US6121626A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Method and system of exposure with a universal dynamic mask and charge coupled device image feedback control
Assignee: Vanguard International Semiconductor Corp
•
Filing: 1998-09-17
•
Granted: 2000-09-19
•
Expires: 2018-09-17
Abstract
Abstract A dynamic mask exposure system and method includes a support for a workpiece, a source of a beam of exposure radiation, and a transmissive dynamic mask with orthogonally arranged matrices of actuator lines and binary pixel units which are opaque or transparent as a function of control inputs to the actuator lines, the transmissive dynamic mask having a top surface and a bottom surface. A control system is connected to supply pixel control signals to the actuator lines of the transmissive dynamic mask to form a pattern of transparent regions and opaque regions. The beam is directed down onto the top surface of the mask. A workpiece and/or an image detection element for detecting a pattern of radiation projected thereon is located on the top surface of the support. The beam passes through the transparent regions and projecting a pattern from the mask onto the support where the workpiece or onto the image detection element is to be located. In the case where the image detection element is the target, there are means for providing signals representing the pattern to the control system.
Inventors
- 👤 Chin-Hsiang Lin
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-09 10:08
CPC Classifications
G; G03; G03F; G03F7/00; G03F7/70; G03F7/70216; G03F7/70283; G03F7/70291
Claims Analysis
Total Claims: 40
Claim 1
Independent Claim
125 words
A dynamic mask exposure system comprising: a support for a workpiece, a source of a beam of exposure radiation, a transmissive dynamic mask with orthogonally arranged matrices of actuator lines and binary pixel units which are opaque or transparent as a function of control inputs to the actuator lines, the transmissive dynamic mask having a top surface and a bottom surface, a control system connected to supply pixel control signals to the actuator lines of the transmissive dynamic mask to form a pattern of transparent regions and opaque regions, the beam directed down onto the top surface of the mask, and the beam passing through the transparent regions and projecting a pattern from the mask onto the support where the workpiece is to be located.
Claim 2
Dependent Claim
125 words
A dynamic mask exposure system comprising: a support for a workpiece, a source of a beam of exposure radiation, a transmissive dynamic mask with orthogonally arranged matrices of actuator lines and binary pixel units which are opaque or transparent as a function of control inputs to the actuator lines, the transmissive dynamic mask having a top surface and a bottom surface, a control system connected to supply pixel control signals to the actuator lines of the transmissive dynamic mask to form a pattern of transparent regions and opaque regions, the beam directed down onto the top surface of the mask, and the beam passing through the transparent regions and projecting a pattern from the mask onto the support where the workpiece is to be located.
Claim 3
Dependent Claim
27 words
A dynamic mask exposure system in accordance with claim 1 wherein: the control system comprises a computer and a direct access storage device for storing patterning data.
Claim 4
Dependent Claim
21 words
A dynamic mask exposure system in accordance with claim 1 wherein: the transmissive dynamic mask comprises a transmissive spatial light modulator.
Claim 5
Dependent Claim
38 words
A dynamic mask exposure system in accordance with claim 1 wherein: the control system comprises a computer and a direct access storage device for storing patterning data, and the transmissive dynamic mask comprises a transmissive spatial light modulator.
Claim 6
Dependent Claim
25 words
A dynamic mask exposure system in accordance with claim 1 wherein: the source of the beam of exposure radiation comprises a collimated beam of light.
Claim 7
Dependent Claim
44 words
A dynamic mask exposure system in accordance with claim 1 wherein: the source of the beam of exposure radiation comprises a collimated beam of light provided by a set of lenses projecting the collimated beam of light onto the top surface of the mask.
Claim 8
Dependent Claim
38 words
A dynamic mask exposure system in accordance with claim 1 wherein: the control system comprises a computer and a direct access storage device for storing patterning data, and the transmissive dynamic mask comprises a transmissive spatial light modulator.
Claim 9
Dependent Claim
69 words
A dynamic mask exposure system in accordance with claim 1 wherein: the source of the beam of exposure radiation comprises a collimated beam of light provided by a set of condenser lenses projecting the collimated beam of light onto the top surface of the mask, and a set of projection lenses projecting and focussing the pattern from the mask onto the support from the bottom surface of the mask.
Claim 10
Dependent Claim
38 words
A dynamic mask exposure system in accordance with claim 8 wherein: the control system comprises a computer and a direct access storage device for storing patterning data, and the transmissive dynamic mask comprises a transmissive spatial light modulator.
Claim 11
Dependent Claim
158 words
A dynamic mask exposure system comprising: a support for a workpiece, a source of a beam of exposure radiation, a transmissive dynamic mask with orthogonally arranged matrices of actuator lines and binary pixel units which are opaque or transparent as a function of control inputs to the actuator lines, the transmissive dynamic mask having a top surface and a bottom surface, a control system connected to supply pixel control signals to the actuator lines of the transmissive dynamic mask to form a pattern of transparent regions and opaque regions, the beam directed down onto the top surface of the mask, an image detection element for detecting a pattern of radiation projected thereon located on the top surface of the support, the beam passing through the transparent regions and projecting a pattern from the mask onto the support where the image detection element is to be located, and means for providing signals representing the pattern to the control system.
