US6110787A
Expired / Lapsed
US
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Method for fabricating a MOS device
Assignee: GlobalFoundries Singapore Pte Ltd
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Filing: 1999-09-07
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Granted: 2000-08-29
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Expires: 2019-09-07
Abstract
Abstract A method of fabricating a MOS device having raised source/drain, raised isolation regions having isolation spacers, and a gate conductor having gate spacers is achieved. A layer of gate silicon oxide is grown over the surface of a semiconductor structure. A polysilicon layer is deposited overlying the gate silicon oxide layer. The polysilicon layer, gate silicon oxide layer and semiconductor structure are patterned and etched to form trenches. The trenches are filled with an isolation material to at least a level even with a top surface of the polysilicon layer to form raised isolation regions. The remaining polysilicon layer is patterned to remove polysilicon adjacent the raised isolation regions forming a gate conductor between the raised isolation regions. The gate conductor and the raised isolation regions having exposed sidewalls. The gate oxide layer between the gate conductor and raised isolation regions is removed. Isolation spacers are formed on the exposed sidewalls of the raised isolation regions and gate spacers are formed on the exposed sidewalls of the gate conductor. A layer of silicon is deposited and patterned to form raised source and drain adjacent the gate spacers with source and drain being doped to form a MOS device.
Inventors
- 👤 Lap Chan
- 👤 Ting Cheong Ang
- 👤 Shyue Pong Quek
- 👤 Sang Yee Loong
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-31 05:11
CPC Classifications
H; H10; H10D; H10D64/00; H10D64/20; H10D64/23; H10D64/251; H10D64/258; H10D30/00; H10D30/01; H10D30/021; H10D30/0223; H10D30/0227; H10D30/027; H10D30/0275; H10D30/60; H10D64/259; H10W; H10W10/00; H10W10/01; H10W10/011; H10W10/014; H10W10/10; H10W10/17
Claims Analysis
Total Claims: 28
Claim 1
Independent Claim
251 words
A method of fabricating a MOS device, comprising the steps of: providing a semiconductor structure; growing a gate oxide layer over said semiconductor structure; depositing a polysilicon layer over said gate oxide layer; patterning and etching said polysilicon layer, said gate oxide layer, and said semiconductor structure to form trenches; filing said trenches with an isolation material to at least a level even with a top surface of said patterned polysilicon layer to form raised isolation regions; patterning said patterned polysilicon layer to remove a portion of said polysilicon layer adjacent said raised isolation regions to form a gate conductor between said raised isolation regions; said gate conductor and said raised isolation regions having exposed sidewalls; removing said gate oxide layer between said gate conductor and said raised isolation regions; forming lightly doped source and drain implants by ion implanting into said semiconductor structure; forming isolation spacers on said exposed sidewalls of said raised isolation regions and gate spacers on said exposed sidewalls of said gate conductor; selectively depositing an undoped silicon film between said gate conductor and said raised isolation regions adjacent said isolation and gate spacers to form raised source and drain areas; said raised source and drain areas composed of raised epitaxial silicon; and doping said raised source and drain areas by implanting ions only into said raised source and drain areas; and forming source/drain regions in said semiconductor structure by implanting ions completely through said doped raised source and drain areas and only into said semiconductor structure.
Claim 2
Independent Claim
251 words
A method of fabricating a MOS device, comprising the steps of: providing a semiconductor structure; growing a gate oxide layer over said semiconductor structure; depositing a polysilicon layer over said gate oxide layer; patterning and etching said polysilicon layer, said gate oxide layer, and said semiconductor structure to form trenches; filing said trenches with an isolation material to at least a level even with a top surface of said patterned polysilicon layer to form raised isolation regions; patterning said patterned polysilicon layer to remove a portion of said polysilicon layer adjacent said raised isolation regions to form a gate conductor between said raised isolation regions; said gate conductor and said raised isolation regions having exposed sidewalls; removing said gate oxide layer between said gate conductor and said raised isolation regions; forming lightly doped source and drain implants by ion implanting into said semiconductor structure; forming isolation spacers on said exposed sidewalls of said raised isolation regions and gate spacers on said exposed sidewalls of said gate conductor; selectively depositing an undoped silicon film between said gate conductor and said raised isolation regions adjacent said isolation and gate spacers to form raised source and drain areas; said raised source and drain areas composed of raised epitaxial silicon; and doping said raised source and drain areas by implanting ions only into said raised source and drain areas; and forming source/drain regions in said semiconductor structure by implanting ions completely through said doped raised source and drain areas and only into said semiconductor structure.
