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Patent US6151346A successfully refreshed from Google Patents.
US6151346A
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US
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High pulse rate pulse power system with fast rise time and low current
Assignee: Cymer LLC
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Filing: 1999-08-09
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Granted: 2000-11-21
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Expires: 2019-08-09
Abstract
Abstract A high pulse rate pulse power source for supplying controlled high energy electrical pulses at rates of 2000 Hz or greater. The source includes a pulse generating circuit including a charging capacitor, a solid state switch and a current limiting inductor. Pulses generated in the pulse generating circuit are compressed in at least two pulse compression circuits and a step-up pulse transformer increases peak voltage to at least 12,000 volts. A very fast regulated power supply is provided for charging the charging capacitor in less than 400 microseconds and a pulse control system including a programmed processor controls the charging of the charging capacitor to an accuracy of less than about one percent at a rate of at least 2000 charges per second.
Inventors
- 👤 William N. Partlo
- 👤 Daniel L. Birx
- 👤 Richard M. Ness
- 👤 Daniel A. Rothweil
- 👤 Paul C. Melcher
- 👤 Brett D. Smith
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-25 17:44
CPC Classifications
H; H01; H01S; H01S3/00; H01S3/09; H01S3/091; H01S3/094; H01S3/094076; G; G03; G03F; G03F7/00; G03F7/70; G03F7/70008; G03F7/70025; G03F7/70041; G03F7/70483; G03F7/7055; G03F7/70575; H01S3/097; H01S3/0975; H03; H03K; H03K17/00; H03K17/51; H03K17/80; H03K3/00; H03K3/02; H03K3/53; H03K3/57; H10; H10D; H10D89/00; H10D89/60; H10D89/601; H10D89/711; H10D89/713; H01S3/14; H01S3/22; H01S3/223; H01S3/225
Claims Analysis
Total Claims: 27
Claim 1
Independent Claim
231 words
A high pulse rate pulse power source providing pulse power to a pair of electrodes comprising: A) a pulse generating circuit, comprising: 1) a charging capacitor for storing a charge at voltages in excess of 600 volts, 2) a solid state switch, and 3) a current limiting inductor; for generating electrical pulses with electrical energy in excess of 3 Joules and with peak voltages in excess of 600 volts; B) at least two pulse compression circuits, defining a first compression circuit providing a first pulse compression and a second compression circuit providing a second pulse compression, each compression circuit comprising a bank of capacitors and a saturable inductor, said second pulse compression circuit comprising a second saturable inductor having less than 6 turns; C) step-up pulse transformer for increasing the peak voltage of the electrical pulses to at least 12,000 volts said pulse transformer comprising a plurality of electrically parallel primary windings and a secondary winding comprises at least one substantially straight conductor; D) a very fast regulated power supply for charging said charging capacitor with at least 3 Joules of electrical energy at voltages of at least 600 volts, in less than 400 microseconds, and E) a very fast pulse control system comprising a processor for controlling the charging of said charging capacitor to an accuracy of less than one percent at a rate at least 2000 charges per second.
Claim 2
Dependent Claim
231 words
A high pulse rate pulse power source providing pulse power to a pair of electrodes comprising: A) a pulse generating circuit, comprising: 1) a charging capacitor for storing a charge at voltages in excess of 600 volts, 2) a solid state switch, and 3) a current limiting inductor; for generating electrical pulses with electrical energy in excess of 3 Joules and with peak voltages in excess of 600 volts; B) at least two pulse compression circuits, defining a first compression circuit providing a first pulse compression and a second compression circuit providing a second pulse compression, each compression circuit comprising a bank of capacitors and a saturable inductor, said second pulse compression circuit comprising a second saturable inductor having less than 6 turns; C) step-up pulse transformer for increasing the peak voltage of the electrical pulses to at least 12,000 volts said pulse transformer comprising a plurality of electrically parallel primary windings and a secondary winding comprises at least one substantially straight conductor; D) a very fast regulated power supply for charging said charging capacitor with at least 3 Joules of electrical energy at voltages of at least 600 volts, in less than 400 microseconds, and E) a very fast pulse control system comprising a processor for controlling the charging of said charging capacitor to an accuracy of less than one percent at a rate at least 2000 charges per second.
Claim 3
Dependent Claim
23 words
A pulse power source as in claim 1 wherein said saturable inductor in said second pulse compression circuit comprises less than three turns.
Claim 4
Dependent Claim
21 words
A pulse power source as in claim 1 wherein said second pulse compression circuit comprises a single bank of peaking capacitors.
