US6143601A
Expired / Lapsed
US
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Method of fabricating DRAM
Assignee: United Microelectronics Corp
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Filing: 1998-12-09
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Granted: 2000-11-07
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Expires: 2018-12-09
Abstract
Abstract A method of fabricating DRAM and embedded DRAM. A contact pad is formed in the periphery/logic circuitry region simultaneously with the formation of the bit line in the memory region. A metal-insulator-metal (MIM) capacitor structure is formed in the memory region by damascene, and a contact and a contact pad are formed in the periphery/logic circuitry region. The formation of the contact in the periphery/logic circuitry is formed step by step to lower the difficulty to fabricate the deep contact. The capacitor electrodes are made by metal layers, which can increase the capacitance of the capacitor.
Inventors
- 👤 Shih-Wei Sun
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-09 03:04
CPC Classifications
H; H10; H10B; H10B12/00; H10B12/01; H10B12/09; H10B12/50; H10D; H10D1/00; H10D1/60; H10D1/68; H10D1/692; H10B12/02; H10B12/03; H10B12/033; H10B12/30; H10B12/31; H10B12/315; H10D1/01; H10D1/041; H10D1/042; H10D1/711; H10D1/716; H10P; H10P14/00; H10P14/60; H10P14/63; H10P14/6326; H10P14/6328; H10W; H10W20/00; H10W20/01; H10W20/031
Claims Analysis
Total Claims: 22
Claim 1
Independent Claim
161 words
A method of fabricating a DRAM wherein a substrate having a memory region and a periphery circuitry region is provided and a first dielectric layer is formed thereon, comprising the steps of: forming a bit line in the memory region and forming a contact pad in the periphery circuitry region; forming a second dielectric layer on the first dielectric layer; forming an opening having a wider upper portion and a narrower lower portion within the first and the second dielectric layer in the memory region to expose the substrate and forming a contact opening in the periphery circuitry region to expose the contact pad; forming a lower electrode of a capacitor on the opening in the memory region and forming a contact in the contact opening; forming a capacitor dielectric layer on the lower electrode; and forming an upper electrode of the capacitor on the capacitor dielectric layer and forming a metal pad on the contact in the periphery circuitry region.
Claim 2
Independent Claim
161 words
A method of fabricating a DRAM wherein a substrate having a memory region and a periphery circuitry region is provided and a first dielectric layer is formed thereon, comprising the steps of: forming a bit line in the memory region and forming a contact pad in the periphery circuitry region; forming a second dielectric layer on the first dielectric layer; forming an opening having a wider upper portion and a narrower lower portion within the first and the second dielectric layer in the memory region to expose the substrate and forming a contact opening in the periphery circuitry region to expose the contact pad; forming a lower electrode of a capacitor on the opening in the memory region and forming a contact in the contact opening; forming a capacitor dielectric layer on the lower electrode; and forming an upper electrode of the capacitor on the capacitor dielectric layer and forming a metal pad on the contact in the periphery circuitry region.
Claim 3
Independent Claim
234 words
A method of fabricating a DRAM wherein a substrate having a memory region and a periphery circuitry region is provided, a word line and a gate are formed thereon in the memory region and the periphery circuitry region respectively, and a first dielectric layer is formed on the substrate to cover the word line and the gate, comprising the steps of: forming a bit line in the memory region and forming a contact pad in the periphery circuitry region; forming a second dielectric layer on the first dielectric layer; forming an opening having a wider upper portion and a narrower lower portion within the first and the second dielectric layer in the memory region to expose the substrate and forming a contact opening in the periphery circuitry region to expose the contact pad; forming a patterned first metal layer on the second dielectric layer wherein the first metal layer on the opening in the memory region serves as a lower electrode of a capacitor and the metal layer filled in the contact window in the periphery circuitry region serves as a contact; forming a capacitor dielectric layer on the lower electrode; and forming a patterned second metal layer on the second metal layer wherein the second metal layer on the capacitor dielectric layer serves as an upper electrode of the capacitor and the second metal layer on the contact serves as a metal pad.