Claim 3
Dependent Claim
13 words
The method of claim 1, wherein said isolation material is SiO 2 .
Claim 4
Dependent Claim
46 words
The method of claim 1, wherein said doping said raised source and drain areas are formed by ion implanting at an energy of from about 10 to 100 keV and at a dose of from about 1 E 15 to 5 E 15 atoms/cm 2 .
Claim 5
Dependent Claim
18 words
The method of claim 1, wherein said gate oxide layer is from about 1 to 20 nm thick.
Claim 6
Dependent Claim
17 words
The method of claim 1, wherein said polysilicon layer is from about 150 to 300 nm thick.
Claim 7
Dependent Claim
19 words
The method of claim 1, wherein said trenches are from about 400 to 800 nm within said semiconductor structure.
Claim 8
Dependent Claim
19 words
The method of claim 1, wherein said trenches are from about 525 to 575 nm within said semiconductor structure.
Claim 9
Dependent Claim
29 words
The method of claim 1, wherein said isolation spacers are from about 60 to 200 nm wide and said gate spacers are from about 50 to 160 nm wide.
Claim 10
Dependent Claim
29 words
The method of claim 1, wherein said isolation spacers are from about 90 to 110 nm wide and said gate spacers are from about 70 to 90 nm wide.
Claim 11
Independent Claim
256 words
A method of fabricating a MOS device, comprising the steps of: providing a semiconductor structure; growing a gate oxide layer over said semiconductor structure; deposing a polysilicon layer over said gate oxide layer; patterning and etching said polysilicon layer, said gate oxide layer, and said semiconductor structure to form trenches; filling said trenches with an isolation material to at least a level even with a top surface of said patterned polysilicon layer to form raised isolation regions; patterning said patterned polysilicon layer to remove a portion of said polysilicon layer adjacent said rained isolation regions to form a gate conductor between said raised isolation regions; said gate conductor and said raised isolation regions having exposed sidewalls; removing said gate oxide layer between said gate conductor and said raised isolation regions; forming extension ion implant diffusions in said semiconductor structure adjacent said gate conductor by ion implanting into said semiconductor structure; forming isolation spacers on said exposed sidewalls of said raised isolation regions and gate spacers on said exposed sidewalls of said gate conductor; selectively depositing an undoped silicon film between said gate conductor and said raised isolation regions adjacent said isolation and gate spacers to form raised source and drain areas; said raised source and drain areas comprised of raised epitaxial silicon; doping said raised source and drain areas by implanting ions only into said raised source and drain areas; and forming source/drain regions in said semiconductor structure by implanting ions completely through said doped raised source and drain areas and only into said semiconductor structure.
Claim 12
Independent Claim
256 words
A method of fabricating a MOS device, comprising the steps of: providing a semiconductor structure; growing a gate oxide layer over said semiconductor structure; deposing a polysilicon layer over said gate oxide layer; patterning and etching said polysilicon layer, said gate oxide layer, and said semiconductor structure to form trenches; filling said trenches with an isolation material to at least a level even with a top surface of said patterned polysilicon layer to form raised isolation regions; patterning said patterned polysilicon layer to remove a portion of said polysilicon layer adjacent said rained isolation regions to form a gate conductor between said raised isolation regions; said gate conductor and said raised isolation regions having exposed sidewalls; removing said gate oxide layer between said gate conductor and said raised isolation regions; forming extension ion implant diffusions in said semiconductor structure adjacent said gate conductor by ion implanting into said semiconductor structure; forming isolation spacers on said exposed sidewalls of said raised isolation regions and gate spacers on said exposed sidewalls of said gate conductor; selectively depositing an undoped silicon film between said gate conductor and said raised isolation regions adjacent said isolation and gate spacers to form raised source and drain areas; said raised source and drain areas comprised of raised epitaxial silicon; doping said raised source and drain areas by implanting ions only into said raised source and drain areas; and forming source/drain regions in said semiconductor structure by implanting ions completely through said doped raised source and drain areas and only into said semiconductor structure.
