US6096641A
Expired / Lapsed
US
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Method of manufacturing semiconductor device
Assignee: Renesas Electronics Corp
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Filing: 1999-06-04
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Granted: 2000-08-01
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Expires: 2019-06-04
Abstract
Abstract A tungsten nitride (6b) is provided also on side surface of a tungsten (6c), to increase an area where the tungsten (6c) and the tungsten nitride (6b) are in contact with each other. On a gate insulating film (2), a polysilicon side wall (5) having high adhesive strength to the gate insulating film is disposed. The polysilicon side wall (5) is brought into a close contact with the tungsten nitride (6b) on the side surface of the tungsten (6c). With this structure improved is adhesive strength of a metal wire or a metal electrode which is formed on an insulating film of a semiconductor device.
Inventors
- 👤 Tatsuya Kunikiyo
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-09 02:00
CPC Classifications
H; H10; H10P; H10P30/00; H10P30/20; H10P30/202; H10P30/204; H10B; H10B12/00; H10B12/30; H10B12/48; H10B12/482; H10D; H10D30/00; H10D30/01; H10D30/021; H10D30/0223; H10D30/0225; H10D64/00; H10D64/01; H10D64/013; H10D64/01302; H10D64/01304; H10D64/01322; H10D64/60; H10D64/66; H10D64/671; H10D84/00; H10D84/01; H10D84/0123; H10D84/0126; H10D84/0165; H10D84/0167; H10D84/017; H10D84/0172; H10D84/02; H10D84/03; H10D84/038; H10P30/208; H10P30/225; H10W; H10W20/00; H10W20/01; H10W20/031; H10W20/062; H10P30/22; H10P30/221; H10P30/222; H10W20/032; H10W20/033
Claims Analysis
Total Claims: 15
Claim 1
Independent Claim
78 words
A method of manufacturing a semiconductor device, comprising the steps of: (a) forming a first insulating film on one major surface of a semiconductor substrate; (b) forming an adhesive member on said first insulating film; (c) forming a barrier layer on said first insulating film and side surfaces of said adhesive member; and (d) forming a conductor on said barrier layer, wherein said barrier layer prevents a substance which is a constituent material of said conductor from diffusing.
Claim 2
Independent Claim
78 words
A method of manufacturing a semiconductor device, comprising the steps of: (a) forming a first insulating film on one major surface of a semiconductor substrate; (b) forming an adhesive member on said first insulating film; (c) forming a barrier layer on said first insulating film and side surfaces of said adhesive member; and (d) forming a conductor on said barrier layer, wherein said barrier layer prevents a substance which is a constituent material of said conductor from diffusing.
Claim 3
Dependent Claim
87 words
The method according to claim 1, wherein said step (b) includes the steps of (b-1) forming a second insulating film on said first insulating film, said second insulating film having a hole in a portion where said conductor and said adhesive member are to be formed, said hole reaching said first insulating film; (b-2) filling said hole with composition material of said adhesive member; and (b-3) etching said composition material of said adhesive member anisotropically to form said adhesive member in an inner wall of said hole.
Claim 4
Dependent Claim
69 words
The method according to claim 2, wherein said second insulating film includes a silicon oxide film and a silicon nitride film, and said step (b-1) includes the steps of (b-1-1) forming said silicon nitride film on said first insulating film; (b-1-2) forming said silicon oxide film on said silicon nitride film; and (b-1-3) forming said hole in said silicon oxide film and said silicon nitride film in this order.
Claim 5
Dependent Claim
54 words
The method according to claim 2, wherein said step (d) includes the steps of (d-1) filling said hole in which said adhesive member is formed with composition material of said conductor; (d-2) planarizing said composition material of said conductor with said second insulating film as a stopper; and (d-3) removing said second insulating film.
Claim 6
Dependent Claim
28 words
The method according to claim 4, wherein said step (d-2) includes the step of (d-2-1) reducing difference in level of said conductor existing on said second insulating film.
Claim 7
Dependent Claim
42 words
The method according to claim 4, wherein said hole is also provided in other portion than said portion where said conductor and said adhesive member are formed so that said composition material of said conductor is formed uniformly in said step (d-1).
Claim 8
Dependent Claim
43 words
The method according to claim 1, wherein said adhesive member includes an adhesive member made of a material that can adhere to said first insulating film and said barrier layer with adhesive strength higher than that between said conductor and said barrier layer.
Claim 9
Independent Claim
108 words
A method of manufacturing a semiconductor device, comprising the steps of: (a) forming a first insulating film on one major surface of a semiconductor substrate; (b) forming an adhesive member on said first insulating film, said adhesive member comprises a first material having a first adhesive strength with respect to adhering to said first insulating film; and (c) forming a conductor on said first insulating film and in contact with side surfaces of said adhesive member, wherein said conductor comprises a second material having a second adhesive strength with respect to adhering to said first insulating film, said first adhesive strength being higher than said second adhesive strength.
Claim 10
Independent Claim
108 words
A method of manufacturing a semiconductor device, comprising the steps of: (a) forming a first insulating film on one major surface of a semiconductor substrate; (b) forming an adhesive member on said first insulating film, said adhesive member comprises a first material having a first adhesive strength with respect to adhering to said first insulating film; and (c) forming a conductor on said first insulating film and in contact with side surfaces of said adhesive member, wherein said conductor comprises a second material having a second adhesive strength with respect to adhering to said first insulating film, said first adhesive strength being higher than said second adhesive strength.
Claim 11
Dependent Claim
87 words
The method according to claim 8, wherein said step (b) includes the steps of (b-1) forming a second insulating film on said first insulating film, said second insulating film having a hole in a portion where said conductor and said adhesive member are to be formed, said hole reaching said first insulating film; (b-2) filling said hole with composition material of said adhesive member; and (b-3) etching said composition material of said adhesive member anisotropically to form said adhesive member in an inner wall of said hole.
Claim 12
Dependent Claim
69 words
The method according to claim 9, wherein said second insulating film includes a silicon oxide film and a silicon nitride film, and said step (b-1) includes the steps of (b-1-1) forming said silicon nitride film on said first insulating film; (b-1-2) forming said silicon oxide film on said silicon nitride film; and (b-1-3) forming said hole in said silicon oxide film and said silicon nitride film in this order.
Claim 13
Dependent Claim
54 words
The method according to claim 9, wherein said step (c) includes the steps of (c-1) filling said hole in which said adhesive member is formed with composition material of said conductor; (c-2) planarizing said composition material of said conductor with said second insulating film as a stopper; and (c-3) removing said second insulating film.
Claim 14
Dependent Claim
28 words
The method according to claim 11, wherein said step (c-2) includes the step of (c-2-1) reducing difference in level of said conductor existing on said second insulating film.
Claim 15
Dependent Claim
44 words
The method according to claim 11, wherein said hole is also provided in other portion than said portion where said conductor and said adhesive member are to be formed so that said composition material of said conductor is formed uniformly in said step (c-1).
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