Patent US6130503A successfully refreshed from Google Patents.
US6130503A
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US
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Electron emission device and display using the same
Assignee: Pioneer Corp
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Filing: 1998-02-27
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Granted: 2000-10-10
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Expires: 2018-02-27
Abstract
Abstract An electron emission device exhibits a high electron emission efficiency. The device includes an electron supply layer of metal or semiconductor, an insulator layer formed on the electron supply layer, and a thin-film metal electrode formed on the insulator layer. The insulator layer is made of a dielectric substance and has a film thickness of 50 nm or greater. When an electric field is applied between the electron supply layer and the thin-film metal electrode, the electron emission device emits electrons.
Inventors
- 👤 Nobuyasu Negishi
- 👤 Takamasa Yoshikawa
- 👤 Takashi Chuman
- 👤 Kiyohide Ogasawara
- 👤 Shingo Iwasaki
- 👤 Hiroshi Ito
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-09 01:54
CPC Classifications
B; B82; B82Y; B82Y10/00; H; H01; H01J; H01J1/00; H01J1/02; H01J1/30; H01J1/312; H01J2329/00
Claims Analysis
Total Claims: 41
Claim 1
Independent Claim
82 words
An electron emission device comprising: an electron supply layer of metal or semiconductor; an insulator layer formed on the electron supply layer; and a thin-film metal electrode formed on the insulator layer and facing a vacuum space, characterized in that said insulator layer is made of a dielectric substance and has a film thickness of 50 nm or greater, whereby the electron emission device emits electrons when an electric field is applied between the electron supply layer and the thin-film metal electrode.
Claim 2
Dependent Claim
82 words
An electron emission device comprising: an electron supply layer of metal or semiconductor; an insulator layer formed on the electron supply layer; and a thin-film metal electrode formed on the insulator layer and facing a vacuum space, characterized in that said insulator layer is made of a dielectric substance and has a film thickness of 50 nm or greater, whereby the electron emission device emits electrons when an electric field is applied between the electron supply layer and the thin-film metal electrode.
Claim 3
Dependent Claim
109 words
An electron emission display device comprising: a pair of first and second substrates facing each other with a vacuum space in between; a plurality of electron emission devices provided on the first substrate; a collector electrode provided in the second substrate; and a fluorescent layer formed on the collector electrode, each of the electron emission devices comprising an electron supply layer of metal or semiconductor; an insulator layer formed on the electron supply layer; and a thin-film metal electrode formed on the insulator layer and facing a vacuum space, wherein said insulator layer is made of a dielectric substance and has a film thickness of 50 nm or greater.
Claim 4
Dependent Claim
109 words
An electron emission display device comprising: a pair of first and second substrates facing each other with a vacuum space in between; a plurality of electron emission devices provided on the first substrate; a collector electrode provided in the second substrate; and a fluorescent layer formed on the collector electrode, each of the electron emission devices comprising an electron supply layer of metal or semiconductor; an insulator layer formed on the electron supply layer; and a thin-film metal electrode formed on the insulator layer and facing a vacuum space, wherein said insulator layer is made of a dielectric substance and has a film thickness of 50 nm or greater.
Claim 5
Dependent Claim
164 words
An electron emission display device comprising: a pair of a device substrate and a transparent substrate facing each other with a vacuum space in between; a plurality of ohmic electrodes formed in parallel on an inner surface of the device substrate; a plurality of electron emission devices provided on the ohmic electrodes, each of the electron emission devices comprising an electron supply layer of metal or semiconductor; an insulator layer formed on the electron supply layer; and a thin-film metal electrode formed on the insulator layer and facing the vacuum space, wherein said insulator layer is made of a dielectric substance and has a film thickness of 50 nm or greater; a plurality of bus electrodes formed on parts of the thin-film metal electrodes and extending in parallel to one another and perpendicular to the ohmic electrodes so as to electrically connect adjoining thin-film metal electrodes; a plurality of collector electrodes provided in the transparent substrate; and fluorescent layers formed on the collector electrodes.