Claim 13
Dependent Claim
13 words
The method of claim 10, wherein said isolation material is SiO 2 .
Claim 14
Dependent Claim
44 words
The method of claim 10, wherein said raised source and drain areas are doped by ion implanting at an energy of from about 10 to 100 keV and at a dose of from about 1 E 15 to 5 E 15 atoms/cm 2 .
Claim 15
Dependent Claim
18 words
The method of claim 10, wherein said gate oxide layer is from about 1 to 20 nm thick.
Claim 16
Dependent Claim
17 words
The method of claim 10, wherein said polysilicon layer is from about 150 to 300 nm thick.
Claim 17
Dependent Claim
19 words
The method of claim 10, wherein said trenches are from about 400 to 800 nm within said semiconductor structure.
Claim 18
Dependent Claim
19 words
The method of claim 10, wherein said trenches are from about 525 to 575 nm within said semiconductor structure.
Claim 19
Dependent Claim
29 words
The method of claim 10, wherein said isolation spacers are from about 60 to 200 nm wide and said gate spacers are from about 50 to 160 nm wide.
Claim 20
Dependent Claim
29 words
The method of claim 10, wherein said isolation spacers are from about 90 to 110 nm wide and said gate spacers are from about 70 to 90 nm wide.
Claim 21
Independent Claim
272 words
A method of fabricating a MOS device, comprising the steps of: providing a semiconductor structure; growing a gate oxide layer from about 1 to 20 nm thick over said semiconductor structure; depositing a polysilicon layer from about 150 to 300 nm thick over said gate oxide layer; patterning and etching said polysilicon layer, said gate oxide layer, and said semiconductor structure to form trenches; filling said trenches with an isolation material to at least a level even with a top surface of said patterned polysilicon layer to form raised isolation regions; patterning said patterned polysilicon layer to remove a portion of said polysilicon layer adjacent said raised isolation regions to form a gate conductor between said raised isolation regions; said gate conductor and said raised isolation regions having exposed sidewalls; removing said gate oxide layer between said gate conductor and said raised isolation regions; forming extension ion implant divisions in said semiconductor structure adjacent said gate conductor; forming isolation spacers on said exposed sidewalls of said raised isolation regions and gate spacers on said exposed sidewalls of said gate conductor; selectively depositing an undoped silicon film, by a selective epitaxial growth (SEG) process, between said gate conductor and said raised isolation regions adjacent said isolation and gate spacers to form raised source and drain areas; said raised source and drain areas composed of raised epitaxial silicon; doping said raised source and drain areas by implanting ions only into said raised source and drain areas; and forming source/drain regions in said semiconductor structure by implanting ions completely through said SEG formed doped raised source and drain areas and only into said semiconductor structure.
Claim 22
Independent Claim
272 words
A method of fabricating a MOS device, comprising the steps of: providing a semiconductor structure; growing a gate oxide layer from about 1 to 20 nm thick over said semiconductor structure; depositing a polysilicon layer from about 150 to 300 nm thick over said gate oxide layer; patterning and etching said polysilicon layer, said gate oxide layer, and said semiconductor structure to form trenches; filling said trenches with an isolation material to at least a level even with a top surface of said patterned polysilicon layer to form raised isolation regions; patterning said patterned polysilicon layer to remove a portion of said polysilicon layer adjacent said raised isolation regions to form a gate conductor between said raised isolation regions; said gate conductor and said raised isolation regions having exposed sidewalls; removing said gate oxide layer between said gate conductor and said raised isolation regions; forming extension ion implant divisions in said semiconductor structure adjacent said gate conductor; forming isolation spacers on said exposed sidewalls of said raised isolation regions and gate spacers on said exposed sidewalls of said gate conductor; selectively depositing an undoped silicon film, by a selective epitaxial growth (SEG) process, between said gate conductor and said raised isolation regions adjacent said isolation and gate spacers to form raised source and drain areas; said raised source and drain areas composed of raised epitaxial silicon; doping said raised source and drain areas by implanting ions only into said raised source and drain areas; and forming source/drain regions in said semiconductor structure by implanting ions completely through said SEG formed doped raised source and drain areas and only into said semiconductor structure.
