Patent US3961077A successfully refreshed from Google Patents.
US6131279A
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Integrated manufacturing packaging process
Assignee: International Business Machines Corp
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Filing: 1998-01-08
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Granted: 2000-10-17
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Expires: 2018-01-08
Abstract
Abstract A process of fabricating a circuitized substrate is provided which comprising the steps of: providing an organic substrate having circuitry thereon; applying a dielectric film on the organic substrate; forming microvias in said dielectric film; sputtering a metal seed layer on the dielectric film and in said microvias; plating a metallic layer on the metal seed layer; and forming a circuit pattern thereon.
Inventors
- 👤 Gerald Walter Jones
- 👤 Ross William Keesler
- 👤 Voya Rista Markovich
- 👤 William John Rudik
- 👤 James Warren Wilson
- 👤 William Earl Wilson
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-09 11:12
CPC Classifications
H; H05; H05K; H05K3/00; H05K3/38; H05K3/388; H05K3/46; H05K3/4602; H10; H10W; H10W70/00; H10W70/01; H10W70/05; H05K2201/00; H05K2201/09; H05K2201/09209; H05K2201/095; H05K2201/09536; H05K2201/096; H05K2203/00; H05K2203/15; H05K2203/1581; H05K3/0011; H05K3/0017; H05K3/0023; H05K3/10; H05K3/14; H05K3/16; Y; Y10; Y10T; Y10T29/00; Y10T29/49; Y10T29/49002; Y10T29/49117; Y10T29/49124; Y10T29/49155; Y10T29/49156; Y10T29/49165
Claims Analysis
Total Claims: 24
Claim 1
Independent Claim
113 words
A process of fabricating a circuitized structure comprising the steps of: (a) applying a dielectric film to at least one surface of an organic substrate having circuitry thereon; (b) forming microvias in selective portions of said dielectric film; (c) sputtering a metal seed layer on said dielectric film and in said microvias, wherein said sputtering is conducted at a sputtering enerav of from about 0.48 kW to about 0.72 kW, a temperature of from about 100° C. to about 150° C. and for a time of about 12 minutes to about 18 minutes; (d) plating a metallic layer on said metal seed layer; and (e) forming outer circuitry on said plated metallic layer.
Claim 2
Dependent Claim
113 words
A process of fabricating a circuitized structure comprising the steps of: (a) applying a dielectric film to at least one surface of an organic substrate having circuitry thereon; (b) forming microvias in selective portions of said dielectric film; (c) sputtering a metal seed layer on said dielectric film and in said microvias, wherein said sputtering is conducted at a sputtering enerav of from about 0.48 kW to about 0.72 kW, a temperature of from about 100° C. to about 150° C. and for a time of about 12 minutes to about 18 minutes; (d) plating a metallic layer on said metal seed layer; and (e) forming outer circuitry on said plated metallic layer.
Claim 3
Dependent Claim
79 words
The process of claim 1 wherein said circuitry on said substrate is obtained by the steps of: (i) providing a metal foil to said organic substrate; (ii) etching said metal foil so as to thin the same; (iii) providing holes in said substrate; (iv) plating said substrate and said holes with a metallic element thereby forming Plated through holes in said substrate; (v) filling said plated through holes with an epoxy resin containing Cu; and (vi) planarizing the structure.
Claim 4
Dependent Claim
32 words
The process of claim 1 wherein said metal seed layer is sputtered under conditions effective to provide a seed layer having a thickness of from about 100 Å to about 2000 Å.
Claim 5
Dependent Claim
22 words
The process of claim 3 wherein said metal seed layer has a thickness of from about 500 Å to about 1500 Å.
Claim 6
Dependent Claim
27 words
The process of claim 1 wherein said metal seed layer is a metal selected from the group consisting of Cu, Cr, Al and mixtures and alloys thereof.
Claim 7
Dependent Claim
21 words
The process of claim 5 wherein said metal seed layer is a layer of Cr and then a layer of Cu.
Claim 8
Dependent Claim
21 words
The process of claim 1 wherein said metallic layer has a thickness of from about 0.2 mils to about 0.5 mils.
Claim 9
Dependent Claim
25 words
The process of claim 1 wherein said metallic layer is composed of a metal selected from the group consisting of Cu, Al, Cr and W.
Claim 10
Dependent Claim
13 words
The process of claim 10 wherein said metallic layer is composed of Cu.
Claim 11
Dependent Claim
35 words
The process of claim 1 wherein said outer circuitry is formed by the steps of: (i) providing a photoresist to said metallic layer; (ii) exposing and developing said photoresist; and (iii) etching said metallic layer.