Claim 12
Dependent Claim
158 words
A dynamic mask exposure system comprising: a support for a workpiece, a source of a beam of exposure radiation, a transmissive dynamic mask with orthogonally arranged matrices of actuator lines and binary pixel units which are opaque or transparent as a function of control inputs to the actuator lines, the transmissive dynamic mask having a top surface and a bottom surface, a control system connected to supply pixel control signals to the actuator lines of the transmissive dynamic mask to form a pattern of transparent regions and opaque regions, the beam directed down onto the top surface of the mask, an image detection element for detecting a pattern of radiation projected thereon located on the top surface of the support, the beam passing through the transparent regions and projecting a pattern from the mask onto the support where the image detection element is to be located, and means for providing signals representing the pattern to the control system.
Claim 13
Dependent Claim
27 words
A dynamic mask exposure system in accordance with claim 10 wherein: the control system comprises a computer and a direct access storage device for storing patterning data.
Claim 14
Dependent Claim
21 words
A dynamic mask exposure system in accordance with claim 10 wherein: the transmissive dynamic mask comprises a transmissive spatial light modulator.
Claim 15
Dependent Claim
38 words
A dynamic mask exposure system in accordance with claim 10 wherein: the control system comprises a computer and a direct access storage device for storing patterning data, and the transmissive dynamic mask comprises a transmissive spatial light modulator.
Claim 16
Dependent Claim
25 words
A dynamic mask exposure system in accordance with claim 10 wherein: the source of the beam of exposure radiation comprises a collimated beam of light.
Claim 17
Dependent Claim
44 words
A dynamic mask exposure system in accordance with claim 10 wherein: the source of the beam of exposure radiation comprises a collimated beam of light provided by a set of lenses projecting the collimated beam of light onto the top surface of the mask.
Claim 18
Dependent Claim
38 words
A dynamic mask exposure system in accordance with claim 10 wherein: the control system comprises a computer and a direct access storage device for storing patterning data, and the transmissive dynamic mask comprises a transmissive spatial light modulator.
Claim 19
Dependent Claim
68 words
A dynamic mask exposure system in accordance with claim 10 wherein: the source of the beam of exposure radiation comprises a collimated beam of light provided by a set of lenses projecting the collimated beam of light onto the top surface of the mask, and a set of projection lenses projecting and focussing the pattern from the mask onto the support from the bottom surface of the mask.
Claim 20
Dependent Claim
38 words
A dynamic mask exposure system in accordance with claim 17 wherein: the control system comprises a computer and a direct access storage device for storing patterning data, and the transmissive dynamic mask comprises a transmissive spatial light modulator.
Claim 21
Dependent Claim
123 words
A dynamic mask exposure method comprising: providing a support for a workpiece, providing a source of a beam of exposure radiation, providing a transmissive dynamic mask with orthogonally arranged matrices of actuator lines and binary pixel units which are opaque or transparent as a function of control inputs to the actuator lines, the transmissive dynamic mask having a top surface and a bottom surface, supplying pixel control signals to the actuator lines of the transmissive dynamic mask to form a pattern of transparent regions and opaque regions, directing the beam down onto the top surface of the mask, and passing the beam through the transparent regions and projecting a pattern from the mask onto the support where the workpiece is to be located.
Claim 22
Dependent Claim
123 words
A dynamic mask exposure method comprising: providing a support for a workpiece, providing a source of a beam of exposure radiation, providing a transmissive dynamic mask with orthogonally arranged matrices of actuator lines and binary pixel units which are opaque or transparent as a function of control inputs to the actuator lines, the transmissive dynamic mask having a top surface and a bottom surface, supplying pixel control signals to the actuator lines of the transmissive dynamic mask to form a pattern of transparent regions and opaque regions, directing the beam down onto the top surface of the mask, and passing the beam through the transparent regions and projecting a pattern from the mask onto the support where the workpiece is to be located.
Claim 23
Dependent Claim
28 words
A dynamic mask exposure method in accordance with claim 19 wherein: the control method comprises using a computer and a direct access storage device for storing patterning data.
Claim 24
Dependent Claim
21 words
A dynamic mask exposure method in accordance with claim 19 wherein: the transmissive dynamic mask comprises a transmissive spatial light modulator.
Claim 25
Dependent Claim
39 words
A dynamic mask exposure method in accordance with claim 19 wherein: the control method comprises using a computer and a direct access storage device for storing patterning data, and the transmissive dynamic mask comprises a transmissive spatial light modulator.
Claim 26
Dependent Claim
25 words
A dynamic mask exposure method in accordance with claim 19 wherein: the source of the beam of exposure radiation comprises a collimated beam of light.
