US6117704A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Stackable layers containing encapsulated chips
Assignee: Nytell Software LLC
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Filing: 1999-03-31
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Granted: 2000-09-12
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Expires: 2019-03-31
Abstract
Abstract A method and structure are disclosed which involve the re-wafering of previously processed and tested IC chips. The chips are encapsulated in supporting non-conductive material in a neo-wafer, so that they may be further processed preparatory to dicing layer units from the neo-wafer, which layer units are ready for stacking in a three-dimensional electronic package. Although the layer areas are the same, different stacked layers may contain different sized IC chips, and a single layer may encapsulate a plurality of chips. Precision of location of the separate IC chips in the neo-wafer is insured by use of photo-patterning means to locate openings in the neo-wafer into which extend conductive bumps on the chips. The neo-wafer is preferably formed with separate cavities in which the chips are located before they are covered with the encapsulating material.
Inventors
- 👤 James S. Yamaguchi
- 👤 Volkan H. Ozguz
- 👤 Andrew N. Camien
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-03 17:05
CPC Classifications
H; H10; H10W; H10W90/00; H10W70/00; H10W70/01; H10W70/05; H10W70/08; H10W70/09; H10W70/099; H10W72/00; H10W72/01; H10W72/0198; H10W74/00; H10W74/01; H10W74/014; H10W70/60; H10W72/801; H10W72/90; H10W72/941; H10W72/9413; H10W74/10; H10W74/131; H10W74/142; H10W90/10
Claims Analysis
Total Claims: 17
Claim 1
Independent Claim
157 words
A method of preparing a plurality of pre-formed IC chips for encapsulation in stackable layers of an electronic package, comprising the following steps; forming a neo-wafer structure having a flat surface; photo-patterning and processing the flat surface to precisely locate and form vias in the flat surface; providing a plurality of IC chips, each having conductive bumps connected to the terminals of the IC chip; inserting the conductive bumps of the IC chips through the vias in the flat neo-wafer surface, in order to precisely locate the chips with respect to one another, and in order to expose the conductive bumps to suitable electrical connections on the other side of the flat neo-wafer surface from the IC chips; covering the chips in the neo-wafer with non-conductive encapsulating material which supports the chips; and dicing the neo-wafer to provide a plurality of separate stackable layers, each having the same area and each containing at least one encapsulated chip.
Claim 2
Independent Claim
157 words
A method of preparing a plurality of pre-formed IC chips for encapsulation in stackable layers of an electronic package, comprising the following steps; forming a neo-wafer structure having a flat surface; photo-patterning and processing the flat surface to precisely locate and form vias in the flat surface; providing a plurality of IC chips, each having conductive bumps connected to the terminals of the IC chip; inserting the conductive bumps of the IC chips through the vias in the flat neo-wafer surface, in order to precisely locate the chips with respect to one another, and in order to expose the conductive bumps to suitable electrical connections on the other side of the flat neo-wafer surface from the IC chips; covering the chips in the neo-wafer with non-conductive encapsulating material which supports the chips; and dicing the neo-wafer to provide a plurality of separate stackable layers, each having the same area and each containing at least one encapsulated chip.
Claim 3
Dependent Claim
61 words
The method of claim 1 in which; the neo-wafer structure is formed with a plurality of separate chambers next to the flat surface; the vias formed in the flat surface of the neo-wafer open into the respective chambers; and the non-conductive encapsulating material in the neo-wafer is separated into a plurality of separate segments by the chambers formed in the neo-wafer.
Claim 4
Dependent Claim
32 words
The method of claim 1 in which the IC chips each are pre-formed by a wafering process, diced into separate chips, and pre-tested to provide known-good chips for insertion in the neo-wafer.
Claim 5
Dependent Claim
32 words
The method of claim 2 in which the IC chips each are pre-formed by a wafering process, diced into separate chips, and pre-tested to provide known-good chips for insertion in the neo-wafer.
Claim 6
Dependent Claim
44 words
The method of claim 3 in which the neo-wafer comprises two sub-assemblies: a flat sub-assembly formed as a supporting plate carrying a layer of dielectric material developable by photo-lithography; and a frame-like sub-assembly having a plurality of open chambers formed therein by chamber-defining walls.
Claim 7
Dependent Claim
44 words
The method of claim 4 in which the neo-wafer comprises two sub-assemblies: a flat sub-assembly formed as a supporting plate carrying a layer of dielectric material developable by photo-lithography; and a frame-like sub-assembly having a plurality of open chambers formed therein by chamber-defining walls.