Claim 12
Dependent Claim
116 words
A process of fabricating a circuitized structure comprising the steps of: (a) providing a dielectric film having a photoimageable layer; (b) laminating said photoimageable layer of said dielectric film to at least one surface of an organic substrate having circuitry thereon; (c) exposing said photoimageable layer to a pattern of radiation under conditions effective to selectively harden portions of said photoimageable layer; (d) providing microvias in areas not harden by step (c); (e) curing the photoimageable layer; (f) sputtering a metal seed layer on said cured photoimageable layer and in said microvias; (g) plating a metallic layer on said metal seed layer; and (h) forming a circuit pattern in said metallic layer provided in step (g).
Claim 13
Dependent Claim
116 words
A process of fabricating a circuitized structure comprising the steps of: (a) providing a dielectric film having a photoimageable layer; (b) laminating said photoimageable layer of said dielectric film to at least one surface of an organic substrate having circuitry thereon; (c) exposing said photoimageable layer to a pattern of radiation under conditions effective to selectively harden portions of said photoimageable layer; (d) providing microvias in areas not harden by step (c); (e) curing the photoimageable layer; (f) sputtering a metal seed layer on said cured photoimageable layer and in said microvias; (g) plating a metallic layer on said metal seed layer; and (h) forming a circuit pattern in said metallic layer provided in step (g).
Claim 14
Dependent Claim
129 words
The process of claim 11 wherein said photoimageable layer is composed of a epoxy based resin system comprising; (a) about 10% to about 80% by weight of a polyol resin which is a condensation product of epichlorohydrin and bisphenol A having a molecular weight of from about 40,000 to about 130,000; (b) about 20% to about 90% by weight of an epoxidized multifunctional bisphenol A formaldehyde novolac resin having a molecular weight of from about 4,000 to about 10,000; (c) about 0% to about 50% by weight of a halogenated epoxidized diglycidyl ether of bisphenol A having a molecular weight of from about 600 to about 2,500; and (d) 0.1 to about 15 parts by weight of the total weight of the epoxy resin system of a cationic photoinitiator.
Claim 15
Dependent Claim
35 words
The process of claim 12 wherein said epoxy based resin system further comprises a solvent component, wherein said solvent component comprises propylene glycol monomethyl ether acetate and 0 to less than about 10% propylene carbonate.
Claim 16
Dependent Claim
45 words
The process of claim 11 wherein step (c) is carried out at a photo-master pressure of from about 3 psi to about 8 psi, an energy of from about 800 milliJoules/cm 2 to about 2000 milliJoules/cm 2 using a 365 nanometer arc 8 Kilowatt lamp.
Claim 17
Dependent Claim
45 words
The process of claim 14 wherein step (c) is carried out at a photo-master pressure of from about 4 psi to about 6 psi, an energy of from about 1000 milliJoule/cm 2 to about 1500 milliJoules/cm 2 using a 365 nanometer arc 8 Kilowatt lamp.
Claim 18
Dependent Claim
15 words
The process of claim 11 wherein step (d) includes baking and developing said photoimageable layer.
Claim 19
Dependent Claim
33 words
The process of claim 16 wherein baking is conducted at a temperature of from about 100° C. to about 140° C. for a time period of about 30 minutes to about 120 minutes.
Claim 20
Dependent Claim
33 words
The process of claim 17 wherein baking is conducted at a temperature of from about 120° C. to about 130° C. for a time period of about 30 minutes to about 60 minutes.
Claim 21
Dependent Claim
18 words
The process of claim 16 wherein developing is conducted using propylene carbonate, gamma butyrolactone, diglyme or mixtures thereof.
Claim 22
Dependent Claim
26 words
The process of claim 11 wherein step (e) is carried out at an energy of from about 2 Joules/cm 2 to about 6 Joules/cm 2 .
Claim 23
Dependent Claim
35 words
The process of claim 11 wherein step (e) is conducted at a temperature of from about 150° C. to about 190° C. for a time period of from about 30 minutes to about 120 minutes.
Claim 24
Dependent Claim
35 words
The process of claim 21 wherein step (e) is conducted at a temperature of from about 160° C. to about 180° C. for a time period of from about 45 minutes to about 90 minutes.
References Cited (Backward Citations)
US3356786A
Cited
US4179800A
Cited
US4554405A
Cited
US4581679A
Cited
US4535388A
Cited
US4598166A
Cited
US5354593A
Cited
US4863808A
Cited
US5097593A
Cited
US5461203A
Cited
US5209817A
Cited
US5268260A
Cited
JPH05218645A
Cited
JPH0745948A
Cited
JPH09331152A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 2003-10-17 | 2004-04-17 | 2004-10-17 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2007-10-17 | 2008-04-17 | 2008-10-17 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2011-10-17 | 2012-04-17 | 2012-10-17 | $7700.00 | Window Closed / Lapsed |