Claim 4
Independent Claim
234 words
A method of fabricating a DRAM wherein a substrate having a memory region and a periphery circuitry region is provided, a word line and a gate are formed thereon in the memory region and the periphery circuitry region respectively, and a first dielectric layer is formed on the substrate to cover the word line and the gate, comprising the steps of: forming a bit line in the memory region and forming a contact pad in the periphery circuitry region; forming a second dielectric layer on the first dielectric layer; forming an opening having a wider upper portion and a narrower lower portion within the first and the second dielectric layer in the memory region to expose the substrate and forming a contact opening in the periphery circuitry region to expose the contact pad; forming a patterned first metal layer on the second dielectric layer wherein the first metal layer on the opening in the memory region serves as a lower electrode of a capacitor and the metal layer filled in the contact window in the periphery circuitry region serves as a contact; forming a capacitor dielectric layer on the lower electrode; and forming a patterned second metal layer on the second metal layer wherein the second metal layer on the capacitor dielectric layer serves as an upper electrode of the capacitor and the second metal layer on the contact serves as a metal pad.
Claim 5
Dependent Claim
89 words
The method according to claim 2, wherein the step of forming a bit line in the memory region and forming a contact pad in the periphery circuitry region further comprises forming a bit line contact window in the memory region and forming a contact pad opening in the periphery circuitry by patterning the first dielectric layer; forming a conductive layer on the first dielectric layer; and forming the bit line in the memory region and forming the contact pad in the periphery circuitry region by patterning the conductive layer.
Claim 6
Dependent Claim
14 words
The method according to claim 3, wherein the conductive layer includes a metal layer.
Claim 7
Dependent Claim
13 words
The method according to claim 2, wherein the first metal layer includes tungsten.
Claim 8
Dependent Claim
17 words
The method according to claim 2, wherein the capacitor dielectric layer includes Ta 2 O 5 .
Claim 9
Independent Claim
280 words
A method of fabricating an embedded DRAM wherein a substrate having a memory region and a periphery circuitry region is provided, a word line and a gate are respectively formed thereon in the memory region and the periphery circuitry region, and a insulated layer is formed on the substrate to cover the word line and the gate, comprising the step of: forming a bit line within the insulated layer in the memory region and forming a contact pad in the periphery circuitry region; forming a first dielectric layer on the insulated layer; forming a hard material layer having a first opening and a second in the memory region and the periphery circuitry region on the first dielectric layer; forming a second dielectric layer on the hard material layer; forming a third opening on the first opening in the memory region to expose the substrate and the hard material layer to form a node contact window within the first dielectric layer and the insulated layer, and forming a contact opening in the periphery circuitry region to expose the contact pad; forming a patterned first metal layer on the second dielectric layer wherein the first metal layer on the opening in the memory region serves as a lower electrode of a capacitor and the metal layer filled in the contact window in the periphery circuitry region serves as a contact; forming a capacitor dielectric layer on the lower electrode; and forming a patterned second metal layer on the second metal layer wherein the second metal layer on the capacitor dielectric layer serves as an upper electrode of the capacitor and the second metal layer on the contact serves as a metal pad.
Claim 10
Independent Claim
280 words
A method of fabricating an embedded DRAM wherein a substrate having a memory region and a periphery circuitry region is provided, a word line and a gate are respectively formed thereon in the memory region and the periphery circuitry region, and a insulated layer is formed on the substrate to cover the word line and the gate, comprising the step of: forming a bit line within the insulated layer in the memory region and forming a contact pad in the periphery circuitry region; forming a first dielectric layer on the insulated layer; forming a hard material layer having a first opening and a second in the memory region and the periphery circuitry region on the first dielectric layer; forming a second dielectric layer on the hard material layer; forming a third opening on the first opening in the memory region to expose the substrate and the hard material layer to form a node contact window within the first dielectric layer and the insulated layer, and forming a contact opening in the periphery circuitry region to expose the contact pad; forming a patterned first metal layer on the second dielectric layer wherein the first metal layer on the opening in the memory region serves as a lower electrode of a capacitor and the metal layer filled in the contact window in the periphery circuitry region serves as a contact; forming a capacitor dielectric layer on the lower electrode; and forming a patterned second metal layer on the second metal layer wherein the second metal layer on the capacitor dielectric layer serves as an upper electrode of the capacitor and the second metal layer on the contact serves as a metal pad.
Claim 11
Dependent Claim
17 words
The method according to claim 7, wherein the bit line and the contact pad includes tungsten silicide.
Claim 12
Dependent Claim
14 words
The method according to claim 7, wherein the hard material layer includes silicon nitride.
