US6114704A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Front-illuminated fluorescent screen for UV imaging
Assignee: Cymer Inc
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Filing: 1998-10-13
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Granted: 2000-09-05
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Expires: 2018-10-13
Abstract
Abstract In one embodiment of the invention, phosphor powder in a binder is deposited on a flat first side of a fused silica substrate. The UV output of a laser beam is reflected off an angled beam splitter so as to be incident upon a flat second side of the fused silica substrate. The phosphor is energized by the UV light transmitted through the fused silica and re-radiates a visible wavelength. The binder is selected to be opaque to UV wavelengths so that only a thin layer (10-20 microns) of the phosphor is energized by the incident UV beam. Since the energized phosphor layer against the first side of the substrate is extremely thin and flat, the energized phosphor produces a visible light which precisely corresponds to the incident UV light. The visible light may then be used to determine the characteristics of the UV beam.
Inventors
- 👤 Jesse D. Buck
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-09 09:20
CPC Classifications
G; G01; G01J; G01J1/00; G01J1/42; G01J1/4257; G01J1/429; G01J1/58
Claims Analysis
Total Claims: 23
Claim 1
Independent Claim
119 words
A system comprising: a light source generating light of a first wavelength not visible to the human eye; a screen for converting said light of said first wavelength to light of a second wavelength, said screen comprising a substrate having opposing smooth surfaces, said substrate being transparent to said light of said first wavelength and said second wavelength, said substrate having deposited on a first surface a material which, when energized by said light of said first wavelength, generates light of said second wavelength, said light of said first wavelength being applied to a second surface of said substrate opposing said first surface; and an optical detector detecting light of said second wavelength being emanated through said second surface.
Claim 2
Independent Claim
119 words
A system comprising: a light source generating light of a first wavelength not visible to the human eye; a screen for converting said light of said first wavelength to light of a second wavelength, said screen comprising a substrate having opposing smooth surfaces, said substrate being transparent to said light of said first wavelength and said second wavelength, said substrate having deposited on a first surface a material which, when energized by said light of said first wavelength, generates light of said second wavelength, said light of said first wavelength being applied to a second surface of said substrate opposing said first surface; and an optical detector detecting light of said second wavelength being emanated through said second surface.
Claim 3
Dependent Claim
17 words
The system of claim 1 wherein said material deposited on said first surface is a phosphor material.
Claim 4
Dependent Claim
31 words
The system of claim 2 wherein said material deposited on said first surface is a phosphor material in a binder, said binder being opaque to said light of said first wavelength.
Claim 5
Dependent Claim
11 words
The system of claim 1 wherein said substrate is fused silica.
Claim 6
Dependent Claim
19 words
The system of claim 1 wherein said light of said first wavelength is ultra-violet light emanating from a laser.
Claim 7
Dependent Claim
29 words
The system of claim 5 wherein a beam output from said laser is reflected off a beam splitter and through said second surface of said screen onto said material.
Claim 8
Dependent Claim
26 words
The system of claim 6 wherein said detector views said second surface of said substrate through said splitter, said splitter being transparent to said second wavelength.
Claim 9
Dependent Claim
41 words
The system of claim 1 wherein said detector outputs a signal corresponding to detected light of said second wavelength generated by said screen, said system further comprising: a controller for converting said signal into control signals for adjusting said light source.
Claim 10
Dependent Claim
26 words
The system of claim 1 herein said material comprises a phosphor powder having a grain size within a range of approximately 5 microns to 50 microns.
Claim 11
Dependent Claim
27 words
The system of claim 1 wherein said light of said first wavelength incident upon said second surface enters said material a maximum depth of approximately 20 microns.
Claim 12
Dependent Claim
17 words
The system of claim 1 wherein said material comprises phosphor powder in a binder of sodium silicate.
Claim 13
Independent Claim
112 words
A method comprising: generating light of a first wavelength not visible to the human eye; providing a screen for converting said light of said first wavelength to light of a second wavelength, said screen comprising a substrate having opposing smooth surfaces, said substrate being transparent to said light of said first wavelength and said second wavelength, said substrate having deposited on a first surface a material which, when energized by said light of said first wavelength, generates light of said second wavelength, applying said light of said first wavelength to a second surface of said substrate opposing said first surface; and detecting light of said second wavelength emanating through said second surface.
Claim 14
Independent Claim
112 words
A method comprising: generating light of a first wavelength not visible to the human eye; providing a screen for converting said light of said first wavelength to light of a second wavelength, said screen comprising a substrate having opposing smooth surfaces, said substrate being transparent to said light of said first wavelength and said second wavelength, said substrate having deposited on a first surface a material which, when energized by said light of said first wavelength, generates light of said second wavelength, applying said light of said first wavelength to a second surface of said substrate opposing said first surface; and detecting light of said second wavelength emanating through said second surface.
Claim 15
Dependent Claim
31 words
The method of claim 12 wherein said material deposited on said first surface is a phosphor material in a binder, said binder being opaque to said light of said first wavelength.
Claim 16
Dependent Claim
11 words
The method of claim 12 wherein said substrate is fused silica.
Claim 17
Dependent Claim
19 words
The method of claim 12 wherein said light of said first wavelength is ultra-violet light emanating from a laser.
Claim 18
Dependent Claim
29 words
The method of claim 15 further comprising reflecting a beam output from said laser off a beam splitter and through said second surface of said screen onto said material.
Claim 19
Dependent Claim
26 words
The method of claim 16 wherein said detector views said second surface of said substrate through said splitter, said splitter being transparent to said second wavelength.
Claim 20
Dependent Claim
50 words
The method of claim 12 wherein a detector detects said light emanating through said second surface, said method further comprising: generating a signal by said detector corresponding to detected light of said second wavelength generated by said screen; and converting said signal into control signal for adjusting said light source.
Claim 21
Dependent Claim
26 words
The method of claim 12 herein said material comprises a phosphor powder having a grain size within a range of approximately 5 microns to 50 microns.
Claim 22
Dependent Claim
27 words
The method of claim 12 wherein said light of said first wavelength incident upon said second surface enters said material a maximum depth of approximately 20 microns.
Claim 23
Dependent Claim
17 words
The method of claim 12 wherein said material comprises phosphor powder in a binder of sodium silicate.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 2003-09-05 | 2004-03-06 | 2004-09-05 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2007-09-05 | 2008-03-06 | 2008-09-05 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2011-09-05 | 2012-03-06 | 2012-09-05 | $7700.00 | Window Closed / Lapsed |