Claim 6
Dependent Claim
164 words
An electron emission display device comprising: a pair of a device substrate and a transparent substrate facing each other with a vacuum space in between; a plurality of ohmic electrodes formed in parallel on an inner surface of the device substrate; a plurality of electron emission devices provided on the ohmic electrodes, each of the electron emission devices comprising an electron supply layer of metal or semiconductor; an insulator layer formed on the electron supply layer; and a thin-film metal electrode formed on the insulator layer and facing the vacuum space, wherein said insulator layer is made of a dielectric substance and has a film thickness of 50 nm or greater; a plurality of bus electrodes formed on parts of the thin-film metal electrodes and extending in parallel to one another and perpendicular to the ohmic electrodes so as to electrically connect adjoining thin-film metal electrodes; a plurality of collector electrodes provided in the transparent substrate; and fluorescent layers formed on the collector electrodes.
Claim 7
Dependent Claim
35 words
An electron emission display device according to claim 3 further comprising a second auxiliary insulator layer with openings formed to separate the surfaces of the thin-film metal electrodes into a plurality of electron emission regions.
Claim 8
Dependent Claim
19 words
An electron emission display device according to claim 4, wherein the second auxiliary insulator layer covers the bus electrodes.
Claim 9
Dependent Claim
90 words
An electron emission device comprising: an electron supply layer of metal or semiconductor; an insulator layer formed on the electron supply layer; and a thin-film metal electrode formed on the insulator layer and facing a vacuum space, characterized in that said insulator layer is made of a dielectric substance with a dielectric constant of 8 or less and has a film thickness of 50 nm or greater, whereby the electron emission device emits electrons when an electric field is applied between the electron supply layer and the thin-film metal electrode.
Claim 10
Dependent Claim
90 words
An electron emission device comprising: an electron supply layer of metal or semiconductor; an insulator layer formed on the electron supply layer; and a thin-film metal electrode formed on the insulator layer and facing a vacuum space, characterized in that said insulator layer is made of a dielectric substance with a dielectric constant of 8 or less and has a film thickness of 50 nm or greater, whereby the electron emission device emits electrons when an electric field is applied between the electron supply layer and the thin-film metal electrode.
Claim 11
Dependent Claim
117 words
An electron emission display device comprising: a pair of first and second substrates facing each other with a vacuum space in between; a plurality of electron emission devices provided on the first substrate; a collector electrode provided in the second substrate; and a fluorescent layer formed on the collector electrode, each of the electron emission devices comprising an electron supply layer of metal or semiconductor; an insulator layer formed on the electron supply layer; and a thin-film metal electrode formed on the insulator layer and facing a vacuum space, wherein said insulator layer is made of a dielectric substance with a dielectric constant of 8 or less and has a film thickness of 50 nm or greater.
Claim 12
Dependent Claim
117 words
An electron emission display device comprising: a pair of first and second substrates facing each other with a vacuum space in between; a plurality of electron emission devices provided on the first substrate; a collector electrode provided in the second substrate; and a fluorescent layer formed on the collector electrode, each of the electron emission devices comprising an electron supply layer of metal or semiconductor; an insulator layer formed on the electron supply layer; and a thin-film metal electrode formed on the insulator layer and facing a vacuum space, wherein said insulator layer is made of a dielectric substance with a dielectric constant of 8 or less and has a film thickness of 50 nm or greater.
Claim 13
Dependent Claim
82 words
An electron emission device comprising: an electron supply layer of metal or semiconductor; an insulator layer formed on the electron supply layer; and a thin-film metal electrode formed on the insulator layer and facing a vacuum space, characterized in that said insulator layer has a film thickness of 50 nm or greater and said electron supply layer is transparent, whereby the electron emission device emits electrons when an electric field is applied between the electron supply layer and the thin-film metal electrode.
Claim 14
Dependent Claim
82 words
An electron emission device comprising: an electron supply layer of metal or semiconductor; an insulator layer formed on the electron supply layer; and a thin-film metal electrode formed on the insulator layer and facing a vacuum space, characterized in that said insulator layer has a film thickness of 50 nm or greater and said electron supply layer is transparent, whereby the electron emission device emits electrons when an electric field is applied between the electron supply layer and the thin-film metal electrode.
