US6113646A
Expired / Lapsed
US
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Method of selecting layout of integrated circuit probe card
Assignee: Micron Technology Inc
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Filing: 1997-12-04
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Granted: 2000-09-05
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Expires: 2017-12-04
Abstract
Abstract A probe card design method is described which optimizes the number of die probed per touchdown and minimizes the number of steps required to test an integrated circuit wafer. The method analyses rows of a wafer in sets. Assuming a specific probe card matrix, the number of touchdown steps required for each set is determined and a total number of touchdown steps required for the wafer is determined. This method is repeated for a plurality of probe card matrixes. The size of the first set can be varied to determine an optimum offset which reduces the number of touchdown steps required to test the wafer. Each set is analyzed by dividing the longest row of the set by the width of the probe card matrix and rounding a result up to the nearest integer. The result of each set is summarized to indicate a minimum number of touchdowns required to test a wafer. A probe card matrix design can be selected based upon the minimum number of touchdowns, number of test sites in a probe card matrix, and a physical size of the matrixes.
Inventors
- 👤 Blane Holden
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-07 13:27
CPC Classifications
G; G01; G01R; G01R31/00; G01R31/28; G01R31/2851
Claims Analysis
Total Claims: 18
Claim 1
Independent Claim
261 words
A method of selecting a probe card matrix layout for integrated circuit wafer testing, the method comprising: defining a maximum number of test sites in the probe card matrix in both X and Y directions; defining a maximum number of test sites in the probe card matrix; specifying a number of rows in the wafer; specifying a number of integrated circuits provided in each row of the wafer; analyzing the number of rows in the wafer and the number of integrated circuits provided in each row of the wafer to determine a number of touchdowns needed to test each integrated circuit provided in the wafer for a plurality of probe card matrix configurations, wherein analyzing comprises: selecting a probe card matrix having a width W from one to X, and a height H from one to Y; selecting a first H rows from the wafer; identifying a longest one of the first H rows which contain the most integrated circuit die; dividing the longest one of the first H rows by width W, rounding a result up to the nearest integer; selecting remaining rows of the wafer in sets of H rows, identifying a longest row in each set, dividing the longest rows by W, and rounding a result up to the nearest integer; and summing the results to identify a number of touchdowns required to test the integrated circuit wafer; providing data indicating a minimum number of touchdowns for each one of the plurality of probe card matrix configurations; and designing an integrated circuit probe card using the provided data.
Claim 2
Independent Claim
261 words
A method of selecting a probe card matrix layout for integrated circuit wafer testing, the method comprising: defining a maximum number of test sites in the probe card matrix in both X and Y directions; defining a maximum number of test sites in the probe card matrix; specifying a number of rows in the wafer; specifying a number of integrated circuits provided in each row of the wafer; analyzing the number of rows in the wafer and the number of integrated circuits provided in each row of the wafer to determine a number of touchdowns needed to test each integrated circuit provided in the wafer for a plurality of probe card matrix configurations, wherein analyzing comprises: selecting a probe card matrix having a width W from one to X, and a height H from one to Y; selecting a first H rows from the wafer; identifying a longest one of the first H rows which contain the most integrated circuit die; dividing the longest one of the first H rows by width W, rounding a result up to the nearest integer; selecting remaining rows of the wafer in sets of H rows, identifying a longest row in each set, dividing the longest rows by W, and rounding a result up to the nearest integer; and summing the results to identify a number of touchdowns required to test the integrated circuit wafer; providing data indicating a minimum number of touchdowns for each one of the plurality of probe card matrix configurations; and designing an integrated circuit probe card using the provided data.
Claim 3
Dependent Claim
16 words
The method of claim 1 wherein the method is performed using a computer executing provided instructions.
Claim 4
Dependent Claim
123 words
The method of claim 1 wherein analyzing comprises: selecting a probe card matrix having a width W from one to X, and a height H from one to Y; selecting a first H rows from the wafer; identifying a longest one of the first H rows which contain the most integrated circuit die; dividing the longest one of the first H rows by width W, rounding a result up to the nearest integer; selecting remaining rows of the wafer in sets of H rows, identifying a longest row in each set, dividing the longest rows by W, and rounding a result up to the nearest integer; and summing the results to identify a number of touchdowns required to test the integrated circuit wafer.
Claim 5
Dependent Claim
64 words
The method of claim 1 further comprising: providing an output identifying the number of touchdowns required to test the integrated circuit wafer for a series of probe card matrixes having a width W ranging from one to X, a height H ranging from one to Y, and a total number of test sites which is less than or equal to a predefined maximum value.
Claim 6
Dependent Claim
34 words
The method of claim 1 further comprising: determining if the number of touchdowns required to test the integrated circuit wafer can be reduced by selecting less than a first H rows from the wafer.
Claim 7
Dependent Claim
24 words
The method of claim 1 further comprising: providing data indicating a physical size for each one of the plurality of probe card matrix configurations.
Claim 8
Dependent Claim
30 words
The method of claim 6 further comprising: selecting one of the plurality of probe card matrix configurations requiring a minimum number of touchdowns, and having a substantially square physical size.
Claim 9
Dependent Claim
23 words
The method of claim 1 further comprising: selecting one of the plurality of probe card matrix configurations requiring a minimum number of touchdowns.
Claim 10
Dependent Claim
36 words
The method of claim 1 further comprising: selecting one of the plurality of probe card matrix configurations requiring a minimum number of touchdowns, and having a minimum number of test sites in the probe card matrix.
