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US6140746A
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Piezoelectric thin film, method for producing the same, and ink jet recording head using the thin film
Assignee: Seiko Epson Corp
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Filing: 1996-04-03
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Granted: 2000-10-31
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Expires: 2016-04-03
Abstract
Abstract A piezoelectric thin film which has good properties, for example, a high dielectric constant and a high piezoelectric strain constant is disclosed. A method for producing a piezoelectric film, which causes no crack during annealing, is also disclosed. The piezoelectric thin film has a thickness in the range of from 0.5 to 20 mu m, comprises crystal grains having an average grain diameter of 0.005 to 0.2 mu m, and is free from any multilayer structure in its cross section. The process for producing a piezoelectric thin film comprises that steps of: coating a substrate with a sol composition comprising a sol, of a metal component for constituting a piezoelectric film, and a polymer compound and then drying the coating to form a film; pre-sintering the film to form a porous thin film of gel comprising an amorphous metal oxide; pre-annealing the porous thin film of gel to bring the film to a film formed of a crystalline metal oxide; repeating the above steps at least once to form a laminated film formed of a crystalline metal oxide; and annealing the laminated film to grow crystal grains of perovskite type in the film into a larger size.
Inventors
- 👤 Satoru Miyashita
- 👤 Masakazu Shinozuka
- 👤 Kouji Sumi
- 👤 Masami Murai
- 👤 Tetsushi Takahashi
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-30 14:12
CPC Classifications
B; B41; B41J; B41J2/00; B41J2/005; B41J2/01; B41J2/135; B41J2/14; B41J2/14201; B41J2/14233; H; H10; H10N; H10N30/00; H10N30/01; H10N30/07; H10N30/074; H10N30/077; H10N30/078; H10N30/80; H10N30/85; H10N30/853; H10N30/8548; H10N30/8554
Claims Analysis
Total Claims: 32
Claim 1
Independent Claim
67 words
In a piezoelectric thin film formed by lamination of a plurality of layers, the improvement wherein the piezoelectric thin film is formed by a plurality of crystallizing steps such that it comprises: a) a cross section that is free of any laminar interface; b) a thickness in the range of from 0.5 μm; and c) crystal grains having an average grain diameter of 0.005 to 0.2 μm.
Claim 2
Dependent Claim
67 words
In a piezoelectric thin film formed by lamination of a plurality of layers, the improvement wherein the piezoelectric thin film is formed by a plurality of crystallizing steps such that it comprises: a) a cross section that is free of any laminar interface; b) a thickness in the range of from 0.5 μm; and c) crystal grains having an average grain diameter of 0.005 to 0.2 μm.
Claim 3
Dependent Claim
98 words
A piezoelectric thin film according to claim 1 which comprises a piezoelectric material of a three-component system represented by the formula xPb (Mg 1/3 Nb 2/3 )O 3 -yPbZrO 3 -zPbTiO 3 , wherein x, y, and z represent molar ratios provided that x+y+z=1, and x, y, and z indicate a point falling within the area defined by lines connecting the following four points A, B, C, and D in a composition diagram of the three-component system represented by said formula: A (x=0.05, y=0.40, z=0.55), B (x=0.05, y=0.60, z=0.35), C (x=0.25, y=0.30, z=0.45), and D (x=0.25, y=0.50, z=0.25).
Claim 4
Dependent Claim
109 words
A piezoelectric thin film according to claim 1 which comprises a piezoelectric material of a three-component system represented by the formula Pb(1-α)Γα[(Mg 1/3 Nb 2/3 )xZryTiz]O 3 , wherein x, y, and z represent molar ratios provided that x+y+z=1, and x, y, and z indicate a point falling within the area defined by lines connecting the following four points A, B, C, and D in a composition diagram of the three-component system represented by said formula: A (x=0.05, y=0.40, z=0.55), B (x=0.05, y=0.60, z=0.35), C (x=0.25, y=0.30, z=0.45), and D (x=0.25, y=0.50, z=0.25); Γ represents an element selected from Sr, Ca, Ba, Bi, and La; and α is 0<α≦0.2.
Claim 5
Dependent Claim
34 words
A piezoelectric thin film according to claim 1, wherein the thickness is in the range of from 0.5 to 20 μm, the thin film being free from any multilayer structure in the cross section.
Claim 6
Dependent Claim
30 words
A piezoelectric thin film according to any one of claim 2 further comprising another Pb or Pb compound thereby the mole ratio of Pb to (Mg+Nb+Zr+Ti) is 1 to 1.2.
Claim 7
Dependent Claim
21 words
A piezoelectric thin-film device comprising a piezoelectric thin film according to any one of claim 4 sandwiched between two electrode layers.
Claim 8
Dependent Claim
20 words
An ink jet recording head comprising, as a vibrator, a piezoelectric thin film according to any one of claim 4.
Claim 9
Dependent Claim
17 words
An ink jet recording head comprising, as a vibrator, a piezoelectric thin film according to claim 5.
Claim 10
Dependent Claim
17 words
A piezoelectric thin film as claimed in claim 4, wherein the cross section is free of cracks.
Claim 11
Dependent Claim
191 words
The piezoelectric thin film of claim 1 produced by a process comprising the steps of: a) coating a substrate with a sol composition comprising a sol of a metal component for constituting a piezoelectric film, and a polymer compound and then drying the coating to form a film; b) pre-sintering the film to form a porous thin film of gel comprising an amorphous metal oxide; c) pre-annealing the porous thin film of gel to bring the film to a film formed of a crystalline metal oxide; d) laminating the film formed in step c) by repeating the steps a), b), and c) at least once to form a laminated film formed of a crystalline metal oxide; and e) annealing the film prepared in step d) to grow perovskite crystal grains in the film into a larger size; said steps a), b), c), d) and e) producing the piezoelectric thin film with a cross section that is free of any interface created by the laminating step d); a thickness in the range of from 0.5 μm to 20 μm; and crystal grains having an average grain diameter of 0.005 to 0.2 μm.