Claim 13
Dependent Claim
13 words
The method according to claim 7, wherein the first metal layer includes tungsten.
Claim 14
Dependent Claim
17 words
The method according to claim 7, wherein the capacitor dielectric layer includes Ta 2 O 5 .
Claim 15
Dependent Claim
87 words
The method according to claim 7, wherein the step of forming a bit line in the memory region and forming a contact pad in the periphery circuitry region further comprises forming a bit line contact window in the memory region and forming a contact pad opening in the periphery circuitry by patterning the insulated layer; forming a conductive layer on the insulated layer; and forming the bit line in the memory region and forming the contact pad in the periphery circuitry region by patterning the conductive layer.
Claim 16
Independent Claim
278 words
A method of fabricating an embedded DRAM wherein a substrate having a memory region and a logic circuitry region is provided, a word line and a gate are respectively formed thereon in the memory region and the logic circuitry region, and a insulated layer is formed on the substrate to cover the word line and the gate, comprising: forming a bit line within the insulated layer in the memory region and forming a contact pad in the logic circuitry region; forming a first dielectric layer on the insulated layer; forming a hard material layer having a first opening and a second opening in the memory region and the logic circuitry region on the first dielectric layer; forming a second dielectric layer on the hard material layer; forming a third opening on the first opening in the memory region to expose the substrate and the hard material layer to form a node contact window within the first dielectric layer and the insulated layer, and forming a contact opening in the logic circuitry region to expose the contact pad; forming a patterned first metal layer on the second dielectric layer wherein the first metal layer on the opening in the memory region serves as a lower electrode of a capacitor and the metal layer filled in the contact window in the logic circuitry region serves as a contact; forming a capacitor dielectric layer on the lower electrode; and forming a patterned second metal layer on the second metal layer wherein the second metal layer on the capacitor dielectric layer serves as an upper electrode of the capacitor and the second metal layer on the contact serves as a metal pad.
Claim 17
Independent Claim
278 words
A method of fabricating an embedded DRAM wherein a substrate having a memory region and a logic circuitry region is provided, a word line and a gate are respectively formed thereon in the memory region and the logic circuitry region, and a insulated layer is formed on the substrate to cover the word line and the gate, comprising: forming a bit line within the insulated layer in the memory region and forming a contact pad in the logic circuitry region; forming a first dielectric layer on the insulated layer; forming a hard material layer having a first opening and a second opening in the memory region and the logic circuitry region on the first dielectric layer; forming a second dielectric layer on the hard material layer; forming a third opening on the first opening in the memory region to expose the substrate and the hard material layer to form a node contact window within the first dielectric layer and the insulated layer, and forming a contact opening in the logic circuitry region to expose the contact pad; forming a patterned first metal layer on the second dielectric layer wherein the first metal layer on the opening in the memory region serves as a lower electrode of a capacitor and the metal layer filled in the contact window in the logic circuitry region serves as a contact; forming a capacitor dielectric layer on the lower electrode; and forming a patterned second metal layer on the second metal layer wherein the second metal layer on the capacitor dielectric layer serves as an upper electrode of the capacitor and the second metal layer on the contact serves as a metal pad.
Claim 18
Dependent Claim
17 words
The method according to claim 13, wherein the bit line and the contact pad includes tungsten silicide.
Claim 19
Dependent Claim
14 words
The method according to claim 13, wherein the hard material layer includes silicon nitride.
Claim 20
Dependent Claim
13 words
The method according to claim 13, wherein the first metal layer includes tungsten.
Claim 21
Dependent Claim
17 words
The method according to claim 13, wherein the capacitor dielectric layer includes Ta 2 O 5 .
Claim 22
Dependent Claim
84 words
The method according to claim 13, wherein forming a bit line in the memory region and forming a contact pad in the logic circuitry region further comprises forming a bit line contact window in the memory region and forming a contact pad opening in the logic circuitry by patterning the insulated layer; forming a conductive layer on the insulated layer; and forming the bit line in the memory region and forming the contact pad in the logic circuitry region by patterning the conductive layer.
References Cited (Backward Citations)
US5610854A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 2003-11-07 | 2004-05-08 | 2004-11-07 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2007-11-07 | 2008-05-08 | 2008-11-07 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2011-11-07 | 2012-05-08 | 2012-11-07 | $7700.00 | Window Closed / Lapsed |