Claim 11
Dependent Claim
272 words
A computerized method for selecting a probe card matrix layout for integrated circuit wafer testing, the method comprising: inputting a maximum number of test sites in the probe card matrix in both X and Y directions; inputting a maximum number of test sites in the probe card matrix; inputting a number of rows in the wafer, and a number of integrated circuits provided in each row of the wafer; using a computer, analyzing the number of rows in the wafer and the number of integrated circuits provided in each row of the wafer to determine a number of touchdowns needed to test each integrated circuit provided in the wafer for a plurality of probe card matrix configurations, analyzing comprises: selecting a probe card matrix having a width W from one to X, and a height H from one to Y; selecting a first H rows from the wafer; identifying a longest one of the first H rows which contain the most integrated circuit die; dividing the longest one of the first H rows by width W, rounding a result up to the nearest integer; selecting remaining rows of the wafer in sets of H rows, identifying a longest row in each set, dividing the longest rows by W, and rounding a result up to the nearest integer; and summing the results to identify a number of touchdowns required to test the integrated circuit wafer using the selected a probe card matrix; providing output data indicating a minimum number of touchdowns for each one of the plurality of probe card matrix configurations; and designing an integrated circuit probe card using the provided data.
Claim 12
Dependent Claim
272 words
A computerized method for selecting a probe card matrix layout for integrated circuit wafer testing, the method comprising: inputting a maximum number of test sites in the probe card matrix in both X and Y directions; inputting a maximum number of test sites in the probe card matrix; inputting a number of rows in the wafer, and a number of integrated circuits provided in each row of the wafer; using a computer, analyzing the number of rows in the wafer and the number of integrated circuits provided in each row of the wafer to determine a number of touchdowns needed to test each integrated circuit provided in the wafer for a plurality of probe card matrix configurations, analyzing comprises: selecting a probe card matrix having a width W from one to X, and a height H from one to Y; selecting a first H rows from the wafer; identifying a longest one of the first H rows which contain the most integrated circuit die; dividing the longest one of the first H rows by width W, rounding a result up to the nearest integer; selecting remaining rows of the wafer in sets of H rows, identifying a longest row in each set, dividing the longest rows by W, and rounding a result up to the nearest integer; and summing the results to identify a number of touchdowns required to test the integrated circuit wafer using the selected a probe card matrix; providing output data indicating a minimum number of touchdowns for each one of the plurality of probe card matrix configurations; and designing an integrated circuit probe card using the provided data.
Claim 13
Dependent Claim
26 words
The computerized method of claim 10 further comprising: providing output data indicating a physical size for each one of the plurality of probe card matrix configurations.
Claim 14
Dependent Claim
31 words
The computerized method of claim 11 further comprising: selecting one of the plurality of probe card matrix configurations requiring a minimum number of touchdowns, and having a substantially square physical size.
Claim 15
Dependent Claim
24 words
The computerized method of claim 10 further comprising: selecting one of the plurality of probe card matrix configurations requiring a minimum number of touchdowns.
Claim 16
Dependent Claim
37 words
The computerized method of claim 10 further comprising: selecting one of the plurality of probe card matrix configurations requiring a minimum number of touchdowns, and having a minimum number of test sites in the probe card matrix.
Claim 17
Independent Claim
224 words
A method of determining a required number of touchdown steps of a plurality of integrated circuit probe card matrixes, for each of a plurality of X×Y matrixes and an integrated circuit wafer having R rows the method comprises: determining a non-offset touchdown total comprising selecting R/Y sets of the R rows, determining a number of touchdowns required for each one of the R/Y sets by dividing a longest row of each one of the R/Y sets by X and rounding to the nearest integer to indicate a number of touchdowns required for each one of the R/Y sets, totaling the number of touchdowns required for each one of the R/Y sets to generate the non-offset touchdown total required for the wafer; determining an offset touchdown total comprising selecting a first set of W rows, wherein W is less than Y, determining a number of touchdowns required for the first set of rows, selecting (R-W)/Y sets from the remaining rows, determining a number of touchdowns required for each one of the (R-W)/Y sets, totaling the number of touchdowns required for the first set and each one of the (R-W)/Y sets to generate the offset touchdown total required for the wafer; providing an output indicating both the non-offset touchdown total and the offset touchdown total; and designing the integrated circuit probe card using the provided output.
Claim 18
Independent Claim
224 words
A method of determining a required number of touchdown steps of a plurality of integrated circuit probe card matrixes, for each of a plurality of X×Y matrixes and an integrated circuit wafer having R rows the method comprises: determining a non-offset touchdown total comprising selecting R/Y sets of the R rows, determining a number of touchdowns required for each one of the R/Y sets by dividing a longest row of each one of the R/Y sets by X and rounding to the nearest integer to indicate a number of touchdowns required for each one of the R/Y sets, totaling the number of touchdowns required for each one of the R/Y sets to generate the non-offset touchdown total required for the wafer; determining an offset touchdown total comprising selecting a first set of W rows, wherein W is less than Y, determining a number of touchdowns required for the first set of rows, selecting (R-W)/Y sets from the remaining rows, determining a number of touchdowns required for each one of the (R-W)/Y sets, totaling the number of touchdowns required for the first set and each one of the (R-W)/Y sets to generate the offset touchdown total required for the wafer; providing an output indicating both the non-offset touchdown total and the offset touchdown total; and designing the integrated circuit probe card using the provided output.
References Cited (Backward Citations)
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| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
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| 3.5 Years (Year 4) | 2003-09-05 | 2004-03-06 | 2004-09-05 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2007-09-05 | 2008-03-06 | 2008-09-05 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2011-09-05 | 2012-03-06 | 2012-09-05 | $7700.00 | Window Closed / Lapsed |