Claim 15
Dependent Claim
109 words
An electron emission display device comprising: a pair of first and second substrates facing each other with a vacuum space in between; a plurality of electron emission devices provided on the first substrate; a collector electrode provided in the second substrate; and a fluorescent layer formed on the collector electrode, each of the electron emission devices comprising an electron supply layer of metal or semiconductor; an insulator layer formed on the electron supply layer; and a thin-film metal electrode formed on the insulator layer and facing a vacuum space, wherein said insulator layer has a film thickness of 50 nm or greater and said electron supply layer is transparent.
Claim 16
Dependent Claim
109 words
An electron emission display device comprising: a pair of first and second substrates facing each other with a vacuum space in between; a plurality of electron emission devices provided on the first substrate; a collector electrode provided in the second substrate; and a fluorescent layer formed on the collector electrode, each of the electron emission devices comprising an electron supply layer of metal or semiconductor; an insulator layer formed on the electron supply layer; and a thin-film metal electrode formed on the insulator layer and facing a vacuum space, wherein said insulator layer has a film thickness of 50 nm or greater and said electron supply layer is transparent.
Claim 17
Dependent Claim
33 words
An electron emission display device according to claim 9, wherein said first substrate is transparent, and further comprising a transparent electrode which is disposed between said first substrate and said electron supply layer.
Claim 18
Dependent Claim
106 words
An electron emission device comprising: an electron supply layer of metal or semiconductor; an insulator layer formed on the electron supply layer; and a thin-film metal electrode formed on the insulator layer and facing a vacuum space, characterized in that said insulator layer is made of silicon oxide as a major component of SiO x where x represents an atomic ratio in a range of from 0.5 to 2 in a whole layer and has a film thickness of 50 nm or greater, whereby the electron emission device emits electrons when an electric field is applied between the electron supply layer and the thin-film metal electrode.
Claim 19
Dependent Claim
106 words
An electron emission device comprising: an electron supply layer of metal or semiconductor; an insulator layer formed on the electron supply layer; and a thin-film metal electrode formed on the insulator layer and facing a vacuum space, characterized in that said insulator layer is made of silicon oxide as a major component of SiO x where x represents an atomic ratio in a range of from 0.5 to 2 in a whole layer and has a film thickness of 50 nm or greater, whereby the electron emission device emits electrons when an electric field is applied between the electron supply layer and the thin-film metal electrode.
Claim 20
Dependent Claim
106 words
An electron emission device comprising: an electron supply layer of metal or semiconductor; an insulator layer formed on the electron supply layer; and a thin-film metal electrode formed on the insulator layer and facing a vacuum space, characterized in that said insulator layer is made of silicon oxide as a major component of SiO x where x represents an atomic ratio satisfying a refractive index in a range of from 1.3 to 3.0 and has a film thickness of 50 nm or greater, whereby the electron emission device emits electrons when an electric field is applied between the electron supply layer and the thin-film metal electrode.
Claim 21
Dependent Claim
106 words
An electron emission device comprising: an electron supply layer of metal or semiconductor; an insulator layer formed on the electron supply layer; and a thin-film metal electrode formed on the insulator layer and facing a vacuum space, characterized in that said insulator layer is made of silicon oxide as a major component of SiO x where x represents an atomic ratio satisfying a refractive index in a range of from 1.3 to 3.0 and has a film thickness of 50 nm or greater, whereby the electron emission device emits electrons when an electric field is applied between the electron supply layer and the thin-film metal electrode.
Claim 22
Dependent Claim
133 words
An electron emission display device comprising: a pair of first and second substrates facing each other with a vacuum space in between; a plurality of electron emission devices provided on the first substrate; a collector electrode provided in the second substrate; and a fluorescent layer formed on the collector electrode, each of the electron emission devices comprising an electron supply layer of metal or semiconductor; an insulator layer formed on the electron supply layer; and a thin-film metal electrode formed on the insulator layer and facing a vacuum space, wherein said insulator layer is made of silicon oxide as a major component of SiO x where x represents an atomic ratio in a range of from 0.5 to 2 in a whole layer and has a film thickness of 50 nm or greater.
