US6127244A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Method of manufacturing semiconductor device
Assignee: SK Hynix Inc
•
Filing: 1998-12-23
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Granted: 2000-10-03
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Expires: 2018-12-23
Abstract
Abstract A method of fabricating a SOI wafer using an isolation film as a polishing stopper, comprising the steps of: preparing a first and a second silicon substrates; implanting impurities into selected active regions of the first silicon substrate to a desired depth; etching the portion of the silicon substrate between the active regions to forming trenches having a desired depth; forming a first insulating layer of an oxide film on the first silicon substrate to be filled in the trenches; etching-back the first insulating layer to form a trench type isolation film; forming a second insulating layer of an oxide film on the first silicon substrate including the isolation film; bonding the first and the second silicon substrates to contact the second insulating layer with the second silicon substrate; firstly polishing the first silicon substrate by the vicinity of the portion of the first silicon substrate where the impurities are implanted; etching the polished first silicon substrate by using an etchant until the portion of the first silicon substrate where the impurities are implanted is removed; and secondarily polishing the first silicon substrate using the isolation film as a polishing stopper.
Inventors
- 👤 Seong Eun Lee
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-09 02:43
CPC Classifications
H; H10; H10W; H10W10/00; H10P; H10P50/00; H10P50/60; H10P50/64; H10P50/642; H10P90/00; H10P90/19; H10P90/1904; H10P90/1906; H10P90/1922; H10W10/01; H10W10/10; H10W10/181; Y; Y10; Y10S; Y10S438/00; Y10S438/928; Y10S438/967; Y10S438/977
Claims Analysis
Total Claims: 18
Claim 1
Independent Claim
180 words
A method of fabricating a semiconductor device, comprising the steps of: preparing a first and a second silicon substrates; implanting impurities into selected active regions of the first silicon substrate to a desired depth; etching the portion of the silicon substrate between the active regions to form trenches having a desired depth; forming a first insulating layer on the first silicon substrate to be filled in the trenches; etching-back the first insulating layer to form an isolation film which is formed within the trenches; forming a second insulating layer on the first silicon substrate including the isolation film; bonding the first and the second silicon substrates to contact the second insulating layer film with the second silicon substrate; firstly polishing the first silicon substrate by the vicinity of the portion of the first silicon substrate where the impurities are implanted; etching the polished first silicon substrate by using an etchant until the portion of the first silicon substrate where the impurities are implanted, is removed; and secondarily polishing the first silicon substrate using the isolation film as a polishing stopper.
Claim 2
Independent Claim
180 words
A method of fabricating a semiconductor device, comprising the steps of: preparing a first and a second silicon substrates; implanting impurities into selected active regions of the first silicon substrate to a desired depth; etching the portion of the silicon substrate between the active regions to form trenches having a desired depth; forming a first insulating layer on the first silicon substrate to be filled in the trenches; etching-back the first insulating layer to form an isolation film which is formed within the trenches; forming a second insulating layer on the first silicon substrate including the isolation film; bonding the first and the second silicon substrates to contact the second insulating layer film with the second silicon substrate; firstly polishing the first silicon substrate by the vicinity of the portion of the first silicon substrate where the impurities are implanted; etching the polished first silicon substrate by using an etchant until the portion of the first silicon substrate where the impurities are implanted, is removed; and secondarily polishing the first silicon substrate using the isolation film as a polishing stopper.
Claim 3
Dependent Claim
57 words
The method as claimed in claim 1, wherein the step of implanting impurities into the first silicon substrate includes the steps of: forming a mask pattern for ion implantation on the first silicon substrate to expose the active regions of the first silicon substrate; and implanting impurities into the exposed active regions of the first silicon substrate.
Claim 4
Dependent Claim
25 words
The method as claimed in claim 2, wherein the impurity is a boron and the implanted dose is 2×10 15 -2×10 16 /cm 2 .
Claim 5
Dependent Claim
50 words
The method as claimed in claim 3, wherein the polished first silicon substrate is wet-etched by using the etchant which etches the portion of the first silicon substrate which the impurities are implanted thereinto fast than the portion of the first silicon substrate which the isolation film is formed thereunder.
Claim 6
Dependent Claim
33 words
The method as claimed in claim 4, wherein the etchant for etching the polished first silicon substrate is a compound solution of NH 2 OH, H 2 O 2 and H 2 O.
Claim 7
Dependent Claim
21 words
The method as claimed in claim 2, wherein the depth of the impurity implantation is deeper than that of the trench.
Claim 8
Dependent Claim
77 words
The method as claimed in claim 1, wherein the step of forming the trenches includes the steps of: sequentially forming a thermal oxide and a nitride film on the first silicon substrate; forming an etching mask pattern to cover the active region of the first silicon substrate; etching the portion of the first silicon substrate between the active regions to form the trenches; and removing the etching mask pattern, the thermal oxide film and the nitride film.
Claim 9
Dependent Claim
32 words
The method as claimed in claim 7, wherein the thermal oxide film is formed at a thickness of 50-200 Å and the nitride film is formed at a thickness of 700-1500 Å.
Claim 10
Dependent Claim
61 words
The method as claimed in claim 1, wherein between the trench formation step and the first insulating layer formation step, further comprising the step of carrying out a sacrificial oxidation process that forms a thermal oxide film in the walls of the trenches through a thermal oxidation and then removes the thermal oxide film formed in the walls of the trenches.
Claim 11
Dependent Claim
41 words
The method as claimed in claim 1, wherein between the trench formation step and the first insulating layer formation step, further comprising the step of carrying out a thermal oxidation to form an oxide film in the walls of the trenches.
Claim 12
Dependent Claim
39 words
The method as claimed in claim 1, wherein the first insulating layer is comprised of one of O 3 tetraethylorthosilicate undoped silicate glass(TEOS USG) film or an oxide film formed by a high density plasma chemical vapor deposition method.
Claim 13
Dependent Claim
44 words
The method as claimed in claim 11, wherein when the first insulating layer is comprised of O 3 TEOS USG film, the first insulating layer is further heat-treated in an ambient of N 2 , at a temperature of 950-1150° C. for 30-60 minutes.
Claim 14
Dependent Claim
23 words
The method as claimed in claim 1, wherein the second insulating layer is comprised of O 3 boro-phosphorous silicate glass (O 3 BPSG).
Claim 15
Dependent Claim
18 words
The method as claimed in claim 13, wherein the second insulating layer has a thickness of 3000-10000 Å.
Claim 16
Dependent Claim
39 words
The method as claimed in claim 1, wherein between the bonding step and the first polishing step, further comprising the step of carrying out a heat treatment to intensify the bonding force between the first and the second substrates.
Claim 17
Dependent Claim
35 words
The method as claimed in claim 15, wherein the heat treatment is carried out in an ambient of one of O 2 or N 2 , at a temperature of 800-950° C. for 10-60 minutes.
Claim 18
Dependent Claim
24 words
The method as claimed in claim 1, wherein the first and the second polishing steps are carried out by a chemical mechanical polishing method.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 2003-10-03 | 2004-04-03 | 2004-10-03 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2007-10-03 | 2008-04-03 | 2008-10-03 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2011-10-03 | 2012-04-03 | 2012-10-03 | $7700.00 | Window Closed / Lapsed |