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US6094448A Expired / Lapsed US ⏱️ 0.0 years remaining

Grating assembly with bi-directional bandwidth control

Assignee: Cymer LLC
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Filing: 1999-02-11
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Granted: 2000-07-25
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Expires: 2019-02-11
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Abstract

Abstract A bidirectional bandwidth controlled grating assembly. A spring housing is connected to one of two end plates extending away from the lined surface of the grating. An adjustment rod threaded through the other end plate extends into the spring housing. Inside the spring housing in a preferred embodiment are two compression springs mounted between pressure surfaces in the housing and a piston which is fixed on the adjustment rod. The lined surface of the grating can be made more concave (or less convex) by screwing the rod in a direction into the spring housing compressing one of the springs to push the end plates apart and the surface can be made more convex (or less concave) by screwing the rod in a direction out of the spring housing compressing the other spring to pull the end plates toward each other.

Inventors

  • 👤 Igor V. Fomenkov
  • 👤 Frederick G. Erie
  • 👤 Alexander I. Ershov

Bibliographic Details

Application Number —
Jurisdiction US
Data Source google_patents
Last Synchronized 2026-10-25 22:02
CPC Classifications
H; H01; H01S; H01S3/00; H01S3/05; H01S3/08; H01S3/08081; G; G02; G02B; G02B5/00; G02B5/18; G02B5/1828; G03; G03F; G03F7/00; G03F7/70; G03F7/70008; G03F7/70025; G03F7/70483; G03F7/7055; G03F7/70575; H01S3/10; H01S3/105; H01S3/1055; H01S3/13; H01S3/14; H01S3/22; H01S3/223; H01S3/225; H01S3/08004; H01S3/08009

Claims Analysis

Total Claims: 9
Claim 1
Independent Claim 216 words
A bi-directional bandwidth controlled grating assembly comprising: A) a grating defining a lined surface and a first end and a second end; B) a first end plate attached to said first end and extending in a direction away from said lined surface; C) a second end plate attached to said second end and extending in a direction away from said lined surface and having a threaded channel; D) a spring housing connected to said first end plate and defining a first pressure surface and a second pressure surface; E) an adjustment rod having a threaded section threaded into said threaded channel of said second end plate and extending into said spring housing; F) an adjustment rod piston fixed on said adjustment rod; G) a first compression element mounted between said first pressure surface and said adjustment rod piston; H) a second compression element mounted between said second pressure surface and said adjustment rod piston; wherein said lined surface is made more concave or less convex by an action of screwing said adjustment rod in a direction to cause it to extend into said spring housing and said line surface is made more convex or less concave by an action of screwing said adjustment rod in a direction to cause it to withdraw from said spring housing.
Claim 2
Dependent Claim 216 words
A bi-directional bandwidth controlled grating assembly comprising: A) a grating defining a lined surface and a first end and a second end; B) a first end plate attached to said first end and extending in a direction away from said lined surface; C) a second end plate attached to said second end and extending in a direction away from said lined surface and having a threaded channel; D) a spring housing connected to said first end plate and defining a first pressure surface and a second pressure surface; E) an adjustment rod having a threaded section threaded into said threaded channel of said second end plate and extending into said spring housing; F) an adjustment rod piston fixed on said adjustment rod; G) a first compression element mounted between said first pressure surface and said adjustment rod piston; H) a second compression element mounted between said second pressure surface and said adjustment rod piston; wherein said lined surface is made more concave or less convex by an action of screwing said adjustment rod in a direction to cause it to extend into said spring housing and said line surface is made more convex or less concave by an action of screwing said adjustment rod in a direction to cause it to withdraw from said spring housing.
Claim 3
Dependent Claim 15 words
An assembly as in claim 1 wherein said first and second compression elements are springs.
Claim 4
Dependent Claim 18 words
An assembly as in claim 1 wherein said spring housing is pivotably attached to said first end plate.
Claim 5
Dependent Claim 27 words
An assembly as in claim 1 and also comprising at least two linear bearings for permitting said adjustment rod to extend substantially friction-free into said spring housing.
Claim 6
Dependent Claim 40 words
An assembly as in claim 1 and further comprising at least two thrust bearings mounted adjacent to said adjustment rod piston for permitting said adjustment rod to be rotated without causing substantial rotation of said first and second compression springs.
Claim 7
Dependent Claim 33 words
An assembly as in claim 1 wherein said first and second compression elements are comprised of two permanent magnets fixed to said spring housing and one permanent magnet fixed to said adjustment rod.
Claim 8
Dependent Claim 28 words
An assembly as in claim 1 wherein said assembly is installed in a line narrowing module mounted on a laser for line narrowing output beams of the laser.
Claim 9
Dependent Claim 13 words
An assembly as in claim 7 wherein said laser is an excimer laser.

USPTO Annuity & Maintenance Windows

Annuity Stage Window Opens Payment Deadline Surcharge Period Until Estimated Fee Status
3.5 Years (Year 4) 2003-07-25 2004-01-24 2004-07-25 $2000.00 Window Closed / Lapsed
7.5 Years (Year 8) 2007-07-25 2008-01-24 2008-07-25 $3760.00 Window Closed / Lapsed
11.5 Years (Year 12) 2011-07-25 2012-01-24 2012-07-25 $7700.00 Window Closed / Lapsed

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