Claim 23
Dependent Claim
133 words
An electron emission display device comprising: a pair of first and second substrates facing each other with a vacuum space in between; a plurality of electron emission devices provided on the first substrate; a collector electrode provided in the second substrate; and a fluorescent layer formed on the collector electrode, each of the electron emission devices comprising an electron supply layer of metal or semiconductor; an insulator layer formed on the electron supply layer; and a thin-film metal electrode formed on the insulator layer and facing a vacuum space, wherein said insulator layer is made of silicon oxide as a major component of SiO x where x represents an atomic ratio in a range of from 0.5 to 2 in a whole layer and has a film thickness of 50 nm or greater.
Claim 24
Dependent Claim
188 words
An electron emission display device comprising: a pair of a device substrate and a transparent substrate facing each other with a vacuum space in between; a plurality of ohmic electrodes formed in parallel on an inner surface of the device substrate; a plurality of electron emission devices provided on the ohmic electrodes, each of the electron emission devices comprising an electron supply layer of metal or semiconductor; an insulator layer formed on the electron supply layer; and a thin-film metal electrode formed on the insulator layer and facing the vacuum space, wherein said insulator layer is made of silicon oxide as a major component of SiO x where x represents an atomic ratio in a range of from 0.5 to 2 in a whole layer and has a film thickness of 50 nm or greater; a plurality of bus electrodes formed on parts of the thin-film metal electrodes and extending in parallel to one another and perpendicular to the ohmic electrodes so as to electrically connect adjoining thin-film metal electrodes; a plurality of collector electrodes provided in the transparent substrate; and fluorescent layers formed on the collector electrodes.
Claim 25
Dependent Claim
188 words
An electron emission display device comprising: a pair of a device substrate and a transparent substrate facing each other with a vacuum space in between; a plurality of ohmic electrodes formed in parallel on an inner surface of the device substrate; a plurality of electron emission devices provided on the ohmic electrodes, each of the electron emission devices comprising an electron supply layer of metal or semiconductor; an insulator layer formed on the electron supply layer; and a thin-film metal electrode formed on the insulator layer and facing the vacuum space, wherein said insulator layer is made of silicon oxide as a major component of SiO x where x represents an atomic ratio in a range of from 0.5 to 2 in a whole layer and has a film thickness of 50 nm or greater; a plurality of bus electrodes formed on parts of the thin-film metal electrodes and extending in parallel to one another and perpendicular to the ohmic electrodes so as to electrically connect adjoining thin-film metal electrodes; a plurality of collector electrodes provided in the transparent substrate; and fluorescent layers formed on the collector electrodes.
Claim 26
Dependent Claim
35 words
An electron emission display device according to claim 14 further comprising a second auxiliary insulator layer with openings formed to separate the surfaces of the thin-film metal electrodes into a plurality of electron emission regions.
Claim 27
Dependent Claim
19 words
An electron emission display device according to claim 15, wherein the second auxiliary insulator layer covers the bus electrodes.
Claim 28
Dependent Claim
123 words
An electron emission display device comprising: a pair of first and second substrates facing each other with a vacuum space in between; a plurality of electron emission devices provided on the first substrate; a collector electrode provided in the second substrate; and a fluorescent layer formed on the collector electrode, each of the electron emission devices comprising an electron supply layer of metal or semiconductor; an insulator layer formed on the electron supply layer; and a thin-film metal electrode formed on the insulator layer and facing a vacuum space, wherein one of said thin-film metal electrode and said insulator layer is provided with a region containing atomic elements each having a work function which is lower than that of said thin-film metal electrode.