Claim 12
Dependent Claim
30 words
The piezoelectric thin film according to claim 10, wherein the pre-annealing in the step c) is carried out at a temperature in the range of from 400 to 800° C.
Claim 13
Dependent Claim
30 words
The piezoelectric thin film according to claim 10, wherein the annealing in the step e) is carried out at a temperature in the range of from 600 to 1200° C.
Claim 14
Dependent Claim
30 words
The piezoelectric thin film according to claim 10, wherein the annealing in the step e) is carried out at a temperature in the range of from 800 to 1000° C.
Claim 15
Dependent Claim
60 words
The piezoelectric thin film according to claim 10, wherein the pre-annealing in the step c) is carried out in two stages, the first stage of which is carried out at a temperature in the range of from 400 to 600° C. with the second stage being carried out at a temperature in the range of from 600 to 800° C.
Claim 16
Dependent Claim
62 words
The piezoelectric thin film according to claim 10, wherein the annealing in the step e) is carried out in two stages, the first stage of which is carried out at a temperature in the range of from 600 to 800 ° C. with the second stage being carried out at a temperature in the range of from 800° C. to 1000° C.
Claim 17
Dependent Claim
26 words
The piezoelectric thin film according to claim 10, wherein the thickness of the porous thin film formed in the step b) is 0.01 to 1 μm.
Claim 18
Dependent Claim
36 words
The piezoelectric thin film according to claim 10, wherein the laminated film formed of a crystalline metal oxide prepared in the step d) is patterned into a piezoelectric thin-film device form prior to the step e).
Claim 19
Dependent Claim
20 words
The piezoelectric thin film according to claim 10, wherein the polymer compound added to the sol composition is polyethylene glycol.
Claim 20
Dependent Claim
20 words
The piezoelectric thin film according to claim 10, wherein the polymer compound added to the sol composition is polypropylene glycol.
Claim 21
Dependent Claim
209 words
The piezoelectric thin film of claim 8 produced by a process comprising the steps of: a) coating a substrate with a sol composition comprising a sol of a metal component for constituting a piezoelectric film, and a polymer compound and then drying the coating to form a film; b) pre-sintering the film to form a porous thin film of gel comprising an amorphous metal oxide; c) laminating the film formed in step b) by repeating the steps a) and b) at least once to form a laminate comprising an amorphous metal oxide; d) pre-annealing the laminate to convert the laminate to a film formed of a crystalline metal oxide; e) repeating the steps c) and d) at least once to form a laminated film formed of a crystalline metal oxide; and f) annealing the film prepared in the step e) to grow crystal grains of perovskite type in the film into a larger size, said steps a), b), c), d), e) and f) producing the piezoelectric thin film with a cross section that is free of any interface created by the laminating step c); a thickness in the range of from 0.5 μm to 20 μm; and crystal grains having an average grain diameter of 0.005 to 0.2 μm.
Claim 22
Dependent Claim
30 words
The piezoelectric thin film according to claim 20, wherein the pre-annealing in the step d) is carried out at a temperature in the range of from 400 to 800° C.
Claim 23
Dependent Claim
30 words
The piezoelectric thin film according to claim 20, wherein the annealing in the step f) is carried out at a temperature in the range of from 600 to 1200° C.
Claim 24
Dependent Claim
30 words
The piezoelectric thin film according to claim 20, wherein the annealing in the step f) is carried out at a temperature in the range of from 800 to 1000° C.
Claim 25
Dependent Claim
60 words
The piezoelectric thin film according to claim 20, wherein the pre-annealing in the step d) is carried out in two stages, the first stage of which is carried out at a temperature in the range of from 400 to 600° C. with the second stage being carried out at a temperature in the range of from 600 to 800° C.
Claim 26
Dependent Claim
62 words
The piezoelectric thin film according to claim 20, wherein the annealing in the step f) is carried out in two stages, the first stage of which is carried out at a temperature in the range of from 600 to 800 ° C. with the second stage being carried out at a temperature in the range of from 800° C. to 1000° C.
Claim 27
Dependent Claim
26 words
The piezoelectric thin film according to claim 20, wherein the thickness of the porous thin film formed in the step c) is 0.01 to 1 μm.
Claim 28
Dependent Claim
36 words
The piezoelectric thin film according to claim 20, wherein the laminated film, formed of a crystalline metal oxide, prepared in the step e) is patterned into a piezoelectric thin-film device form prior to the step f).
Claim 29
Dependent Claim
20 words
The piezoelectric thin film according to claim 20, wherein the polymer compound added to the sol composition is polyethylene glycol.
Claim 30
Dependent Claim
20 words
The piezoelectric thin film according to claim 20, wherein the polymer compound added to the sol composition is polypropylene glycol.
Claim 31
Dependent Claim
17 words
An ink jet recording head comprising, as a vibrator, a piezoelectric thin film according to claim 2.
Claim 32
Dependent Claim
17 words
An ink jet recording head comprising, as a vibrator, a piezoelectric thin film according to claim 3.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 2003-10-31 | 2004-05-01 | 2004-10-31 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2007-10-31 | 2008-05-01 | 2008-10-31 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2011-10-31 | 2012-05-01 | 2012-10-31 | $7700.00 | Window Closed / Lapsed |