent Claim
14 words
The article of claim 15, wherein the photo-definable polymer material includes a negative photoresist.
Claim 21
Dependent Claim
14 words
The article of claim 15, wherein the photo-definable polymer material includes an epoxidized novolak.
Claim 22
Dependent Claim
57 words
Preparing a photonic device comprising: applying a polymeric material to a surface of a substrate having the photonic device; and forming an integral guide from the polymeric material on the photonic device, said integral guide extending outwardly from said surface to form a free end and being configured to align and receive an optical signal conveying element.
Claim 23
Dependent Claim
57 words
Preparing a photonic device comprising: applying a polymeric material to a surface of a substrate having the photonic device; and forming an integral guide from the polymeric material on the photonic device, said integral guide extending outwardly from said surface to form a free end and being configured to align and receive an optical signal conveying element.
Claim 24
Dependent Claim
13 words
The method of claim 19, wherein the forming step includes reactive ion etching.
Claim 25
Dependent Claim
14 words
The method of claim 19, wherein the photonic device is a light emitting diode.
Claim 26
Dependent Claim
15 words
The method of claim 19, wherein the guide is configured to receive an optical fiber.
Claim 27
Dependent Claim
14 words
The method of claim 19, wherein the guide is configured to receive a waveguide.
Claim 28
Dependent Claim
12 words
The method of claim 19, wherein the photonic device is a photodiode.
Claim 29
Dependent Claim
12 words
The method of claim 19, wherein the photonic device is a photodetector.
Claim 30
Dependent Claim
16 words
The method of claim 19, wherein the photonic device is a vertical cavity surface emitting laser.
Claim 31
Dependent Claim
14 words
The method of claim 19, wherein the photonic device is a light emitting diode.
Claim 32
Dependent Claim
11 words
A photonic device produced according to the process of claim 19.
References Cited (Backward Citations)
US4307935A
Cited
US4882245A
Cited
US4779946A
Cited
US4826275A
Cited
US5466558A
Cited
US5526454A
Cited
US5355386A
Cited
US5644667A
Cited
US5420954A
Cited
US5631988A
Cited
US5359687A
Cited
WO1997002501A1
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 2003-11-21 | 2004-05-22 | 2004-11-21 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2007-11-21 | 2008-05-22 | 2008-11-21 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2011-11-21 | 2012-05-22 | 2012-11-21 | $7700.00 | Window Closed / Lapsed |