Claim 29
Dependent Claim
123 words
An electron emission display device comprising: a pair of first and second substrates facing each other with a vacuum space in between; a plurality of electron emission devices provided on the first substrate; a collector electrode provided in the second substrate; and a fluorescent layer formed on the collector electrode, each of the electron emission devices comprising an electron supply layer of metal or semiconductor; an insulator layer formed on the electron supply layer; and a thin-film metal electrode formed on the insulator layer and facing a vacuum space, wherein one of said thin-film metal electrode and said insulator layer is provided with a region containing atomic elements each having a work function which is lower than that of said thin-film metal electrode.
Claim 30
Dependent Claim
85 words
An electron emission device comprising: an electron supply layer of metal or semiconductor; an insulator layer formed on the electron supply layer; and a thin-film metal electrode formed on the insulator layer and facing a vacuum space, characterized in that said insulator layer has a film thickness of 50 nm or greater and is provided with one or more thermal conductive layers, whereby the electron emission device emits electrons when an electric field is applied between the electron supply layer and the thin-film metal electrode.
Claim 31
Dependent Claim
85 words
An electron emission device comprising: an electron supply layer of metal or semiconductor; an insulator layer formed on the electron supply layer; and a thin-film metal electrode formed on the insulator layer and facing a vacuum space, characterized in that said insulator layer has a film thickness of 50 nm or greater and is provided with one or more thermal conductive layers, whereby the electron emission device emits electrons when an electric field is applied between the electron supply layer and the thin-film metal electrode.
Claim 32
Dependent Claim
112 words
An electron emission display device comprising: a pair of first and second substrates facing each other with a vacuum space in between; a plurality of electron emission devices provided on the first substrate; a collector electrode provided in the second substrate; and a fluorescent layer formed on the collector electrode, each of the electron emission devices comprising an electron supply layer of metal or semiconductor; an insulator layer formed on the electron supply layer; and a thin-film metal electrode formed on the insulator layer and facing a vacuum space, wherein said insulator layer has a film thickness of 50 nm or greater and is provided with one or more thermal conductive layers.
Claim 33
Dependent Claim
112 words
An electron emission display device comprising: a pair of first and second substrates facing each other with a vacuum space in between; a plurality of electron emission devices provided on the first substrate; a collector electrode provided in the second substrate; and a fluorescent layer formed on the collector electrode, each of the electron emission devices comprising an electron supply layer of metal or semiconductor; an insulator layer formed on the electron supply layer; and a thin-film metal electrode formed on the insulator layer and facing a vacuum space, wherein said insulator layer has a film thickness of 50 nm or greater and is provided with one or more thermal conductive layers.
Claim 34
Dependent Claim
120 words
An electron emission device comprising: an electron supply layer of metal or semiconductor; an insulator layer formed on the electron supply layer; and a thin-film metal electrode formed on the insulator layer and facing a vacuum space, characterized in that said insulator layer is made of a dielectric substance and has a film thickness of 50 nm or greater which is formed through a sputtering by using a mixture gas essentially comprising a rare gas under a sputtering condition of a gas pressure of 0.1 to 100 mTorr and a forming rate of 0.5 to 100 nm/min, whereby the electron emission device emits electrons when an electric field is applied between the electron supply layer and the thin-film metal electrode.
Claim 35
Dependent Claim
120 words
An electron emission device comprising: an electron supply layer of metal or semiconductor; an insulator layer formed on the electron supply layer; and a thin-film metal electrode formed on the insulator layer and facing a vacuum space, characterized in that said insulator layer is made of a dielectric substance and has a film thickness of 50 nm or greater which is formed through a sputtering by using a mixture gas essentially comprising a rare gas under a sputtering condition of a gas pressure of 0.1 to 100 mTorr and a forming rate of 0.5 to 100 nm/min, whereby the electron emission device emits electrons when an electric field is applied between the electron supply layer and the thin-film metal electrode.