Claim 23
Dependent Claim
19 words
The method of claim 19, wherein said trenches are from about 400 to 800 nm within said semiconductor structure.
Claim 24
Dependent Claim
19 words
The method of claim 19, wherein said trenches are from about 525 to 575 nm within said semiconductor structure.
Claim 25
Dependent Claim
29 words
The method of claim 19, wherein said isolation spacers are from about 60 to 200 nm wide and said gate spacers are from about 50 to 160 nm wide.
Claim 26
Dependent Claim
29 words
The method of claim 19, wherein said isolation spacers are from about 90 to 110 nm wide and said gate spacers are from about 70 to 90 nm wide.
Claim 27
Independent Claim
273 words
A method of fabricating a MOS device, comprising the steps of: providing a semiconductor structure; growing a gate oxide layer from about 1 to 20 nm thick over said semiconductor structure; depositing a polysilicon layer from about 150 to 300 nm thick over said gate oxide layer; patterning and etching said polysilicon layer, said gate oxide layer, and said semiconductor structure to form trenches; filling said trenches with an isolation material to at least a level even with a top surface of said patterned polysilicon layer to form raised isolation regions; patterning said patterned polysilicon layer to remove a portion of said polysilicon layer adjacent said raised isolation regions to form a gate conductor between said raised isolation regions; said gate conductor and said raised isolation regions having exposed sidewalls; removing said gate oxide layer between said gate conductor and said raised isolation regions; forming lightly doped source and drain implants by implanting ions into said semiconductor structure; forming isolation spacers on said exposed sidewalls of said raised isolation regions and gate spacers on said exposed sidewalls of said gate conductor; selectively depositing an undoped silicon film by a selective epitaxial growth (SEG) process between said gate conductor and said raised isolation regions adjacent said isolation and gate spacers to form raised source and drain areas; said raised source and drain areas composed of raised epitaxial silicon; doping said raised source and drain areas by implanting ions only into said raised source and drain areas; and forming source/drain regions in said semiconductor structure by implanting ions completely through said SEG formed doped raised source and drain areas and only into said semiconductor structure.
Claim 28
Independent Claim
273 words
A method of fabricating a MOS device, comprising the steps of: providing a semiconductor structure; growing a gate oxide layer from about 1 to 20 nm thick over said semiconductor structure; depositing a polysilicon layer from about 150 to 300 nm thick over said gate oxide layer; patterning and etching said polysilicon layer, said gate oxide layer, and said semiconductor structure to form trenches; filling said trenches with an isolation material to at least a level even with a top surface of said patterned polysilicon layer to form raised isolation regions; patterning said patterned polysilicon layer to remove a portion of said polysilicon layer adjacent said raised isolation regions to form a gate conductor between said raised isolation regions; said gate conductor and said raised isolation regions having exposed sidewalls; removing said gate oxide layer between said gate conductor and said raised isolation regions; forming lightly doped source and drain implants by implanting ions into said semiconductor structure; forming isolation spacers on said exposed sidewalls of said raised isolation regions and gate spacers on said exposed sidewalls of said gate conductor; selectively depositing an undoped silicon film by a selective epitaxial growth (SEG) process between said gate conductor and said raised isolation regions adjacent said isolation and gate spacers to form raised source and drain areas; said raised source and drain areas composed of raised epitaxial silicon; doping said raised source and drain areas by implanting ions only into said raised source and drain areas; and forming source/drain regions in said semiconductor structure by implanting ions completely through said SEG formed doped raised source and drain areas and only into said semiconductor structure.
References Cited (Backward Citations)
US5539229A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 2003-08-29 | 2004-02-28 | 2004-08-29 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2007-08-29 | 2008-02-28 | 2008-08-29 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2011-08-29 | 2012-02-28 | 2012-08-29 | $7700.00 | Window Closed / Lapsed |