Claim 27
Dependent Claim
44 words
A dynamic mask exposure method in accordance with claim 19 wherein: the source of the beam of exposure radiation comprises a collimated beam of light provided by a set of lenses projecting the collimated beam of light onto the top surface of the mask.
Claim 28
Dependent Claim
38 words
A dynamic mask exposure method in accordance with claim 19 wherein: the control system comprises a computer and a direct access storage device for storing patterning data, and the transmissive dynamic mask comprises a transmissive spatial light modulator.
Claim 29
Dependent Claim
68 words
A dynamic mask exposure method in accordance with claim 19 wherein: the source of the beam of exposure radiation comprises a collimated beam of light provided by a set of lenses projecting the collimated beam of light onto the top surface of the mask, and a set of projection lenses projecting and focussing the pattern from the mask onto the support from the bottom surface of the mask.
Claim 30
Dependent Claim
38 words
A dynamic mask exposure method in accordance with claim 26 wherein: the control system comprises a computer and a direct access storage device for storing patterning data, and the transmissive dynamic mask comprises a transmissive spatial light modulator.
Claim 31
Dependent Claim
158 words
A dynamic mask exposure method comprising: providing a support for a workpiece, providing a source of a beam of exposure radiation, providing a transmissive dynamic mask with orthogonally arranged matrices of actuator lines and binary pixel units which are opaque or transparent as a function of control inputs to the actuator lines, the transmissive dynamic mask having a top surface and a bottom surface, supplying pixel control signals to the actuator lines of the transmissive dynamic mask to form a pattern of transparent regions and opaque regions, directing the beam down onto the top surface of the mask, locating an image detection element for detecting a pattern of radiation projected thereon located on the top surface of the support, passing the beam through the transparent regions and projecting a pattern from the mask onto the support where the image detection element is located, and providing signals representing the pattern to the control system from the image detection element.
Claim 32
Dependent Claim
158 words
A dynamic mask exposure method comprising: providing a support for a workpiece, providing a source of a beam of exposure radiation, providing a transmissive dynamic mask with orthogonally arranged matrices of actuator lines and binary pixel units which are opaque or transparent as a function of control inputs to the actuator lines, the transmissive dynamic mask having a top surface and a bottom surface, supplying pixel control signals to the actuator lines of the transmissive dynamic mask to form a pattern of transparent regions and opaque regions, directing the beam down onto the top surface of the mask, locating an image detection element for detecting a pattern of radiation projected thereon located on the top surface of the support, passing the beam through the transparent regions and projecting a pattern from the mask onto the support where the image detection element is located, and providing signals representing the pattern to the control system from the image detection element.
Claim 33
Dependent Claim
27 words
A dynamic mask exposure method in accordance with claim 28 wherein: the control system comprises a computer and a direct access storage device for storing patterning data.
Claim 34
Dependent Claim
21 words
A dynamic mask exposure method in accordance with claim 28 wherein: the transmissive dynamic mask comprises a transmissive spatial light modulator.
Claim 35
Dependent Claim
38 words
A dynamic mask exposure method in accordance with claim 28 wherein: the control system comprises a computer and a direct access storage device for storing patterning data, and the transmissive dynamic mask comprises a transmissive spatial light modulator.
Claim 36
Dependent Claim
25 words
A dynamic mask exposure system in accordance with claim 28 wherein: the source of the beam of exposure radiation comprises a collimated beam of light.
Claim 37
Dependent Claim
44 words
A dynamic mask exposure system in accordance with claim 28 wherein: the source of the beam of exposure radiation comprises a collimated beam of light provided by a set of lenses projecting the collimated beam of light onto the top surface of the mask.
Claim 38
Dependent Claim
38 words
A dynamic mask exposure system in accordance with claim 28 wherein: the control system comprises a computer and a direct access storage device for storing patterning data, and the transmissive dynamic mask comprises a transmissive spatial light modulator.
Claim 39
Dependent Claim
68 words
A dynamic mask exposure system in accordance with claim 28 wherein: the source of the beam of exposure radiation comprises a collimated beam of light provided by a set of lenses projecting the collimated beam of light onto the top surface of the mask, and a set of projection lenses projecting and focussing the pattern from the mask onto the support from the bottom surface of the mask.
Claim 40
Dependent Claim
38 words
A dynamic mask exposure system in accordance with claim 35 wherein: the control system comprises a computer and a direct access storage device for storing patterning data, and the transmissive dynamic mask comprises a transmissive spatial light modulator.
References Cited (Backward Citations)
US3824604A
Cited
US4846694A
Cited
US5028939A
Cited
US5083854A
Cited
US5629113A
Cited
US5461475A
Cited
US5576562A
Cited
US5701185A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 2003-09-19 | 2004-03-20 | 2004-09-19 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2007-09-19 | 2008-03-20 | 2008-09-19 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2011-09-19 | 2012-03-20 | 2012-09-19 | $7700.00 | Window Closed / Lapsed |