Claim 36
Dependent Claim
147 words
An electron emission display device comprising: a pair of first and second substrates facing each other with a vacuum space in between; a plurality of electron emission devices provided on the first substrate; a collector electrode provided in the second substrate; and a fluorescent layer formed on the collector electrode, each of the electron emission devices comprising an electron supply layer of metal or semiconductor; an insulator layer formed on the electron supply layer; and a thin-film metal electrode formed on the insulator layer and facing a vacuum space, wherein said insulator layer is made of a dielectric substance and has a film thickness of 50 nm or greater which is formed through a sputtering by using a mixture gas essentially comprising a rare gas under a sputtering condition of a gas pressure of 0.1 to 100 mTorr and a forming rate of 0.5 to 100 nm/min.
Claim 37
Dependent Claim
147 words
An electron emission display device comprising: a pair of first and second substrates facing each other with a vacuum space in between; a plurality of electron emission devices provided on the first substrate; a collector electrode provided in the second substrate; and a fluorescent layer formed on the collector electrode, each of the electron emission devices comprising an electron supply layer of metal or semiconductor; an insulator layer formed on the electron supply layer; and a thin-film metal electrode formed on the insulator layer and facing a vacuum space, wherein said insulator layer is made of a dielectric substance and has a film thickness of 50 nm or greater which is formed through a sputtering by using a mixture gas essentially comprising a rare gas under a sputtering condition of a gas pressure of 0.1 to 100 mTorr and a forming rate of 0.5 to 100 nm/min.
Claim 38
Dependent Claim
202 words
An electron emission display device comprising: a pair of a device substrate and a transparent substrate facing each other with a vacuum space in between; a plurality of ohmic electrodes formed in parallel on an inner surface of the device substrate; a plurality of electron emission devices provided on the ohmic electrodes, each of the electron emission devices comprising an electron supply layer of metal or semiconductor; an insulator layer formed on the electron supply layer; and a thin-film metal electrode formed on the insulator layer and facing the vacuum space, wherein said insulator layer is made of a dielectric substance and has a film thickness of 50 nm or greater which is formed through a sputtering by using a mixture gas essentially comprising a rare gas under a sputtering condition of a gas pressure of 0.1 to 100 mTorr and a forming rate of 0.5 to 100 nm/min; a plurality of bus electrodes formed on parts of the thin-film metal electrodes and extending in parallel to one another and perpendicular to the ohmic electrodes so as to electrically connect adjoining thin-film metal electrodes; a plurality of collector electrodes provided in the transparent substrate; and fluorescent layers formed on the collector electrodes.
Claim 39
Dependent Claim
202 words
An electron emission display device comprising: a pair of a device substrate and a transparent substrate facing each other with a vacuum space in between; a plurality of ohmic electrodes formed in parallel on an inner surface of the device substrate; a plurality of electron emission devices provided on the ohmic electrodes, each of the electron emission devices comprising an electron supply layer of metal or semiconductor; an insulator layer formed on the electron supply layer; and a thin-film metal electrode formed on the insulator layer and facing the vacuum space, wherein said insulator layer is made of a dielectric substance and has a film thickness of 50 nm or greater which is formed through a sputtering by using a mixture gas essentially comprising a rare gas under a sputtering condition of a gas pressure of 0.1 to 100 mTorr and a forming rate of 0.5 to 100 nm/min; a plurality of bus electrodes formed on parts of the thin-film metal electrodes and extending in parallel to one another and perpendicular to the ohmic electrodes so as to electrically connect adjoining thin-film metal electrodes; a plurality of collector electrodes provided in the transparent substrate; and fluorescent layers formed on the collector electrodes.
Claim 40
Dependent Claim
35 words
An electron emission display device according to claim 22 further comprising a second auxiliary insulator layer with openings formed to separate the surfaces of the thin-film metal electrodes into a plurality of electron emission regions.
Claim 41
Dependent Claim
19 words
An electron emission display device according to claim 23, wherein the second auxiliary insulator layer covers the bus electrodes.
References Cited (Backward Citations)
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| 3.5 Years (Year 4) | 2003-10-10 | 2004-04-10 | 2004-10-10 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2007-10-10 | 2008-04-10 | 2008-10-10 | $3760.00 | Window Closed / Lapsed |
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