Claim 5
Dependent Claim
30 words
A pulse power source as in claim 1 wherein said second pulse compression circuit comprises two separate banks of capacitors each bank is isolated from said electrodes by an inductance.
Claim 6
Dependent Claim
18 words
A pulse power source as in claim 4 wherein said inductance is provided by a single saturable inductor.
Claim 7
Dependent Claim
20 words
A pulse power source as in claim 1 wherein said step-up transformer is a part of said first compression circuit.
Claim 8
Dependent Claim
23 words
A pulse power source as in claim 1 wherein said at least one substantially straight conductor, four straight rods electrically connected in series.
Claim 9
Dependent Claim
20 words
A pulse power source as in claim 1 wherein said plurality of primary windings is at least 20 primary windings.
Claim 10
Dependent Claim
37 words
A pulse power source as in claim 1 wherein said regulated power supply comprises a bleed-down circuit comprising a switch and a resistor for bleeding down to voltage on said charging capacitor to a desired control voltage.
Claim 11
Dependent Claim
41 words
A pulse power source as in claim 1 wherein said source is a component of an electric discharge laser and furnishes electrical pulses to generate discharges between electrodes of said laser to generate laser pulses each pulse defining a pulse energy.
Claim 12
Dependent Claim
22 words
A pulse power source as in claim 10 and further comprising a pulse energy monitor for monitoring energy of said laser pulses.
Claim 13
Dependent Claim
43 words
A pulse power source as in claim 11 said processor for controlling the charging of said charging capacitor is programmed with an algorithm for calculating a control voltage for a pulse on the basis of pulse energy of at least one previous pulse.
Claim 14
Dependent Claim
24 words
A pulse power source as in claim 12 wherein said at least one previous pulse comprises all the pulses in a burst of pulses.
Claim 15
Dependent Claim
20 words
A pulse power source as in claim 13 wherein said at least one pulse also includes pulses in earlier bursts.
Claim 16
Dependent Claim
31 words
A pulse power source as in claim 1 wherein said at least two compression circuits is two compression circuits and the capacitor in said second compression circuit is a peaking capacitor.
Claim 17
Dependent Claim
38 words
A pulse power source as in claim 1 wherein said pulse generating circuit, said compression circuits, said pulse transformer and said power supply are fabricated into modules comprising components of an electric discharge laser system defining two electrodes.
Claim 18
Dependent Claim
17 words
A pulse power source as in claim 16 wherein said laser system is an excimer laser system.
Claim 19
Dependent Claim
18 words
A pulse power system as in claim 17 wherein said excimer laser system is a KrF laser system.
Claim 20
Dependent Claim
14 words
A pulse power system as in claim 18 wherein said modules are air cooled.
Claim 21
Dependent Claim
46 words
A pulse power system as in claim 19 wherein said saturable inductors are immersed transformer oil defining an oil level contained in a pot type container having at least one real function wherein said oil level is below all of said at least one seal junction.
Claim 22
Dependent Claim
18 words
A pulse power system as in claim 17 wherein said excimer laser system is an ArF laser system.
Claim 23
Dependent Claim
36 words
A pulse power system as in claim 16 wherein one of said two electrodes is connected to a ground and said pulse power system provides a negative high voltage to the other of said two electrodes.
Claim 24
Dependent Claim
36 words
A pulse power system as in claim 16 wherein one of said two electrodes is connected to a ground and said pulse power system provides a positive high voltage to the other of said two electrodes.
Claim 25
Dependent Claim
62 words
A pulse power system as in claim 16 wherein said pulse generating circuit is a first pulse generating circuit for generating negative pulses and further comprising a second pulse generating circuit for generating positive pulses, wherein said first pulse generating circuit and said second pulse generating circuit are controlled to produce alternating pulses to produce bipolar operation of the electric discharge laser.
Claim 26
Dependent Claim
23 words
A pulse power system as in claim 1 wherein at least one of said saturable inductors comprise at least one flux excluding piece.
Claim 27
Dependent Claim
35 words
A pulse power system as in claim 1 wherein said capacitor and inductors are connected electrically using copper clad printed circuit boards and bolts for connecting the capacitors and inductors to the printed circuit boards.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 2003-11-21 | 2004-05-22 | 2004-11-21 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2007-11-21 | 2008-05-22 | 2008-11-21 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2011-11-21 | 2012-05-22 | 2012-11-21 | $7700.00 | Window Closed / Lapsed |