Claim 8
Dependent Claim
74 words
The method of claim 3 in which: dielectric material is applied to the flat-neo-wafer surface to cover the conductive bumps; vias are formed in the dielectric material to expose the conductive bumps; electrical conductors are formed on top of the dielectric material, which conductors (a) are connected to the conductive bumps, and (b) lead to one or more edges of the respective encapsulated IC chips; and dielectric material is applied over the electrical conductors.
Claim 9
Dependent Claim
74 words
The method of claim 4 in which: dielectric material is applied to the flat-neo-wafer surface to cover the conductive bumps; vias are formed in the dielectric material to expose the conductive bumps; electrical conductors are formed on top of the dielectric material, which conductors (a) are connected to the conductive bumps, and (b) lead to one or more edges of the respective encapsulated IC chips; and dielectric material is applied over the electrical conductors.
Claim 10
Dependent Claim
74 words
The method of claim 5 in which: dielectric material is applied to the flat-neo-wafer surface to cover the conductive bumps; vias are formed in the dielectric material to expose the conductive bumps; electrical conductors are formed on top of the dielectric material, which conductors (a) are connected to the conductive bumps, and (b) lead to one or more edges of the respective encapsulated IC chips; and dielectric material is applied over the electrical conductors.
Claim 11
Dependent Claim
74 words
The method of claim 6 in which: dielectric material is applied to the flat-neo-wafer surface to cover the conductive bumps; vias are formed in the dielectric material to expose the conductive bumps; electrical conductors are formed on top of the dielectric material, which conductors (a) are connected to the conductive bumps, and (b) lead to one or more edges of the respective encapsulated IC chips; and dielectric material is applied over the electrical conductors.
Claim 12
Independent Claim
147 words
A method of preparing a plurality of pre-formed chips for encapsulation in stackable layers of a multi-chip package, comprising the following steps; forming a neo-wafer structure having a flat surface; processing the flat surface to precisely locate and form vias in the flat surface; providing a plurality of chips, each having signal-carrying bumps connected to the terminals of the chip; inserting the bumps of the chips through the vias in the flat neo-wafer surface, in order to precisely locate the chips with respect to one another, and in order to expose the bumps to suitable connections on the other side of the flat neo-wafer surface from the chips; covering the chips in the neo-wafer with non-conductive encapsulating material which supports the chips; and dicing the neo-wafer to provide a plurality of separate stackable layers, each having the same area and each containing at least one encapsulated chip.
Claim 13
Independent Claim
147 words
A method of preparing a plurality of pre-formed chips for encapsulation in stackable layers of a multi-chip package, comprising the following steps; forming a neo-wafer structure having a flat surface; processing the flat surface to precisely locate and form vias in the flat surface; providing a plurality of chips, each having signal-carrying bumps connected to the terminals of the chip; inserting the bumps of the chips through the vias in the flat neo-wafer surface, in order to precisely locate the chips with respect to one another, and in order to expose the bumps to suitable connections on the other side of the flat neo-wafer surface from the chips; covering the chips in the neo-wafer with non-conductive encapsulating material which supports the chips; and dicing the neo-wafer to provide a plurality of separate stackable layers, each having the same area and each containing at least one encapsulated chip.
Claim 14
Dependent Claim
61 words
The method of claim 11 in which; the neo-wafer structure is formed with a plurality of separate chambers next to the flat surface; the vias formed in the flat surface of the neo-wafer open into the respective chambers; and the non-conductive encapsulating material in the neo-wafer is separated into a plurality of separate segments by the chambers formed in the neo-wafer.
Claim 15
Dependent Claim
27 words
The method of claim 11 in which the chips each are pre-formed by a wafering process, diced into separate chips, and pre-tested before insertion in the neo-wafer.
Claim 16
Dependent Claim
27 words
The method of claim 12 in which the chips each are pre-formed by a wafering process, diced into separate chips, and pre-tested before insertion in the neo-wafer.
Claim 17
Dependent Claim
41 words
The method of claim 12 in which the neo-wafer comprises two sub-assemblies: a flat sub-assembly formed as a supporting plate carrying a layer of non-conductive material; and a frame-like sub-assembly having a plurality of open chambers formed therein by chamber-defining walls.
References Cited (Backward Citations)
US5478781A
Cited
US5952725A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 2003-09-12 | 2004-03-13 | 2004-09-12 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2007-09-12 | 2008-03-13 | 2008-09-12 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2011-09-12 | 2012-03-13 | 2012-09-12 | $7700.00 | Window Closed / Lapsed |